Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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2 nm<br />
TEMs of <strong>ALD</strong> LaAlO 3 <strong>and</strong> GdScO 3<br />
=> Sharp interfaces with silicon without interlayers<br />
=> Uni<strong>for</strong>m nucleation <strong>and</strong> thickness<br />
Harvard University<br />
LaAlO 3<br />
Si