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a) c) Piezo motor Fail

a) c) Piezo motor Fail safe spring DC motor Rotary tubular shutter Shutter blade 3 – SHUTTER ACTUATION PRINCIPLES b) d) Piezo actuator VCA Fail safe spring Shutter blade Shutter blade Figure 3.1: Investigated shutter actuation principles: a) DC motor rotary tubular shutter, b) piezo actuator driven shutter, c) piezo motor driven shutter and d) voice coil actuator linear shutter. 3.2 Study Results As result of the study, the piezo actuator driven shutter and the voice coil actuator linear shutter were valuated as predestinated to fulfill all the requirements listed in table 2.1. However, piezo actuators need high driving voltages and cannot achieve long strokes. Designing the MSTS DM based on the Voice Coil Actuator (VCA) principle was therefore concluded as best solution in every sense. The shutter study was closed with the insight of combining a debris free guidance with a fail safe mechanism in terms of a Flexible Hinge (FH) structure driven by a VCA. 10

Chapter 4 Fundamentals 4.1 Statics 4.1.1 Introduction As a result of the shutter study presented in the previous chapter, the MSTS mechan- ical part shall be designed using a flexible hinge structure due to the lifetime and fail safe requirements. To consider the basics of flexible hinges and to discuss applicable materials and machining technologies is important for the design of the MSTS FH structure. A FH generally works like a spring in the elastic range described by Hooke’s law, but additionally performs frictionless guiding and stroke amplification. Although a FH underlies that simple mechanical principle, conception methods for their usage in micro- and even nanotechnology just came up in the end of the 20 th century. Powerful computers for calculations with the Finite Element Method (FEM) and improved per- formances of the Electrical Discharge Machining (EDM) are essential for designing and manufacturing flexible hinges in the micro- and nanotechnological range. MEMS 1 ac- celerator sensors, today manufactured in lot of millions, contain flexible hinges etched in silicon with lengths below one millimeter 2 . Flexible hinges are generally characterized by regions of reduced bending stiffness in one ore more directions. They have a lot of advantages for microsystems compared to 1 Microelectromechanical systems. 2 http://www.panasonic-electric-works.de/pewde/en/html/23405.php? accessed on June 4, 2008. 11

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