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f Deflection of the

f Deflection of the Flexible Hinge f (1) eig 1st Eigenfrequency fres Resonant Frequency FV CA Lorentz Force GF H(s) Transfer Function of the Mechanical Part GV CA(s) Transfer Function of the Electromagnetic Part h Thickness of the Flexible Hinge hC Coil Winding Height I Geometrical Moment of Inertia IC Coil Current KF Force Factor k Attenuation Constant L Coil Inductance l Length of the Flexible Hinge LC Coil Wire Length lC Coil Length M Bending Moment m Mass N Number of Windings of the Coil Nc Buckling Load P Force applied on the Flexible Hinge PC Power Dissipation of the Coil vi

RC Coil Resistance r Feedback Variable S ′ e Endurance Strength TC Curie Temperature UC Coil Voltage w Set Point x Control Variable y Actuating Variable z Disturbance Variable ∆ Oscillation Amplitude δ Logarithmic Decrement ɛ Thermal Efficiency ζ Glue Thickness λT Thermal Conductivity Coefficient µ0 Vacuum Permeability ξ Ratio of the Necked Down Flexure ρ Mass Density ρC Electrical Resitivity τL Time Constant of the Inductance χ Magnet Clearance vii