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Chapter 5 Conclusion The

Chapter 5 Conclusion The study in carbide formation of a-C:W films in an non-thermal equilibrium state have been investigated using XRD, SEM/STEM and nano-diffraction. Within the a-C:W films all three carbides depending on two parameters (concentration and temperature) are observed, although only the stable thermodynamic phase WC is expected. From all carbides, WC1-x is the only and dominant phase at temperatures of 2200K up to 2800K within the lower concentrated films (

Annealing Temperature Figure 5.1: summary Tableau Tungsten concentration - 51 -

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