Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
Atomic Layer Deposition (ALD): An Enabler for Nanoscience and ...
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ML 2<br />
H 2O<br />
Typical <strong>ALD</strong> Reaction <strong>for</strong> Oxides<br />
ML 2<br />
ML 2<br />
OH OH OH<br />
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H 2O<br />
ML<br />
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Harvard University<br />
H 2O<br />
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ML<br />
O<br />
MOH<br />
O<br />
HL<br />
ML<br />
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HL<br />
MOH<br />
O<br />
HL<br />
ML<br />
O<br />
HL<br />
MOH<br />
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HL<br />
HL