Temperature calibration - Laytec
Temperature calibration - Laytec
Temperature calibration - Laytec
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Motivation<br />
Heteroepitaxy of III-Nitride semiconductors<br />
Wafer temperature has influence on:<br />
• material quality<br />
• composition of ternary compounds<br />
• evolving film stress<br />
substrate/wafer<br />
susceptor<br />
Bow<br />
Dz ~ ΔT<br />
Stress due to lattice mismatch results in wafer bowing which leads to:<br />
� Change in temperature uniformity across the wafer<br />
� Inhomogeneity of material properties<br />
23 June 2009 <strong>Temperature</strong> <strong>calibration</strong><br />
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