functionalized surfaces on porous silica by atomic layer ... - Aaltodoc

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3-Glycidoxypropyltrimethoxysilane with triethylamine (TEA) as the catalyst 15 Silica gel n-Octadecyltrimethoxysilane Silicon wafer 56 Heptadecafluoro-1,1,2,2-tetrahydrodecyl-1trimethoxysilane Silicon wafer 56 3-Mercaptopropyltrimethoxysilane (MPTMS) Pyrex glass and quartz 57 Dimethyldimethoxysilane (DMDM) Silica disk Pyrogenic silica Methyldimethoxysilane (MDMS) Silica disk 50 Trimethylethoxysilane (TMES) Silica disk Silica gel MCM-41 silica Dimethylmonoethoxysilane Silica gel 52 Trimethylmonomethoxysilane (TMMS) Silica disk Pyrogenic silica Aminoalkoxysilanes γ-Aminopropyltriethoxysilane (APTS) Oxidized Al Silicon wafer Silica gel 6 50,58 49 50 52 53 50,58 49 63 64 6,18,59-61,65, 66, III-VI γ-Aminopropyltrimethoxysilane (APTMS) Silica gel III,V,VI, 59-61 N-(2-Aminoethyl)-3-aminopropyltrimethoxysilane (AAPS) Silica gel 59,60, 63,VII n-(6-Aminohexyl)aminopropyltrimethoxysilane Silicon wafer 56 γ-Aminopropyldiethoxymethylsilane (APDMS) Silica gel 59-61,III,V γ-Aminopropyldimethylethoxysilane (APDMES) without a catalyst with TEA as catalyst Chloro- and iodosilanes Silica gel Silica gel Heptadecafluorodecyltrichlorosilane (HFTS) Glass coated with SiO2 68,69 Trifluoropropyltrichlorosilane (TFTS) Glass coated with SiO2 68 Nonafluorohexyltrichlorosilane (NFTS) Glass coated with SiO2 68 19,III,59-61,67 67
3-Bromopropyltrichlorosilane Glass and quartz wafer 57 Trichloromethylsilane (TMCS) Silica disk Silica gel MCM-41 silica and Ti-MCM-41 16 50 70,71 53 Dichlorodimethylsilane Silica gel 72, 73 1,3-Dichloro(tetramethyldisiloxane) Silica gel 72 1,5-Dichloro(hexamethyltrisiloxane) Silica gel 72 1,7-Dichloro(octamethyltetrasiloxane) Silica gel 72 1-(Dimethylchlorosilyl)-2-(p, mchloromethylphenyl)ethane (DMCSE) Pyrex glass and quartz wafer p-Tolyldimethylchlorosilane (TDMCS) Pyrex glass and quartz wafer Tris(trimethylsiloxy)chlorosilane (TMSCl) Silicon wafer 74 Alkylchlorosilanes (CH3-(CH2)n-1(CH3)2Si-Cl, n=4,8,18, or 30) n-Alkylmethyldichlorosilanes (H(CH2)n-Si(CH3)- Cl2, n=1-18) Alkyltrichlorosilanes (H(CH2)n-Si-Cl3), n=1-18) Quartz slides and pyrogenic silica Silicon wafer Silicon wafer 1H,1H,2H,2H-Perfluorodecyldimethylclorosilane Ge/Ge oxide and Ge/SiO2 51 Trimethyliodosilane Silicon wafer 76 Aminosilanes (without alkoxy groups) CH3-(CH2)17-Si(CH3)2-N-(CH3)2 Quartz slides and pyrogenic silica Bis(dimethylamino)dimethylsilane (BDMADMS) Quartz disk 77 1,1,1,3,3,3-Hexamethyldisilazane (HMDS) Quartz disk Silica gel γ-Alumina Other silanes Triethylsilanol (TES) Silica disk 50 (Trimethylsilyl)trifluoromethanesulfonate Silicon wafer 76 68 68 24 75 75 24 78 79, 81 80
Page 1 and 2: Helsinki University of Technology I
Page 3 and 4: Distribution: Helsinki University o
Page 5 and 6: PREFACE The experimental work of th
Page 7 and 8: THE AUTHOR’S CONTRIBUTION TO THE
Page 9 and 10: MTES Methyltriethoxysilane MTMS Met
Page 11 and 12: 1. INTRODUCTION There is growing in
Page 13 and 14: 2. GENERAL BACKGROUND As background
Page 15: Figure 2. Gas-phase deposition of
Page 19 and 20: the number of cycles applied. Adjac
Page 21 and 22: announced ALD to be the method-of-c
Page 23 and 24: precursor molecules compared to the
Page 25 and 26: Figure 5. Distilled water was used
Page 27 and 28: 3.2.2 Deposition of several surface
Page 29 and 30: 4. RESULTS AND DISCUSSION The effec
Page 31 and 32: Wave number/ cm -1 Figure 8. DRIFT
Page 33 and 34: Table 3. Results from TG and 1 H MA
Page 35 and 36: Various signal-processing technique
Page 37 and 38: 450 °C, the sharp peak due to free
Page 39 and 40: only monodentately bound, but also
Page 41 and 42: mono- and bidentate bonding modes o
Page 43 and 44: The reaction of the amino groups of
Page 45 and 46: APTS molecules/ nm 2 Carbon atoms/
Page 47 and 48: Figure 20. Deposition of pyromellit
Page 49 and 50: 5. CONCLUSIONS Because ALD growth i
Page 51 and 52: 6. REFERENCES 1. Vansant, E.F., Van
Page 53 and 54: 64. Haller, I., J. Amer. Chem. Soc.
Page 55 and 56: 135. Maciel, G.E. and Sindorf, D.W.

functionalized surfaces on porous silica by atomic layer ... - Aaltodoc

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