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EpiCurve®TT Blue - Laytec

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EpiCurve ® TT <strong>Blue</strong><br />

Current Signal-to-noise ratio in Planetary ®<br />

GaN growth on single-sided polished sapphire wafer<br />

due to effects from aspheric bowing: resulting SNR: ±5km -1<br />

due to gas foil rotation<br />

±5km -1<br />

7 June 2009 Product developments at LayTec 2009<br />

4

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