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Saes Monotorr PS8 MGS 10 120 Spec T - Teesing

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Automatically Regenerable Nitrogen/Rare<br />

Gas Purifier (<strong>10</strong>-<strong>120</strong> Nm3/hr)<br />

The MegaTorr <strong>MGS</strong> Series Nitrogen Gas Purifiers are enhanced,<br />

optimized designs providing sub-ppb performance in small footprints.<br />

SAES Pure Gas has drawn on years of experience in Ultra-High Purity<br />

(UHP) piping design, advanced process material analysis and state of<br />

the art integrated control systems to develop this family of purifiers to<br />

meet the needs of low capital cost, high reliability and high<br />

performance.<br />

Purifier uses dual adsorption vessels that alternate between purify and<br />

regeneration modes, providing continuous purification. Adsorber<br />

regeneration is accomplished by back-flushing with purified process gas<br />

at an elevated temperature.<br />

Safety Features<br />

• Over Pressurization Safety System<br />

Provides over-pressurization protection for purifier vessels and<br />

piping. NOTE: This is not a full flow relief system - this is an<br />

internal relief system to accommodate blocked valve heating.<br />

• High Temperature Hardware Interlock<br />

For over-temperature protection independent of the control system<br />

Standard Features<br />

• Microprocessor PLC<br />

• Color Touch Screen Human Machine Interface (HMI)<br />

• Electric Gas Preheaters<br />

• Closed-Loop Temperature Controls<br />

• Alarm and Gas relay customer connections<br />

• Hydrogen Blending Station provides hydrogen regeneration gas<br />

mixture blending and control.<br />

• Ground Fault Protection (GFI)<br />

• Emergency Off Button (EMO)<br />

Optional Features<br />

• Inlet and Outlet Isolation Valves for manual purifier isolation.<br />

• Auto or Manual Bypass allows process gas flow to bypass the<br />

purifier vessels.<br />

• Separate Control Power allows purifier control system to be<br />

powered by an external, customer supplied power source or UPS.<br />

• Particle Filter provides purified gas filtration.<br />

• MODBUS Data communication port provides operational data<br />

output.<br />

• Purifier Hold Down Brackets for securing purifier to floor.<br />

• Inlet/Outlet Pressure transducers provide process gas pressure<br />

indication.<br />

• Inlet Mass Flow Meter provides process gas flow rate and total<br />

flow indication.<br />

• Internal Bypass Column. (For sizes <strong>MGS</strong><strong>10</strong>~40, requires cabinet<br />

for <strong>MGS</strong>50~60 if option is ordered.)<br />

• Purified Gas Moisture Sensor provides continuous confirmation of<br />

outlet moisture content.<br />

Applications<br />

• Semiconductor<br />

• Flat Panel Display<br />

• LED / Compound Semiconductor<br />

• Fiber Optic<br />

• Research<br />

• Solar<br />

Model<br />

<strong>PS8</strong>-<strong>MGS</strong><strong>10</strong>- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong>20- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong>30- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong>40- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong>50- N/R<br />

Rated Flow<br />

<strong>10</strong> Nm3/hr (~166 slpm)<br />

20 Nm3/hr (~333 slpm)<br />

30 Nm3/hr (~500 slpm)<br />

40 Nm3/hr (~666 slpm)<br />

50 Nm3/hr (~833 slpm)<br />

<strong>PS8</strong>-<strong>MGS</strong>60- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong>90- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong><strong>10</strong>0- N/R<br />

<strong>PS8</strong>-<strong>MGS</strong><strong>120</strong>- N/R<br />

60 Nm3/hr (~1,000 slpm)<br />

90 Nm3/hr (~1,500 slpm)<br />

<strong>10</strong>0 Nm3/hr (~1,666 slpm)<br />

<strong>120</strong> Nm3/hr (~2,000 slpm)<br />

Product <strong>Spec</strong>ifications (for all models)<br />

Gas Purified<br />

N 2 and Rare Gasses (He, Ne, Ar, Kr, Xe, Rn)<br />

Inlet Requirements (Process Gas)<br />

N 2 : 5.0 N Inlet Purity*, 20 micron max particle size<br />

0-35ºC (32-95ºF), 3.5-<strong>10</strong> barg (50-150 psig)<br />

Inlet Requirements (Regen Gas)<br />

H 2 : 5.0 N Inlet Purity, 20 micron max particle size<br />

0-35ºC (32-95ºF), 6.2-7.6 barg (90-1<strong>10</strong> psig)<br />

Impurities Removed<br />

O 2 , CO, CO 2 , H 2 , H 2 O, NMHC to < 1 ppb*<br />

Particle Filtration<br />

2 micron (standard)<br />

0.003 micron (optional)<br />

Pressure Drop<br />

< 0.7 bard (~<strong>10</strong> psid)<br />

(Without options at maximum flow, 6.9 barg inlet)<br />

Clean dry air or nitrogen filtered to <strong>10</strong> μm<br />

Instrument Air<br />

Min-Max Pressure: 6.6 – 9.7 barg (~95 – 140 psig)<br />

Applicable Codes & Standards<br />

ASME Pressure Vessel Standards Section VIII<br />

US National Electric Code<br />

CE Marking (Must be specified on order)<br />

Manufacture License of Pressure Vessels, Peoples Republic of China (Must be specified on order)<br />

* Consult factory for non‐standard inlet or outlet purity requirements. Analytical specification certified at greater than <strong>10</strong>% of the max flow.<br />

S1<strong>10</strong>‐925_B DCN 4907 2 <strong>Spec</strong>ification subject to change<br />

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Facility <strong>Spec</strong>ifications<br />

Purifier Model <strong>PS8</strong>-<strong>MGS</strong><strong>10</strong>-N/R <strong>PS8</strong>-<strong>MGS</strong>20-N/R <strong>PS8</strong>-<strong>MGS</strong>30-N/R <strong>PS8</strong>-<strong>MGS</strong>40-N/R<br />

Dimensions<br />

(If internal bypass column is<br />

ordered, see <strong>MGS</strong>50~60<br />

dimensions.)<br />

Purifier Clearance<br />

Mechanical Connections<br />

Height: 1375 mm (~54 in)<br />

Width: 800 mm (~31 in)<br />

Depth: 400 mm (~15 in)<br />

Weight: < 1<strong>10</strong> Kg (< 242 lbs.)<br />

1 meter ( ~3 feet) in front; 150 mm (~6 inches) left and right sides<br />

Feed Inlet: ½” FVCR<br />

Purified Outlet: ½” FVCR<br />

Regeneration/Relief Vent: ½” FVCR<br />

H 2 Inlet: ¼” Tube Stub<br />

Cabinet Vent: 4” duct<br />

Instrument Air Inlet: 3/8” FNPT<br />

Ambient air + 30°C (+ 54°F)<br />

Programmable<br />

Regeneration Vent Temp.<br />

Purify Time<br />

N 2 /R Consumed per Regen 15 m 3 15 m 3 30 m 3 30 m 3<br />

H 2 Consumed per Regen 0.03 m 3 @ 0.6 slpm 0.042 m 3 @ 0.6 slpm 0.071 m 3 @ 1 slpm 0.075 m 3 @ 1 slpm<br />

Main Power Installed Power: 675 W Installed Power: 1150 W<br />

208 or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption during Purification: 0.1 kW<br />

Power Consumption during Regeneration: 0.26 kW Power Consumption during Regeneration: 0.43 kW<br />

Separate Control Power<br />

(Option)<br />

1<strong>10</strong> or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption: 0.1 kW<br />

Cabinet Ventilation 170 Nm 3 /hr (<strong>10</strong>0 scfm) [@ Facilities Vacuum - 0.2 inches H 2 O]<br />

Installation<br />

Indoor, Ambient Temp (min – max) 5° – 35°C (41° – 95°F)<br />

Dimensions<br />

<strong>PS8</strong>-<strong>MGS</strong><strong>10</strong>-N/R (<strong>10</strong> Nm3/hr) through <strong>PS8</strong>-<strong>MGS</strong>40-N/R (40 Nm3/hr)<br />

S1<strong>10</strong>‐925_B DCN 4907 3 <strong>Spec</strong>ification subject to change<br />

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Facility <strong>Spec</strong>ifications<br />

Purifier Model <strong>PS8</strong>-<strong>MGS</strong>50-N/R <strong>PS8</strong>-<strong>MGS</strong>60-N/R<br />

Dimensions<br />

Height: 1675 mm (~66 in)<br />

Width: 865 mm (~34 in)<br />

Depth: 6<strong>10</strong> mm (~24 in)<br />

Weight: < 180 Kg (< 400 lbs.)<br />

Purifier Clearance<br />

1 meter ( ~3 feet) in front and back<br />

Mechanical Connections<br />

Feed Inlet: ½” FVCR<br />

Purified Outlet: ½” FVCR<br />

Regeneration/Relief Vent: ½” FVCR<br />

H 2 Inlet: ¼” Tube Stub<br />

Cabinet Vent: 4” duct<br />

Instrument Air Inlet: 3/8” FNPT<br />

Regeneration Vent Temp.<br />

Ambient air + 30°C (+ 54°F)<br />

Purify Time<br />

Programmable<br />

N 2 /R Consumed per Regen 65 m 3 65 m 3<br />

H 2 Consumed per Regen 0.14 m 3 @ 2.5 slpm 0.152 m 3 @ 2.5 slpm<br />

Main Power<br />

Installed Power: 2.2 kW<br />

208 or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption during Purification: 0.1 kW<br />

Power Consumption during Regen: 0.85 kW<br />

Separate Control Power<br />

(Option)<br />

1<strong>10</strong> or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption: 0.1 kW<br />

Cabinet Ventilation 260 Nm 3 /hr (150 scfm) [@ Facilities Vacuum - 0.2 inches H 2 O]<br />

Installation<br />

Indoor, Ambient Temp (min – max) 5° – 35°C (41° – 95°F)<br />

Dimensions<br />

<strong>PS8</strong>-<strong>MGS</strong>50-N/R (50 Nm3/hr) through <strong>PS8</strong>-<strong>MGS</strong>60-N/R (60 Nm3/hr)<br />

S1<strong>10</strong>‐925_B DCN 4907 4 <strong>Spec</strong>ification subject to change<br />

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Facility <strong>Spec</strong>ifications<br />

Purifier Model <strong>PS8</strong>-<strong>MGS</strong>90-N/R <strong>PS8</strong>-<strong>MGS</strong><strong>10</strong>0-N/R <strong>PS8</strong>-<strong>MGS</strong><strong>120</strong>-N/R<br />

Dimensions<br />

Height: 1650 mm (~65 in)<br />

Width: <strong>10</strong>00 mm (~40 in)<br />

Depth: 700 mm (~28 in)<br />

Weight: < 300 Kg (< 660 lbs.)<br />

Purifier Clearance<br />

1 meter ( ~3 feet) in front and back<br />

Mechanical Connections<br />

Feed Inlet: ¾” FVCR<br />

Purified Outlet: ¾” FVCR<br />

Regeneration/Relief Vent: ½” FVCR<br />

H 2 Inlet: ¼” Tube Stub<br />

Cabinet Vent: 4” duct<br />

Instrument Air Inlet: 3/8” FNPT<br />

Regeneration Vent Temp.<br />

Ambient air + 30°C (+ 54°F)<br />

Purify Time<br />

Programmable<br />

N 2 /R Consumed per Regen 70 m 3 70 m 3 70 m 3<br />

H 2 Consumed per Regen 0.185 m 3 @ 2.5 slpm 0.195 m 3 @ 2.5 slpm 0.212 m 3 @ 2.5 slpm<br />

Main Power<br />

Installed Power: 2.4 kW<br />

208 or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption during Purification: 0.1 kW<br />

Power Consumption during Regen: 1 kW<br />

Separate Control Power<br />

(Option)<br />

1<strong>10</strong> or 230 VAC, 1 Phase, 50/60 Hz<br />

Power Consumption: 0.1 kW<br />

Cabinet Ventilation 260 Nm 3 /hr (150 scfm) [@ Facilities Vacuum - 0.2 inches H 2 O]<br />

Installation<br />

Indoor, Ambient Temp (min – max) 5° – 35°C (41° – 95°F)<br />

Dimensions<br />

<strong>PS8</strong>-<strong>MGS</strong>90-N/R (90 Nm3/hr) through <strong>PS8</strong>-<strong>MGS</strong><strong>120</strong>-N/R (<strong>120</strong> Nm3/hr)<br />

S1<strong>10</strong>‐925_B DCN 4907 5 <strong>Spec</strong>ification subject to change<br />

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Piping Diagram<br />

For all models<br />

S1<strong>10</strong>‐925_B DCN 4907 6 <strong>Spec</strong>ification subject to change<br />

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