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Master Thesis Design and Construction of the Shutter Demonstrator Model for the Mercury Radiometer and Thermal Infrared Spectrometer Dipl.-Ing. (FH) Andreas Hurni from Bern, Switzerland Thesis submitted in partial fulfillment of the requirements for the degree of Master of Science (M.Sc.) University of Applied Sciences Munich Department of Precision- and Micro-Engineering, Engineering Physics Master’s program Micro- and Nanotechnology Examiner: Prof. Dr. rer. nat. Rolf Heilmann Second examier: Prof. Dr.-Ing. Rainer Froriep Supervisor: Dr.-Ing. Thomas Zeh, Kayser-Threde GmbH Munich Day of submission: July 31, 2008 Munich 2008

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