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List of Figures 4.8

List of Figures 4.8 Interaction map . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 4.9 Standard closed loop system . . . . . . . . . . . . . . . . . . . . . . . . . . 27 4.10 Models of the spring mass system and the RL circuit . . . . . . . . . . . . 28 4.11 Model of the control path . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 5.1 Thermal networks for moving coil and moving magnet . . . . . . . . . . . 31 5.2 Thermal analysis curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 5.3 FEMM meshing and calculation result . . . . . . . . . . . . . . . . . . . . 34 5.4 Single coil VCA force distribution measurement result . . . . . . . . . . . 37 5.5 Photo of the test shutter . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 5.6 Helmholtz VCA simulation with d = 0.5 mm . . . . . . . . . . . . . . . . . 42 5.7 Helmholtz VCA simulation with d = 1.5 mm . . . . . . . . . . . . . . . . . 42 5.8 Helmholtz VCA simulation with d = 2.5 mm . . . . . . . . . . . . . . . . . 43 5.9 Maximum force to clearance of the simulated Helmholtz VCA . . . . . . . 43 5.10 Helmholtz VCA energy optimization . . . . . . . . . . . . . . . . . . . . . 44 5.11 Helmholtz force dirstribution measurement . . . . . . . . . . . . . . . . . 44 5.12 Step responses of the equal coupled and the anti-coupled Helmholtz VCA 45 6.1 MSTS DM CAD model . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 6.2 Helmholtz VCA dimension parameters . . . . . . . . . . . . . . . . . . . . 50 6.3 Photo of the MSTS DM . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 6.4 Static force measurement of the MSTS FH structure . . . . . . . . . . . . 52 68

List of Figures 6.5 Measured step response of the MSTS DM VCA . . . . . . . . . . . . . . . 52 7.1 Control electronics principle . . . . . . . . . . . . . . . . . . . . . . . . . . 54 7.2 Results of the controlled MSTS DM . . . . . . . . . . . . . . . . . . . . . 57 A.1 Step response function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62 69

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