Annual Report 2005 - IPHT Jena

INSTITUT FÜR 

PHYSIKALISCHE HOCHTECHNOLOGIE e.V. 

JENA 

INSTITUTE FOR 

PHYSICAL HIGH TECHNOLOGY JENA 

JAHRESBERICHT 

2005 

ANNUAL REPORT

Institut für Physikalische Hochtechnologie e.V. 

Direktor: Prof. Dr. H. Bartelt 

Albert-Einstein-Str. 9, D-07745 Jena 

Postfach/P.O.B.: 10 02 39, D-07702 Jena 

Telefon/Phone: +49(0)36 41 2 06 00 

Telefax: +49(0)36 41 20 60 99 

e-mail: institut@ipht-jena.de 

internet: http://www.ipht-jena.de 

Titelfoto: Dr. K. Fischer 

Herstellung: 

Werbeagentur Kirstin Sangmeister 

Telefon: 03671/64 12 96 

Mobil: 0171 8 43 65 94 

e-mail: kirstin.sangmeister@freenet.de

Inhaltsverzeichnis / Content 

INHALT / CONTENT 

A. Vorwort / Introduction 3 

B. Organisation / Organization 7 

C. Personal und Finanzen / Staff and Budget 12 

D. Forschungsbereiche / Scientific Divisions 12 

1. Bereich Magnetik/Quantenelektronik (Prof. Dr. H. E. Hoenig) 12 

Magnetics/Quantum Electronics Division 

1.1 Überblick / Overview 12 

1.2 Scientific results 15 

1.2.1 Micro- and nanofabrication 15 

1.2.2 SQUID sensors and systems 15 

1.2.3 Integrated superconducting circuits 17 

1.2.4 Quantum computing 18 

1.2.5 Foundry service 19 

1.2.6 Domain wall motion in small GMR structures 19 

1.2.7 Measurement of coupling strength distribution in exchange bias film systems 21 

1.2.8 Electron exited L X-rax spectra of the elements 14

INHALT / CONTENT 

2.3 Appendix Partners 51 

Publications 52 

Presentations/Posters 54 

Lectures 56 

Patents 57 

Diploma/Master Thesis/Laboratory Exercises 57 

Guest scientists 57 

Memberships 57 

Participations in fairs/expositions 58 

3. Bereich Mikrosysteme (Prof. Dr. J. Popp) 59 

Microsystems Division 

3.1 Übersicht / Overview 59 

3.2 Scientific results 63 

3.2.1 Spectral optical techniques and instrumentation 63 

Spectral optical sensing 63 

Thermal microsensors 65 

3.2.2 Photonic chip systems 67 

Molecular nanotechnology and plasmonics 67 

DNA-chip technology 69 

3.2.3 Micro system technology 69 

Microfluidics of liquid-liquid segmented sample streams 70 

Chipmodule for analysis of micro combustion 71 


Editor/Book chapters 73 



Patents 77 

Lectures 77 

Diploma thesis 78 

Laboratory exercises 78 

Practical trainee 78 

Guest scientists 78 

Memberships 78 

Awards 79 

Conference organization 79 

4. Bereich Lasertechnik (Prof. Dr. H. Stafast) 80 

Laser Technology Division 

4.1 Überblick / Overview 80 

4.2 Selected results 83 

4.2.1 Laser chemistry 83 

Laser crystallization, Thin film deposition and nanowire growth, Laser ablation 83 

4.2.2 Laser diagnostics 84 

UV optical materials, Combustion processes 85 




Patents 89 

Lectures 89 

Diploma Theses 89 

Laboratory Exercises 89 

Committees 89 

Award, Exhibitions 89 

New Equipment 89 

E. Innovation Project 2005 90 

Nanostructured Ta 2 O 5 layers for optochemical/biophotonic sensors and solar cells 90 

2

VORWORT / INTRODUCTION 

A. Vorwort 

A. Introduction 

Das IPHT konnte das Jahr 2005 mit einer erfolgreichen 

Projektarbeit abschließen. Die Drittmittelquote 

liegt deutlich über 50% mit einer bemerkenswerten 

Steigerung bei den EU-Projekten. 

Als besonders herausragende Beispiele der in 

diesem Jahresbericht enthaltenen Darstellung 

der Ergebnisse sollen hier genannt werden: 

– Erstmalig wurden vier Flussquanten-Qubits als 

Vorstufe für einen adiabatischen Quantenrechner 

gekoppelt und spektroskopisch charakterisiert. 

– Bei der Erzeugung von Einzelpuls-Bragg-Gittern 

(Typ I) in optischen Fasern wurden mit bis 

zu 50% Reflexionseffizienz internationale Spitzenwerte 

erzielt. 

– Die Entwicklung eines auf dem Prinzip segmentierter 

Probenströme arbeitenden LabOn- 

Chip basierten Systems führte zu einer Analysenplattform 

für die Krebsdiagnostik, deren 

Anwendungspotenzial auf grundlegende molekularbiologische 

Fragestellungen erweiterbar 

ist. 

– durch Laserkristallisation von Silizium auf Glas 

wurden mittels eines industrietauglichen Diodenlasers 

Keimkristalle mit Abmessungen bis 

500 µm erzeugt, die die bisherige Größe um 

das 5- bis 10fache übersteigt. 

Gleichzeitig wurde während des Jahres eine 

Reihe von Weichenstellungen für eine zukunftsorientierte 

Aufstellung und Entwicklung der 

Arbeitsgebiete des IPHT vorbereitet. Dazu gehört 

zunächst die Berufung von Prof. Dr. Jürgen Popp 

als Leiter des Forschungsbereiches Mikrosysteme 

zum 1. Mai 2005. Er ist gleichzeitig Lehrstuhlinhaber 

für Physikalische Chemie an der Universität 

Jena und ausgewiesener Spezialist auf dem 

Forschungsgebiet der Laserspektroskopie und 

der Biophotonik. Damit wird die Verbindung von 

optischen Technologien und Anwendungen der 

Lebenswissenschaften fachlich gestärkt und die 

Zusammenarbeit mit der Friedrich-Schiller-Universität 

weiter unterstützt. Dr. Helmut Dintner, der 

diesen Forschungsbereich während der vergangenen 

sechs Jahre geleitet hatte, gebührt unser 

Dank für seine umsichtige Leitungstätigkeit 

während dieser Zeit. 

Zur Frage einer mit dem Umfeld abgestimmten 

und zukunftsorientiert ausgerichteten Fokussierung 

der Arbeitsgebiete zu photonischen und 

optischen Technologien wurde auf Empfehlung 

des Wissenschaftlichen Beirats durch das Kuratorium 

des IPHT eine Strukturkommission unter 

Leitung von Prof. Dr. Dietrich Wegener (Universität 

Dortmund) mit Beteiligung von Vertretern 

des IPHT, der Universität und des Landes eingesetzt. 

Auf der Basis eines vom IPHT vorgelegten 

Konzeptes wurden unter besonderer Berücksichtigung 

der bestehenden fachlichen Stärken Empfehlungen 

zur Fokussierung auf den Gebieten 

For the IPHT, 2005 was a successful project year. 

The share of project-financed activities was well 

above the 50% level, with a considerable 

increase in EU-funded projects. Here are some 

highlights of the results presented in this annual 

report: 

– For the first time, four flux quantum qubits have 

been coupled and spectrally characterized – a 

first step towards an adiabatic quantum computer. 

– The inscription of single pulse fibre Bragg gratings 

(type I) has achieved a reflection efficiency 

of 50% – a new international record. 

– The development of a LabOnChip based system 

using the principle of segmented probe 

flow has paved the way for an analysis platform 

for cancer diagnosis, which can be further 

extended to perform fundamental investigations 

in molecular biology. 

– By laser crystallisation of silicon on glass with 

a diode laser suitable for industrial use, seed 

crystals with a size of up to 500 µm have been 

produced, which is an improvement by a factor 

of 5 to 10. 

In addition to the scientific achievements, several 

measures were taken to shape the future of the 

IPHT and to assure the successful development 

of its research fields. As one major point, Prof. Dr. 

Jürgen Popp was appointed as head of the Micro 

Systems research division as of May 1 st , 2005. 

He is also a professor of physical chemistry at 

the University of Jena and a well-known specialist 

in the fields of laser spectroscopy and biophotonics. 

This appointment will strengthen the synergy 

in our research in optical technologies and 

applications in the life sciences as well as intensify 

our collaboration with the University of Jena. 

We are obliged to Dr. Helmut Dintner for his prudent 

management of the said research division 

during the last six years. 

Based on a recommendation by the Institute’s 

scientific council, the Supervisory Board of the 

IPHT appointed a structural commission headed 

by Prof. Dr. Dietrich Wegener (University of Dortmund) 

with participation of representatives from 

the IPHT, the University of Jena and the State of 

Thuringia. This commission has discussed future 

focussing directions in the fields of photonic technologies 

considering regional interests to 

strengthen scientific excellence. Based on a concept 

framed by the IPHT, the commission investigated 

the Institute’s specific strengths and recommended 

focussing and further strengthening 

in the fields of optical fibres and applications and 

photonic instrumentation. 

For the magnetics and quantum electronics 

research fields, similar and still ongoing discussions 

have been held in order to develop strategies 

for this important part of the IPHT’s activities. 

3


4 

Optische Fasern und Faseranwendungen und 

Photonische Instrumentierung formuliert. 

Für die Forschungsgebiete Magnetik und Quantenelektronik 

fand ebenfalls eine Reihe von 

Abstimmungsgesprächen zur Zukunftsgestaltung 

dieses gewichtigen Arbeitsfeldes statt, die aber 

noch nicht abgeschlossen sind. 

Zur Pflege des wissenschaftlichen Austauschs 

war das IPHT Ausrichter von Tagungen und 

Workshops und beteiligte sich aktiv an Ausstellungen 

und internationalen Messen. Im Februar 

traf sich der PhotonicNet-Arbeitskreis „Oberflächenbearbeitung“ 

im IPHT. Im Mai organisierte 

Dr. Wolfgang Fritzsche ein internationales Symposium 

zur Molekularen Plasmonik. Ebenfalls im 

Mai versammelten sich unter der Schirmherrschaft 

des OPTONET e.V. Spezialisten im IPHT, 

um im Rahmen eines Workshops über neue 

Laserstrahlquellen zu diskutieren. 

Die Vermittlung von Forschungsergebnissen an 

die Öffentlichkeit war Anliegen der Beteiligung 

des IPHT an der Präsentation des Beutenberg 

Campus in Tokio im Rahmen des „Deutschlandjahres 

in Japan 2005–2006“ sowie an den Ausstellungen 

Faszination Licht im Januar und Eiskalte 

Energien für Europa im Juli, jeweils in der 

Jenaer Einkaufspassage Goethe-Galerie. Der 

öffentlichen Vermittlung von Forschungsarbeiten 

diente auch die Lange Nacht der Wissenschaften 

in Jena im November. Bis nach Mitternacht 

drängten sich die Besucher an den Experimenten 

und in den Labors. 

Lange Nacht der Wissenschaften: 

Besucher und Aussteller in Aktion 

The “Long Night of the Sciences”: 

Visitors and demonstrators in action 

Zu einem Ehrenkolloquium war vom IPHT aus 

Anlass des 75. Geburtstages von Prof. Dr. Günter 

Albrecht im März eingeladen worden. Prof. 

Albrecht hat in seiner aktiven Zeit an der Universität 

die Forschung zur Supraleiterelektronik 

maßgeblich etabliert und ist damit einer der 

Väter dieser Forschungsrichtung im IPHT. 

In order to encourage scientific discussion and 

exchange, the IPHT organized conferences and 

workshops and was actively engaged in exhibitions 

and international fairs. In February, the PhotonicNet 

cluster on surface modification met at 

the IPHT. Dr. Wolfgang Fritzsche organized an 

international symposium on “Molecular Plasmonics” 

in May. Also in May a workshop on new laser 

sources was held at the IPHT under the patronage 

of the OPONET cluster. 

Several activities were aimed to present our scientific 

results to a broad public: the presentation 

of the Beutenberg campus in Tokyo/Japan as 

part of the German Year 2005/2006, and the 

expositions “Fascinating Light” (in January) and 

“Ice-cold Energies for Europe” (in July) in the 

Jena’s Goethe Gallery shopping mall. With the 

same intention, the IPHT took part in the first 

“Long Night of the Sciences” in Jena in November. 

Till well after midnight, many interested visitors 

crowded the Institute’s laboratories and took 

part in scientific experiments. 

An honorary colloquium was held on the occasion 

of the 75 th birthday of Prof. Dr. Günther 

Albrecht in March. During his active years, Prof. 

Albrecht was a major force in establishing the 

research field of supraconductivity at the Jena 

University and also became a father of this 

research direction at the IPHT. 

Another special highlight at the IPHT was a public 

colloquium held by Prof. Dr. Anton Zeilinger 

(University of Vienna) on quantum information 

transmission, a subject which is related to our 

activities in quantum electronics research. As 

one of a series of talks at Beutenberg campus, 

this talk was organized by Prof. E. Hoenig with 

great commitment and attracted more than 200 

visitors. 

The work of Dr. Thomas Henkel for the development 

of microfluidic chip systems had been 

acknowledged by the 2004 IPHT award. Another 

IPHT research award was presented to Dr. Sonja 

Unger, Volker Reichel and Klaus Mörl for their 

work on high power laser fibres with a record 

result of 1.3 kW output power from a single fibre. 

Six students of the University of Applied Sciences 

in Jena finished their diploma work in 2004 

with very good results and marks: Constanze 

Döring, Lars Bergmann, Ralf Bitter, Carsten Hartmann, 

Matthias Schnepp und Rico Stober .They 

received the prizes for the best IPHT diploma 

work, sponsored by the Jena-Saale-Holzland 

Savings Bank. 

The internal competition for the 2005 innovation 

project was decided in favor of Wolfgang Morgenroth, 

Dr. Uwe Hübner, Richard Boucher (Magnetics/Quantum 

Electronics Division), Sven 

Brückner, Uta Jauernig, Dr. Siegmund Schröter, 

Dr. Torsten Wieduwilt, Barbara Geisenhainer, 

Matthias Giebel, Dr. Günther Schwotzer (Optics 

Division), Dr. Andrea Czaki, Andrea Steinbrück,

Ein besonderer Höhepunkt war im Rahmen der 

von Prof. E. Hoenig mit großem Engagement 

organisierten öffentlichen Vortragsreihe des Beutenberg 

Campus eine Veranstaltung im IPHT mit 

Prof. Dr. Anton Zeilinger aus Wien, die über 

200 Besucher anlockte. Prof. Zeilinger sprach 

über Quanteninformationsübertragung mit Anknüpfung 

an unsere Arbeitsrichtung Quantenelektronik. 


Mit einem IPHT-Preis 2004 wurden die Arbeiten 

von Dr. Thomas Henkel zur Entwicklung mikrofluidischer 

Chipsysteme für Kompartimentierung, 

Kultivierung und Detektion biologischer Spezies 

anerkannt. Ein weiterer IPHT-Preis 2004 ging an 

Dr. Sonja Unger, Dipl.-Phys. Volker Reichel und 

Dipl.-Phys. Klaus Mörl für Arbeiten auf dem 

Gebiet der Hochleistungsfaserlaser mit einer 

Ausgangsleistung von 1,3 kW aus einer Einzelfaser. 

Gleich sechs Diplomanden von der FH Jena hatten 

ihre Arbeit 2004 mit sehr guten Ergebnissen 

abgeschlossen: Constanze Döring, Lars Bergmann, 

Ralf Bitter, Carsten Hartmann, Matthias 

Schnepp und Rico Stober. Sie wurden mit von 

der Sparkasse Jena-Saale-Holzland in dankenswerter 

Weise zur Verfügung gestellten Preisen 

ausgezeichnet. 

Den IPHT-internen Wettbewerb um das IPHT- 

Innovationsprojekt 2005 gewannen Wolfgang 

Morgenroth, Dr. Uwe Hübner, Richard Boucher 

(Bereich Magnetik/Quantenelektronik), Sven 

Brückner, Uta Jauernig, Dr. Siegmund Schröter, 

Dr. Torsten Wieduwilt, Barbara Geisenhainer, 

Matthias Giebel, Dr. Günther Schwotzer (Bereich 

Optik), Dr. Andrea Czaki, Andrea Steinbrück, 

Dr. Wolfgang Fritzsche (Bereich Mikrosysteme) 

und Dr. Gudrun Andrä (Bereich Lasertechnik) mit 

der gemeinsamen Thematik „Nanostrukturierte 

Ta 2 O 5 -Schichten für optochemische/biophotonische 

Sensorik sowie Solarzellen“. Die erzielten 

Ergebnisse sind am Ende dieses Jahresberichtes 

zusammengefasst. 

Die kommerzielle Umsetzung von wissenschaftlichen 

Ergebnissen in Produkte ist ein besonderes 

Anliegen des IPHT. Auf dem Gebiet optischer 

Faser-Bragg-Gitter konnte dazu im Oktober 2005 

ein Gemeinschaftsunternehmen mit einem belgischen 

Partner unter Beteiligung des IPHT, die 

FBGS Technologies GmbH (Fibre Bragg Grating 

Sensor Technologies), mit Sitz in Jena gegründet 

werden. Geschäftsfelder dieses Unternehmens 

sind Forschung, Entwicklung, Produktion und 

Vermarktung von optoelektronischen Elementen, 

insbesondere spezielle Glasfaser-Bragg-Gitter. 

Der Wissenschaftliche Beirat beurteilte auf seiner 

jährlichen Sitzung im April die wissenschaftlichen 

Leistungen des IPHT als sehr beachtlich und 

überzeugend. Turnusmäßig ausgeschieden aus 

dem Wissenschaftlichen Beirat sind Dr. Siegfried 

Birkle (Siemens Erlangen), Prof. Dr. Hans Koch 

Die Gewinner des IPHT-Preises 2004 / 

IPHT Prizewinner 

a) Dr. Thomas Henkel, 

b) Klaus Mörl, Dr. Sonja Unger, Volker Reichel 

Dr. Wolfgang Fritzsche (Micro Systems Division) 

and Dr. Gudrun Andrä (Laser Technology Division) 

who worked on the subject of nanostructured 

Ta 2 O 5 layers for optochemical/biophotonic 

sensors and solar cells. Results are presented at 

the end of this annual report. 

The transfer into commercial use of its scientific 

results is a matter of special interest to the IPHT. 

In the field of optical Bragg gratings, we started a 

new company in Jena in October jointly with a 

Belgian company (Fibre Bragg Grating Sensor 

Technologies). The objects of the new company 

are research, development, production and sale 

of optoelectronic components such as especially 

fibre Bragg gratings. 

The scientific council has reviewed the scientific 

results of the IPHT regularly and during its 

meeting in April appreciated them as highly 

respectable and convincing. Dr. Siegfried Birkle 

(Siemens Erlangen), Prof. Dr. Hans Koch (PTB 

Berlin), and Dr. Augustin Siegel (Carl Zeiss, 

Oberkochen) left the council due to the end of 

their term. We would like to thank them for their 

very constructive work during the last years. New 

members appointed to the scientific council are 

Prof. Dr. Michael Siegel (Universität Karlsruhe), 

a 

b 

5


(PTB Berlin) und Dr. Augustin Siegel (Carl Zeiss, 

Oberkochen). Den ehemaligen Mitgliedern danken 

wir für ihre konstruktive Mitarbeit in den vergangenen 

Jahren. Als neue Mitglieder wurden 

Prof. Dr. Michael Siegel (Universität Karlsruhe), 

Dr. Stefan Spaniol (CeramOptec GmbH, Bonn) 

und Dr. Martin Wiechmann (Carl Zeiss Meditec 

AG, Jena) berufen. 

Danken möchten wir an dieser Stelle auch dem 

Freistaat Thüringen, allen Förderern im Bund und 

bei der EU für die stete Unterstützung sowie 

unseren Partnern in Wissenschaft, Forschung 

und Wirtschaft für die gute Zusammenarbeit. 

Dr. Stefan Spaniol (CeramOptec, Bonn), and 

Dr. Martin Wiechmann (Carl Zeiss Meditec, 

Jena). 

We thank the State of Thuringia and all our partners 

in research and industry for their ongoing 

support and cooperation. 

H. Bartelt, February 2006 

H. Bartelt, im Februar 2006 

Beutenberg Campus 2005 

Foto: Ballonteam Jena 

6

ORGANISATION / ORGANIZATION 

B. Organisation / Organization 

Institut für Physikalische Hochtechnologie e.V., Jena 

Institute for Physical High Technology 

Dez. 2005 

Kuratorium/Supervisory Board 

Thüringer Kultusministerium 

MDgt. Dr. J. Komusiewicz 

Thüringer Ministerium für 

Wirtschaft, Technologie und Arbeit 

MD Dr. F. Ehrhardt 

Friedrich-Schiller-Universität Jena 

Prorektor Prof. Dr. H. Witte 

2 gewählte Mitglieder 

Dr. E. Hacker, Dr. M. Heming 

Mitgliederversammlung 

Assembly of Members 

Wissenschaftlicher Beirat 

Scientific Advisory Council 

Sprecher: 

Prof. Dr. S. Büttgenbach 

Vereinsvorstand/Executive Committee 

Vorsitzender = Direktor 

Prof. Dr. H. Bartelt 

Stellvertretender Direktor 

Dr. K. Fischer 

Kaufmännischer Direktor 

F. Sondermann 

Kaufmännischer Bereich 

Administrative Division 

Kaufmännischer Direktor: 

F. Sondermann 

Bereichsleiterversammlung 

Assembly of Convention 

Vereinsvorstand 

Betriebsratsvertreter 

Forschungsbereichsleiter 

Betriebsrat 

Works Committee 

Vors.: Frau Dr. G. Andrä 

Wissenschaftl.-Techn. Rat 

Scient.-Techn. Council 

Sprecher: Dr. E. Keßler 

Forschungsbereich 

1 

Research Division 1 

Magnetik/ 

Quantenelektronik 

Magnetics/ 

Quantum Electronics 

Leiter: 

Prof. Dr. H. E. Hoenig 


2 


Optik 

Optics 

Leiter: 

Prof. Dr. H. Bartelt 


3 


Mikrosysteme 

Microsystems 

Leiter: 

Prof. Dr. J. Popp 


4 


Lasertechnik 

Laser 

Technology 

Leiter: 

Prof. Dr. H. Stafast 

Die Leiter der Forschungsbereiche sind berufene Professoren an der Friedrich-Schiller-Universität Jena. 

The divisions head are professors at the University of Jena. 

7


Das IPHT ist eine gemeinnützige Forschungseinrichtung 

in der Rechtsform eines eingetragenen 

Vereins und wird institutionell gefördert durch den 

Freistaat Thüringen. Mitglieder des Vereins sind 

öffentliche Einrichtungen sowie Personen aus 

Wissenschaft und Wirtschaft. Im Kuratorium sind 

zwei verschiedene Ministerien des Freistaates 

Thüringen, die Friedrich-Schiller-Universität Jena 

und die Industrie durch zwei von der Mitgliederversammlung 

gewählte Persönlichkeiten vertreten. 

Das FuE-Programm unterliegt der Kontrolle 

eines Wissenschaftlichen Beirats mit Mitgliedern 

sowohl aus der Wissenschaft als auch aus der 

Industrie. Das Institut ist in vier Forschungsbereiche 

untergliedert, deren Leiter gleichzeitig Mitglieder 

der Physikalisch-Astronomischen bzw. 

der Chemisch-Geowissenschaftlichen Fakultät 

der Friedrich-Schiller-Universität sind. 

The IPHT is a non-profit association with the legal 

status of a convention, institutionally funded by 

the Free State of Thuringia, and members from 

public institutions as well as private members. 

There is a Supervisory Board with two representatives 

of two different ministries of the Free 

State of Thuringia in Germany, one from the 

Friedrich-Schiller-University in Jena, and two 

R&D managers from the industry. The R&D program 

is supervised by a Scientific Advisory 

Council with members from the scientific community 

and from the industry. The institute is organized 

in four research divisions with heads serving 

also as members oft he faculties for Physics 

and Astronomy as well as for Chemical and Earth 

Sciences of the Friedrich-Schiller-University. 

Wissenschaftlicher Beirat / Scientific Advisory Council 

Prof. Dr. Stephanus Büttgenbach 

(Sprecher/Chairman) 

Prof. Dr. Bruno Elschner 

Dr. Michael Harr 

Prof. Dr. Burkard Hillebrands 

Prof. Dr. Peter Komarek 

Prof. Dr. Siegfried Methfessel 

Prof. Dr. Frieder Scheller 

Prof. Dr. Paul Seidel 

Dr. Thomas Töpfer 

Technische Universität Braunschweig 

Technische Hochschule Darmstadt 

ASTEQ Applied Space Techniques GmbH, Kelkheim 

Universität Kaiserslautern 

Forschungszentrum Karlsruhe 

Witten-Herbede 

Universität Potsdam 


Jenoptik AG, Jena 

2005 ausgeschieden / left in 2005 

Dr. Siegfried Birkle 

Prof. Dr. Hans Koch 

Dr. Augustin Siegel 

Siemens AG, Erlangen 

Physikalisch-Technische Bundesanstalt, Berlin 

Carl Zeiss AG, Oberkochen 

2005 neu hinzugekommen / joined in 2005 

Prof. Dr. Michael Siegel 

Dr. Stefan Spaniol 

Dr. Martin Wiechmann 

Universität (TH) Karlsruhe 

CeramOptec GmbH, Bonn 

Carl Zeiss Meditec AG, Jena 

8


Mitglieder des IPHT e.V. / Members of the Convention 

Institutionelle Mitglieder / Membership of institutions 

Thüringer Kultusministerium, Erfurt 

Thüringer Ministerium für Wirtschaft, 

Technologie und Arbeit, Erfurt 

Stadt Jena 


Fachhochschule Jena 

CiS Institut für Mikrosensorik e.V., 

Erfurt 

Leibniz-Institut für Festkörper- und 

Werkstoffforschung e.V., Dresden 

Sparkasse Jena 

TÜV Thüringen e.V., Erfurt 

4H Jena Engineering GmbH 

Robert Bosch GmbH, Stuttgart 

j-fiber GmbH, Jena 

Dr. Gerd Meißner 

MD Dr. Frank Ehrhardt 

Oberbürgermeister Dr. Peter Röhlinger 

Prof. Dr. Herbert Witte 

Prof. Dr. Gabriele Beibst 

Dr. Hans-Joachim Freitag 

Prof. Dr. Helmut Eschrig 

Herr Martin Fischer 

Herr Bernd Moser 

Herr Manfred Koch 

Dr. Christoph P. O.Treutler 

Herr Lothar Brehm 

Persönliche Mitglieder / Personal members 

Prof. Dr. Hartmut Bartelt 

Dr. Peter Egelhaaf 

Prof. Dr. Bruno Elschner 

Dr. Klaus Fischer 

Prof. Dr. Peter Görnert 

Frau Elke Harjes-Ecker 

Prof. Dr. Karl-August Hempel 

Prof. Dr. Hans Eckhardt Hoenig 

Herr Bernd Krekel 

Prof. Dr. Siegfried Methfessel 

Prof. Dr. Gerhard Schiffner 

Herr Frank Sondermann 

Prof. Dr. Herbert Stafast 

Institut für Physikalische Hochtechnologie, Jena 

Robert Bosch GmbH, Stuttgart 

Darmstadt 


Innovent e.V., Jena 

Thüringer Kultusministerium, Erfurt 

RWTH Aachen 


Commerzbank AG, Jena 

Witten-Herbede 

Ruhr-Universität Bochum 



9

PERSONAL UND FINANZEN / STAFF AND BUDGET 

C. Personal und Finanzen / Staff and Budget 

Kaufmännischer Bereich / Administrative Division 

Leitung/Head: F. Sondermann 

e-mail: frank.sondermann@ipht-jena.de 

Beauftragte für den Haushalt/ 

Finance Department Head: I. Ring 

e-mail: ina.ring@ipht-jena.de 

Projektmanagement/ 

Project Management: Dr. I. Bieber 

e-mail: ivonne.bieber@ipht-jena.de 

Technik/Technical Infrastructure: Th. Büttner, e-mail: thomas.buettner@ipht-jena.de 

Personal des Instituts / Staff of the institute 

Mitarbeiterinnen und Mitarbeiter 

des Kaufmännischen Bereichs. 

The staff of the administrative division. 

Institutionelle 

Drittmittel/Project funding 

Förderung/ 

Institutional Öfftl. Förderung/ Industrie/ 

funding Public funding Industrial funding 

Wissenschaftler/ 

Scientists 34 33 13 80 

Doktoranden/ 

Doctoral candidates 14 3 17 

Techniker, Mitarbeiter 

für den Betrieb/ 

Engineers, employees 

for infrastructure 46 27 15 88 

Verwaltung/ 

Administration 15 15 

Personalbestand 

am 31.12.2005/ 

Number of employees 

per 2005/12/31 95 74 31 200 

Zusätzliches Personal (Gastwissenschaftler, Diplomanden, Praktikanten, Auszubildende)/ 

Additional staff (visiting scientists, students, trainees): 39 

10 

Anmerkung: Die Tabelle weist Personen aus, nicht Vollbeschäftigtenäquivalente./ 

Note: The table states numbers of persons, not of full time-jobs

PERSONAL UND FINANZEN / STAFF AND BUDGET 

Finanzen des Instituts / Budget of the institute 

Institutionelle Förderung (Freistaat Thüringen)/ 

Institutional funding (Free State of Thuringia) 7.053,6 T” 

Drittmittel/Project funding 8.393,7 T” 

Institutionelle Förderung: Verwendung / Institutional funding: use 

15.447,3 T ” 

Personalmittel/staff 4.276,7 T” 

Sachmittel/materials 1.838,4 T” 

Investitionsmittel/investments 938,5 T” 

Aufgliederung Drittmittel / Subdivision of project funding 

7.053,6 T ” 

BMBF/Federal Ministry 2.400,6 T” 

DFG/German Research County 328,3 T” 

Freistaat Thüringen (Projektförderung)/Free State of Thuringia (Projects) 793,6 T” 

(davon für Datennetz-Migration/incl. computer network migration 209,3 T”) 

Europäische Union/European Union 931,5 T” 

Aufträge öffentlicher Einrichtungen/Contracts of public institutions 569,9 T” 

Sonstige Zuwendungsgeber/Other fundings 203,9 T” 

(Unterauftr. an Dritte in öfftl. gef. Projekten/Subcontracts to others 321,2 T”) 

Unteraufträge in Verbundprojekten/Subcontracts 438,8 T” 

FuE-Aufträge incl. wiss. techn. Leistungen/R&D contracts 2.727,1 T” 

8.393,7 T ” 

Gesamtkosten des Projektes beliefen sich auf 

279,0 T“, von denen die Europäische Union 

209,3 T“ finanziert und das IPHT einen Eigenanteil 

von 69,7 T“ aufgewendet hat. 

The project „Kernnetzmigration“ was cofinanced 

by the European Union. 

Das Projekt „Kernnetzmigration“ wurde von 

der Europäischen Union kofinanziert 

Um heutzutage international wettbewerbsfähig 

zu sein, benötigt man auch eine moderne DV- 

Infrastruktur. Zu diesem Zweck hatte das Institut 

für Physikalische Hochtechnologie e.V. im Mai 

2005 einen Antrag an das Thüringer Kultusministerium 

auf Förderung des „Ersatzes veralteter 

Netzwerkkomponenten des Datennetzwerkes 

des IPHT“, Kurztitel: „Kernnetzmigration“ 

gestellt. 

Das Projekt wurde dankenswerterweise durch 

das Thüringer Kultusministerium bewilligt und 

dann, wie geplant, bis Ende 2005 umgesetzt. Die 

To be today international competitive a modern 

data processing infrastructure is needed. To this 

purpose the Institute for Physical High Technology 

had applied for a funding at the Thuringian 

Ministry of Education an Cultural Affairs in May 

2005 to replace the meanwhile antiquated network 

components of the data network of the 

IPHT, shortened title “Kernnetzmigration” (“Core 

Network Migration”). 

The project had been gratefully financed by the 

Thuringian Ministry of Education and Cultural 

Affairs and had been executed till the end of 

2005. The total costs of the project amounted to 

279,0 thousand Euros. From these total costs the 

European Union had financed 209.3 thousand 

Euros and the IPHT had financed an own share 

of 69.7 thousand Euros. 

11

MAGNETIK & QUANTENELEKTRONIK / MAGNETICS & QUANTUM ELECTRONICS 

D. Forschungsbereiche / Scientific Divisions 

1. Magnetik & Quantenelektronik / Magnetics & Quantum Electronics 

Leitung/Head: Prof. Dr. H. E. Hoenig 

e-mail: eckhardt.hoenig@ipht-jena.de 

Magnetik Magnetoelektronik Quantenelektronik 

Magnetics Magnetoelectronics Quantum Electronics 

Ltg./Head: Prof. Dr. W. Gawalek Ltg./Head: Dr. R. Mattheis Ltg./Head: Dr. H.-G. Meyer 

wolfgang.gawalek@ipht-jena.de roland.mattheis@ipht-jena.de hans-georg.meyer@ipht-jena.de 

Kultusminister Prof. Dr. Jens Goebel verleiht 

am 3. Februar 2005 in Schmalkalden den 

Thüringer Forschungspreis 2004 an 

Dr. Andrei Izmalkov, Dr. Thomas Wagner, 

Prof. Dr. Miroslav Grajcar und Dr. Evgeni 

Ilichev (v.l.n.r). 

Science minister Prof. Dr. Jens Goebel presents 

the Thuringian Research Award 2004 

to Dr. Andrei Izmalkov, Dr. Thomas Wagner, 

Prof. Dr. Miroslav Grajcar, and Dr. Evgeni 

Ilichev (left to right). 

12 

1.1 Überblick 

Der Forschungsbereich Magnetik/Quantenelektronik 

repräsentiert in unserem Hause die 

Elektronik und die Materialforschung. Diese 

Elektronik stützt sich auf supraleitende bzw. 

magnetische Materialien und ist dementsprechend 

in Quantenelektronik und Magnetoelektronik 

gegliedert. Unter Quantenelektronik verstehen 

wir die Nutzung der Quanteneffekte der 

Supraleitung in mikro- und nanotechnisch hergestellten 

Bauelementen und Schaltungen. Die 

Materialforschung betrifft Supraleiter und Magnetpigmente. 

Die Abteilung Quantenelektronik, mit mehr als 

30 Mitarbeitern die weitaus größte und dynamischste 

im Forschungsbereich und im Institut, 

betreibt wesentlich unseren Reinraum und versteht 

sich als Systementwickler mit und für Partner 

und Anwender weltweit. Professionelle Qualität 

wird durch eine jährlich aktualisierte ISO-Zertifizierung 

gesichert. Eine strategische Partnerschaft 

besteht mit dem Fraunhofer-Institut für 

Angewandte Optik und Feinmechanik bei Betrieb 

und Anwendung der Elektronenstrahllithographie. 

Herausragende wissenschaftliche Ergebnisse im 

Jahre 2005 waren: (1) Weltweit erstmals wurde 

als Vorstufe zu künftigen adiabatischen Quantrenrechnern 

vier Flussquanten-Qubits quanten- 

1.1 Overview 

The division Magnetics/Quantum Electronics represents 

the electronics and materials research in 

IPHT. It is based on superconducting and magnetic 

materials and is organized in the Quantum 

Electronics and Magnetoelectronics departments 

respectively. Quantum Electronics uses quantum 

effects of superconductivity in micro- and nanodevices 

and circuits. Materials research concerns 

superconductors and magnetic nanoparticles. 

The Quantum Electronics department, the 

largest and most dynamical in house, is main 

operator of our clean room and system developer 

together with and servicing partners and customers 

worldwide. ISO certification assures a 

professional quality level and is updated every 

year. A strategic partnership has been established 

with the nearby Fraunhofer Institute for 

Applied Optics and Precision Mechanics operating 

and using electron beam lithography. 

Highlights in the year 2005 have been: (1) for the 

first time worldwide four superconducting flux 

qubits have been quantum mechanically coupled 

and spectroscopically characterized on the route 

to adiabatic quantum computation; a corresponding 

European research partnership has been 

accomplished; in February the group around 

Dr. Ilichev was honoured with the Thuringian 

Research Award, (2) again as a worldwide first, a


The SQUID system for archaeological prospection, pulled by a jeep, during measurement near Palpa, Peru. 

The orange tubes contain the SQUID channels. 

New measuring station 

used to study domain 

wall movement in magnetic 

thin film sensors. 

In the middle of the coils 

two boards are visible. 

The upper one contains 

the sensor chip 

(2 × 2 mm 2 ) and a fast 

preamplifier, the lower 

board contains a multiplexer. 

The mayor of Jena 

C. Schwind, the Thuringian 

minister of education 

and cultural affairs 

Prof. Dr. J. Goebel and 

the head of department 

Magnetics Prof. Dr. 

W. Gawalek during the 

opening of the interactive 

exhibition “Eiskalte 

Energie für Europa” 

(June 29–July 02, 2005, 

GoetheGalerie Jena) 

testing a fly-wheel 

energy storage system. 

13


mechanisch gekoppelt und spektroskopisch charakterisiert. 

Eine entsprechende europäische 

Forschungspartnerschaft wurde etabliert. Im 

Februar wurde der Thüringer Forschungspreis an 

unsere Quantenelektronikgruppe verliehen. (2) 

Weltweit erstmals konnte mit einem fahrzeugtransportierten 

SQUID-System eine professionelle 

archäometrische Erkundung zum Erfolg gebracht 

werden. (3) Unsere Beiträge zu dem von uns veranstalteten 

Symposium „Messen an der Quantengrenze“ 

bei der Frühjahrstagung der DPG 

demonstrierten die Schlüsselstellung der supraleitenden 

Quantenelektronik bei Astro-Kameras 

und Quantencomputing. Im Rahmen des Jahres 

„Deutschland in Japan“ wurden diese Arbeiten 

auch in Tokyo als besondere Leistung des Beutenberg 

Campus präsentiert. 

Unsere Magnetoelektronik stützt sich auf die 

Besonderheit einer industriekompatiblen Beschichtungsanlage 

für Magnetowiderstands-Multilagen 

bis zum Format von 8 Zoll. Professioneller 

Betrieb ist erprobt in kundenspezifischen und 

kundenvertraulichen Arbeiten. Ein weltweit 

erstrangiger Geräteentwickler stützt sich auf 

unsere Prozessentwicklung. Wir haben Expertise 

in der Charakterisierung der Dünnschicht-Grenzflächen 

und das Instrumentarium dafür. Qualitätssicherung 

mit Zertifizierung besteht und wird turnusmäßig 

erneuert. Highlights sind: (1) GMR- 

Viel-Umdrehungszähler für Anwendungen im 

Automobil, (2) Analytik-Highlights: Neue L-Röntgenspektren 

als Kalibrierreferenz. 

Materialentwicklung supraleitender und magnetischer 

Materialien für die Energietechnik und 

Medizintechnik betreiben wir in unserer Abteilung 

Magnetik. Das Projekt DYNASTORE zum 

Schwungmassenenergiespeicher wurde verlängert 

und steht jetzt vor dem erfolgreichen 

Abschluss. Ein großes Projekt mit Partnern zur 

Entwicklung hochdynamischer Motoren wurde 

begonnen. Mit „Superlife“ wurde eine von uns 

mitgestaltete europäische Ausstellung in Jena 

der Öffentlichkeit präsentiert. Das bisher schon 

bestehende Zusammengehen mit dem IFW 

Dresden wird intensiviert. 

Die Nutzung von Magnetpigmenten in der Krebstherapie 

in Partnerschaft mit dem Klinikum Jena 

(Forschungsgruppe von Prof. Werner A. Kaiser) 

kommt voran. Die Materialentwicklung dazu hat 

ihre Basis dazu im Ferrofluid-Verbund der DFG, 

an dem wir maßgeblich beteiligt sind. 

vehicle carried SQUID-system operated successfully 

in archaeometric prospection in Palpa/ 

Peru, (3) the key role of our Quantum Electronics 

in camera development for astrophysics and in 

quantum computing circuitry was demonstrated 

by our contribution to the symposium “measurements 

at the quantum limit” as organized by us at 

the spring meeting of the German Physical Society 

in Berlin; this work also was presented in 

Tokyo within the year “Germany in Japan” as 

highlight of the Beutenberg Campus where we 

belong to. 

Our Magnetoelectronics department features a 

deposition system for magneto-resistive multilayer 

sputtering on industry compatible 8” substrates. 

Professional operation has been 

approved in customer-specific and -confidential 

work. A top level company providing such 

machines to the world marked relies on our 

process development. 

We are experienced in characterising thin film 

interfaces and are well equipped for such investigations. 

ISO certification assures quality and is 

updated annually. Highlights have been: (1) a 

multiturn GMR counter for automotive applications, 

(2) new L-x-ray spectra as reference for 

instrumentation. 

Our Magnetics department developes superconducting 

and magnetic materials for power and 

medical engineering. The project DYNASTORE 

on a flywheel with our superconducting components 

has been extended and is expected to be 

finished in summer of 2006. A large project has 

been started on a superconducting machine testing 

high power combustion engines for the car 

industry. With “Superlife” we presented a European 

exhibition to the public here in Jena with our 

contributions. We intensify our collaboration with 

the IFW Dresden. 

Cancer therapy using our magnetic nanoparticles 

and corresponding heating system reported 

progress (team of Prof. Werner A. Kaiser). The 

materials development is based on the ferro-fluid 

consortium of the DFG where we contribute and 

organize. 

14


1.2 Scientific results 

1.2.1 Micro- and nanofabrication 

(Uwe Hübner, Ludwig Fritzsch, 

Solveig Anders, Jürgen Kunert) 

The microfabrication group is responsible for the 

maintenance of the existing micro- and nanotechnological 

fabrication processes for quantum 

electronic devices (SQUID sensors, voltage standard 

chips, Qubits) and other applications such 

as nanoscale calibration standards, photonic 

crystals and micro optical components, and for 

the development of technologies appropriate for 

new device requirements. In 2005, 210 chromium 

masks and 240 electron beam direct writing 

exposure jobs were made using the ZBA 23H. 

120 masks were prepared by using the optical 

pattern generator MANN 3600. About 80 high 

resolution exposures were made using the 

e-beam-tool LION. For the further improvement 

of the electron beam lithography the software 

tool SCELETON was installed as a proximity 

function calculator. 

In 2005 a new DFG-project, “Electrooptically Tunable 

Photonic Crystals”, was started. The European 

project PLATON (PLAnar Technology for 

Optical Networks) and the R&D project “KALI II” 

were successfully finished. In the “KALI II” project 

a new type of nanoscale CD-standard for AFM 

and a “Nanoscale Linewidth/Pitch Standard” 

were realized. These standards consist of different 

grating structures etched in nanocrystalline 

silicon on a quartz substrate. They contain 

patterns on nanometer scale for the calibration 

and resolution-check of high-resolution optical 

microscopy techniques, such as deep ultraviolet 

microscopy and laser scanning microscopy. 

One important task of the year 2005 was to 

develop a process to reduce the standard 3.5 µm 2 

Nb/Al process to junction dimensions of 1 µm 2 .At 

the start of 2005 a chemical-mechanical polishing 

(CMP) machine was installed and the process 

of SiO 2 -planarization on 4” wafers developed. In 

parallel, optical lithography using a g-line stepper 

(AÜR, Zeiss Jena) and the RIE process for sub- 

µm Nb structures were optimized. A first wafer 

run with test structures of SQUIDs with Josephson 

junctions of different dimensions down to 0.8 

µm showed in principal the functionality of the 

planarization process. However, there was a 

large parameter spread and a small yield, caused 

by an insufficient reliability and overlap accuracy 

of the stepper and the strong dependence of the 

polishing rate on topology and structure dimensions. 

Therefore, for the ongoing test runs new 

technological concepts were developed including 

direct e-beam exposure and the CALDERA 

process for the CMP step in order to overcome 

the dimensional effects when polishing. Fig. 1.1 

shows a cross section of planarized SiO 2 isolated 

Nb lines. The standard 3.5 µm 2 Nb/Al process 

for SQUIDs was upgraded by integrating 

Nb-oxide capacitors with specific capacitances of 

app. 4 fF/µm 2 for areas of up to 25 mm 2 . They are 

used in highly balanced gradiometers for mobile 

SQUID system applications. The development of 

large area Josephson junctions for applications 

as x-ray detectors in synchrotron radiation experiments 

was started with special emphasize on 

the minimization of the subgap leakage currents. 

The first results are promising and future work will 

be concentrated on the preparation of sensor 

arrays and the implementation of different 

absorber materials. 

Fig. 1.1: Cross section of Nb lines with planarized 

SiO 2 isolation. 

1.2.2 SQUID sensors and systems 

(Volkmar Schultze, Ronny Stolz, 

Viatcheslav Zakosarenko, 

Andreas Chwala, Sven Linzen, 

Nilolay Ukhanski, Torsten May) 

Except for SQIFs (Superconducting Interference 

Filters – a special combination of number of various 

SQUIDs) which are developed and produced 

within a long-standing cooperation with the University 

of Tübingen and the company QEST, all 

SQUID projects are based now upon the use of 

low temperature superconductors. 

In the fourth phase of the development of the 

LTS SQUID gradiometer system for mobile applications 

the second generation prototype for measuring 

the full tensor of the Earth’s magnetic field 

gradient with extremely high sensitivity was built. 

It features several improvements compared to its 

antecessors. 

With integrated low pass filters the frequency gap 

for disturbances between the system bandwidth 

of approximately 4 MHz and 500 MHz of the RFI 

screen around the cryostat could be closed. 

Here, the main task was the development of a 

technology for integrated capacitances up to 80 

nF. After several aborts in the past few years the 

successful implementation of intrinsic capacitors 

is a highlight in the SQUID development in 2005. 

Now, due to these filters the new gradiometer 

sensors provide higher stability in environments 

with high frequency radiation and their intrinsic 

noise could be decreased down to 20 fT/(m·√Hz). 

The second task was to reduce the motion noise 

15


16 

of the SQUIDs caused by movements in the 

Earth’s magnetic field. By decreasing the width of 

all superconducting structures below 5 µm the 

critical magnetic field amplitude for flux capture 

could be increased up to 65 µT. Furthermore, 

using smaller areas of about 3000 µm 2 , the sensitivity 

of the three reference SQUID magnetometers 

was decreased. Now we are able to 

work even in high magnetic field amplitudes like, 

for instance, in the north of Canada. 

Further development has been done on the data 

acquisition unit of the system. It contains now 

extremely low noise differential inputs for 21 analogue 

channels. They are digitized with 24 bit 

ADC. All interactions of this unit with the SQUID 

system have been removed. The accuracy of the 

determination of the 3D position, flight direction, 

and orientation in space is determined from a 

low-power differential GPS system and a new 

inertial system unit containing high accuracy 

fiber-optical gyros. With the implementation of 

new lithium ion batteries the weight and geometric 

dimensions of the data acquisition unit have 

been decreased by simultaneous increase of the 

working period to approximately eight hours. 

In September 2005 the Earth’s magnetic field 

gradient of the same area (approx. 13 km × 7 

km), surveyed in South Africa already in 2004, 

was measured again. The system was used in a 

fixed wing configuration on a CESSNA Grand 

Caravan 208 airplane from Fugro Airborne Systems, 

where the rigidity of the stinger was 

increased compared to the past. In this configuration 

the area (1100 line kilometers) was 

scanned at altitudes of 80 m and line spacing of 

100 m. To compare the system sensitivity with the 

best contemporary conventional system (MIDAS 

system from Fugro Airborne systems), the survey 

was conducted with helicopter based instruments 

at altitudes between 35 m and 40 m and a tow 

rope length of 40 m. The comparison of the magnetic 

maps of both systems showed a superior 

sensitivity and spatial resolution of the full-tensor 

SQUID device. 

The development of a SQUID system for archaeological 

prospection within the project 

“ArcheNova” was finished with the end of year 

2005. Via various field trials the system was further 

improved compared to the status the year 

before. The final examination – and a highlight 

of the SQUID activities in this year – was an 

expedition to the Nasca/Palpa region in Peru, 

about 250 km south of Lima. This region is most 

famous because of the large geoglyphes. Our 

measurements were performed in coordination 

and cooperation with the BMBF project network 

“Nasca: Development and adaption of archaeometric 

techniques for the investigation of cultural 

history”. 

All the demands of this application – transport of 

the system, provision with liquid Helium, and 

especially the measurement in a hyper arid, 

dusty area – could be solved well. The measurements 

could even be performed with a pickup 

truck as a hauling system – despite a very 

cragged surface of the explored areas (cf. colored 

picture). Mappings on foot, performed for 

comparison, proved the same data quality of the 

“motorized” ones. So it was possible to map 

about one hectare per measurement hour, which 

is a remarkable gain compared to common handheld 

geomagnetic archaeological prospection 

systems. All in all more than 200 line kilometers 

were driven. Due to the geo-referenced positioning 

with the differential GPS system the results 

can easily be fit into photos or maps achieved 

with other methods. 

One example out of the 10 mapped areas is 

shown in Figure 1.2. On the ortho photo only 

recent plow furrows are visible. Partially they also 

reproduce in the magnetogram. However, there 

also an old riverbed comes out, magnetically 

detectable due to the deposition of sediments. 

This gives an impression on the dramatic 

changes the area around Nasca suffered in times 

before the Spanish set up to conquer South 

America. 

On other areas geometric structures came out in 

the magnetogram which allude to ancient settlement 

residues. 

Fig. 1.2: Jauranga – a site near Palpa, Peru. 

Top: Ortho photo (by courtesy of the Institute for 

Geodesy and Photogrammetry, ETH Zürich), 

Bottom: Magnetogram.


Even though with the Peru expedition the project 

is formally finished, in 2006 some other field trials 

in Europe are planned where the potential of our 

system shall be used for geomagnetic prospection 

of archaeologically interesting sites. 

The most common electromagnetic method in 

mineral exploration is based on the application 

of transient Electro-Magnetics (TEM). Already in 

2003 a prototype of a TEM system with LTS 

SQUID magnetometers has been developed, 

which has been used routinely on several targets 

in Australia and South Africa in 2004 with great 

success. 

In 2005, the system has been redesigned in various 

aspects. All components have been evaluated 

for the use of the system under arctic conditions. 

A new cryostat with a higher thermal efficiency 

(and the same size) helps to save liquid helium, 

since it now needs to be refilled every second day 

only. The power supply and control unit have 

shrunk by almost a factor of two in size. The 

mechanical setup has been ruggedized by changing 

cable, connectors, switches and cryostat installation. 

A new family of SQUIDs has been implemented 

to achieve a better stability of the working 

point all over the world (with different magnetic 

field strengths). At the end of this process it was 

possible to out-source the fabrication to our spinoff 

‘Supracon’. Two new systems have been produced 

there and meet all the required specifications. 

The first “production” system was applied in 

routine field work for many weeks in Australia. 

Already in 2001 a prototype of a directly coupled 

SQUID electronics for various applications has 

been developed. In between it has been successfully 

used in various applications. From 2002 on, 

commercial production of this electronics, completed 

by a digital control unit, started by our 

spin-off ‘Supracon’. In 2005 this electronics has 

been redesigned in many aspects. Keeping a 

frequency range of 7 MHz and very low input 

noise ~0.33 nV/Hz 1/2 (with flicker noise corner 

frequency ~0.1 Hz), thermodrift (~5 nV/K), maximum 

slew rate (~16 MΦ 0 /s) and dynamic range 

(170 dB) have been remarkably improved. 

Fig. 1.3: A quadratic, 800 nm thick silicon nitride 

membrane patterned in the shape of a spider 

web. The width of the legs is 4 µm. 

In the frame work of the “LABOCA” project being 

executed in close collaboration with the Max 

Planck Institute for Radio Astronomy in Bonn our 

group has considerably enhanced the performance 

of the used transition edge bolometers by 

developing a new technology for patterning the 

supporting membranes. These structured membranes, 

sometimes referred to as “spider-webs” 

(Fig. 1.3), help to lower the thermal conductivity 

and thereby improve the energy resolution down 

to values below 10 –16 W/Hz. Furthermore, we 

have developed a new concept of coupling the 

first-stage readout SQUID and the second-stage 

amplifier SQUID. This approach is particularly 

well adapted to the time domain multiplexing concept. 

The appropriate electronics was improved 

and a production prototype was built, which can 

be easily produced in the batches of 30 ones, 

needed for the 300 channel array. 

In parallel the LABOCA prototype system with 

7 channels was successfully used to image 

objects from a distance of a few meters in a lab 

environment. Imaging in the frequency band 

between 0.1 and 1 THz also opens the possibility 

of detecting potentially hazardous objects hidden 

underneath the clothing of suspects, for 

instance in security areas at airports. 

Together with the company Vericold Technologies 

we have developed and manufactured X-ray 

bolometers, operating at a temperature of 100 mK. 

They are routinely used to equip the Polaris 

spectrometer, an add-on for commercial electron 

microscopes, which can be used for finding 

defects in semiconducting electronic circuits. 

1.2.3 Integrated superconducting circuits 

(Gerd Wende, Marco Schubert, 

Torsten May, Michael Starkloff, 

Birger Steinbach, Hans-Georg Meyer) 

In 2005 the project “Quantum Synthesizer 

(QuaSy)” was successfully developed further. In 

the project three components – an RSFQ pulse 

pattern generator, a pulse amplifier, and a 

Josephson quantizer – are being developed by 

different project partners, and integrated into a 

Multi-Chip-Module. Within the scope of the joint 

project the IPHT is focused on investigations of 

superconducting pulse-driven microwave circuits, 

the so-called Josephson quantizer, and on the 

relevant microwave tests and measurements. 

Our main activities were the improvement of the 

fabrication technology and testing the Josephson 

quantizer microwave circuits. With this new technology 

the packing density of the Josephson 

17


18 

junctions (JJs) was increased by about one third. 

The critical current spread was reduced from 

about 10% to 2–3%. All this together results in a 

distinct increase of the yield of fully functional 

quantizer circuits. 

A new cooperation with the NMi Van Swinden 

Laboratorium B.V. in Delft, Netherlands, allowed 

to measure our chips in a bipolar pulse driving 

mode with pulse repetition frequencies of up to 

12 GHz. The pulse pattern generator delivers a 

repeating pattern of short current pulses in which 

the desired low frequency output waveform is 

encoded. By the Josephson quantizer circuit it is 

transformed into a pattern of quantized voltage 

pulses. Fig. 1.4 shows an example of the operation 

of a Josephson quantizer circuit with 

2560 JJs. In this case, a 122 kHz ac voltage was 

delta-sigma modulated in a 64 Mbit long pattern. 

The used clock frequency was 4 GHz. The left 

spectrum of Fig. 1.4 is delivered by the generator 

itself. It can be seen that there are not only the 

distinct higher harmonics of the fundamental but 

also other peaks whose origin is not yet clear. 

The quantizer circuit driven by the same pattern 

removes all of these unwanted signals as seen 

in the right hand side spectrum of Fig. 1.4. The 

amplitude of the fundamental frequency was 

9.5 mV with quantum accuracy and the higher 

harmonics were suppressed by –86 dBc. Currently, 

the Josephson junction array limits the 

maximum usable clock frequency to 4.8 GHz and 

the maximum ac voltage amplitude to 9.5 mV. 

Therefore, the major task for the next few months 

is to increase the chip bandwidth in order to 

increase the maximum ac voltage amplitude. 

Fig. 1.4: Measured power spectra of a deltasigma 

modulated 122 kHz sine wave with an 

amplitude of 9.5 mV. The bipolar pulse pattern 

generator was clocked at 4 GHz. Left spectrum: 

Delivered by the generator itself. Right spectrum: 

Output signal of the JJ array quantizer, pulse-driven 

by the generator with the same pattern. The 

suppression of the higher harmonics is –86 dBc. 

Josephson quantizer and 10 V Josephson voltage 

standard chips with almost 20,000 JJs are the 

most highly integrated superconductive circuits 

provided commercially. Worldwide only HYPRES 

Inc. (USA) and the IPHT are able to offer such 

10 V Josephson voltage standard circuits. In 2005 

the IPHT delivered quantizer chips and 10 V chips 

to several national metrology laboratories. 

In 2005 a complete microprocessor controlled 

10 V Josephson voltage standard system was 

developed. The system facilitates a variety of DC 

voltage calibrations and measuring functions: 

Calibration of secondary DC-reference Zeners 

and testing of the linearity and accuracy of DCvoltmeters 

and DC-calibrators in the voltage 

range of 0 to ±10 V. It was successfully evaluated 

at the PTB in Braunschweig. A direct comparison 

of the IPHT Josephson voltage standard 

with the PTB one showed a voltage difference 

between both standards of only 0.7 nV, with a 

measurement uncertainty of 3.4 nV. This corresponds 

to an accuracy of 7 × 10 –11 . So, the IPHT 

system compares to the primary standards of the 

national metrology institutes. 

1.2.4 Quantum computing 

(Evgeni Il’ichev, Miroslav Grajcar, 

Andrei Izmalkov, Thomas Wagner, 

Sven Linzen, Uwe Hübner, 

Simon van der Ploeg, Daniel Wittig) 

Approximately ten years ago it was demonstrated 

theoretically that a quantum computer can solve 

some problems much more effectively than a 

classical one. This discovery has stimulated an 

effort to find a physical system which can be 

used as a qubit, the building block of a quantum 

computer. 

Amongst the many systems in physics which can 

be used as a qubit, one is the so-called persistent 

current qubit. This qubit consists of a small 

inductance superconducting loop with three 

Josephson junctions. Such superconducting 

qubits have several advantages over qubits 

based on microscopic systems: there is no principal 

limitation in their number and they can be 

accessed and controlled individually. 

We proposed a specific implementation for adiabatic 

quantum computing with a set of coupled 

superconducting flux qubits, which can be fabricated 

with the present state of the art. We could 

show that our measurement setup – the impedance 

measurement technique – can be effectively 

used to read out the results of the adiabatic 

evolution algorithm. 

In order to demonstrate any quantum algorithm, a 

coupling between qubits must be implemented. 

We proposed implementing the coupling between 

two qubits through a shared Josephson junction. 

We have experimentally demonstrated direct antiferromagnetic 

Josephson coupling between two 

persistent current qubits. The coupling strength 

can be of the order of a Kelvin, and agrees with 

theoretical predictions to the expected accuracy. 

Moreover, the resulting coupling not only is 

strong, but can also be varied independent of 

other design parameters by choosing the shared 

junction’s size.


We implemented a “twisted” design which exhibits 

the ferromagnetic coupling. It was done by fabricating 

and studying a four–qubit circuit (Fig. 1.5) 

in which the two types of coupling co-exist. This is 

very promising from the perspectives of realizing 

nontrivial Ising-spin systems and scalable adiabatic 

quantum computing. This world-wide first 

coupling of four superconducting qubits clearly is 

a highlight of our work in 2005. The acquired data 

fully agree with a quantum-mechanical description 

to the experimental accuracy. 

For superconducting qubits the problem of decoherence 

is one of the most important. In order to 

get additional information about the qubits 

dynamics we proposed a new tool – low frequency 

Rabi spectroscopy for a two-level system. In 

principal we have analyzed the interaction of a 

dissipative two-level quantum system with highand 

low-frequency excitation. The system is continuously 

and simultaneously irradiated by these 

two waves. If the frequency of the first signal is 

close to the level separation, the response of the 

system exhibits undamped low-frequency oscillations 

whose amplitude has a clear resonance at 

the Rabi frequency with the width being dependent 

on the damping rates of the system. Therefore, 

by analyzing the experimental data, decoherence 

as well as relaxation times can be reconstructed. 

We have also experimentally and theoretically 

investigated combined superconductor-semiconductor 

structures. The measurement of the 

supercurrent-phase relationship of a ballistic 

Nb/InAs(2DES)/Nb junction in the temperature 

range from 1.3 K to 9 K using impedance measurement 

technique showed at low temperatures 

substantial deviations of the supercurrent-phase 

relationship from conventional tunnel-junction 

behaviour, as has to be expected for highly transparent 

interfaces. Reasonable agreement between 

theory and experiment was found. 

The whole work of the quantum computing group 

was honoured already in the preceding year with 

the Thuringian Research Award. The actual 

awards ceremony happened in the year 2005, 

shown in the colored picture. 

These good results, ever again presented in 

important scientific journals, also reflect in a 

steadily growing embedding in international 

cooperation. To allow for the growing number of 

measurements coming along with this, a second 

mK-cryostat had to be set up, what was connected 

with the preparation of an additional specially 

prepared room for it. 

So, in combination of these further improving 

measurement conditions and the scientific potential 

of the quantum computing group its position 

in the emerging field of quantum computing could 

further be strengthened. 

Fig. 1.5: Electron micrograph of a four-qubit 

sample. The central junctions A1–A3 couple the 

Al qubits q1–q4. The surrounding Nb coil is part 

of the LC tank circuit, used for measurement and 

global flux biasing. The Nb lines I b1 –I b4 allow 

asymmetric bias tuning. 

1.2.5 Foundry service 

(Wolfgang Morgenroth, Ludwig Fritzsch, 

Torsten May, Jürgen Kunert, 

Birger Steinbach, Gerd Wende, 

Hans-Georg Meyer) 

The Jena Superconductive Electronics Foundry 

(JeSEF) was founded in 1997. It uses the knowhow 

and the competitive infrastructure for niobium 

and YBCO technology of the department of 

Quantum Electronics. The foundry provides customers 

with LTS SQUIDs and SQUID systems, 

RSFQ circuits, Josephson voltage standard circuits, 

components and systems, and with microfabrication 

items including the design and fabrication 

of lithography masks. Further, the foundry 

offers technological services like single manufacturing 

steps, using our cleanroom facilities, as 

well as characterization services of our well 

equipped laboratories. JeSEF and the department 

of Quantum Electronics have been ISO 

9001:2000 certified since 2002. 

About 40 orders were processed in 2005. Our 

main customers for SQUIDs and Microfabrication 

were Supracon AG, THEVA GmbH, Bruker 

BioSpin GmbH, and Jenoptik LOS GmbH. Voltage 

standard circuits and components were 

delivered to the University of Naples and to the 

national metrology laboratories of the Netherlands, 

France, and Korea. 

1.2.6 Domain wall motion in small GMR 

structures 

(Roland Mattheis, Hardy Köbe, 

Dominique Schmidt, Uwe Hübner, 

Wolfgang Morgenroth) 

The motion of domain walls in narrow stripes represents 

the key element for new magneto- 

19


20 

electronic devices like magnetic logic, stacked 

MRAM, and our multiturn sensor. We investigated 

domain wall motion in 500 µm long stripes of a 

GMR stack with NiFe as the sensing layer. The 

stripes were prepared using e-beam lithography 

and Ar ion milling. 

Fig. 1.6: GMR stripe with domain wall generator: 

a) Temporal evolution of voltage (proportional to 

R) of a 220 nm wide stripe; b) distribution of the 

field strength H inj ; c) distribution of the length covered 

during the first domain wall jump; d) distribution 

of the field strength H mov > H inj necessary for 

completion of the domain wall movement through 

the stripe. 

Stripe widths of between 150 and 300 nm and 

thicknesses of the NiFe layer of between 5 and 

20 nm, cause large shape anisotropy and, as a 

consequence, high fields H nuc were needed for a 

domain wall nucleation in the stripe. Some stripes 

have an 6 µm × 10 µm large area (domain wall 

generator) at one end, in which a 180° domain 

wall is generated upon rotation of a field of 

strength H gen and injected into the stripe at a field 

strength H inj (with H nuc > H mov > H inj > H gen ). The 

field dependencies of the 180° domain wall injection, 

of the domain wall velocity, and of the 

processes of pinning and depinning in our stripes 

were determined from the resistance changes of 

the GMR stack, by measuring the R(t)-curve and 

statistically interpreting 500 repeated experiments. 

As shown in Fig. 1.6a during a linear increase of 

the magnetic field a domain wall was injected at 

5.3 kA/m and pinned after travelling about 70 µm, 

140 µm, and 270 µm, as derived from the relative 

voltage jump. The distribution of the injection field 

H inj in Fig. 1.6b clearly shows a twofold Gaussian 

distribution. These two peaks are presumably 

caused by the two possible types of domain 

walls, transverse and vortex-like domain walls, 

whose injection into the stripe is dependent on 

the magnetic reversal process in the domain wall 

generator. As displayed in Fig. 1.6c the domain 

wall can be pinned during movement through the 

stripe at nearly all parts of the wire, thereby 

showing the stochastic nature of domain wall 

movement. The pinning probability exhibits a 

double peak near 100 µm. In most cases the 

domain wall is pinned twice during passage. The 

magnetic field for passing through the complete 

stripe is depictured in Fig 1.6d. The wide distribution 

of this field again indicates the stochastical 

nature of domain wall motion, pinning and depinning. 

Edge roughness probably causes this statistically 

distributed pinning. Magnetic fields H mov 

of about 9.5 kA/m are sufficient to move the 

domain wall completely through the 500 µm long 

stripes. 

In some stripes with a domain wall generator single 

defects seem to occur. These cause strong 

pinning for every domain transition. The field 

strength necessary to overcome this strong pinning 

varies from experiment to experiment within 

a factor of 3. One such strong defect near the 

domain wall generator enabled us to determine 

the field dependence of the domain wall velocity. 

As shown in Fig. 1.7 we get a linear field dependence 

of the domain wall velocity v. Within some 

µs a domain wall can move through the whole 

stripe. The domain wall mobility of 17 (m/s)/ 

(kA/m) is low compared to that obtained in largearea 

NiFe layers and is comparable to that found 

by other groups in narrow stripes at comparatively 

high magnetic fields. The minimum field H inj for 

any domain wall movement in 200 nm wide 

stripes is of the order of 4 kA/m.


Fig. 1.7: Linear dependence of the domain wall 

velocity v on the field strength H mov in a stripe with 

a defect. 

Fig. 1.8: Distribution of the field strength necessary 

for nucleation of a domain wall in a GMR 

stripe without domain wall generator. 

annual report 2004) and included thermal relaxation 

processes in our model used to analyse the 

experimental non-equilibrium torque curves L(Φ). 

Furthermore, we performed time dependent 

measurements which directly show relaxation at 

T = 10 K. 

L(Φ) is the irreversible contribution to the torque 

exerted on the F/AF film by an in-plane rotating 

strong magnetic field after a rotation reversal 

from the cw to ccw sense. Beginning at the reversal 

point (Φ = 0), the film grains of coupling 

strength j change their magnetic states from one 

equilibrium (cw) to a new one (ccw) at characteristic 

angles Φ(j). Thus L(Φ) reflects P(j) and we 

derive 

P(j) = 1/(S(Kt) 2 ) * G(β S (j),Φ) * d 2 L(Φ)/dΦ 2 , 

where S, K, and t are the area, anisotropy constant, 

and thickness of the AF film, respectively. 

The function G was calculated in the frame of a 

Stoner-Wohlfarth model for 3-axial anisotropy 

(inset of Fig. 1.9). This model describes for a single 

grain the magnetization angles β S (j/Kt) at 

which the coupled AF net moment switches from 

one AF anisotropy axis to the next, thus contributing 

to the irreversible torque L(Φ). Thermal energy 

reduces this switching angle β S (j,T)< β S (j,0) as 

demonstrated in Fig. 1.9, because within the 

measuring time t > τ =10 –9 s * exp(E B /k B T) an 

energy barrier E B can be overcome. This must be 

considered also at T = 10 K because the grain 

volume V E B is very small. As an example 

In stripes without a domain wall generator the 

domain wall nucleates at one end of the stripe at 

a field strength H nuc = 18–26 kA/m and moves 

through the line within some µs. The peak field is 

inversely proportional to the stripe width and has 

a very narrow Gaussian distribution (σ ~ 0.8% of 

the peak field) as shown in Fig. 1.8. This field is 

larger than the field necessary to overcome every 

pinning and corresponds to the coercitive field 

strength H C . 

1.2.7 Measurement of coupling strength 

distribution in exchange bias film 

systems 

(Klaus Steenbeck, Roland Mattheis) 

The exchange bias field and the coercitivity of 

ferro-/antiferromagnetic (F/AF) coupled polycrystalline 

film systems for magnetoelectronics 

strongly depend on the coupling strength j of the 

individual grains, with their distribution function 

P(j) in the grain ensemble. Until now P(j) was not 

measurable. 

We quantified our proposed method to determine 

P(j) with low temperature torquemetry (see IPHT 

Fig. 1.9: Calculated critical magnetization angles 

β S for switching of the AF net moment µ AF to a 

neighbouring easy axis as a function of the grain 

coupling (j/Kt). The shown parameter is the ratio 

(T/K) of temperature and AF anisotropy constant 

K. 

Inset: Sketch of the rotating magnetization M F 

and the coupled AF net moment µ AF in a film crystallite 

with 3 easy axes of the AF. 

21


22 

Fig. 1.10: Probability P(j) for a coupling energy 

density between j and (j+dj) as a function of j, 

determined from torque measurements with a 

NiFe / IrMn film at T = 10 K. 

Fig. 1.10 shows the distribution function P(j) for a 

sputtered NiFe (16 nm) / IrMn (0.8 nm) coupled 

film determined from torque measurements at 

T = 10 K. Only the range of coupling j > j 1 , which 

is responsible for the irreversible torque contributions, 

can be recorded by the method. The result 

shows that most of the grains have low coupling 

energies and that the portion of strongly coupled 

grains continuously decreases with increasing j. 

The value of K used was estimated using information 

from exchange bias measurements. 

1.2.8 Electron excited L X-ray spectra of 

the elements 14


Fig. 1.12: Correlation between the m.a.c. values 

and the intensity ratio R = I(20 keV)/I(7 keV). 

difference leads to effects of differential absorption, 

where the absorption is stronger for 

decreasing line energy. For the net peak height 

ratio β 1 /α we obtained results which are of the 

same order of magnitude as those given by 

White and Johnson (W&J) in their popular tables. 

However for l/α and β 3,4 /β 1 our results show an 

atomic number dependence which is completely 

different from those given by W&J. 

Fig. 1.13: Melt-textured YBCO monolith prepared 

using 7 seeds. 

General material development 

Any application requires material with good and 

reproducible quality. This is provided by our batch 

process. We are able to prepare several sizes of 

monoliths according to the requirements of the 

application (D. Litzkendorf). 

To enlarge the monoliths size and to improve the 

magnetic properties we concentrated on the 

multi-seeding technique where several seeds 

were placed on the monoliths. 

Both and growth fronts were investigated 

used polarised light microscopy (J. Bierlich, 

PhD work). In both orientations a transport 

current across the grain boundaries is observed 

in the trapped field profile. The seeds have to be 

oriented with an accuracy of about 3° in a distance 

less than 5 mm. Fig. 1.13 shows a monolith 

with a size of 78 * 38 * 18 mm 3 where 7 seeds 

in orientation were applied. The trapped 

field profile (Fig. 1.14) represents a transport current 

across all grain boundaries. 

1.2.9 Preparation, characterization and 

application of melt-textured YBCO 

(Wolfgang Gawalek, Tobias Habisreuther) 

Our work is based on a stable preparation technology 

to prepare high quality material combined 

with an adapted characterization technology. 

Investigation on the whole chain from precursor 

preparation to the system integration of function 

elements is performed in order to optimize melttextured 

YBCO for applications. 

Several projects and co-operations with partners 

in research and industry of Germany, Europe and 

world wide support our work. 

Silvia Kracunovska successfully defended her 

PhD thesis on the relation between preparation 

and microstructure. 

Fig. 1.14: Trapped flux distribution of the multiseeded 

monolith. The flux distribution shows a 

transport current across all grain boundaries. 

Within the EFFORT consortium we use the possibility 

to exchange and discuss the latest developments 

and results with all European specialists. 

Applications 

In co-operation with MAI Moscow motor tests at 

temperatures at 20 K were performed. Small 

scale reluctance motors were tested at the MAI 

Moscow. The power output of an YBCO-motor 

increased from 500 W at 77 K to 1500 W at 20 K 

and 3000 rpm. 

In 2005 we and our project-partners Oswald 

Elektromotoren GmbH, MAI Moscow, and Arburg 

GmbH developed first designs for the BMBF-project 

“Hochdynamischer HTSL Motor”. 

In the frame of the POWER SCENET W. 

Gawalek leads the working group “Rotating 

machines”. A meeting with 20 participants from 

10 countries was organized in Jena from April 

11–12, 2005 in Jena. 

23


In 2005 the final detailed system design was realized 

for the Dynastore project. We finished the 

monoliths for the embedding into the bearing and 

transferred them to the company Nexans High 

Temperature Superconductors for the system integration. 

It is scheduled to test the system in 2006. 

Public awareness 

Under the patronage of the Thuringian minister 

of education and cultural affairs Prof. J. Goebel 

we organised an interactive exhibition “Eiskalte 

Energie für Europa” from June 29 to July 2 in the 

GoetheGalerie Jena (Fig. 1.15). The exhibition was 

developed in the frame of EU-project “SUPER- 

LIFE” in co-operation with the Budapest University 

for Technology and Economics (co-ordination), 

ICMAB Barcelona, ISMRA Caen, Oxford University, 

Ben-Gurion University of the Negev, S-Metall 

Budapest and Sydcraft. After contacting schools 

within a range of 100 km around Jena we organized 

50 guided tours through the exhibition to 

bring superconductivity near to the young students. 

During the exhibition we counted 2000 persons 

testing the human levitator. 

Fig. 1.16: Rotor of the first MgB 2 HTS motor. 

set-up for motor tests at 21K was constructed and 

the motor tests were performed. Test results are 

shown in Fig. 1.17. At 20 K this motor showed an 

output power of 1300 W at 3000 rpm. 

24 

Fig. 1.15: Visitors watching a levitated train at the 

exhibition. 

In addition we showed levitation during the “Highlights 

der Physik 2005” in Berlin, at Siemens 

Nürnberg, during the “Lange Nacht der Wissenschaften” 

in Jena and Erlangen, and at the 

Solvay headquarters Hannover. Also we contributed 

our human levitator to the TV-science 

magazine “Galileo”. 

1.2.10 Characterization and application 

of bulk MgB 2 

(Wolfgang Gawalek, Tobias Habisreuther, 

Matthias Zeisberger) 

The first motor with MgB 2 elements world-wide 

was constructed by ISM Kiev, MAI Moscow and 

IPHT Jena (Fig. 1.16). 

ISM Kiev produced several MgB 2 plates. In Jena 

they were characterized and machined to function 

elements. At the MAI Moscow the experimental 

Fig. 1.17: Test results of the MgB 2 motor at 20 K. 

The DFG project “Neue Werkstoffe für die 

Energietechnik: Magnesiumdiborid” was successfully 

enroled. 

1.2.11 Preparation of magnetic materials 

(Robert Müller) 

In the frame of the DFG-priority program spectroscopic 

investigations (University Bonn) on glass 

crystallised Ba-ferrite BaFe 12–2x Ti x Co x O 19 magnetic 

particles were continued with respect to the 

problem of reduced magnetisation in nanoparticles 

(“magnetic dead layer”). 

Experiments to prepare magnetite or maghemite 

nanoparticles in the 20 nm-range for medical 

applications by glass crystallisation as well as by 

cyclic wet chemical precipitation were continued. 

Essential points of interest are the optimisation of 

nucleation and the growth onto given particles 

without further nucleation (see Fig. 1.18), respectively. 

Mean particles sizes >30 nm could be


Fig. 1.18: Magnetic properties in dependence on 

number of cycles (i.e. on increasing mean size 

from 11 to 26 nm). 

realised. Bigger particles in size distributions with 

mean values > ≈25 nm are magnetically too hard 

to give a high loss power at the small field amplitudes 

required for medical treatment. 

Experiments on covering the particles by a biocompatible 

layer (dextran) were started in the 

frame of a diploma thesis. Stable suspensions with 

17 nm-particles (mean value) could be prepared. 

Investigations on magnetic properties were done 

as well in cooperation with partners on Co-particles, 

encapsulated particles (FZK, DFG-program), 

hard-magnetic Ba-ferrite particles (TU 

Ilmenau), iron oxide particles and ferrofluids with 

different polymer surface layers (University Düsseldorf, 

DFG-program) and iron oxide microspheres 

(HKI Jena). 

1.2.12 Biomedical applications of magnetic 

nanoparticles 

(Rudolf Hergt, Matthias Zeisberger) 

In the last years magnetic nanoparticles (MNP) 

found increasing interest in various biomedical 

applications as for instance superparamagnetic 

contrast agents for MRI, cellular separation and 

refinement, drug delivery, gene magnetofection 

and magnetic biochips. One important new therapy 

method entering now clinical application is 

magnetic particle hyperthermia and thermoablation 

which is under development in the group of 

the IPHT in co-operation with the Institute for 

Diagnostic and Interventional Radiology (IDIR, 

Prof. W. A. Kaiser) of the Clinics of the University 

Jena. Within the frame of the DFG-priority program 

“Colloidal Magnetic Fluids” foundations for 

therapy of breast carcinoma by magnetic particle 

injection were provided and the fundamentals of 

the second therapy generation, the “Antibody 

Mediated Targeting of Nanoparticles” (AMTN) 

were laid down. The experimental setup developed 

in co-operation with IDIR for first clinical trials 

was further improved considering reliability 

and comfortability for patients. For the developed 

apparatus as well the special magnetic particle 

suspension to be injected for tumour therapy two 

patents were filed. 

The new method of AMTN is presently under 

investigation in the frame of the DFG-project 

“Magnetic heat treatment of breast tumours with 

multivalent magnetic nanoparticles” (HE2878/9-2) 

in co-operation with Prof. Kaiser (IDIR). The goal 

is the coupling of three strategies of tumour therapy: 

combination of hyperthermia by magnetic 

nanoparticles with antibody-targeting and chemoor 

radiotherapy. Therefore, functional molecular 

groups (e.g. tumour-specific antibodies and cisplatin) 

will be coupled to the carboxymethyldextran 

coating of maghemite nanoparticles. There, a till 

now not satisfyingly solved problem is the preparation 

of MNP which provide sufficient specific 

heating power (SHP). While suitable MNP with 

moderate values of SHP are available now for the 

direct intratumoural injection method, the target 

concentrations expected for AMNT are so low that 

at least an order of magnitude higher SHP is 

needed. Theoretical modelling of the heat generation 

by magnetic nanoparticles in a tumour 

showed that for large tumours (some cm) SHP of 

more than 1 kW/g is needed, a value which is even 

increasing with decreasing tumour size. Such a 

high value of SHP was found by our group till now 

only for magnetosomes synthesized by magnetotactical 

bacteria (co-operation with Dr. Schüler, 

MPI Marine Microbiology Bremen). Unfortunately, 

those particles are available only in small amounts 

and – more importantly – they lack biocompatibility 

due to the bacteria proteins of their coating. Our 

investigations have shown that a maximum of 

magnetic losses occurs in the transition region 

between superparamagnetic and stable single 

domain particles. For maghemite or magnetite this 

is just the mean size of about 30 nm found for 

magnetosomes. However, screening with respect 

to magnetic properties, in particular losses, for 

various MNP types prepared by chemical precipitation 

resulted in nearly one order of magnitude 

lower SHP. As a reason, the too broad size distribution 

as well as a magnetic coupling of MNP is 

supposed and is subject of present investigations. 

Besides efforts with particle preparation described 

in the previous section. An apparatus for magnetic 

size fractionation was developed which is under 

investigation, now. Another way towards large values 

of SHP is the application of MNP with higher 

magnetic moment e.g. FePt or Co. The latter ones 

are presently magnetically investigated with 

encouraging results (co-operation with Prof. Bönnemann, 

FKZ). 

In co-operation with the University of Applied Sciences 

Jena (Prof. Andrä, Prof. Bellemann, Dept. 

Biomedical Engineering) a pharmaceutical capsule 

for the remote controlled drug release is in 

development. The release mechanism is based 

on the heating of a magnetic absorber in an alternating 

magnetic field. By in-vitro investigations 

the remote controlled release was realised and a 

clinical study is under preparation. 

25


26 

1.3. Appendix 

Partners 

National cooperation 

Thuringia 

• B&W Trade Technology, Jena 

• Carl Zeiss Jena GmbH 

• Docter-Optics GmbH, Neustadt/Orla 

• FH Jena, FB SciTec, FB Medizintechnik 

• Fraunhofer Institut für Angewandte Optik 

und Feinmechanik, Jena 

• Friedrich Hagans Plastverarbeitung, Erfurt 

• FSU Jena 

• Physikalisch-Astronomische Fakultät und 

Chemisch-Geowissenschaftliche Fakultät 

• Institut für Diagnostische und 

Interventionelle Radiologie 

• Institut für Sportwissenschaft 

• Klinik für Innere Medizin III 

• HITK Hermsdorf 

• IMB Jena 

• IMG Nordhausen 

• IMMS gGmbH, Ilmenau 

• Innovent e.V. Jena 

• j-fiber GmbH, Jena 

• Jenoptik AG, Jena 

• JOLD Jena 

• Landesamt für Archäologie mit Museum für 

Ur- und Frühgeschichte Thüringens in Weimar 

• Leica Microsystems Lithography GmbH Jena 

• Melexis AG Erfurt 

• Schott Lithotec, Jena 

• STS Diagnostics, Jena 

• Supracon AG, Jena 

• SurA Chemicals, Jena 

• TÜV Thüringen e.V., Kalibrierlabor Arnstadt 

• TU Ilmenau 

Germany 

• BAM, Berlin 

• Bayerisches Landesamt für Denkmalpflege 

(BLfD) München 

• Bruker AXS Microanalysis GmbH, Berlin 

• BUGH, Wuppertal 

• EAS Hanau 

• Eberhard Karls Universität Tübingen, 

Physikalisches Institut I 

• Forschungszentrum Jülich GmbH 

• Fraunhofer – INT, Euskirchen 

• FRT GmbH – Fries Research & Technology 

• FZ Karlsruhe 

• FZ Rossendorf 

• HL Planartechnik Dortmund 

• Hochschule für Technik, Wirtschaft und Kultur 

Leipzig 

• IFW Dresden 

• Infineon AG München 

• Infineon AG Regensburg 

• Lucent Technologies GmbH Nürnberg 

• Max Planck Institut für Radioastronomie Bonn 

• Max Planck Institut für Mikrostrukturphysik Halle 

• Nanoworld Services GmbH Erlangen 

• Naomi technologies Mainz 

• Nexans High Temperature Superconductors, 

Hürth 

• Novotechnik Messwertaufnehmer OHG, 

Ostfildern 

• OSWALD Elektromotoren GmbH, Miltenberg 

• Philips Semiconductor Hamburg 

• Physikalisch-Technische Bundesanstalt, 

Braunschweig 

• Physikalisch-Technische Bundesanstalt, Berlin 

• Piller GmbH, Osterode 

• PREMA Semiconductor GmbH, Mainz 

• QEST GmbH, Tübingen 

• RWTH Aachen 

• Siemens AG Erlangen 

• Singulus AG Kahl 

• Solvay Barium Strontium GmbH, Hannover 

• Technische Universität Hamburg-Harburg 

• TU Kaiserslautern 

• Tracto-Technik GmbH, Lennestadt 

• TransMIT GmbH, Gießen 

• TU Braunschweig 

• TU Bergakademie Freiberg 

• Universität Bielefeld 

• Universität Erlangen 

• Universität Gießen 

• Universität Heidelberg, Kirchhoff-Institut 

für Physik 

• Universität Karlsruhe 

• Universität Mainz, Institut für Organische 

Chemie 

• Universität Regensburg 

• Vacuumschmelze GmbH & Co KG, Hanau 

• VeriCold Technologies Ismaning 

• WSK Hanau 

International cooperations 

• Altis Semiconductor France 

• Anglo Operations Ltd., South Africa 

• Bar Ilan University, Israel 

• Ben-Gurion University of the Negev, Israel 

• Budapest University of Technology and 

Economy, Hungary 

• Cambridge University, UK 

• CardioMag Imaging Inc., Schenectady, USA 

• CEA Saclay, Gif sur Yvette cedex, France 

• CEA/Le Ripault Mounts, France 

• Chalmers University of Technology, Sweden 

• Chengdu University, China 

• CNRS Grenoble, France 

• Comenius University, Slovakia 

• Commissariat a l’energie atomique, France 

• Consiglio Nazionale Delle Ricerche, Italy 

• D-wave System Inc. Canada 

• Edison Spa, Milano, Italy 

• Encom Technology Pty Ltd, Sydney, Australia 

• Fugro Airborne Surveys, South Africa 

• Geovista, Sweden 

• Helsinki University of Technology, Finland 

• ICMAB Barcelona, Spain 

• Institute for Superhard Materials, Kiev, Ukrain 

• Institute of Crystallography Moscow, Russia 

• Institute of Radio Engineering and 

Electronics Moscow, Russia


• Lawrence Berkely National Laboratory, CA, 

USA 

• Leiden University, Kamerlingh Onnes 

Laboratorium, The Netherlands 

• Los Alamos National Laboratory, Biophysics 

Group, NM, USA 

• MAI Moscow, Russia 

• Moscow Engineering Physics Institute 

(State University), Russia 

• National Physical Laboratory, Teddington, UK 

• Nederlands Meetinstitut, NMi Van Swinden 

Laboratorium B.V., The Netherlands 

• NIST, Gaithersburg, MD, USA 

• Novosibirsk University, Russia 

• Philips Reseach Lab Eindhoven/NL 

• PicoImages Limited, South Africa 

• SAS Kosice, Slovakia 

• SPEZREMONT, Moscow, Russia 

• Swiss Federal Institute of Technology 

Lausanne, Institute of Applied Optics (IOA), 

Suisse 

• Technical Research Centre of Finland 

• TU Wien, Austria 

• University of Oxford, Department of Physics, 

Sub-department of Particle Physics, UK 

• University of Twente, Faculty of Science and 

Technology, The Netherlands 

• Vienna Institute for Archaeological Science, 

Austria 

Publications 

M. Schmidt, M. Eich, U. Huebner, R. Boucher: 

“Electrooptically tunable photonic crystals” 

Appl. Phys. Lett. 87 (2005) 121110 

M. Grajcar, A. Izmalkov, S. H. W. van der Ploeg, 

S. Linzen, E. Il’ichev, Th. Wagner, U. Hübner, 

H.-G. Meyer, Alec Maassen van den Brink, 

S. Uchaikin, A. M. Zagoskin: 

“Direct Josephson coupling between superconducting 

flux qubits” 

Phys. Rev. B 72 (2005) 020503(R) 

M. Grajcar, A. Izmalkov, E. Il’ichev: 

“Possible implementation of adiabatic quantum 

algorithm with superconducting flux qubits” 

Phys. Rev. B 71 (2005) 144501 

Ya. S. Greenberg, E . Il’ichev, A. Izmalkov: 

“Low-frequency Rabi spectroscopy for a dissipative 

two-level system” 

Europhys. Lett., 72 (2005) 880–886 

Ya. S. Greenberg, I. L. Novikov, V. Schultze, 

H.-G. Meyer: 

“The influence of the second harmonic in the current-phase 

relation on the voltage-current characteristic 

of high-T c DC SQUIDs” 

Eur. Phys. J. B 44 (2005) 57–62 

H.-G. Meyer, R. Stolz, A. Chwala, M. Schulz: 

“SQUID technology for geophysical exploration” 

phys. stat. sol. (c) 2 (2005) 1504–1509 

M. Schubert, T. May, G. Wende, H.-G. Meyer: 

“A Cross-Type SNS Junction Array for a Quantum-Based 

Arbitrary Waveform Synthesizer” 

IEEE Trans. Appl. Supercond. Vol. 15 (2) 829– 

832, 2005 

T. May, V. Zakosarenko, E. Kreysa, W. Esch, 

S. Anders, L. Fritzsch, R. Boucher, R. Stolz, 

J. Kunert, H.-G- Meyer: 

“On-chip integrated SQUID readout for superconducting 

bolometers” 

IEEE Transactions on Applied Superconductivity 

Vol. 15 (2) (2005) 537–540 

W. Krech, D. Born, V. Shnyrkov, Th. Wagner, 

M. Grajcar, E. Il’ichev, H.-G. Meyer, Ya. Greenberg: 

“Quantum dynamic of the interferometer-type 

charge qubit under microwave irradiation” 

IEEE Trans. Appl. Supercond. 15 (2005) 876 

M. Ebel, C. Busch, U. Merkt, M. Grajcar, 

T. Plecenik, E. Il’ichev: 

“Supercurrent-phase relationship of a Nb/InAs 

(2DES)/Nb Josephson junction in overlapping 

geometry” 

Phys. Rev. B 71, 052506 (2005) 

R. Boucher: 

“Sr 2 FeMoO 6+x : Film structure dependence upon 

substrate type and film thickness” 

J. Phys. Chem. Solids, 66 (2005) 1020 

R. Mattheis, K. Steenbeck: 

“Beating the superparamagnetic limit of IrMn in 

F/AF/AAF stacks” 

J. Appl. Phys. 97(2005) 10K107 

S. Questea, S. Dubourg, O. Acher, J.-C. Soret, 

K.-U. Barholz, R. Mattheis: 

“Microwave permeability study for antiferromagnet 

thickness dependence on exchange bias field 

in NiFe/lrMn layers” 

J. Magn. Magn. Mater. 288 (2005) 60–65 

P. A. Warburton, A. R. Kuzhakhmetov, G. Burnell, 

M. G. Blamire, Y. Koval, A. Franz, P. Müller, and 

H. Schneidewind: 

“Fabrication and Characterization of Sub-Micron 

Thin Film Intrinsic Josephson Junction Arrays” 

IEEE Trans. Appl. Supercond. 15 (2005) 237–240 

B. Oswald, K. -J. Best, M. Setzer, M. Söll, 

W. Gawalek, A. Gutt, L. K. Kovalev, G. Krabbes, 

L. Fisher, H. C. Freyhardt: 

“Reluctance motors with bulk HTS material” 

Supercond. Sci. Technol. 18 (2005) S24–S29 

27


28 

W. Gawalek, T. Habisreuther, M. Zeisberger, 

D. Litzkendorf, O. Surzhenko, S. Kracunovska, 

T. A. Prikhna, B. Oswald, L. K. Kovalev, 

W. Canders: 

“Batch-processed melt-textured YBCO with 

improved quality for motor and bearing applications” 

Supercond. Sci. Technol. 17 (2005) 1185–1188 

D. A. Cardwell, M. Murakami, M. Zeisberger, 

W. Gawalek, R. Gonzalez-Arrabal, M. Eisterer, 

H. W. Weber, G. Fuchs, G. Krabbes, A. Leenders, 

H. C. Freyhardt, N. Hari Babu: 

“Round robin test on large grain melt processed 

Sm-Ba-Cu-O bulk superconductors” 


M. Zeisberger, W. Gawalek, G. Giunchi: 

“Magnetic levitation using magnesiumdiboride” 

J. Appl. Phys. 98 (2005) 023905 

J. Bierlich, T. Habisreuther, D. Litzkendorf, 

C. Dubs, R. Müller, S. Kracunovska, W. Gawalek: 

“Growth and investigation of melt-textured 

SmBCO in air for preparation of Sm123 seed 

crystals” 


D. Litzkendorf, T. Habisreuther, J. Bierlich, 

O. Surzhenko, M. Zeisberger, S. Kracunovska, 

W. Gawalek: 

“Increased efficiency of batch-processed melttextured 

YBCO” 


S. Kracunovska, P. Diko, D. Litzkendorf, 

T. Habisreuther, J. Bierlich, W. Gawalek: 

“Oxygenation and cracking in melt-textured 

YBCO bulk superconductors” 


P. Diko, S. Kracunovska, L. Ceniga, J. Bierlich, 

M. Zeisberger, W. Gawalek: 

“Microstructure of top seeded melt-grown YBCO 

bulks with holes” 


T. A. Prikhna, W. Gawalek, N. V. Novikov, 

V. E. Moshchil, V. B. Sverdun, N. V. Sergienko, 

A. B. Surzhenko, L. S. Uspenskaya, R. Viznichenko, 

A. A. Kordyuk, D. Litzkendorf, T. Habisreuther, 

S. Kracunovska and A. V. Vlasenko: 

“Formation of superconducting junctions in MT- 

YBCO” 


E. Bartolome, X. Granados, T. Puig, X. Obradors, 

E. S. Reddy and S. Kracunovska: 

“Critical State of YBCO Superconductors With 

Artificially Patterned Holes” 

IEEE Transactions on Applied Superconductivity 

15 (2005) 2775–2778 

M. Zeisberger, T. Habisreuther, D. Litzkendorf, 

A. Surzhenko and W. Gawalek: 

“Investigation of the structure of melt-textured 

YBCO by magnetic measurements” 


M. Zeisberger, I. Latka, W. Ecke, T. Habisreuther, 

D. Litzkendorf and W. Gawalek: 

“Measurement of the thermal expansion of melttextured 

YBCO using optical fibre grating sensors” 


R. Zboril, L. Machala, M. Mashlan, J. Tucek, 

R. Müller, O. Schneeweiss: 

“Magnetism of amorphous Fe 2 O 3 nanopowders 

synthesized by solid-state reactions” 

phys. stat. sol. (c) 1 (2004) 3710–3716 

R. Müller, R. Hergt, M. Zeisberger, W. Gawalek: 

“Preparation of magnetic nanoparticles with 

large specific loss power for heating applications” 


S. Dutz, W. Andrä, H. Danan, C. S. Leopold, 

C. Werner, F. Steinke, M. E. Bellemann: 

“Remote controlled drug delivery to the gastrointestinal 

tract: investigation of release profiles” 

Biomedizinische Technik 50 (Suppl. 1) (2005) 

601–602 

C. Werner, W. Andrä, T. Kupfer, J. Seilwinder, 

M. E. Bellemann: 

“Out-patient magnetic marker monitoring: evaluation 

of temporal and spatial resolution” 

Biomedizinische Technik 50 (2005) Suppl. Vol. 1, 

Part 1, 605–606 

W. Andrä, M. E. Bellemann: 


tract: optimizing the total system” 

Biomedizinische Technik 50 (2005) Suppl. Vol. 1, 

Part 1, 607–608 

S. Dutz, W. Andrä, R. Hergt, R. Müller, J. Mürbe, 

J. Töpfer, C. Werner, M. E. Bellemann: 

“Magnetic nanoparticles for remote controlled 

drug delivery to the gastrointestinal tract” 

Biomedizinische Technik 50 (Suppl. 1) (2005) 

1555–1556 

W. Andrä, H. Danan, K. Eitner, M. Hocke, 

H.-H. Kramer, H. Parusel, P. Saupe, C. Werner, 

M. E. Bellemann: 

“A novel magnetic method for examination of 

bowel motility” 

Med. Phys. 32 (2005) 2942–2944 

S. Dutz, R. Hergt, R. Müller, M. Zeisberger, 

W. Andrä, M. E. Bellemann: 

“Application of Magnetic Nanoparticles for Biomedical 

Heating Processes”


VDI-Berichte Nr. 1920 – 4 th Internat. Nanotechnology 

Symposium: 229–232 (2005) (Ed.: VDI Wissensforum 

IWB GmbH). 

R. Müller, H. Steinmetz, R. Hergt, M. Zeisberger, 

S. Dutz, W. Gawalek: 

“Magnetic iron oxide nanoparticles for medical 

applications” 

Conference report – Chemical Nanotechnology 

Talks VI, (2005) Ed.: DECHEMA Frankfurt/M. 

M. Zeisberger, S. Dutz, R. Hergt, R. Müller: 

“Magnetic Nanoparticles for Hyperthermia” 

Conference report – Bioinspired Nanomaterials 

for Medicine and Technologies: 62 (2005), Ed.: 

DECHEMA 

R. Hergt, R. Hiergeist, M. Zeisberger, D. Schüler, 

U. Heyen, I. Hilger, W. A. Kaiser: 

“Magnetic properties of bacterial magnetosomes 

as potential diagnostic and therapeutic tools” 


I. Hilger, R. Hergt, W. A. Kaiser: 

“Use of magnetic nanoparticle heating in the 

treatment of breast cancer” 

IEE Proc. Nanobiotechnol. 152 (2005) 33–39 

I. Hilger, R. Hergt, W. A. Kaiser: 

“Towards breast cancer treatment by magnetic 

heating” 


I. Hilger, W. Andrä, R. Hergt, R. Hiergeist, 

W. A. Kaiser: 

„Magnetische Thermotherapie von Tumoren der 

Brust: Ein experimenteller Ansatz“ 

RöFo Fortschr. Röntgenstr. 177 (2005) 507–515 

Presentations (Talks and Posters) 

V. Schultze, A. Chwala, R. Stolz, M. Schulz, 

S. Linzen, H.-G. Meyer, T. Schüler: 

“A SQUID system for geomagnetic archaeometry” 

Proc. 6 th Int. Conf. on Archaeological Prospection 

(Archeo2005), 14–17 Sept. 2005, Rom, pp. 

245–248, poster 

H.-G. Meyer, A. Chwala, R. Stolz, S. Linzen, 

V. Schultze, M. Schulz, T. Schüler: 

„Aktuelle Anwendungen von SQUIDs zur geomagnetischen 

Pospektion“ 

Proc. Tagung Kryoelektronische Bauelemente 

„Kryo’05“, 09–11 Oktober 2005, Bad Herrenalb, 

p. 23, oral presentation 

V. Schultze, R. IJsselsteijn, H.-G. Meyer: 

„Zur Realisierung von SQIFs mit Hochtemperatur-Supraleitern“ 



p. 66, poster 


S. Linzen, T. Schüler, H.-G. Meyer 

„SQUID-System für die geomagnetische Archäometrie“ 



p. 67, poster 

R. IJsselsteijn, V. Schultze, H.-G. Meyer: 

„Thermozyklieren von HTS-SQIFs und -SQUID“ 



p. 96, poster 


S. Linzen, H.-G. Meyer, T. Schüler: 

„A SQUID system for geomagnetic archaeometry“ 

Proc. ISEC ‘05, 05.–09.09.2005, Noordwijkerhout, 

The Netherlands, P-H.08 

V. Schultze, R. IJsselsteijn, H.-G. Meyer: 

“How to puzzle out a good high-T c SQIF?” 

Proc. ISEC ‘05, 05.–09.09.2005, Noordwijkerhout, 

The Netherlands, P-K.06 

U. Huebner, W. Morgenroth, R. Boucher, 

H. G. Meyer, Th. Sulzbach, B. Brendel, 

W. Mirandé, E. Buhr, G. Ehret, Th. Fries, 

G. Kunath-Fandrei, R. Hild: 

“Prototypes of new nanoscale CD-standards for 

high resolution optical microscopy and AFM” 

in Proceedings of the 5 th international euspen 

conference, Montepellier, 185–188, 2005, poster 

U. Huebner, W. Morgenroth, R. Boucher, 

W. Mirandé, E. Buhr, Th. Fries, Nadine Schwarz, 

G. Kunath-Fandrei, R. Hild: 

“Development of a nanoscale linewidth-standard 

for high-resolution optical microscopy” 

in Optical Fabrication, Testing, and Metrology II, 

edited by Angela Duparré, Roland Geyl, David 

Rimmer, Lingli Wang, Proc. SPIE Systems 

Design Jena, Germany, Vol. 5965, (2005), poster 

U. Huebner, R. Boucher, W. Morgenroth, 

M. Schmidt, M. Eich: 

“Fabrication of photonic crystal structures in 

polymer waveguide material” 

Micro & Nano Engineering MNE 2005, (2005), 

poster 

M. Eich, M. Schmidt, U. Huebner, R. Boucher: 

“Electrooptically tunable photonic crystal” 

Proceedings of SPIE Optics and Photonics San 

Diego, California, (2005), 5935–18 

29


30 

G. Wende, M. Schubert, T. May, H.-G. Meyer: 

“Pulse Driving of a Josephson Pulse Quantizer 

for Quantum-Based Arbitrary Waveform Synthesizers, 

Proc. ISEC`05, 05.–09.2005, Noordwijkerhout, 

The Netherlands, P-K.05 

G. Wende, M. Schubert, T. May, H.-G. Meyer: 

“Impulsansteuerung eines Josephson-Impuls- 

Quantisierers für einen Quantensynthesizer 

beliebiger Wellenformen” 

Tagung Kryoelektronische Bauelemente “Kryo’05”, 

09.–11. Oktober 2005, Bad Herrenalb, Poster 

V. Zakosarenko, S. Anders, T. May, R. Boucher, 

H.-G. Meyer, E. Kreysa, N. Jethava, G. Siringo: 

“Time domain multiplexing for superconducting 

bolometers read out by integrated SQUIDs” 

Low Temperature Detectors LTD 2005, Tokio 

(Japan), Poster 

N. Oukhanski, R. Stolz, H.-G. Meyer: 

“Concept of ultra-low-drift and very fast dc 

SQUID readout electronics” 


“Kryo’05”, 09.–11. Oktober 2005, Bad Herrenalb, 

p. 65, Poster 

N. Oukhanski, R. Stolz, H.-G. Meyer: 

“Ultra-low-drift and very fast dc SQUID readout 

electronics” 

Proc. of 7 th European Conference on Applied 

Superconductivity (EUCAS’05), Sept. 11–15, 

2005, Vienna, Austria, P- WE-P3–138 

A. Izmalkov, M. Grajcar, S.H. W. van der Ploeg, 

S. Linzen, T. Plecenik, Th. Wagner, U. Hübner, 

E. Il’ichev, H.-G. Meyer, A. Yu. Smirnov, P. J.Love, 

A. Maassen van den Brink, M. H. S. Amin, 

S. Uchaikin, A. M. Zagoskin: 

“Realization of ferro- and antiferromagnetic coupling 

among superconducting qubits through a 

common Josephson junction” 

“Kryo’05”, 09–11 October 2005, Bad Herrenalb, 

contributed talk 

A. Izmalkov, M. Grajcar, E. Il’ichev, 

S. H. W. van der Ploeg, S. Linzen, Th. Wagner, 

U. Hübner, H.-G. Meyer, A. Yu. Smirnov, 

S. Uchaikin, M. H. S. Amin, 

A. Maassen van den Brink, A. M. Zagoskin: 

“Experimental investigation of coupled flux 

qubits” 

7 th European Conference on Applied Superconductivity 

(EUCAS’05), Sept. 11–15, 2005, 

Vienna, Austria, poster 

S. H. W. van der Ploeg, A. Izmalkov, M. Grajcar, 

E. Il’ichev, S. Linzen, Th. Wagner, U. Hübner, 

H.-G. Meyer, A. Yu. Smirnov, S. Uchaikin, 

M. H. S. Amin, Alec Maassen van den Brink, 

A. M. Zagoskin: 

“Characterization of coupled flux qubits by 

impedance measurement technique” 

ISEC ‘05, 05.09.09.2005, Noordwijkerhout, The 

Netherlands, contributed talk 

S. H. W. van der Ploeg, A. Izmalkov, A. Maassen 

van den Brink, U. Hübner, M. Grajcar, 

S. Uchaikin, S. Linzen, E. Il’ichev, H.-G. Meyer: 

“Realization of strong and controllable anti-ferromagnetic 

coupling between superconducting 

flux-qubits” 


09.–11. October 2005, Bad Herrenalb, contributed 

talk 

S. Anders, T. May, R. Boucher, H.-G. Meyer, 

C. Hollerith, D. Wernicke: 

“Transition-edge sensors manufactured on 4-inch 

wafers for reliable, cost-effective x-ray detectors” 

ISEC ‘05, 05.09.2005, Noordwijkerhout, The 

Netherlands, poster 

S. Anders, R. Boucher, T. May, H.-G. Meyer: 

“Kantenbolometer aus dem Zweischichtsystem 

Mo/AuPd für Röntgendetektoren” 


09.–11. Oktober 2005, Bad Herrenalb, poster 

J. Fassbender, J. McCord, M. Weisheit, 

R. Mattheis: 

“Modifikation der magnetischen Dämpfung in 

Permalloy-Schichten durch Cr-Implantation” 

Vortrag, Verhandlungen Frühjahrstagung DPG, 

28.02.–04.03.2005, MA 27.7 

Ch. Hamann, J. McCord, R. Schäfer, 

L. Schultz, R. Mattheis: 

“Magnetization reversal in CoFe/IrMn exchange 

biased structures” 

Vortrag, Verhandlungen Frühjahrstagung DPG 


J. McCord, R. Mattheis: 

“Asymmetric fixed and rotatable magnetic 

anisotropy at the onset of exchange bias” 

Poster, Verhandlungen Frühjahrstagung DPG, 


J. Fassbender, J. McCord, M. Weisheit, 

R. Mattheis: 

“Increased magnetic damping of Permalloy upon 

Cr implantation” 

International Magnetics Conference, Intermag 

2005, Nagoya, Japan 

J. Fassbender, J. McCord, R. Mattheis, 

K. Potzger, A. Mücklich, J. v. Borany: 

“Doping magnetic materials – tunable properties 

due to ion implantation” 

European Congress on Advanced materials 

and processing, 5.–8.09.2005, Prague, Czech 

Republics 

R. Mattheis, M. Diegel, U. Huebner: 

“Domain Wall motion in narrow spin valve strip 

lines” 

50 th Conference on Magnetism and Magnetic 

Materials, San Jose, California, USA


J. Fassbender, L. Bischoff, R. Mattheis, P. Fischer: 

“Magnetic domains and magnetization reversal of 

ion-induced magnetically patterned RKKY-coupled 

Ni 81 Fe 19 /Ru/Co 90 Fe 10 films” 

50 th Conference on Magnetism and Magnetic 

Materials, San Jose, California, USA 

M. Mans, A. Grib, M. Büenfeld, R. Bechstein, 

F. Schmidl, H. Schneidewind und P. Seidel: 

“Elektrische Untersuchung serieller intrinsischer 

Josephsonkontaktarrays an dünnen Tl 2 Ba 2 Ca- 

Cu 2 O 8+x Schichten auf r-cut Saphir und 20° vizinalem 

LaAlO 3 ” 

Vortrag, Verhandlungen Frühjahrstagung DPG, 

28.02.–04.03.2005, TT 10.11 

M. Büenfeld, R. Bechstein, M. Mans, F. Schmidl, 

A. Grib, H. Schneidewind und P. Seidel: 

“Elektrische Untersuchung serieller intrinsischer 

Josephsonkontaktarrays an dünnen Tl 2 Ba 2 Ca- 

Cu 2 O 8+x Schichten auf r-cut Saphir und 20° vizinalem 

LaAlO 3 ” 

Poster, Verhandlungen Frühjahrstagung DPG, 

28.02.–04.03.2005, TT 23.47 

H. Schneidewind, M. Mans, M. Büenfeld, 

M. Diegel: 

“Misaligned Tl-2212 Thin Films with Different Tilt 

Angles for Intrinsic Josephson Junctions” 

7 th European Conference on Applied Superconductivity 

(EUCAS ‘05), Vienna University of Technology, 

11 to 15 September 2005, Austria 

M. Büenfeld, M. Mans, A. N. Grib, F. Schmidl, 

H. Schneidewind, P. Seidel: 

“Untersuchung intrinsischer Josephsonkontaktarrays 

aus dünnen Tl 2 Ba 2 CaCu 2 O 8+x Schichten auf 

vicinalem LaAlO 3 ” 

Tagung Kryoelektronische Bauelemente, 09.–11. 

Oktober 2005, in Bad Herrenalb 

A. Assmann, J. Dellith, M. Wendt: 

“Electron excited L X-ray spectra of the elements 

24


32 

W. Gawalek, T. A. Prikhna, L. K. Kovalev, 

G. Giunchi, M. Zeisberger: 

“Bulk MgB 2 -Superconductors: A new material for 

Energy technologies?” 

Keynote talk JAPMED´4: 4 th Japanese-Mediterranean 

Workshop on Applied Electromagnetic 

Engineering for Magnetic, Superconducting and 

nano materials, Cairo, Egypt, September 17–20, 

(2005), p. 19 

T. A. Prikhna, Ya. M. Savchuk, W. Gawalek, 

N. V. Sergienko, V. E. Moshchil, P. A. Nagorny, 

V. B. Sverdun, A. V. Vlasenko, L. K. Kovalev, 

K. L. Kovalev, V. T. Penkin: 

“High-pressure high-temperature synthesis of 

Nanostructural magnesium diboride for electromotors 

working at liquid hydrogen temperatures” 

Proceedings of International Conference “Modern 

Materials Science: Achievements and 

Problems”, September 26–30, (2005), Kiev, 

Ukraine 

T. A. Prikhna, W. Gawalek, Ya. M. Savchuk, 

N. V. Sergienko, V. E. Moshchil, M. Wendt, 

M. Zeisberger, T. Habisreuther, S. X. Dou, 

S. N. Dub, V. S. Melnikov, Ch. Schmidt, J. Dellith 

and P. A. Nagorny: 

“Formation of magnesium diboride-based materials 

with high critical currents and mechanical 

characteristics by high-pressure synthesis” 

EUCAS 2005, Sept. 11–15, 2005, Vienna, Austria 

T. A. Prikhna, W. Gawalek, V. B. Sverdun, 

Ya. M. Savchuk, A. V. Vlasenko, X. Chaud, 

J. Rabier, A. Joulain, V. E. Moshchil, 

P. A. Nagorny, N. V. Sergienko, V. S. Melnikov, 

S. N. Dub, T. B. Serbenyuk: 

“Improvement of MT-YBCO properties by oxygenation 

and treatment under pressure” 

Proceedings of International Conference “Modern 

Materials Science: Achievements and Problems”, 

September 26–30, (2005), Kiev, Ukraine 

M. Eisterer, S. Haindl, M. Zehetmayer, 

R. Gonzalez-Arrabal, H. W. Weber, 

D. Litzkendorf, M. Zeisberger, T. Habisreuther, 

W. Gawalek, L. Shlyk, G. Krabbes: 

“Limitations for the Trapped Field in Large Grain 

YBCO Superconductors” 

PASREG 2005, 5 th International Workshop on 

Processing and Applications of Superconducting 

(RE)BCO Large Grain Materials, October 21–23, 

2005, Tokyo, Japan 

R. Müller, H. Steinmetz, M. Zeisberger, 

Ch. Schmidt, S. Dutz, R. Hergt, W. Gawalek: 

“Precipitated iron oxide particles by cyclic 

growth” 

6. Deutschen Ferrofluid-Workshop, 19.–22. 7. 05, 

Saarbrücken 

S. Dutz, R. Hergt, J. Mürbe, J. Töpfer, R. Müller, 

M. Zeisberger, W. Andrä, M. E. Bellemann: 

“Preparation of water based dispersions of 

magnetic iron oxide nanoparticles in the mean 

diameter range of 15 to 30 nm” 

6 th German Ferrofluid-Workshop, 19.–22. 7. 05, 

Saarbrücken 

S. Dutz, N. Buske, R. Hergt, R. Müller, M. Zeisberger, 

P. Görnert, M. Röder, M. E. Bellemann: 

“Magnetic Nanoparticles for biomedical heating 


6. Deutschen Ferrofluid-Workshop, 19.–22. 7. 05, 

Saarbrücken, poster 

R. Müller, H. Steinmetz, R. Hergt, Ch. Schmidt, 

M. Zeisberger, W. Gawalek: 

“Preparation of Iron Oxide Nanoparticles for 

Heating Applications” 

6 th Colloq. of DFG-Priority Program “Colloidal 

magnetic fluids”, Benediktbeuern 25.–28. 9. 05 

N. Palina, H. Modrow, R. Müller, J. Hormes, Ya. 

B. Losovyj: 

“Final results of X-ray absorption spectroscopy 

and resonant photo-emission investigations on 

doped Bariumhexaferrite nanoparticles” 


magnetic fluids”, Benediktbeuern 25.–28.9.05 

S. Dutz, W. Andrä, H. Danan, C. S. Leopold, 

C. Werner, F. Steinke, M. E. Bellemann: 


tract: investigation of release profiles” 

Jahrestagung der Deutschen Gesellschaft Biomedizinische 

Technik, Nürnberg (14.–17.09. 2005) 

S. Dutz: 

„Magnetische Nano-Verbundwerkstoffe für die 

intrakorporale Erwärmung in der Medizin“ Jahreskolloquium 

des Institutes für Keramische 

Werkstoffe, Bergakademie Freiberg (20.–21.10. 

2005). 

S. Dutz, R. Hergt, R. Müller, M. Zeisberger: 

“Magnetic nanoparticles for hyperthermia” 

Mitarbeitertreffen des DFG-Schwerpunktprogramms 

“Kolloidale magnetische Flüssigkeiten”. 

Erlangen (01.–02.12.2005). 

S. Dutz, R. Hergt, M. Zeisberger, M. Kettering, 

I. Hilger, W. A. Kaiser: 

“Magnetic hyperthermia with multivalent magnetic 

nanoparticles” 


magnetic fluids”, Benediktbeuern 25.–28.9.2005 

J. Dellith: 

„Zur röntgenmikroanalytischen Werkstoffcharakterisierung 

mittels niederenergetischer M-Strahlung“ 

Kolloquium des IKW der TU Freiberg, Oktober 

20–21, 2005


J. Bierlich, T. Habisreuther, M. Zeisberger, 

D. Litzkendorf, S. Kracunovska, W. Gawalek: 

„Multi-Seeding von massiven YBCO Supraleitern“ 

SDYN-Treffen, 07.–08.07.2005, Jena, Deutschland 

J. Bierlich, T. Habisreuther, S. Kracunovska, 

W. Gawalek, E. Müller, F. Schirrmeister: 

“Modifizierte Oberflächenbekeimung von schmelztexturierten 

YBa 2 Cu 3 O 7-x -Supraleitern” 

IKW – Hauskolloquium, 20.–21.10.2005, Freiberg, 

Deutschland 


M. Zeisberger, S. Kracunovska, W. Gawalek: 

“Multi-seeding for single domain melt-textured 

YBCO” 

ISS 2005, 18 th International Symposium on 

Superconductivity, October 24–26, 2005, Tsukuba, 

Japan 


M. Zeisberger, S. Kracunovska, W. Gawalek: 

“Multi-seeding for single domain melt-textured 

YBCO” 





Invited talks 

A. Izmalkov, M. Grajcar, E. Il’ichev, 

S. H. W. van der Ploeg, S. Linzen, Th. Wagner, 

U. Hübner, H.-G. Meyer, A. Yu. Smirnov, 

S. Uchaikin, M. H. S. Amin, 

Alec Maassen van den Brink, 

A. M. Zagoskin: 

“Experimental and theoretical investigation of 

multiqubit systems” 

International Workshop on Physics of Superconducting 

Phase Shift Devices, 2–5 April 2005, 

Ischia, Italy 

A. Izmalkov, M. Grajcar, E. Il’ichev, Th. Wagner, 

U. Hübner, N. Oukhanski, T. May, H.-G. Meyer, 

A. Yu. Smirnov, A. Maassen van den Brink, 

M. H. S. Amin, A. M. Zagoskin, Ya. S. Greenberg: 

“Macroscopic quantum effects in a flux qubit” 

Seminar at Institute of Solid State Physics, 11 

May 2005, Chernogolovka, Russia 

E. Il’ichev, M. Grajcar, A. Izmalkov, Th. Wagner, 

S. Linzen, T. May, H. E. Hoenig, H.-G. Meyer, 

D. Born, W. Krech, A. Smirnov, S. Uchaikin, 

A. Zagoskin: 

„Supraleitende Qubits auf dem Weg zum Quantenrechner“ 

Deutschen Physikalischen Gesellschaft (German 

Physical Society), Berlin, Germany, March 4–9, 



S. Linzen, T. May, U. Hübner, H. E. Hoenig, 

H.-G. Meyer, M. H. S. Amin, A. Maasen van den 

Brink, A. Smirnov, S. Uchaikin, A. Zagoskin: 

“Continuous Impedance Measurements of a 

Superconducting Flux Qubit” 

American Physical Society, Los Angeles, USA, 

March 21–25, 2005 



H.-G. Meyer, A. Maasen van den Brink, 

A. Smirnov, S. Uchaikin, A. Zagoskin: 

“Impedance Measurement Technique for Investigation 

of Superconducting Qubits” 

Pishift conference, Ischia (Naples), Italy, 2–5 April 


E. Il’ichev: 

“Radio-Frequency Method for Investigation of 

Quantum Properties of Superconducting Structures” 

International Summer School and Conference on 

Arrays of Quantum Dots and Josephson Junctions 

Kiten, Bulgaria, 9 th –24 th June, 2005 



H.-G. Meyer, A. Maasen van den Brink, 

A. Smirnov, S. Uchaikin, A. Zagoskin: 

“Radio-Frequency Method for Investigation of 


International ULTRA-1D STREP Workshop 

Quantum Coherence and Decoherence at the 

Nanoscale (Corfu, Greece) 28 August–2 September 



“Radio-Frequency Technique for Investigation of 


The Mesoscopic Quantum Physics Conference 

(Aussois, France) 05–09 October 2005 


“Radio-Frequency Technique for Investigation of 


The 5 th International Argonne Fall Workshop on 

the Nanohysics Argonne, USA, 13–18 November 

R. Mattheis: 

„Grundprinzipien von Sensoren auf der Basis 

des Magnetowiderstandseffektes und deren 

Anwendungsfelder in der Automobil- und Automatisierungstechnik 

sowie in der hochempfindlichen 

Magnetfeldsensorik“, 

Vortrag HdT Essen, Magnetische Erkennung 

von Position und Bewegung, Essen, 8. und 9.06. 


33


34 

R. Mattheis: 

„Multiturnsensor mit GMR“ 

Vortrag 8. Sympsoium „Magnetoresistive Sensoren 

Grundlagen-Herstellung-Anwendungen“, 

Wetzlar, 8. und 9.03.2005 

M. Wendt: 

„Mikrostrukturcharakterisierung mittels Rasterelektronen- 

und Rasterkraft-Mikroskopie“ 

Kolloquium aus Anlass des 60. Geburtstages von 

Prof. Dr. Ludwig Josef Balk, Wuppertal, May 30, 


M. Wendt: 

„Qualitative Röntgenmikroanalyse mit Si(Li)- 

Detektoren“ 

RÖNTEC – Kundenschulung, Bad Saarow, June 

14–16, 2005 

M. Wendt: 

„Zur Systematik der weichen Röntgenemissionsspektren“ 

PTB-Kolloquium, Berlin, September 22, 2005 

W. Gawalek T. Habisreuther, M. Zeisberger, 

D. Litzkendorf: 

„Magnetic levitation with Bulk YBCO and MgB 2 

Superconductors” 

„8 th International Symposium on Magnetic Suspension 

Technology“, Dresden, Germany, September 

26–28, (2005), p.114 

K. L. Kovalev, S. M.-A. Koneev, V. N. Poltavets, 

W. Gawalek: 

“Magnetically Levitated High-Speed Carriages on 

the Basis of Bulk Elements” 

“8 th International Symposium on Magnetic Suspension 

Technology”, Dresden, Germany, September 

26–28, (2005), p.51 

T. Habisreuther: 

„VSM – Vibrating Sample Magnetometry – Einsatz 

im IPHT Jena“ 

Uni Potsdam, Germany, June 1, 2005 

T. Habisreuther: 

“Processing, Characterisation and Application of 

Batch Processed and Multi-Seeded Single 

Domain Melt-Textured YBCO” 





R. Müller: 

„Magnetit – Renaissance eines alten Magnetwerkstoffs“ 

6 th Colloq. of DFG-Priority Program „Colloidal 

magnetic fluids“, Benediktbeuern 25.–28.9.05 

R. Müller: 

„Eigenschaften magnetischer Eisenoxidpartikel“ 

Arbeitsgruppenseminar „Grundlagen“, Klinik für 

Innere Medizin II, FSU Jena, 12.10.05 

Th. Klupsch: 

“Prediction of macromolecular units and optimum 

crystallization conditions by static and dynamic 

light scattering” 

Crystallization Course CC 2005, October 10–12, 

2005, Nove Hrady, Czech Republik 

Th. Klupsch: 

“Understanding the protein solubility: classical 

concepts and novel ideas” 

Crystallization Course CC 2005, October 10–12, 

2005, Nove Hrady, Czech Republik 

Patents 

V. Schultze, W. Andrä, K. Peiselt: 

„Vorrichtung und Verfahren zur Lokalisierung 

eines Gerätes“ 

DE 10 2005 051 357.3 (25.10.2005) 

R. Müller, H. Steinmetz, W. Gawalek: 

„Verfahren zur Herstellung von nanokristallinen 

magnetischen Eisenoxidpulvern“ 


W. Andrä, M. E. Bellemann, H. Danan, S. Dutz, 

S. Liebisch, R. Schmieg: 

„Kapsel zum Freisetzen von in ihr befindlichen 

Wirkstoffen an definierten Orten in einem Körper“ 

PCT/DE 2005–001086 (15.6.2005) 

W. Andrä, R. Hergt, I. Hilger, W. A. Kaiser, 

D. Spitzer: 

„Vorrichtung zur zielgerichteten Erwärmung“ 


K.-U. Barholz, M. Diegel, R. Mattheis, G. Rieger, 

J. Hauch: 

„Stromsensor zur galvanisch getrennten Gleichstrommessung“ 


Membership 

Prof. Dr. H. E. Hoenig 

Beirat Institut für Mikroelektronik 

und Mechatronik Ilmenau 

Beirat Forschungszentrum für Medizintechnik 

und Biotechnologie e. V. 

Bad Langensalza 

Scientific advisor of the Materials Science 

Institutes CSIC (Spain) 

Auswahlgremium Forschungspreis 

des Thüringer Kultusministeriums 

Vorstandsvorsitzender im Verein Beutenberg 

Campus e. V. 

Vorstandsvorsitzender der SUPRACON AG 

Scientific board of WOLTE and CRYO


Dr. R. Mattheis 

Editorial Board IEEE Transactions on Magnetics 

Mitglied des FA 9.4 der ITG 

Mitglied des Wissenschaftlichen Beirats der 

Tagung: „Sensoren und Sensorsysteme 2006“ 

Freiburg/Breisgau 

Prof. Dr. M. Wendt 

Mitwirkung im Organisationskomitee der EDO- 

Tagung 

Prof. W. Gawalek 

Head of SCENET-2 Working Group “Rotating 

HTS Machines” 

International Steering Committee JAPMED´4: 4 th 

Japanese-Mediterranean Workshop on Applied 

Electromagnetic Engineering for Magnetic, 

Superconducting and Nano Materials, Cairo, 

Egypt, September 17–20, (2005) 

Dr. T. Habisreuther 

Arbeitsgruppe K184 Supraleiter der DKE und 

TC90 WG10 

Lectures 

Prof. H. E. Hoenig 

Vorlesung WS 04/05, Quantencomputing 

Vorlesung SS 2005, Quantencomputing 

Prof. M. Wendt 

Vorlesung “Einführung in die Analytische Elektronenmikroskopie” 

WS 2004/2005 sowie 2005/2006 an der FH Jena 

Dr. H.-G. Meyer 

Vorlesung SS 2005, Supraleiterelektronik 

Vorlesung WS 2005/2006, Supraleitende Quanteninterferometer 

(SQUID) und ihre Anwendungen 

Dr. H. Schneidewind 

5 Vorlesungen in „Festkörperphysik für Werkstofftechniker“ 

von Prof. F. Schirrmeister 

Vorlesung an der FH Jena, WS 2005/2006 

Dr. H. Schneidewind 

“Metallphysik” 

Vorlesung an der FH Jena im SS 2005 


„Sonder- und Verbundwerkstoffe“ 

Vorlesung an der FH Jena, WS2004/2005 

Vorlesung an der FH Jena, WS2005/2006 


„Festkörperphysik für Werkstofftechniker“ 

von Prof. F. Schirrmeister 

Vorlesung an der FH Jena, WS2004/2005 

Vorlesung an der FH Jena, WS2005/2006 

PhD Thesis 

Andrei Izmalkov: 

“Macroscopic quantum effects in a flux qubit” 

18.05.2005, Moscow Engineering Physics Institute 

Silvia Kracunovska: 

“The influence of preparation parameters on 

microstructure and properties of YBCO bulk 

superconductors” 

Technische Universität Kosice, Slowakische 

Republik, 20.09.2005 

Diploma Thesis 

André Krüger: 

„Entwurf, Aufbau und Inbetriebnahme einer 

mehrkanaligen, hochauflösenden 24-Bit Analog- 

Digital-Wandlerkarte für ein modulares Datenerfassungssystem“, 

22.03.2005, Fachhochschule 

Jena. 

Michael Starkloff: 

„Entwicklung und Aufbau eines mikroprozessorgesteuerten 

Messsystems zur Gleichspannungskalibrierung 

von Fluke-Normalen mit dem Josephson-Primärnormal“, 

22.03.2005, Fachhochschule 

Jena. 

Laboratory Exercises 

H. Köbe 18 Wochen, Praktikumssemester FH 

Jena 

Praktikums- 

Dominique Schmidt 18 Wochen, 

semester FH Jena 

Herr Oliver und Joachim Müller, Herr Jens Bartelt 

und Felix Oertel, zweiwöchentliches Seminarfach 

der Spezialschule Carl Zeiss, Jena 

Christopher Schmidt 

“Herstellung und magnetische Eigenschaften von 

Eisenoxidpartikeln durch Fällung 

FH Jena 

Events/Exhibitions 

„Eiskalte Energie für Europa – Supraleiter und 

der Traum vom Schweben“ 

„International Superlife Exhibition“ 

Goethe-Galerie Jena, Jena, Germany, June 29– 

July 2, (2005) 

SCENET-2 Workshop “Superconducting Electric 

motors with HTS”, Jena, Germany, April 11–13, 

(2005) 

35


Physik-Ausstellung „Zeit, Licht, Zufall – Physik 

seit Einstein“ 

Highlights der Physik 2005, 13.–18.06.2005, 

Berlin, Deutschland 

Präsentation „Magnetschweben-Levitator“ 

Siemens Familien-Tag 2005, 02.07.2005, Nürnberg, 

Deutschland 

Präsentation „Supraleitung-Schwebendes Logo“ 

SOLVAY Familientag, 02.09.2005, Hannover, 

Deutschland 

Präsentation „Supraleitung-Levitation“ 

Sternstunden. Lange Nacht der Wissenschaften 

Jena, 18.11.2005, Jena, Deutschland 

Studioexperiment „Supraleitung-Levitation“ in der 

TV-Sendung Galileo 

Gesendet am 14.10.2005 bei ProSieben 

Awards 

EMAS young scientists award an Dipl.-Ing. (FH) 

Andy Scheffel 

New Equipment 

Ion-beam-etching-equipment for structuring of 

high T c -superconductors at low temperatures 

36

OPTIK / OPTICS 

2. Optik / Optics 

Leitung/Head: Prof. Dr. H. Bartelt 

hartmut.bartelt@ipht-jena.de 

Optische Fasern Mikrooptik Optische Mikrosysteme 

Optical Fibers Microoptics Optical Microsystems 

Leitung/Head: Leitung/Head: Leitung/Head: 

Dr. J. Kirchhof Dr. H.-R. Müller Prof. Dr. R. Willsch 

johannes.kirchhof@ipht-jena.de hans.rainer.mueller@ipht-jena.de reinhardt.willsch@ipht-jena.de 

Mikrostrukturtechnik 

Micro Structuring Technology 

Dr. S. Schröter 

siegmund.schroeter@ipht-jena.de 

Mitarbeiter des Bereiches Optik 2005 / Staff of the Optics Division in 2005. 

2.1 Übersicht 

Das zentrale Arbeitsgebiet des Forschungsbereichs 

betrifft „Optische Fasern und Faseranwendungen“. 

Die vom Kuratorium des IPHT im 

Jahr 2005 eingesetzte Strukturkommission hat 

die besondere wissenschaftliche und technologische 

Position des IPHT auf diesem Gebiet hervorgehoben 

und eine weitere Stärkung dieser 

Arbeitsfelder empfohlen. 

2.1 Overview 

The main focus of the activities within the Optics 

division is on optical fibres and fibre applications. 

The structure commission, which was established 

for advising future focusing of activities 

within the IPHT, has emphasized the special scientific 

and technological competence of the IPHT 

in this field and has recommended a further 

strengthening of this research direction. 

37


Characterisation of high 

precision multicore fibre 

optic waveguide arrays: 

cross section of an array 

of 61 waveguides and light 

propagation patterns. 

Demonstrator of an optical 

add-drop-multiplexer 

(OADM) based on a photosensitive 

planar technology 

38 

Thermal elongation measurement of 

melt-textured YBCO in cryogenic temperature 

range down to 10 K using a 

fibre Bragg grating strain sensor array 

(sensors attached in the three principal 

axes of the anisotropic sample).


Ein wichtiges internationales Forum zur Diskussion 

von modernen Sensoranwendungen optischer 

Fasern war die 17. Optical Fibre Sensors 

Konferenz (OFS) in Brügge/Belgien im Mai 2005, 

an der das IPHT sowohl organisatorisch als auch 

inhaltlich maßgeblich mitwirkte (Prof. Reinhardt 

Willsch und Dr. Wolfgang Ecke als Conference 

Chairs). Das IPHT war mit fünf wissenschaftlichen 

Beiträgen einschließlich einem eingeladenen 

Vortrag (Prof. Hartmut Bartelt) und einem 

viel beachteten Ausstellungsstand vertreten, der 

unsere starke Stellung auf diesem Forschungsgebiet 

deutlich machte. Die internationale 

Rekordbeteiligung von ca. 500 Teilnehmern aus 

mehr als 40 Ländern an dieser seit 1983 stattfindenden 

Konferenz zeigte generell das wachsende 

Interesse an Anwendungen optischer Fasern 

in der Sensor- und Messtechnik. Dieser internationalen 

Entwicklung folgte auch die Ausgründung 

zu Fasergitter-Sensorkomponenten unter 

dem Namen FBGS Technologies GmbH aus dem 

IPHT gemeinsam mit einer belgischen Partnerfirma 

im Oktober 2005. Die technischen Grundlagen 

zu diesem Arbeitsfeld, nämlich die Möglichkeit 

der Erzeugung von Faser-Bragg-Gittern mit 

einem einzelnen Laserpuls während des Faserziehens, 

wurde dazu im vergangenen Jahr weiter 

ausgebaut. Die Herstellung von solchen Gittern 

mit bis zu 50% Reflexion (Typ I) demonstriert die 

weltweit führende Rolle des IPHT und seiner 

Ausgründung in dieser Technologie. Mit dem Firmenstandort 

im Technologie- und Innovationspark 

am Campus Beutenberg in Jena ist auch 

zukünftig die Basis für eine enge Zusammenarbeit 

mit dem IPHT gesichert. Anwendungsfelder 

der Arbeiten des IPHT betrafen im Sensorbereich 

im vergangenen Jahr vor allem temperaturbeständige 

faseroptische Bragg-Gitter-Sensoren 

für das Turbinen- und Triebwerksmonitoring, 

Fasergitter-Sensornetzwerke für die strukturintegrierte 

Zustandsüberwachung in der Bahntechnik 

und in Windenergieanlagen sowie opto-chemische 

Fasersensorsysteme für die in-situ- 

Gewässeranalytik. Die Entwicklung neuartiger 

Fasern etwa unter Nutzung von Mikro- und Nanostrukturen, 

die Weiterentwicklung photonischer 

Kristallfasern und Arbeiten zu temperaturbeständigen 

Coatings bildeten dazu einen wichtigen 

technologischen Hintergrund. 

Die Arbeiten zu optischen Faserlasern finden 

zunehmendes Anwendungsinteresse und wurden 

insbesondere unter Aspekten speziell strukturierter 

und dotierter Faserkerne zur Optimierung 

der Stabilität und der Pumpeffizienz weitergeführt. 

Die Aktualität dieses Forschungsgebietes 

zeigte sich auch auf einem Workshop des 

OptoNet Clusters, „Neue Laserstrahlquellen“, der 

im Mai 2005 mit ca. 100 Teilnehmern am IPHT 

organisiert und veranstaltet wurde. Kompetenz 

zu strukturierten Wellenleitern konnte erfolgreich 

auch für Sensoranwendungen in speziellen planaren 

Strukturen genutzt werden. 

A major international forum in 2005 for the discussion 

of modern sensor applications of optical 

fibres was the 17 th Optical Fibre Sensors Conference 

(OFS) in May 2005 in Bruges (Belgium) with 

major organizational and scientific involvement of 

the IPHT (Prof. Willsch as technical chair and Dr. 

Ecke as program chair). The IPHT took part in 

this conference with 5 presentations including an 

invited talk (Prof. Hartmut Bartelt) and a well-recognized 

exhibition booth indicating its strong 

position in this research field. The record international 

participation (approx. 500 participants from 

40 countries) in this conference of a series started 

in 1983 underlines the growing interest in 

such modern applications of optical fibres. Following 

such demands for applications, the IPHT 

became involved (together with a Belgian partner) 

in the founding of a new company for the 

development and application of draw tower fibre 

gratings in October 2005 (FBGS Technologies). 

The technological basis of inscribing fibre Bragg 

gratings during the fibre drawing process with a 

single laser pulse has been further developed in 

2005. The making of such gratings (type I) with a 

reflection efficiency of up to 50% has demonstrated 

the international leading competence in 

this technology of the IPHT and of the newly 

founded company. The headquarters of the 

FBGS company being placed at the Beutenberg 

campus in Jena ensures future close cooperation. 

Investigations into sensor applications of optical 

fibres covered especially temperature-stable fibre 

Bragg grating sensor systems for turbine and 

engine monitoring, fibre grating sensor networks 

for integrated diagnosis in train systems and in 

wind energy converters, and opto-chemical sensors 

for in-situ water analysis. 

The development of new types of fibres with 

micro- and nanostructures, developments for 

photonic crystal fibres and activities for coatings 

with high temperature stability were important 

cornerstones for these activities. 

The applications of fibre lasers are gaining growing 

interest and have been pursued with regard to 

specially structured and doped fibre cores, e.g. 

for optimization of pumping efficiency and stability. 

The general interest in this research field 

became obvious also by strong participation (15 

scientific presentations, 100 participants) in a 

workshop on new laser sources held at the IPHT 

in cooperation with the OptoNet cluster. The competence 

in structured waveguides was additionally 

exploited for sensor applications in specific planar 

waveguides. 

The results presented in this report indicate that 

optical fibres indeed offer attractive research subjects 

for the future and also promise fruitful applications 

jointly with the complementary research 

field of photonic instrumentation within the IPHT. 

39

Die nachfolgend präsentierten Ergebnisse in diesem 

Jahresbericht machen die hohe Attraktivität 

der Forschung zu optischen Fasern und Faseranwendungen 

deutlich und bieten in Kombination 

mit dem komplementären Arbeitsgebiet zur 

photonischen Instrumentierung im IPHT breite 

zukünftige Anwendungsmöglichkeiten. 


40 

2.2. Scientific Results 

2.2.1 Flame hydrolysis technique (FHD) 

for the preparation of advanced 

optical materials 

(C. Aichele, St. Grimm, M. Köhler, 

K. Schuster) 

The flame hydrolysis technique allows the production 

of highest quality silica. This material is 

primarily used for planar optical waveguide 

devices and components or for the deposition of 

substrate tubes by OVD (Outside Vapor Deposition). 

To utilize the potential of this technology we 

are engaged in new applications. 

The recent concentration of microlithography on 

an excitation wavelength of 193 nm requires an 

improvement of the optical materials and devices 

used. 

For high power density and excellent replication 

quality, materials are necessary which provide 

special, very well-defined properties in terms of 

optical quality as well as type and distribution of 

the dopant hydrogen. The flame hydrolysis technique 

enables the preparation of a high-quality 

quartz glass material combined with the implementation 

of different dopant distributions in a 

wide range. 

Fig. 2.1: FHD-configuration. 

A further miniaturization of the structure at the 

same excitation wavelength can be achieved by 

what is known as immersion lithography. Aqueous 

fluids (immersions) with a still higher refractive 

index than standard materials and good optical 

transparency are particularly suitable for 

these processes. 

By flame hydrolysis it is possible to prepare highly 

pure, oxidic particles with a main size of about 

5–10 nm and a narrow particle size distribution. 

These oxidic materials can be used as additives 

to water to increase its refractive index for application 

as an immersion medium. 

Figure 2.1 shows the burner configuration used 

for the FHD technique. 

2.2.2 Materials for fibre lasers: Preparation 

and properties 

(S. Unger, A. Schwuchow, S. Grimm, 

V. Reichel, J. Kirchhof) 

Recently, the performance of rare earth doped 

high-power silica fibre lasers has been dramatically 

increased with output powers beyond 1 kW, 

high efficiency and excellent beam quality. 

This progress is due to new design concepts 

such as non-symmetrical double clads and large 

mode area core structures, but also by careful tailoring 

of the material properties. Extreme power 

load and complicated fibre structures make high 

demands on preparation technology and materials. 

However, up to now still little is known about 

the influence of the material and the preparation 

technology on the laser efficiency. 

Here, the absorption and emission properties of 

silica based ytterbium doped preforms, made by 

Modified Chemical Vapor Deposition (MCVD) 

and solution doping, and of the drawn fibres were 

investigated in dependence on the atmosphere 

during the preform collapsing. 

The preparation was carried out under oxidizing 

and reducing conditions (helium/carbon monoxide/hydrogen). 

The absorption measurements on 

preforms and fibres with nominally identical compositions 

have shown the following results: 

– All Yb doped preform samples show the typical 

Yb 3+ absorption in the wavelength region 

between 800 and 1100 nm, and the absorption 

coefficient is not remarkably changed by modifications 

during the preparation process.


Fig. 2.2: Preform absorption spectra in the UV/VIS 

region. 

– However, changes are observed in the UV/VIS 

region. With an increasingly reducing effect of 

the collapsing atmosphere (He

2.2.4 Photonic crystal fibres for innovative 

applications and devices 

(J. Kobelke, K. Schuster, J. Kirchhof, 

A. Schwuchow, K. Mörl, K. Oh) 


42 

Photonic crystal fibres (PCFs) are commonly 

interesting as transmission media over long distances 

for their specific light propagation behaviour. 

However, the promising application potential 

of photonic crystal fibres also takes effect in various 

novel devices, e.g. PCFs with defect super 

lattice structure and PCF-based NxN fibre couplers. 

Such PCF couplers have a power stability 

advantage, because they can be manufactured 

without any dopants in the basic silica. Moreover, 

the transmission behaviour is mostly effected by 

air hole confinement light propagation, so a high 

numerical aperture is possible. Typical power limitations 

of polymer-clad fibre can be avoided by 

the air-clad design. 

We prepared special large mode area PCFs by 

variation of the geometric cross section design 

parameters. They were changed by introduction 

of a flexible defect in the lattice structure. The 

new defect design consists of the central air hole, 

surrounded by a holey germanium-doped silica 

ring. It provides a large-area annulus-mode light 

propagation and a chromatic dispersion with low 

slope ~0.05 ps/km nm 2 at 1550 nm. 

Fig. 2.4: Calculated dispersion curves of fundamental 

modes of different d core /Λ core of the super 

lattice PCF. Inset: fibre micrograph. 

PCFs with air-clad design are interesting components 

for optical devices. 2×2 and 4×4 multimode 

air-clad holey fibre couplers were prepared 

at the Gwangju Institute of Science and Technology 

(GIST), South Korea, based on IPHT-manufactured 

PCFs. The couplers were fabricated by 

a novel fusion tapering technology, starting from 

an air-clad fibre with a core diameter of about 

130 µm and a very high air fraction of the holey 

clad ring. The couplers thus fabricated show a 

high port-to-port coupling uniformity over a wide 

spectral range from 800 nm to 1650 nm. Due to 

the absence of power-limiting low refractive index 

polymer materials to achieve the high numerical 

aperture, the device shows a strong potential for 

future high-power applications. 

Fig. 2.5: Scheme of the 4×4 coupler, micrograph 

of the used air-clad index-guided PCF and lateral 

segments of the 2×2 coupler. 

2.2.5 Loss measurements at silica fibres 

for cladding pumped applications 

(S. Jetschke, A. Schwuchow) 

Silica fibres with rare-earth-doped cores for laser 

or amplifier applications are often claddingpumped 

to benefit from commercial high-power 

pump diodes. Thereby, losses of pump power 

may occur in the cladding material itself or in the 

adjacent coating having a refractive index lower 

than silica. We investigated this attenuation in silica 

fibres of diameter 125 µm (without core), 

drawn from F300 rods and coated with different 

materials (see Tab. 2.1). 

The loss measurements were done by two different, 

but well-known methods: 

1. With the cut-back method, the loss spectra 

are calculated from transmission measurements 

in the 300–1700 nm wavelength range 

(Halogen lamp, NA 0.25) in a long (>60 m) 

and a shortened fibre (10 m). Although the 

fibre NA is not fully illuminated, the characteristic 

absorption bands of the coating materials 

are clearly seen (Fig. 2.6). 

Fig. 2.6: Loss spectra of coated silica fibres, 

measured by the cut-back method.


Coating material NA Layer Cut-back method: OTDR: 

(coated thickness Loss [dB/km] Loss [dB/km] 

silica fibre) [µm] 

800nm 1310nm 1550nm 850nm 1310nm 1550nm 

Silicone RT601 0.358 50 20 25 250 13 29 n.m. 

Ormogel HG-Li-V-T 0.410 5 25 51 150 23 37 (70) 

1D3-63 (Acrylate) 0.404 50 34 59 180 (50) 75 n.m. 

Luv PC 373 (Acrylate) 0.447–0.127 50 9 17 60 5 16 45 

Teflon AF 0.606 5–10 9 7 8 4 5 6 

Tab. 2.1: Loss in silica fibres with different coating materials, measured by the cut-back method and by 

OTDR (n.m. = not measurable, because of limited dynamic range of OTDR; cut-back method works without 

limitation of measurable loss). 

2 With the Optical Time Domain Analysis 

(OTDR), the loss can be evaluated with a spatial 

resolution of some meters, but only at 

selected wavelengths. Fibre lengths >60 m 

can be analysed; the measurements should be 

executed from both fibre ends. One of the 

available devices applies a wavelength of 

850nm and illuminates the fibre under test with 

NA 0.20 (spot size 50 µm); another device for 

1310 nm and 1550 nm implements NA 0.10 

(spot size 10 µm). 

Both methods supplement each other and are 

suitable especially for the comparison of losses 

in fibres with different coatings, but equal fibre 

diameters. 

The results obtained with both methods are compared 

in Tab. 2.1 (the wavelengths are determined 

by the OTDR devices) and indicate a sufficient 

consistency. 

The low loss and the high NA achieved with the 

Teflon AF coating, as well as the absence of 

additional absorption bands (apart from OH 

absorption) are particularly advantageous for 

cladding pumping. But the Teflon layer that can 

be implemented is too thin for many applications. 

The low-index Acrylate Luv 370–444, but also Silicone 

RT601 provide a moderate pump loss and 

an adequate layer thickness. However, characteristic 

absorption bands may be detrimental, e.g. 

the Silicone absorption around the common 

pump wavelength of 915 nm. 

Besides the effects on fibre loss, the coating 

materials differ in their mechanical and thermal 

properties, which should also be taken into 

account in high pump power applications. 

out usually by repeated packaging and stretching 

of rare-earth-doped elements made by the well 

established MCVD technique, soaking in rareearth 

solutions and subsequent drawing of the 

microstructured fibre by means of the “stack and 

draw“ technique. Fig. 2.7 shows the central part 

of a PCF with 7 × 7 active Yb-doped filaments. 

Fig. 2.7: Central part of a PCF with 7 × 7 active 

doped filaments . 

A matter of particular interest is the mode behaviour 

of such structures, especially the optical coupling 

of the single elements (formation of a 

“super-mode”). Fig. 2.8 shows the changing 

mode picture at the end of a short piece of the 

fibre shown in Fig. 2.7, achieved by launching 

2.2.6 Studies of the mode behaviour 

of multi-core fibre structures 

(K. Mörl, J. Kobelke, K. Schuster) 

There are various reasons to build-up the active 

cores of microstructured fibres from single doped 

filaments. One of them is to achieve a mode field 

as large as possible. The preparation is carried 

Fig. 2.8: Mode structure at the end of a short 

piece of fibre shown in Fig. 2.7, obtained by 

launching different wavelengths in the central part. 

43


light in the central part of fibre core by means of 

a fibre with 7 µm mode field diameter, and scanning 

the wavelength. We can see the beating of 

modes with a period of about 7 µm. From this and 

from the fibre length it is possible to compute the 

mode coupling length. 

Much more interesting it is to study the mode 

behaviour of such multi-filament cores in the 

active laser regime. Fig. 2.9 shows the large 

mode field of the fundamental laser mode (supermode), 

and Fig. 2.10 shows the mode profile of 

this mode at the same scale. 

Fig. 2.9: Fundamental laser mode (super –mode) 

of the fibre shown in Fig. 2.7. 

However, because of the necessary weak coupling 

between the waveguides, the tolerances of 

the optical properties and the relative positions of 

the waveguides are quite challenging. With 

respect to the state of the art, the precision of the 

geometrical and material parameters should be 

improved by a factor of 10. 

To achieve this requirement we developed a special 

technology on the basis of high-quality optical 

materials, precision machining and a careful 

control of all preparation steps. A first sample 

prepared in this way is shown in Fig. 2.11. The 

array consists of 61 weakly coupled single-mode 

waveguides with a hexagonal symmetry. The 

array is surrounded by a microstructured buffer 

zone and a jacketing tube. The precision of the 

array geometry fulfils the requirements. 

Fig. 2.11: Precision fibre 

array (designed for λ = 

1.5 µm; outer diameter 

585 µm); photo-micrograph 

with transmitted 

light (a) and reflected 

light DIC (b) of a cleaved 

HF-etched fibre end. 

Fig. 2.10: Profile of the mode field of Fig. 2.9 in 

comparison to the fibre geometry. 

The distribution of light launched into a single 

waveguide follows the propagation characteristic 

in a regular array. A thorough analysis of this 

array sample shows that almost all (but not really 

all) waveguides fulfil the requirements. 

44 

2.2.7 Fibre-optic waveguide arrays 

as model systems of discrete optics 

(U. Röpke, S. Unger, K. Schuster, 

J. Kobelke, H. Bartelt) 

The field of optics in discrete systems is evolving 

from theoretical concepts into experimental verification 

and discussion of its application potential. 

In the framework of a DFG research group working 

at this topic, we developed fibre-optic waveguide 

arrays suitable for optical experiments on 

nonlinear dynamics in two-dimensional discrete 

systems. 

The technology of microstructured fibres, which 

succeeds in the preparation of photonic crystal 

fibres, also provides a basis for waveguide arrays. 

Fig. 2.12: Propagation of light (λ = 1550 nm) in 

the array launched into a waveguide at a boundary 

corner (L: propagation length). 

In conclusion we have shown that fibre-optic 

waveguide arrays can be prepared that are suited 

as model systems in experiments of nonlinear 

discrete optics.


2.2.8 High-reflectivity draw-tower fibre 

Bragg gratings (FBG) at 1550 nm 

wavelength 

(M. Rothhardt, Ch. Chojetzki) 

For making Bragg gratings with excellent 

mechanical strength during the drawing tower 

process of the fibre, there is a limitation in using 

single pulses for the inscription of each grating. 

To achieve high reflectivity Bragg gratings during 

the dynamic inscription of FBG within the fibre 

drawing process (draw tower gratings), three 

important components are under consideration: 

first of all, the laser pulse properties; second, the 

UV photosensitivity of the fibre core, and third, 

the optical configuration and its alignment. These 

three factors have been developed and optimized 

during the last years; the result is the achievement 

of single pulse gratings with a reflectivity 

maximum of R = 51% at 1550 nm. 

Useful values for fibre transmission losses of 


comprising a semiconductor laser and an extended 

external cavity. On the one hand, the FGL concept 

for Non-Return-to-Zero (NRZ) data transmission 

is considered as a potential low-cost data 

transmitter device; on the other hand, the laser 

output power and emission wavelength is shown 

to be sensitive to packaging, laser temperature 

and device current (see IPHT annual report 

2001). 

FGL understanding and optimization require simulation 

tools, which have been developed at the 

IPHT. The numerical method bases on the travelling 

wave model for DFB (distributed feedback) 

semiconductor lasers. As the lasing condition of 

the external cavity laser depends on its own history, 

the applied model splits the laser into individual 

sections, each with its own treatment of 

rate equations, (Bragg) reflections and losses. 

The simulation tools give access to the complex 

output power behaviour, mode jumps and eye. 

Additionally it is now possible to design special 

laser architectures like mode-hop-free FGLs with 

active wavelength stabilization and wavelengthswitchable 

FGLs, which are based on the interaction 

between the external cavity with superimposed 

Bragg gratings and the internal cavity, 

which comprises the semiconductor optical 

amplifier section. 

2.2.10 Implementation of an OADM with a 

data rate of 10 Gbit/s as technology 

demonstrator in the PLATON project 

(Planar Technology for Optical Networks) 

(M. Rothhardt, C. Aichele, M. Becker, 

U. Hübner) 

The EU-funded PLATON Project involves collaboration 

and permanent feedback with a variety of 

European research partners: Université des Sciences 

et Technologies de Lille (France), Université 

Paris Sud (France), Ecole Polytechnique Fédérale 

de Lausanne (Switzerland), Technische Universität 

Hamburg Harburg (Germany), Instituto de 

Engenharia de Sistemas e Computadores do 

Porto (Portugal), and two industrial partners, 

Lucent Technologies GmbH (Nürnberg, Germany) 

and Highwave Optical Technologies (France). 

The objective of the PLATON project was to 

study, develop and assess photosensitive planar 

technology through key pilot devices. The main 

subject of interest is demonstrating the feasibility 

of the technology for making components like 

channel waveguides, multimode interferometers, 

Mach-Zehnder structures and Bragg gratings. 

The work aims at a reconfigurable optical adddrop 

multiplexer (OADM) which will be the final 

demonstrator. 

Objectives of the IPHT were particularly: 

(i) Accomplishing an optimized process for optical 

layer deposition 

(ii) Structuring the optical waveguides of the key 

pilot components (OADM) 

(iii) Realizing the Bragg gratings inside the optical 

waveguides 

(iv) UV trimming of the MZI structures (Mach 

Zehnder Interferometer) of the OADM’s 

(v) Packaging and fibre coupling of the optical 

chips. 

Fig. 2.16: OADM scheme with MZI structure, sections 

for UV trimming, input and output ports and 

Bragg grating regions. 

46 

Fig. 2.15: Simulated eye diagrams of the virtual 

fibre-grating-laser at 2.5 Gbit/s. Shown are the 

eye diagrams with the emission wavelength at the 

Bragg wavelength (top) and at the long-wavelength 

slope close to a mode-hop (bottom). 

The main results are: 

(i) Optical layer deposition 

The well-mastered technology at the IPHT for 

optical silica layer deposition, FHD (Flame Hydrolysis 

Deposition) is applied for this project. The 

core layer is germanium-doped. Our parameters 

achieved are: 

Core layer thickness of 4.5 µm/5.2 µm and a 

refractive index of n[core] = 1.469. The refractive 

index tolerance is δn


a 

b 

Fig. 2.17: 

a. Scheme of cross 

sections of etched 

waveguides 

b. Deposition and 

sintering of a 

cladding layer. 

(iv) UV trimming 

The actual trimming process applies a tuneable 

laser source, an EDFA and an optical power-versus-time 

recorder. The number of trimming sections 

is four for symmetry reasons. 

The cladding layer is boron co-doped, resulting in 

a refractive index of n[clad] = 1,454. A level of 

nearly no stress-induced birefringence was 

achieved. The resulting core-cladding refractive 

index difference is as specified, with ∆n~1.5 * 10 –2 . 

(ii) Structuring of the optical waveguides 

The techniques used are photolithography and 

reactive ion etching (RIE), which allow exact definition 

of planar waveguide structures. A square 

cross section of the waveguides was achieved. 

Fig. 2.20: Set-up scheme for UV trimming of the 

MMI structure of the OADM. 

The UV trimming procedure was performed two 

times: first time with hydrogen- loaded sample 

and second with presensitized trimming sections. 

The resulting OADM was tested at LUCENT 

Technologies in Nuremberg with a bit stream of 

10 Gbit/s. The functionality of the OADM was 

shown. 

Fig. 2.18: Photomicrograph of the optical near 

field of the waveguide samples obtained. 

(iii) Bragg grating inscription process 

For Bragg grating inscription, a two step UVprocess 

was applied. It starts with imprinting the 

grating’s index modulation and continues with the 

correction of the average index modulation envelope. 

This final apodisation correction is done by 

exposing the grating to the inverse grating envelope 

intensity profile. The grating inscription setup 

at the IPHT uses the holographic Talbot interferometer 

inscription technique with a frequency-doubled 

argon-ion laser operating cw at 244 nm. The 

laser power at the output was 244 mW at 244 nm. 

2.2.11 Material processing with DUV/VUV 

laser radiation 

(S. Brückner) 

Because of their short wavelengths and their 

high quantum energies, the ArF laser (193 nm) 

and the F 2 laser (157 nm) are excellent laser tools 

for the precise and efficient micro structuring of 

high band gap materials, like fused silica or PTFE 

(Teflon). The measurement setups for material 

processing in the DUV/VUV spectral range have 

been continually improved in recent years. With 

both laser systems it is possible now, by the use 

of high-resolution mechanical components, to 

produce complex microstructures with lateral and 

depth resolutions in the sub-µm range. 

Different special tasks were successfully processed 

with both measurement setups by maskbased 

structuring. 

By means of the ArF laser, an array of 12 microholes 

with diameters smaller than 50 µm was 

drilled in a silica-based Photonic Crystal Fibre 

(PCF). For the implementation of a chemical sensor 

system it was necessary to drill holes through 

the fibre cladding exactly up to the fibre core. The 

drilling depth is determined by the number of 

laser pulses and the fluence. With an energy 

dose of 750 J/cm 2 it was possible to drill the hole 

just up to the fibre core, as shown in figure 2.21. 

Fig. 2.19: Grating transmission spectra after index 

modulation inscription before (α) and after (β) 

adaptation of the average refractive index profile. 

47


Fig. 2.21: Micrographs of the side view (left) and 

the fractured surface (right) of a Photonic Crystal 

Fibre (PCF) with a drilled hole (produced with 

193 nm). 

Additionally to a variety of experiments to F 2 laser 

material processing of glass, fused silica and 

metallic layers, the micro structuring of PTFE 

should be mentioned. By the use of specially 

designed CaF 2 lenses and an improved experimental 

setup, new results at sub-µm structuring 

were achieved. Different gratings with sizes of 

1mm 2 , line widths up to 1 µm and a depth of 

500 nm were produced with fluences from 0.3 to 

1.5 mJ/cm 2 . Investigations of the ablation behaviour 

of PTFE in a nitrogen atmosphere show an 

efficient ablation process with ablation rates of 40 

nm/pulse at a fluence of 300 mJ/cm 2 . The assembling 

of a new vacuum chamber system permits 

material processing with 157 nm in the high-vacuum 

range. In further experiments, a comparison 

of material processing in vacuum and in a dry 

nitrogen atmosphere will be carried out to determine 

the ablation behaviour and the deposition of 

debris particles on the grating surface. 

Although operating at a data rate 500 times higher 

than our previous standard design, the sensor 

system is very compact (220 × 140 × 60 mm 3 , 

Fig. 2.23) and robust, operates at temperatures 

between –40 and +60 °C, and is fully suitable for 

use in industrial applications in adverse environments. 

Our industrial partner for sensor technologies, 

Jenoptik LOS GmbH, is now commercializing 

this new high-speed sensor system in addition 

to the precursor “StrainaTemp”, which is dedicated 

to performing slower temperature and 

strain measurements. 

Highly topical application fields of fast fibre optic 

strain measurements are, e.g., the quality monitoring 

of spot welding (cooperation with University 

of Applied Sciences Jena), defect monitoring 

of train overhead contact lines (cooperation in 

two European R&D projects), and load monitoring 

of wind turbine blades (cooperation with 

Enercon GmbH and Jenoptik AG). 

48 

2.2.12 High-speed optical fibre grating 

sensor system 

(W. Ecke) 

Fibre Bragg grating (FBG) sensor systems find 

application in a steadily increasing number of 

fields, including fast strain vibrations in electrical 

machines, drive units or tools, e.g., train current 

collectors, large-scale generators, wind turbines 

or spot-welding grippers. These applications 

require fast measuring and cost-effective signal 

processing equipment. For this purpose, our concept 

of an FBG sensor system-based on broadband 

illumination and a compact spectrometer 

operating at 800 nm wavelength (Fig. 2.22) has 

been optimized to achieve a digital signal processing 

data rate of up to 1800 measurements 

per second, with exactly simultaneous processing 

for all the 16 sensors in the fibre network. The 

development of new optical mode-equalizing 

components now decreases the influence of disturbances 

on the fibre transmission lines to well 

below the detection limits of Bragg wavelength 

excursions (standard deviation down to 0.3 pm). 

Repeatability and accuracy of the measured 

strain signals have been improved to less than 

0.5 µε and 5 µε, respectively. 

Fig. 2.22: Schematic of the optical fiber grating 

sensor system. 

Fig. 2.23: View of the high-speed sensor system 

(1800 meas./s for 16 strain/vibration sensors; 

Ethernet data output at the rear).

2.2.13 Monitoring of inhomogeneous flow 

distributions using fibre-optic Bragg 

grating temperature sensor arrays 

(I. Latka, W. Ecke) 


In many industrial facilities like chemical reactors, 

thermodynamic engines, pipes and others, complex 

flow distributions occur. Knowledge of the 

gas flow distributions may help to achieve an efficient 

system performance. 

In our approach, fibre Bragg grating (FBG) sensors 

have been used for measuring the temperature 

of a heated element, in our case a steel capillary, 

which is cooled according to the surrounding 

mass flow. Because of the multiplexing capability 

of FBG sensors, one can measure the temperature 

distribution, i.e., the spatial distribution 

of the gas mass flow along the sensor array. The 

length of the heated and sensor-equipped element 

can be easily adapted to the cross section 

of the gas flow, from


After long-term laboratory tests of the sensor 

system with artificial and natural seawater, field 

tests of the sensor system were performed by the 

GKSS-Research Centre/Institute for Coastal 

Research, Geesthacht on board the ferry ship 

„Duchess of Scandinavia“ during a trip between 

Cuxhaven (D) and Harwich (GB) [Fig. 2.26]. The 

measured nitrate profile, shown in Fig. 2.27, 

reflects the nitrate load in the seawater caused by 

the rivers Elbe, Weser and Schelde as well as the 

nitrate pollution from the North Frisian Islands 

and the big harbour cities of the Netherlands and 

fits well to measurements obtained by sampling 

nutrient analysers on the same ferry route. 

Fig. 2.28: Comparison between water samples 

measured by sensor and by autoanalyzer. 

50 

Fig. 2.26: Ferry route from Harwich to Cuxhaven. 

Fig. 2.27: Nitrate content profile in the North Sea, 

measured during the ferry trip in Fig. 2.26. 

Further investigations mainly directed to the 

improvement of the long-term stability of the sensor 

were performed during a 2-week North Sea 

round trip of the German research vessel 

“Gauss”. On several stations the nitrate concentration 

was measured by the sensor and compared 

with the results of a commercial nutrient 

autoanalyser [Fig. 2.28]. 

2.2.15 Novel optical dew point sensor 

(T. Wieduwilt, G. Schwotzer) 

The dew or frost point is a measure of the water 

content of any gas. Commercial optical dew point 

hygrometers are based on the “chilled mirror” 

principle. The devices consist of polished stainless 

steel or platinum mirrors attached to thermoelectric 

coolers (Peltier devices). The mirrors are 

illuminated (e.g. with LED), and the reflected light 

is received by photodiodes. 

The gas stream whose humidity is to measure is 

directed over the mirror surface. When the mirror 

temperature falls below the dew or frost point of 

the gas sample water condenses or forms ice 

crystals onto the mirror surface. The reflected 

light received by the photodiode is abruptly 

reduced due to scattering. 

The photodiode is tied into a servo loop which 

controls the current to the Peltier cooler. This 

enables the mirror to be maintained at an equilibrium 

temperature where the rates of condensation 

and evaporation of water molecules are 

equal and therefore, a constant mass of water is 

maintained on the mirror. The resulting temperature 

of the mirror is then fundamentally, by definition, 

equal the dew point temperature. A platinum 

resistance thermometer (PRT) embedded 

beneath the mirror surface measures this temperature. 

An inconvenience of chilled mirror hygrometers 

is the falsification of the measuring by contaminations 

on the mirror surface. Contaminations 

(e.g. organic particle) affect the light reflection 

characteristics and cleaning procedures or compensation 

methods are necessary. The electronic 

schemes used for contamination compensation 

are often sophisticated and expensive. Other 

problems are the limited miniaturization and the 

unsuitable manufacturing technology for mass 

production. 

In cooperation with BARTEC GmbH a novel optical 

dew point sensor has been developed to overcome 

these disadvantages.


The operation principle is based on frustrated 

total internal light reflection on the glass-air interface 

in the presence of dew drops or ice crystals 

(patented by Bartec). 

The optical principle is shown in Fig. 2.29. Essential 

features of the new dew point hygrometer are 

the application of a transparent light guiding 

glass slide and the reverse illumination of the 

glass-gas interface through glass. 

To precise measure the dew point temperature, a 

platinum resistance thermometer with contact 

structures has been deposited on the glass surface 

(see Fig. 2.30). The platinum structure is 

arranged in the thermoelectric cooled condensation 

area. For passivation, the measuring structure 

is coated by a thin silicon carbide overlay to 

protect the electrical resistance structure. Fig. 

2.31 shows a microscopic photo of condensed 

water droplets on the sensor surface. 

With the presented sensor, an accuracy of ±0.5 K 

for the dew point temperature in the range of –15 

to +20 °C DP has been measured. 

Fig. 2.29: Scheme of the sensor principle. 

Without condensed water on the glass surface, 

the light from a LED propagates without losses 

through the light guide to the photodetector. If 

condensed dew droplets are on the glass surface 

the light penetrates the glass-droplet interfaces 

and is scattered at the droplet-air interface. This 

results in a decrease of the intensity at the detector. 

The advantage of this principle is the ruggedness 

in relation to contamination. 

Fig. 2.30: Optical waveguide with platinum resistance 

thermometer. 

Fig. 2.31: Condensation on the glass surface. 

2.3 Appendix 

Partners 

1. Industrial partners 

• Advanced Optic Solutions GmbH, Dresden 

• Analytik Jena AG 

• AIFOTEC Fiber Optics GmbH, Meiningen 

• BARTEC Messtechnik & Sensorik GmbH 

• Carl Zeiss Jena, Oberkochen 

• CeramOptec GmbH, Bonn 

• Crystal Fibre A/S Lyngby, Dänemark 

• DaimlerChrysler AG, Forschungszentrum Ulm 

• DSM Research, Geleen, Niederlande 

• EADS München-Ottobrunn 

• Electro-optics Industries Ltd., Israel 

• EPSA GmbH Saalfeld/Jena 

• j-Fiber GmbH,Jena 

• FiberTech GmbH, Berlin 

• fiberware GmbH, Mittweida 

• FISBA Optik, St. Gallen/Schweiz 

• GESO GmbH, Jena 

• GRINTECH GmbH Jena 

• Heraeus Quarzglas GmbH & Co. KG 

• Heraeus Tenevo AG 

• Hottinger Baldwin Messtechnik GmbH, Darmstadt 

• Hybrid Glass Technologies, Princeton, USA 

• I.D. FOS Research, Geel, Belgien 

• Jenoptik Laserdiode GmbH 

• Jenoptik L.O.S. GmbH 

• Jenoptik LDT GmbH, Gera 

• Jenoptik Mikrotechnik GmbH 

• Jenoptik Laser Solution GmbH 

• Jena-Optronik GmbH 

• JETI GmbH Jena 

• Kayser & Threde GmbH München 

• Laserline GmbH Mühlheim-Kärlich 

• Layertec GmbH Mellingen 

• Leica Microsystems Wetzlar 

• Mikrotechnik & Sensorik GmbH Jena 

• NTECH Technology, Novara, Italy 

• ONERA Paris Palaiseau /Frankreich 

• OVD Kinegram Corp., Zug, Schweiz 

• piezosystem jena GmbH 

• ROFIN SINAR Laser GmbH Hamburg 

• Schott Glas, Mainz 

• Schott Lithotec AG, Jena 

51


52 

• Siemens AG, CT Erlangen und München 

• SUPERLUM Ltd. Moskau 

• SurA Chemicals GmbH Jena 

• Thales Avionics Massy/Frankreich 

• Thales Research and Technology 

• Orsay/Frankreich 

• TETRA GmbH Ilmenau 

• Lucent Technologies Nürnberg 

• unique mode AG Jena 

• VITRON Spezialwerkstoffe GmbH Jena 

• Wahl optoparts GmbH, Neustadt 

• 4H Jena Engineering GmbH 

2. Scientific partners 

• Bundesanstalt für Materialprüfung und 

-forschung (BAM), Berlin 

• DBI Gas- und Umwelttechnologie GmbH, 

Leipzig 

• EMPA Dübendorf/Schweiz 

• ESO European Southern Observatory, 

Garching 

• Fachhochschule Giessen-Friedberg 

• Fachhochschule Jena 

• Ferdinand-Braun-Institut für Höchstfrequenztechnik 

Berlin 

• Fiber Optics Research Center, Moskau 

• Fraunhofer Heinrich-Hertz-Institut für 

Nachrichtentechnik Berlin 

• Fraunhofer Institut Angewandte Optik und 

Feinmechanik Jena 

• Fraunhofer Institut für Silicatforschung 

Würzburg 

• Fraunhofer Institut für Lasertechnik Aachen 

• Fraunhofer INT, Euskirchen 

• GKSS Forschungszentrum Geesthacht 

• Image Processing Systems Institute, Samara, 

Russia 

• INNOVENT e.V. Jena 

• INESC Porto/Portugal 

• Institut für Angewandte Photonik, Berlin 

• S.I. Vavilov State Optical Institute, 

St. Petersburg, Russia 

• Institut für Bioprozess- und Analysenmesstechnik 

(IBA) Heiligenstadt 

• Institut für Fügetechnik und Werkstoffprüfung 

GmbH Jena 

• Institute für Radiotechnik und Elektronik in 

Moskau/Uljanovsk und Prag 

• Laser Zentrum Hannover 

• Max-Planck-Institut für Plasmaphysik, Greifswald 

• Max-Born-Institut für Nichtlineare Optik und 

Kurzzeitspektroskopie, Berlin 

• Physikalisch-Technische Bundesanstalt Braunschweig 

• Technische Universität Berlin 

• Universität Braunschweig 

• Technische Universität Chemnitz 

• Technische Universität Darmstadt 

• Technische Universität Dresden 

• Universität Erlangen 

• Technische Universität Hamburg-Harburg 

• Technische Universität Ilmenau 

• Universität Jena 

• Universität Kaiserslautern 

• Technische Universität München 

• University of Leeds, U.K. 

• University of Pardubice, Tschech. Republik 

• University of Rio de Janeiro (PUC), Brasilien 

• University of Southampton, U.K. 

• Verfahrenstechnisches Institut Saalfeld 

• Universite Catholique de Louvain/Belgien 

• Universite Paris-Süd/Frankreich 

• Universite de Lille/Frankreich 

• Gwangju Institute of Science and Technology, 

South Korea 

Publications 

H. Bartelt: 

Properties of microstructured and photonic 

crystal fibers suitable for sensing application 

Proceedings SPIE Vol. 5950, 236–242 (2005) 

H. Bartelt: 

Influences of micro- and nanostructuring on light 

guiding 


Y. Kim, Y. Jeong, K. Oh, J. Kobelke, 

K. Schuster, J. Kirchhof: 

“Multi-port N × N multimode air-clad holey fiber 

coupler for high-power combiner and splitter” 

Optics Letters 30, 2697–2699 (2005) 

Y. Kim, Y. Jung, U. Paek, K. Oh, 

U. Röpke, J. Kirchhof, H. Bartelt: 

„A new type of index guiding holey fiber with flexible 

modal birefringence control“ 

Proc. SPIE Vol 5855, 306–309 (2005) 

J. Kirchhof, S. Unger, J. Kobelke, K. Schuster, 

K. Mörl, S. Jetschke, A. Schwuchow: 

“Materials and technologies for microstructured 

high power fiber lasers” 

Proc. SPIE 5951, 107/1–12 (2005) 

C. Chojetzki, M. Rothhardt, J. Ommer, 

S. Unger, K. Schuster, H.-R. Müller: 

“High-reflectivity draw-tower fiber Bragg gratings 

– arrays and single gratings of type II” 

Optical Engineering 44, 60503/1–2 (2005) 

M. Wegmann,J. Heiber, F. Clemens, T. Graule, 

D. Hülsenberg, K. Schuster: 

“Forming of noncircular cross-section SiO 2 glass 

fibers” 

Glass Sci. Technol. 78, 69–75 (2005) 

H. Lehmann, S. Brückner, J. Kobelke, 

G. Schwotzer, K. Schuster, R. Willsch: 

“Toward photonic crystal fiber based distributed 

chemosensors” 

Proc. SPIE Vol. 5855, 419–422 (2005)


K.-F. Klein, H. S. Eckhardt, C. Vincze, 

S. Grimm, J. Kirchhof, J. Kobelke, J. Clarkin, 

G. Nelson: 

“High NA-fibers: silica-based fibers for new applications” 

Proc. SPIE Vol. 5691, 30–41 (2005) 

J. Kirchhof, S. Unger, A. Schwuchow, 

S. Jetschke, B. Knappe: 

“Dopant interactions in high power laser fibers” 


J. Kobelke, H. Bartelt, J. Kirchhof, S. Unger, 

K. Schuster, K. Mörl, C. Aichele, K. Oh: 

„„Dotierte Photonische Kristallfaser – erweiterte 

Möglichkeiten zur Modifizierung der Propagationseigenschaften 

und zur Verbesserung der Anwendungsmöglichkeiten 

mikrostrukturierter Fasern“ 

DGaO – Proceedings 2005, ISSN 1614 8436. 

W. Ecke, K. Schröder, S. Bierschenk, 

R. Willsch: 

“Opto-chemical fibre Bragg grating sensors 

based on evanescent field interaction with specific 

transducer layers” 


R. Willsch, W. Ecke, G. Schwotzer: 

“Spectrally Encoded Optical Fibre Sensor Systems 

and their Application in Process Control, 

Environmental and Structural Monitoring” (invited 

paper) 

Proceedings of SPIE, Vol.5952,133–146 (2005) 

T. Glaser, A. Ihring, W. Morgenroth, N. Seifert, 

S. Schröter, V. Baier: 

“High temperature resistant antireflective motheye 

structures for infrared radiation sensors” 

Microsystem Technologies 11, 86–90 (2005) 

M. Duparré, B. Lüdge, S. Schröter: 

“On-line characterization of Nd:YAG laser beams 

by means of modal decomposition using diffractive 

optical correlation filters” 

Proc. SPIE Vol. 5962, 59622G (2005) 

M. Zeisberger, I. Latka, W. Ecke, 

T. Habisreuther, D. Litzkendorf, W. Gawalek: 

“Measurement of the thermal expansion of melttextured 

YBCO using optical fibre grating sensors” 

Supercond. Sci. Technol. Vol. 18, 202–205 (2005) 

W. Ecke, K. Schröder, M. Kautz, P. Joseph, 

S. Willet, T. Bosselmann, M. Jenzer: 

“On-line characterization of impacts on electrical 

train current collectors using integrated optical 

fiber grating sensor network” 

Proceedings SPIE, Vol. 5758, 114–123 (2005) 

I. Latka, W. Ecke, B. Höfer, T. Frangen, 

R. Willsch, A. Reutlinger: 

“Micro bending beam based optical fiber grating 

sensors for physical and chemical measurands” 


K. Schröder, J. Apitz, W. Ecke, E. Lembke, 

G. Lenschow: 

“Fibre Bragg grating sensor system monitors 

operational load in a wind turbine rotor blade” 


J. P. Dakin, W. Ecke, M. Reuter: 

“Comparison of vibration measurements of elastic 

and mechanically lossy (visco-elastic) materials 

using fibre grating sensors” 


C. Chojetzki, M. Rothhardt, J. Ommer, 

S. Unger, K. Schuster, H.-R. Müller: 

“High reflectivity draw tower fiber Bragg gratings 

array and single gratings of type II” 

Optical Engineering Jan. (2005) 

M. Becker, M. Rothhardt und H.-L. Althaus: 

„Wavelength-Switchable Fiber Grating Laser with 

Active Wavelength Stabilization“, Optical Engineering 

Dec. (2005) 

S. Jetschke, V. Reichel, K. Mörl, S. Unger, 

U. Röpke, H.-R. Müller: 

“Nd:Yb-codoped Silica Fibers for High Power 

Fiber Lasers: Fluorescence and Laser Properties” 


A. Strauss, S. Brueckner, U. Roepke, 

H. Bartelt: 

“Thermal Poling of Silica” 

DGAO-Proceedings, ISSN 1614–8436 (2005) 

H. Bartelt, S. Schröter, J. Kobelke, K. Schuster 

“Photonische Kristalle: neue Funktionalität für 

integrierte Optik und optischen Fasern” 

Proceedings Symposium “Optik in der Rechentechnik”, 

TU Ilmenau Sept. (2005) 

C. Chojetzki, K. Schröder, M. Rothhardt, 

W. Ecke: 

“Strukturüberwachung mit Faser-Bragg-Gitter- 

Sensoren am Beispiel des Rotorblattes einer 

Windkraftanlage” 

VDI-Berichte Nr. 1899, 209–217, (2005) 

M. Rothhardt, C. Chojetzki, H.-R. Müller: 

“High mechanical strength single-puls draw 

tower gratings” 

Proc. SPIE Vol. 5579, 127–135, (2005) 

Y. Joeng, Y. Kim, K. Mörl, S. Höfer, 

A. Tünnermann, K. Oh: 

“Q-switching of Yb 3+ -doped fiber laser using a 

novel micro-actuating platform light modulator” 

Optics Express 13, 10302, (2005) 

53


54 

Presentations/Posters 

S. Unger, J. Kirchhof, A. Schwuchow, 

S. Jetschke, B. Knappe: 

“Dopant interactions in high power laser fibers” 

Photonics West/Optoelectronics, 

22.01.–27.01.2005, San Jose, California/USA 

(Poster) 

S. Jetschke, V. Reichel, K. Mörl, S. Unger, 

U. Röpke, H.-R. Müller: 

“Nd:Yb-codoped slica fiber lasers: fluorescence 

and laser properties”: 

Photonics West 2005, San Jose USA 

24.01.–28.01.2005 

(Paper) 


„Faseroptische Sensorsysteme mit Mikro- und 

Nanostrukturkomponenten“ 

VDE /GMM Workshop „Mikrooptik im Fokus der 

Photonik“, Karlsruhe 03.02.–04.02.2005 

(Paper) 

S. Schröter, U. Hübner, R. Boucher, H. Bartelt: 

“Mikrooptische Komponenten auf der Basis von 

PC-Strukturen in Ta 2 O 5 -Wechselschichtsystemen” 

GMM-Workshop “Mikrooptik im Fokus der Photonik”, 

FZ Karlsruhe,03.02.–04.02. 2005 

(Paper) 

J. Kobelke, J. Kirchhof, K. Schuster, K. Gerth, 

S. Unger, C. Aichele, K. Mörl: 

“Photonische Kristallfasern – Möglichkeiten zur 

Herstellung und Anwendung einer neuen Klasse 

optischer Fasern” 

Innovationsforum Strukturierung von Gläsern, 

14.02.–15.02. 2005, Barleben. 

(Paper) 

W. Ecke, K. Schröder, M. Kautz, P. Joseph, 

S. Willet, T. Bosselmann, M. Jenzer: 

“On-line characterization of impacts on electrical 

train current collectors using integrated optical 

fiber grating sensor network” 

SPIE’s 12 th International Symposium on Smart 

Structures and Materials, Conference “Smart 

Sensor Technology and Measurement Systems”, 

07.03.–09.03 2005, San Diego/USA, (Paper) 

J. Kobelke, J. Kirchhof, S. Unger, K. Schuster, 

K. Mörl, C. Aichele, H. Bartelt: 

“Active and passive doped microstructured and 

photonic crystal fibres” 

Hauptjahrestagung der DPG, 04.–09.03. 2005, 

Berlin. 

(Poster) 

J. Kirchhof, S. Unger, J. Kobelke, H. Bartelt: 

„Hochleistungs-Laserfasern und Photonische 

Mikrostrukturen“ 

DGG Glasforum, 10. 03.2005, Würzburg. 

(Invited paper) 

Y. Kim, W. Shin, S. C. Bae, K. Oh, J. Kobelke, 

K. Schuster, J. Kirchhof: 

“Air-clad multimode holey fiber coupler for high 

power transmission” 

CLEO 2005, section 09, paper CWN1. 

(Paper) 

W. Ecke, K. Schröder: 

“Fiber Optic Health Monitoring Sensor System for 

Wind Energy Turbine” 

Colloquium at National Wind Technology Center 

of US Department of Energy, Boulder, Colorado, 

16.03.2005 


K. Mörl: 

„Arbeiten zu mikrostrukturierten und Hochleistungs-Laserfasern 

am IPHT Jena“ 

Universität Hamburg, 25.04.2005 


V. Reichel: 

„Höchstleistungsfaserlaser für cw-Betrieb“ 

OptoNet Workshop „Neue Laserstrahlquellen“ 

11.05.2005, IPHT Jena 


J. Kobelke, H. Bartelt, J. Kirchhof, S. Unger, 

K. Schuster, K. Mörl, C. Aichele, K. Oh: 

“Doped photonic crystal fibres – Enhanced possibilities 

for modification of microstructured fibres” 

DGaO-Jahrestagung, 

17.05.–20.05.2005 Wroclaw, Polen. 

(Paper) 

A. Strauss, S. Brueckner, U. Roepke, 

H. Bartelt: 

“Thermal Poling of Silica“, 

106. Jahrestagung der DGaO, 

17.05.–20.05. 2005, Wroclaw/Polen 

(Poster) 

A. Csaki, A. Steinbrück, S. Schröter, T. Glaser, 

W. Fritzsche: 

“Fabrication and characterization of nanophotonic 

metal structures” 

International Symposium Molecular Plasmonics, 

Jena 19.05.–21.05. 2005 

(Poster) 

I. Latka, W. Ecke, B. Höfer, T. Frangen, 

R. Willsch, A. Reutlinger: 

“Micro bending beam based optical fiber grating 

sensors for physical and chemical measurands” 

17 th International Conference on Optical Fibre 

Sensors, 23.05.–27.05.2005, Bruges/Belgium, 

(Paper) 

K. Schröder, J. Apitz, W. Ecke, E. Lembke, 

G. Lenschow: 

“Fibre Bragg grating sensor system monitors 

operational load in a wind turbine rotor blade” 



(Paper)


J. P. Dakin, W. Ecke, M. Reuter: 

“Comparison of vibration measurements of elastic 

and mechanically lossy (visco-elastic) materials, 

using fibre grating sensors” 



(Paper) 

H. Bartelt: 

“Influences of micro- and nanostructuring on light 

guiding” 

17 th International Conference on Optical 

Fibre Sensors, Bruges/Belgium, 

23.05.–27.05.2005 


C. Aichele, M. Becker, S. Grimm, B. Knappe 

M. Rothhardt: 

„Eigenschaften dotierter SiO-Wellenleiterschichten 

für UV-Strukturierungs-verfahren zur Realisierung 

passiver optischer Wellenleiterkomponenten“, 

VDE-ITG-Diskussionssitzung“ „Messung 

und Modellierung in der Optischen 

Nachrichtentechnik“ (MMONT’05), Hamburg, 

01.06.–03.06. 2005 (Paper) 

M. Becker, M. Rothhardt: 

„Simulation direkt modulierbarer Faser-Gitter- 

Laser mit dem Wanderwellenmodell, VDE-ITG 

Diskussionssitzung „Messung und Model-lierung 

optischer Nachrichtensysteme“ (MMONT’05), 

Hamburg, 01.06.–03.06.2005 

(Paper) 

C. Chojetzki, M. Rothhardt, H.-R. Müller, 

M. Becker: 

„Ziehturm Faser-Bragg-Gitter – kostengünstige 

Bauelemente für die optische Informationstechnik“, 

VDE-ITG-Diskussionssitzung 

“Messung und Modellierung in der Optischen 

Nachrichtentechnik (MMONT’05), Hamburg, 

01.06.–03.06.2005 

(Paper) 

K.-F. Klein, H. S. Eckhardt, C. Vincze, 

J. Kirchhof, J. Kobelke: 

„Numerische Apertur von mikrostrukturierten 

Multimode-Fasern“ 

Messung und Modellierung in der optischen 

Nachrichtentechnik, 

Hamburg, 01.06.–03.06.2005 

(Paper) 

U. Röpke, S. Jetschke, S. Unger: 

”Investigation of Nd:Yb-codoped Silica Fibers as 

a Laser Material”, CLEO Europe 2005, 

WED CJ-14, München, 12.06.–17.06.2005 

(Poster) 

H.-R. Müller, J. Kirchhof, V. Reichel, S. Unger: 

“Fibres for High-Power Lasers and Amplifiers” 

Journees Scientifique de I’ONERA, Paris 

27.06.–29.06.2005 


B. Knappe, C. Aichele, St. Grimm, M. Alke, 

H. Renner, E. Brinkmeyer: 

“Ready-to-use silica slab waveguides for pretreatmentless 

UV-fabrication of customized planar 

lightwave circuits” 

BGPP, Sydney, Australia, 04.07.–07.07.2005, 

(Paper) 

M. Rothhardt, C. Chojetzki, H.-R. Müller, 

H. Bartelt: 

“Large Fiber Bragg Grating Arrays for Motoring 

Applications Made by Drauring Tower Inscription”, 

BGPP, Sydney, Australia 

04.07.–06.07.2005 

(Poster) 

J. Kirchhof, S. Unger, C. Aichele, S. Grimm, 

J. Dellith: 

“Borosilicate optical fibers and planar waveguides 

– Technology and properties” 

5 th Int. Conf. on Borate Glasses, Crystals and 

Melts, Trento, Italy,10.07.–14.07.2005, 

(Paper) 

W. Ecke, K. Schröder, S. Bierschenk, 

R. Willsch: 

“Opto-chemical fibre Bragg grating sensors 

based on evanescent field interaction with specific 

transducer layers” 

SPIE OOC 2005, Warsaw/Poland 

28.08.–02.09.2005 

(Paper) 


“Spectrally Encoded Optical Fiber Sensor Systems 

and their Application in Industrial Process 

Control, Environmental and Structural Monitoring” 

SPIE Optics and Optoelectronics Congress 

Warsaw/Poland, 28.08.–02.09.2005 


H. Bartelt: 

“Properties of microstructured and photonic crystal 

fibers suited for sensing applications” 

SPIE OOC 2005, Warsaw/Poland 

28.08.–02.09.2005 


J. Kirchhof, S. Unger, J. Kobelke, K. Schuster, 

K. Mörl: 

“Materials and technologies for microstructured 

high power fiber lasers” 

Optics and Optoelectronics Conference, 

28.08.–02.09. 2005, Warsaw, Poland. 

(Paper) 

L. Kröckel, G. Schwotzer, M. Koch, K. Bley, 

K. H. Venus: 

“Fluorimetric Determination of Phosphate by 

Reversed-FIA for In-Situ Water Analysis” 

AquaLife, Kiel, 20.09.05–22.09.05 

(Poster) 

55


56 

G. Schwotzer: 

“Optical Components and Devices for In-Situ 

Water Analysis in Project BIOSENS” 

AquaLife 2005, Kiel, 20.09.–22.09.2005 


C. Chojetzki, W. Ecke, M. Rothhardt, 

K. Schröder: 

“Structural monitoring using fibre Bragg gratings 

at the example of a wind energy facility” 

GESA – Symposium 2005, Saarbrücken, 

21.09.–22.09.2005 

(Paper) 

H. Bartelt: 

“Optische Fasern – geführtes Licht für Kommunikationstechnik 

und Sensorik” 

Lehrerfortbildung, Jena, 22.09.2005 

H. Bartelt, S. Schröter, J. Kobelke, 

K. Schuster: 

“Photonische Kristalle: Neue Funktionalität für 

integrierte Optik und optische Fasern” 

Vortrag auf dem 8. Workshop „Optik in der 

Rechentechnik“, TU Ilmenau, 23.09.2005 

(Paper) 

H.-R. Müller: 

“Fiber Development for Diode Pumped Fiber 

Lasers” 

Sino-German Workshop GZ 313 

“Advances in Diodes and Diode Pumped Lasers”, 

Peking, 25.09.–30.09.2005 


J. Kirchhof, S. Unger, A. Schwuchow, 

S. Grimm, V. Reichel: 

“Materials for high-power fiber lasers” 

First Conference on Advances in Optical Materials, 

12.10.–16.10.2005, Tucson, Arizona/USA. 

(Poster) 


“Optical fibre grating sensors for structural health 

monitoring in adverse environment” 

Colloquium at Max-Planck-Institute for Plasma 

Physics, Greifswald, 04.11.2005 


W. Ecke: 

“Fibre Bragg grating sensor systems for structural 

health monitoring and optochemical measurements” 

Colloquium at Institute of Materials Science and 

Applied Mechanics of Wroclaw University of 

Technology, Wroclaw/Poland, 16.11.2005 

(Paper) 


„Spektraloptische Fasersensorsysteme für Prozess-, 

Umwelt- und Strukturmonitoring“ 

17. Internat. Wiss. Konferenz IWKM, Mittweida, 

03.11.–04.11.2005 


K. Schuster, J. Kobelke, J. Kirchhof, 

C. Aichele, K. Mörl, A. Wojcik,: 

“High NA fibers – a comparison of optical, thermal 

and mechanical properties of ultra low index 

coated fibers and air clad MOF’s” 

54 th Int. Cable and Wire Symposium, 

Providence, RI/USA, 13.11.–16.11.2005, 

(Paper) 

A. Wojcik, K. Schuster, J. Kobelke, 

C. Chojetzki, C. Michels, K. Rose, 

M. J. Matthewson: 

“Novel Protective coatings for high temperature 


54 th Int. Cable and Wire Symposium, 

Providence, RI/USA,13.11–16.11. 2005, 

(Paper) 

J. Kobelke, K. Schuster, J. Kirchhof, S. Unger, 

A. Schwuchow, K. Mörl, S. Brückner: 

“Active and passive microstructured fibers” 

Int. Workshop on Emerging Areas of Fibre Optics 

and Future Applications, 

Kalkutta, India 

08.12.–10.12.2005, 


Lectures 

Prof. Dr. H. Bartelt: 

Wahlvorlesung 


Optische Nachrichtentechnik 

Winter-Semester 

und 2004/2005 

Wahlvorlesung 


Mikrooptik und integrierte Optik 

Sommer-Semester 2005 

Prof. Dr. R. Willsch: 

Fachhochschule Jena, 

Fachbereiche/Studienrichtungen 

Elektrotechnik/Informationstechnik, 

Physikalische Technik, Umwelttechnik und 

Biotechnologie, “Sensortechnik” 

Wintersemester 2004/2005 und 2005/2006 

Dr.W.Ecke: 

Fachhochschule Jena, 

Masterstudiengang Laser- und Opto-Technologien 

LOT “Faseroptik” Sommersemester 2005 

Patents 

J. Bolle, J. Bliedtner, K. Zweinert, W. Ecke, 

R. Willsch, W. Bürger: 

„Schweißanordnung, insbesondere zum Verbinden 

von Werkstücken durch Widerstands- und 

Pressschweißen“ 

DE 10 2005 017 797.2



„Anordnung zur Erhöhung der Messgenauigkeit 

von Fasergitter-Sensorsystemen“ 


H.-R. Müller, S. Unger, K. Mörl, K. Schuster: 

„Optische Fasern für polarisiert emittierende 

Faserlaser und -verstärker sowie ein Verfahren 

zu deren Herstellung“, 


Diploma 

Y. Eberhardt 

„Konzeption, Aufbau und Erprobung von Küvetten 

zur Messung kleiner Flüssigkeits-Volumina“ 

Fachhochschule Jena, 15.06.2005 

R. Roth 

„Optische Untersuchungen ausgewählter Laserdioden 

und VCSEL hinsichtlich ihrer Eignung für 

Sensoranwendungen“ 


Th. Frangen. 

„Entwicklung, Aufbau und Test eines Fasergitter- 

Mikrobiegebalkens zur Messung kleiner Biegekräfte 

und Anwendung als Viskosimeter“ 


L. Kröckel: 

„Untersuchungen zum fluorimetrischen Nachweis 

von Phosphat in Wasser mittels Fließ-Injektions- 

Analyse“ 


D. Reinisch: 

„Konstruktion eines Simulators für die optische 

Messung von Temperatur und Feuchte in Zahnradgetrieben“ 

Fachhochschule Jena 16.12.2005 

Master Thesis 

M. Giebel: 

„Entwicklung einer Labormesseinrichtung zur 

Messung von Brechzahlen in Wasser“ 


S. Bierschenk: 

“Application of specifically sensibilised layers in 

an optical fibre grating refractometer” 


Mirko Wittrin: 

„Untersuchungen zum Potential des RNF-Verfahrens 

für Brechzahlprofilmessungen an optischen 

,Silica on Silicon‘-Wellenleitern“ 

Fachhochschule Jena, Oktober 2005 

Laboratory exercises 

Th. Frangen 01.01.05–31.01.05 

L. Kröckel 21.02.05–31.12.05 

D. Mitrenga 14.02.05–31.07.05 

E. Lindner 15.02.05–18.02.06 

M. Klube 01.03.05–30.04.06 

M. Wittrin 01.03.05–30.09.05 

D. Reinisch 01.04.05–30.11.05 

M. Leich 04.04.05–12.08.05 

R. Roth 26.04.04–16.07.05 

N. Westphal 18.07.05–29.07.05 

T. Rohrbach 05.10.05–21.02.06 

T. Rathje 19.10.05–30.06.06 

K. Wolter 21.11.05–31.05.06 

F. Just 01.12.05–30.06.06 

Guest scientists 

Dr. Y. Joeng 

Gwangju Institute of Science 

and Technology, Korea 

März 2005 

Dr. Aleksey Tchertoriski, Institute for Radio 

Engineering and Electronics, Ulyanovsk, Russia, 

01.04.–27.06.2005 

Prof. Kyunghwan Oh 

Gwangju Institute of Science 

and Technology, Korea 

01.12.04–28.02.2005 

Memberships 

Prof. Dr. H. Bartelt: 

• Mitglied im Arbeitskreis Mikrooptik der 

Deutschen Gesellschaft für Angewandte Optik 

• Deutscher Vertreter in WG7 der ISO zum 

Thema „Diffractive Optics“ 

• Mitglied des Editorial Board der Fachzeitschrift 

„Optik“ 

• Vorstandsmitglied des Mikrotechnik Thüringen 

e.V. 

• Mitglied im Kuratorium der Stiftung für 

Forschung und Technologie STIFT 

• Mitglied im wissenschaftlichen Beirat der 

Jenaer Technologietage 2004 und 2005 

• Mitglied im Beirat des BioRegio Jena e.V. 

• Mitglied im Beirat des Technologie- und Innovationspark 


• Conference Chair Optical sensing II 

Photonics Europe, April 2006, 

Strasbourg/France 

Prof. Dr. R. Willsch: 

• Mitglied des Redaktionsbeirates der 

Fachzeitschrift „SENSOR report“ 

• Member of Optical Fibre Sensors (OFS) 

International Steering Committee, Chair of 

OFS-17, International Conference May 2005 

Bruges/Belgium 

57


• Mitglied im Kongressbeirat und Session-Chairman 

OPTO-Kongress Nürnberg, Mai 2006 

• Stellv. Vorsitzender AMA-Fachausschuss 

„Optische Sensorik“ 

Dr.W.Ecke: 

• Program Chair and Member of Technical 

Program Committee of International Optical 

Fiber Sensors Conference OFS-17, 

Bruges/Belgium, May 2005 

• Co-Chair of Conference „Smart Sensor 

Technology and Measurement Systems“ 

of SPIE International Symposium on Smart 

Structures and Materials, San Diego/CA 

USA, March 2005 

• Member of Technical Program Committees 

of Optical Fibre Technology (OFT) and 

Optical Fibre Applications (OFA) 

conferences of SPIE Optics and Optoelectronics 

Congress, 

Warsaw/Poland, August 2005 

Participation in fairs/expositions 

• Exhibition at OFS-17 Conference 

23.05.–27.05.2005 Bruges, Belgium 

• „Lange Nacht der Wissenschaften“ 

18.11.2005 IPHT Jena 

• Optonet Workshop 

„Neue Laserstrahlquellen“ 

11.05. 2005, IPHT, Jena 

• LASER 2005 – World of Photonics, 

Neue Messe München, 

3.–16. 06.2005, 

Ausstellung am Gemeinschaftsstand 

Sachsen/Thüringen 

• TRANSFER X, Messe Dresden, 

9.–11.11.05 

Gemeinschaftsstand IPHT 

58

MIKROSYSTEME / MICROSYSTEMS 

3. Mikrosysteme / Microsystems 

Leitung/Head: Prof. Dr. J. Popp 

e-mail: juergen.popp@ipht-jena.de 

Stellvertreter/Vice Head: Dr. H. Dintner 

helmut.dintner@ipht-jena.de 

Spektral-optische Verfahren Photonische Chipsysteme Mikrosystemtechnologie 

und Instrumentierung Photonic Chip Systems Microsystem Technology 

Spectral Optical Techniques 

and Instrumentation 

Leitung/Head: Prof. Dr. J. Popp Leitung/Head: Dr. W. Fritzsche Leitung/Head: Dr. Th. Henkel 

wolfgang.fritzsche@ipht-jena.de thomas.henkel@ipht-jena.de 

Spectral Optical Sensing 

Dr. R. Riesenberg 

rainer.riesenberg@ipht-jena.de 

Thermal Microsensors 

Dr. E. Keßler 

ernst.kessler@ipht-jena.de 

Sensor Preparation 

Dr. A. Lerm 

albrecht.lerm@ipht-jena.de 

Microtechnology 

Dr. G. Mayer 

guenter.mayer@ipht-jena.de 


2005 war für den Bereich „Mikrosysteme“ ein 

bewegtes Jahr, das im Rückblick mit den Begriffen 

Kontinuität und Veränderung umrissen werden 

kann. 

Kontinuität insofern, dass in den Gruppen die 

fachliche Arbeit auf den verschiedenen Themengebieten 

systematisch weiter vorangetrieben 

wurde und zu einer Reihe sehr beachtlicher wissenschaftlicher 

Ergebnisse, verbunden mit 

erfolgreicher Projektakquisition, geführt hat. Die 

nachfolgenden Abschnitte geben darüber Auskunft. 

Veränderung benennt vor allem zwei wichtige, 

eng miteinander verkoppelte Entwicklungen. Zum 

Einen hat das Kuratorium mit Wirkung vom 1. Mai 

2005 Prof. Jürgen Popp zum neuen Bereichsleiter 

berufen. Prof. Popp ist Lehrstuhlinhaber für 

Physikalische Chemie an der hiesigen Universität 

und Leiter des Institutes für Physikalische Chemie. 

Er wird diese Funktionen auch weiterhin 

ausüben, so dass die Verflechtung des IPHT mit 

der Universität in seiner Person eine substanzielle, 

für die Zukunft des IPHT entscheidende Stärkung 

erfährt. Als weithin anerkannter Experte auf 

dem Gebiet der Laserspektroskopie und der Biophotonik 

bringt Prof. Popp – mit seiner Gruppe an 

der FSU – ein hochaktuelles und zukunftsträchtiges 

wissenschaftliches Feld in das IPHT ein, welches 

sich in idealer Weise mit dem KnowHow 

3.1. Overview 

2005 was a rather exciting year for the microsystems 

division. The year 2005 can be sketched by 

the terms continuity and change. 

Continuity insofar as the scientific work of the 

various research fields within the division has 

been pursued systematically resulting in a lot of 

remarkable scientific results and a very successful 

acquisition of new projects. The following 

chapters provide a more detailed insight into the 

recent achievements of the microsystems division. 

The term change marks two important and 

strongly coupled developments. Firstly, Prof. 

Juergen Popp was appointed as the new head of 

the division starting at May 1 by the supervisory 

board of the institute. Prof. Popp holds a chair at 

the Friedrich-Schiller-Universität of Jena where 

he is the director of the institute for physical 

chemistry. Since he will carry on this position, the 

scientific interlocking between the IPHT and the 

university being an essential factor for the future 

of the IPHT will be strengthened by Prof. Popp in 

a substantial manner. As a widely recognized 

expert in the field of laser spectroscopy and biophotonics 

Prof. Popp – together with his group at 

the university – will establish a highly attractive 

and longreaching research field at IPHT which 

can be suitably combined with the know how of 

the division on the development of chip systems 

59


The staff of the microsystems division. 

Fig. 3A: NIR Raman spectral sensor. The sensor 

works in the wavelength range of 780 nm to 

1100 nm, is equipped with a 1024 × 128 pixel 

CCD and has a spectral resolution of 0.3 nm 

(5 cm –1 to 2.5 cm –1 ). 

60 

Fig. 3B: Relative irradiance on the CCD of the 

multi-signal-polychromator. Positions of 4 rows of 

25 spectra, dot-distance 31 nm. 

Fig. 3C: 16 × 16 thermopile array of a calorimetric 

space debris detector on PC.


Fig. 3D: Silver nanoparticles were coated with a gold shell in order to tune the plasmon surface resonance 

band. Spectra (left), scheme (center), photos of droplets with various gold shell thickness (center right) and 

SEM and TEM images of the sample (right). 

Fig. 3E: Single particle spectroscopy on immobilized 90 nm silver (left) and 110 nm gold (right) nanoparticles. 

The presented spectra were measured on a single particle each. 

Fig. 3F: LabOnChip system for droplet-based micro flow-trough PCR. Sample droplets are moved along a 

winding micro channel over the different temperature zones according the thermal protocol. The fluidic 

module is in thermal contact with a micro system-based heat plate. The thermal distribution as measured 

with an infrared camera is shown in the upper right corner. A detailed view of sample droplets inside the 

microchannel is given in the lower right corner. 

61


62 

des Bereiches zur mikrotechnisch basierten 

Chip- und Instrumentenentwicklung ergänzt und 

das fachliche Profil des Bereiches, aber auch des 

IPHT insgesamt, maßgeblich prägen wird. 

Damit ist zugleich die zweite wesentliche Veränderung 

des vergangenen Jahres angesprochen: 

Die erreichten Fortschritte in der Diskussion zu 

der zukünftigen Ausrichtung und Positionierung 

des IPHT. Die vom Kuratorium bestellte Strukturkommission 

hat für den optisch orientierten Teil 

des IPHT, und damit auch für den Bereich „Mikrosysteme“, 

Empfehlungen zur inhaltlichen Fokussierung 

und strukturellen Anpassung ausgesprochen. 

Von den beiden identifizierten Forschungsschwerpunkten 

Optische Fasern und Photonische 

Instrumentierung beschreibt vor allem der 

Letztere die avisierte thematische Ausrichtung 

des Bereiches, auf welche sich die Arbeiten in 

den kommenden Jahren fokussieren werden. 

Fachlich bedeutet der Fokussierungsprozess einerseits 

die kontinuierliche Fortführung von 

Arbeitsrichtungen, welche sich unmittelbar in das 

neue Bereichsprofil einordnen (Verknüpfung 

optisch basierter Chiparrays, mikroanalytischer 

Systeme, infrarotoptischer Sensoren mit laserspektroskopischen 

Verfahren). Andererseits sind 

mit der Neuausrichtung auch inhaltliche Umorientierungen 

verbunden (Mikrosystemkonzepte 

außerhalb der Optik) und muss mit Blick auf die 

kompetente Besetzung der Forschungsfelder 

zusätzliche Expertise auf- bzw. ausgebaut werden 

(Plasmonik, molekulares und funktionales 

Imaging, THz-Technik). Hierzu sollen insbesondere 

Nachwuchsgruppen zeitnah etabliert werden. 

Um die fachliche Profilierung zu befördern, hat 

sich der Bereich im vergangenen Jahr eine neue 

Abteilungsstruktur gegeben, welche im obigen 

Organigramm dargestellt ist. Die einzelnen 

Arbeitsgruppen sind dabei in sich weitgehend 

unverändert geblieben, wurden aber durch die 

geänderte Zuordnung in einen neuen Kontext 

gestellt. Dies betrifft vor allem die Vereinigung 

von spektraloptischer Verfahrens- und Systementwicklung 

sowie die Herausstellung der Mikrosystemtechnik 

(Mikroreaktorik, Mikrofluidik) als 

unverzichtbare enabling technology für die photonische 

Instrumentierung. 

Damit sind intern bereits wichtige Weichen 

gestellt, um den Fokussierungsprozess des 

Bereiches forciert weiterzuführen. Zugleich sind 

diese Maßnahmen eingebunden in zentrale forschungsstrategische 

Aktivitäten der Universität 

und des Campus Beutenberg (z.B. Ernst-Abbe- 

Center for Photonics, Jenaer Innovationscluster 

„Optische Technologien“). Insgesamt sieht sich 

der Bereich „Mikrosysteme“ daher gut aufgestellt, 

um die Herausforderungen der inhaltlichen Profilierung 

als Chance für die weitere wissenschaftliche 

und struklurelle Entwicklung des Bereiches 

zu nutzen. 

and instruments defining not only the future 

scientific profile of the division, but also a main 

research topic of the IPHT. 

For this reason, the second essential change 

within the last year was already addressed: the 

progress achieved in the discussion about the 

future orientation and positioning of the IPHT. 

The structure commission being established by 

the supervisory board submitted a strategic recommendation 

for a scientific focusing and structural 

adaption of the optical orientated parts of 

IPHT, hence, also for the microsystems division. 

The future scientific direction of the division is 

described by “Photonic Instrumentation” being 

one of the newly identified research fields “Optical 

Fibers” and “Photonic Instrumentation”. 

With respect to the research activities of the division 

the focusing process stands on the one hand 

for a steady continuation of those approaches 

which fit into the new scientific profile i.e. combination 

of optical based chip arrays, microanalytical 

systems and infrared sensors with laser spectroscopic 

methods. However on the other hand, a 

focusing on photonic instrumentation is associated 

with significant changes in some traditional 

areas like microsystem concepts not based on 

optical principles. Furthermore the establishment 

and strengthening of new research fields 

requires a build-up or extension of new expertise 

like e.g. plasmonics, molecular and functional 

imaging, and THz techniques etc. For these purposes, 

young scientists groups need to be 

installed. 

The division has changed its department structure 

in accordance to the recommended focusing 

process (see scheme given above). In doing so 

the various groups remained largely unchanged 

however are put into a new context due to the 

changed classification. This restructuring process 

mainly concerns the association between spectral-optical 

techniques and instrumentation as 

well as the emphasis on microsystem technology 

(including microreactors, microfluidics) as an 

essential enabling technology for photonic instrumentation. 

All these efforts are setting internally the course 

for a successful continuation of the department’s 

focusing process. Additionally, these 

decisions are embedded into central strategic 

activities of the university and the campus (e.g. 

Ernst-Abbe-Center for Photonics, Jena innovation 

cluster “Photonic Technologies”). Overall 

the microsystems division is in a very good position 

not only to face the challenges arising due 

to the new profile of the IPHT but also to use this 

profiling opportunity as a chance to further pursue 

the scientific and structural development of 

the division.


3.2 Scientific Results 

3.2.1 Spectral optical techniques and 

instrumentation 

(J. Popp) 

The main objectives of the department “Spectral 

optical techniques and instrumentation” are the 

development of innovative optical and spectroscopical 

techniques as well as the design and 

experimental realization of advanced spectral 

optical devices and instruments for material and 

life sciences applications. A fundamental understanding 

of the processes taking place when light 

interacts with matter is an indispensable prerequisite 

for such developments. The ultimate 

goal in life sciences is a deeper understanding of 

the molecular processes occuring inside living 

cells. Furthermore chemical reactions, metabolite 

or bioactive compounds driven functionalities 

of biological cells as well as cell-cell communication 

need to be studied. Optical and spectroscopical 

techniques are extremely capable methods 

to study the aforementioned processes on a 

molecular level. Based on such knowledge e.g. in 

the field of health care the origin of diseases can 

be resolved, therapies can be optimized, and the 

occurence of diseases might be prevented or at 

least minimized. 

Apart from the derivation of structure-property 

relationships, the derivation of structure-dynamic 

relationships is one of the most challenging topics. 

Utilizing advanced nanostructuring technologies 

artificial bioinspired materials with new 

promising properties can be realized. 

To achieve all the aformentioned ambitious goals 

in material and life sciences innovative optical 

components and sophisticated frequency-, timeand 

spatially resolved innovative laser spectroscopical 

methods and systems ranging from the 

UV to the THz with unparalleled functionalities 

need to be developed. Therefore, future research 

activities have to focus on the development of 

innovative optical spectroscopy techniques and 

instruments like e.g.: 

– Frequency resolved spectroscopical techniques 

exploiting novel spectral ranges to access 

innovative matter structures, 

– Time-resolved methods ranging from nanosecond 

to subfemtosecond time resolution to 

study the entire range of time dependent structural 

changes, 

– Functional and molecular imaging – e.g. CARS 

microscopy, TIP-SERS, 

– High-efficient spectral imaging for diagnostics, 

– Applied plasmonics for the ultra-sensitive diagnostics, 

– Lensless microscopes, 

– THz-spectroscopy and -technique. 

Another research topic together with the Department 

“Photonic Chip Systems” shall combine the 

achievements of photonics especially of biophotonics 

with those from micro- and nano-technology. 

The main goal is the realization of new industrial 

products, like e.g. the development of a new 

generation of optical and spectroscopical microchips 

for a powerful point-of-care diagnostics. 

A. Spectral optical sensing 

(R. Riesenberg) 

The annual report 2004 was entitled “Micro-aperture 

arrays in optics” and that oft 2003 “Ultra-sensitive 

optical sensing”. The annual report 2005, 

presents innovative high performance optical 

sensing set-ups for spectral sensors, for a multisignal-reader 

and for micro-imaging. 

Future research topics might be high performance 

optical spectral and 5D-sensing architectures 

and lensless micro-imaging with synthetic 

apertures. 

Compact Raman spectral sensors 

(A. Wuttig, R. Riesenberg) 

The project “OMIB online monitoring and identification 

of microorganisms and bio aerosols” 

deals with a rapid identification of single microorganisms 

by means of micro Raman-spectroscopy 

in combination with statistical data evaluation 

procedures. Such a point-of-care detection 

demands compact high performance sensors. 

Therefore, two sensors based on new technologies 

were designed and manufactured: one 

for the UV-region and another for the NIR-region. 

For that reason, a special 2D-entrance aperture 

array implementing a set of 10 little different 

spectrometers in one design can be applied. The 

reconvolution of the different images avoids aberrations 

and increases the spectral resolution as 

well as the throughput (patent pended arrangements). 

The UV spectral sensor established in 

2004 has been successfully tested by recording 

Raman spectra of bacteria and minerals. More 

than 10.000 spectral points are detected by 

the UV-sensor exhibiting a detector-array of 

2048 × 512 pixels (spectral region 245 nm – 360 nm, 

spectral resolution up to 0.035 nm) simultaneously 

(see Fig. 3.1). 

A second NIR Raman spectral sensor (see 

Fig. 3A on color page) operates in the wavelength 

range of 780 nm to 1100 nm at a wavelength 

resolution of 0.3 nm (corresponding 

wavenumber resolution: 5 cm –1 at λ = 780 nm … 

2.5 cm –1 at λ = 1100 nm) using only a 1024 × 128 

pixel detector. 

63


Unconventional micro-imaging 

(R. Riesenberg, A. Grjasnow, M. Kanka, 

J. Bergmann) 

a) 

The coherent illumination of a sample by a pinhole 

generates an interference image (inlineholography). 

Results are given by unconventional 

microscopic imaging by illumination with a pinhole 

array, see Fig. 3.2. The microscopy by multiplane 

interference detection uses three or more 

interference pictures to reconstruct the objects. 

The actual technique is adapted to microscopic 

imaging. No reference is needed and a sub-pixel 

algorithm is implemented. 

The lensless technique is applied for wide field 

imaging. The illumination by a pinhole-array 

leads to a homogenous illumination with more 

intensity and so with an increased sensitivity. The 

field of view can be extended without loosing resolution 

(see Fig. 3.3). 

b) 

Fig. 3.1: a) View of the compact UV-Raman 

spectral sensor (circled) with a commercial 

Raman spectrometer HR 600 with nearly the 

same performance and b) measured spectra of 

bacillus pumius, DSM 361, excitation wavelength 

257 nm, with both instruments. 

Fig. 3.2.: Arrangement of illumination of the 

sample by a pinhole-array and interference 

detection by a CCD. 

64 

Fig. 3.3: a…d above: Digital inline holography. Objects (diameter of 0.5 µm) at the edge of the illumination 

cone (object plane in 10 µm distance from the pinhole-plane) can not be detected and reconstructed. For 

a pinhole diameter of 1 µm the aperture is limited. The field of view is limited [hologram at a distance of 

220 µm from the pinhole-plane, image area (200 µm) 2 , the field of view in the example is limited to about 

(9 µm) 2 . 

e…h below: The single pinhole is replaced by a pinhole-array (9 pinholes). Nearly all objects can be illuminated 

and reconstructed. The field of view is extended.


Spectral-reader-technologies 

(G. Nitzsche, R. Riesenberg) 

A concept and an optical design of a fluorescence 

reader for real-time PCR was developed 

which enables for the first time the detection of 

four different dyes in 96 samples simultaneously. 

It uses fiber-arrays, a lens-array and microaperture 

entrance arrays for parallel illumination as 

well as for highly parallel spectral detection. The 

design of the multi-signal polychromator with 

the 2D-slit-array consists of 4 × 25 single slits 

to generate 4 × 25 spectra on the CCD-chip (see 

Fig. 3B on color page). The design was adapted 

to a CCD-camera with 1024 × 1024 pixels of a 

pitch of 13 µm. 

B. Thermal microsensors 

(E. Keßler) 

Two projects (ISEL and FANIMAT-nano) could 

be started in 2005 while the MICRO-THERM 

project was finished. All these projects fit in the 

strategic orientation of the Thermal Microsensors 

group aimed at research and development 

of miniaturized thermal sensors (in particular 

for sensing electromagnetic radiation in 

the infrared and neighboring spectral regions) 

with a high and relatively uniform sensitivity/ 

detectivity in a broad spectral region and in a 

wide range of operating temperatures up to 

200 °C and more based on high-performance 

materials of the functional layers, e.g., the 

absorber, the thermoelectric transducer and the 

isolation/passivation layers. 

inalienable condition, the detector operating in a 

high-vacuum ambiance. 

The floating membrane pattern is generated by 

dry etching processes. Several chip designs and 

types of thermopiles comprising four and eight 

thermocouples with leg widths of 2 and 4 µm, 

respectively, deposited on stress-controlled silicon 

nitride, have been tested and provided for 

packaging (see. Fig. 3.4). Under vacuum conditions, 

responsivities of up to approximately 

3000 V/W and specific detectivities of 1.4 × 10 9 

cm Hz 1/2 /W were measured with the thermoelectric 

materials combination BiSb and Sb. Variations 

of the multi-layer absorber system aiming at 

the lowering of its thermal mass to decrease the 

thermal time constant resulted in responsivities of 

about 2400 V/W and time constants in the order 

of 40 ms for an optimized design. 

A significant potential for a further increase in 

responsivity and detectivity arises from substituting 

the p-material Sb by the high-figure-of-merit 

material BiSbTe and by the application of a new 

membrane technology based on SU-8. These 

efforts were continued after the termination of 

the project in September 2005. 

The scaled-down geometrical dimensions of the 

micro-thermopiles connected to the accomplishable 

high detectivities are an important first step 

towards the development of thermopile arrays 

with high spatial resolution; hence, this project is 

of particular importance for the further development 

of thermopile sensors at the IPHT. 

New generation of micro-thermopiles 

with high detectivity (MICRO-THERM) 

(E. Kessler, V. Baier, U. Dillner, A. Ihring) 

The main goal of the project MICRO-THERM, 

started in July 2004, was the development of 

microthermopiles for high-resolution low-temperature 

radiation thermometry (spectral range 8 to 

14 µm). The work was carried out in close cooperation 

with Optris GmbH, Berlin and Mikrotechnik 

& Sensorik GmbH, Jena. 

Essential specifications of this new generation of 

detectors are reduced dimensions of the receiving 

area (diameters ranging from 100 to 150 µm, 

thus permitting the enhancement of the distance 

ratio and the optical resolution of pyrometers up 

to 1:200 even with small optics), high specific 

detectivities above 1 × 10 9 cm Hz 1/2 /W and comparatively 

low thermal time constants in the range 

of 100 ms. These features are achieved by a 

thermally optimized thermopile arrangement on a 

floating membrane with supporting bridges smaller 

than 10 µm and reduced thicknesses of active 

and passive layers, thereby reducing parasitic 

thermal conductances and masses, and, as an 

Fig. 3.4: MICRO-THERM thermopile chip on 

TO-5 base plate, wire-bonded. 

Infrared sensors having increased standards 

of performance (ISEL) 

(E. Kessler, V. Baier) 

Basically, the aims of this project are both to shift 

the long-term operating temperature of thermopile 

IR sensors beyond the limit of 180 °C, 

reached in the former project HOBI, towards 

250 °C and enhancing the responsivity of the 

sensors. This shall be achieved by replacing the 

65


typically used thermoelectric materials BiSb and 

Sb with materials of higher thermoelectric figures 

of merit, which moreover have higher temperature 

stabilities. For the prediction of sensor properties 

by parametric thermal modeling the transport 

coefficients of these materials have to be 

characterized up to 300 °C. The according measurement 

equipment shall be built in 2006. 

The high-effective ternary BiSbTe was chosen 

as thermoelectric p-material. It was sputtered 

by dc technology under optimized conditions. 

Thereby a power factor of P = α 2 σ = 1.9 10 –3 W/ 

(m K 2 ) (Seebeck coefficient α = 189 µV/K and 

electrical conductivity σ = 53 540 (Ω m) –1 ) was 

obtained at room temperature. In a first run sensors 

of TS 80 type were manufactured for high 

temperature applications with this technology 

using CuNi as n-material. However, some problems 

appeared in the wet-chemical patterning of 

the BiSbTe films, which can most likely be attributed 

to the specific sputtering conditions. The 

averaged responsivity S = 51 V/W is enhanced 

by a factor of 1.6 compared with BiSb/Sb and 

the temperature coefficient of responsivity is 

lowered by a factor of 2.7 in the room temperature 

range. Sensors of this type were delivered 

for testing and qualifying to the project partner 

Micro-Hybrid Electronic. 

in vacuum-tight sensor housings are planned to 

test the compatibility of the ceramic films with 

high-temperature interconnection and packaging 

techniques. Thus, the project combines the competence 

of the three partners HITK (ceramic 

nano-powders), IPHT (thermoelectric sensor 

functional layers) and MHE (interconnection and 

packaging techniques). 

In 2005, first investigations concerning new 

absorber layers were carried out. The absorption 

coefficients of several high-temperature resistant 

layers supplied by HITK and based on different 

materials were measured at IPHT using a FTIRspectrometer. 

Moreover, the morphology of the 

layers was characterized by SEM (see Fig. 3.5). 

For layers of a special soot, absorption coefficients 

exceeding 90% were found in the wavelength 

range between 8 and 14 µm. 

66 

Nanotechnologies for the functionalization 

of ceramic materials (FANIMAT-nano) 

(E. Kessler, U. Dillner) 

FANIMAT-nano represents one so-called “growth 

core” in the Program “Innovative Regional 

Growth Cores” launched by the Federal Ministry 

of Education and Research (BMBF). This is a 

development support program aimed towards 

regional cooperations with platform technology 

and important features which make them unique 

in their field of competence. The target region of 

FANIMAT-nano is the region Jena-Hermsdorf in 

the federal state Thuringia. Within the FANIMATnano 

growth core, the Thermal Microsensors 

group at IPHT Jena is involved in a project called 

“Structurable ceramic thin films for high-temperature 

stable infrared (HT-IR) sensors” which started 

in September 2005. Our partners in this project 

are the Hermsdorf Institute for Technical 

Ceramics (HITK) and the Micro-Hybrid Electronics 

GmbH (MHE), also located in Hermsdorf. 

The development objectives of this project 

include the creation and characterization of 

structurable polyceramic or solgel thin film materials 

which can be integrated in the stacks of 

functional layers of thermoelectric infrared 

microsensors as high-temperature resistant 

absorber layers and isolation or passivation layers, 

respectively. Furthermore, the development 

of thermopile sensor chips with operating temperatures 

up to 250 °C employing those ceramic 

films is envisioned. Investigations of these chips 

Fig. 3.5: A SEM micrograph of a special hightemperature 

resistant soot absorber layer. 

Calorimetric space debris detector 

(E. Kessler, V. Baier, U. Dillner, A. Ihring) 

A detector array of 16 × 16 thermopile sensors 

based on the TS100/Flow design was developed 

as an integrated part of a breadboard model of a 

new type of in-situ space debris and meteoroid 

detector to determine the impact energy of 

micron-sized particles by calorimetric measurements 

(see Fig. 3C on the color page). The partners 

of this project are the eta_max Space 

GmbH, Braunschweig, the Physikalisch-Technische 

Bundesanstalt, and the TU Braunschweig. 

The thermopile array is completed with an appropriate 

plate absorber array supported by small 

spacing columns of 20 µm height made of SU-8 

and thermally connected to the sensitive areas of 

the thermopiles each to convert the kinetic energy 

of the impacting particles into a temperature 

increase. An estimate of an average thermal 

effect gives temperature rises of 2…3 mK which 

can be clearly detected by the thermopiles. Initial 

tests using laser pulse heating were successfully 

performed.


3.2.2 Photonic chip systems 

(W. Fritzsche) 

The detection and manipulation of molecular 

ensembles as well as individual molecules based 

on miniaturized and paralleled photonic approaches 

represent the main objective of the department. 

It is therefore aimed at two main research directions: 

(I) molecular construction techniques in 

order to develop required novel methods for 

manipulation and detection at the molecular level 

and (II) chip technology to convert these developments 

into (bio)analytical applications. 

The ultimate goal for both ultrasensitive bioanalytics 

and other possible applications for molecular 

complexes (such as nano-electronics and 

-optics) is the control of the constructs at the 

nanoscale and the single molecule level. During 

the last years novel approaches for single molecule 

handling have been developed in the 

department. They address the integration problem 

by aiming at parallel approaches to position 

individual molecular structures in prestructured 

microsystem environments, such as microelectrode 

gaps. In 2005, this development was 

advanced by the adaptation of dielectrophoretic 

methods. The last years witnessed also impressive 

results in the synthesis and optical characterization 

of designer metal nanoparticles, providing 

particles with defined spectral properties. 

Thereby, the main focus of the department 

shifted towards molecular plasmonics, a field 

that combines the effect of surface plasmon 

resonance at metal nanostructures, such as 

metal nanoparticles, with molecular components. 

These molecular structures can either be 

used to influence the optical properties, thus representing 

the analyte (bioanalytics), or to realize 

novel nanoscale hybrid complexes of metal 

nanoparticles and molecular components. In 

these complexes, the molecules act as backbone 

to realize a connection with defined geometry 

(distance, angle etc.) at the nanometer 

scale. This research field was massively pushed 

by the international symposium “Molecular Plasmonics” 

that was organized in May by the 

department and brought many of the world leading 

scientists in this field to the IPHT. 

In order to convert these developments into applications 

the established platform technologies for 

DNA arraying and model system evaluation has 

been further extended. These activities included 

the first successful demonstration of the electrical 

DNA chip detection system for a biological 

application and the further extension of partnerships 

with innovative bioanalytic companies in 

order to get market-driven and application-oriented 

impulses for future research and development 

in this promising field. 

A. Molecular nanotechnology 

and plasmonics 

Electrical manipulation of DNA 

(A. Csaki, A. Wolff, R. Kretschmer, W. Fritzsche) 

The control of a precise positioning of (bio) molecular 

complexes onto microstructured substrates 

is a key requirement for molecular nanotechnology. 

The application of electrical fields 

represents an interesting alternative for this purpose. 

Electrical fields are a well-established technique 

for molecular manipulation and they are 

easily directed with microscale precision using 

microelectrodes. Therefore, prestructured microelectrodes 

that will later act as contacts to the 

complexes were utilized to apply fields of alternating 

current in order to position polarizable 

molecular structures from solution by dielectrophoresis. 

Molecules of lambda-phage DNA 

(about 16 µm long) could be successfully positioned 

in electrode gaps as revealed by fluorescence 

and scanning force microscopy. 

Fig. 3.6: Defined positioning of DNA molecules in 

microelectrode gaps (100 nm gold) on silicon oxide 

substrates by dielectrophoresis using 300 ng/µl 

lambda-phage DNA and a field with 1 V/µm and 

1 MHz. AFM-images (left and center) and fluorescence 

image (YOYO-1 as DNA-specific dye). 

Substrate-controlled orientation of DNA 

superstructures 

(J. Vesenka, A. Wolff, A. Reichert, W. Fritzsche) 

Another approach for aligned positioning of (bio) 

molecular structures is the utilization of substrate-inherent 

patterns of e.g. electrostatic 

charges. The observed effect of alignment of 

DNA superstructures (G wires) on mica substrates 

following three major directions was characterized 

and studied. By resolving the substrate 

of such samples with atomic resolution in the 

same experiment, it was found that the G-wires 

seem to align with the next nearest neighbor 

potassium vacancy sites of mica. Such auto-orientation 

phenomena could be utilized to address 

the fine-positioning of molecular structures e.g. in 

network formation. The self-organization character 

and the massive parallelization are features 

that make this approach very promising for future 

applications. 

67


particles with defined optical features are 

required. Therefore, core-shell particles consisting 

of Ag/Au or Au/Ag were identified as especially 

promising systems to tune the resulting plasmon 

resonance (see figure 3D on the color 

page). 

Moreover, optical characterization at both ensemble 

and single particle level are needed. The last 

year witnessed the set-up of a spectroscopy system 

with single particle capabilities in the department 

(see figure 3E on the color page). Experiments 

demonstrated the ability to yield UV-VIS 

spectra of individual nanoparticles, together with 

AFM and optical images of this structure. 

Fig. 3.7: Alignment of DNA structures (G wires) 

following the atomic arrangement in mica crystal 

planes. (Top) Overview AFM image (left) with histogram 

of orientation of G wire segments (right), 

(bottom) orientation of G wires as compared to 

the crystal arrangement of the underlying mica 

(insets) on air (left) and in buffer (right). 

Metal nanoparticles for molecular plasmonics 

(A. Steinbrück, A. Csaki, W. Fritzsche) 

Utilizing the optical properties of metal nanoparticles 

in combination with molecular complexes 

represents a promising recent development in 

molecular nanotechnology with envisioned applications 

especially for bioanalytics but also in 

nanophotonic devices. This field is based on the 

surface plasmon resonance effect in the particles. 

In order to realize complex systems the optical 

properties of the nanostructures have to be 

tuned and approaches to synthesize designer 

Photonic nanostructures combined 

with metal nanoparticles 

(A. Csaki, A. Steinbrück, S. Schröter, 

W. Fritzsche) 

Photonic nanostructures, such as nanoaperture 

arrays, show promising novel effects regarding 

e.g. transmission of light. The established experience 

with nanoparticle handling and ultramicroscopic 

characterization was applied in order to 

position metal nanoparticles in nanoapertures. 

Comparison of the transmission characteristics 

of the apertures with and without particles 

showed a higher transmission in the case of particle-modified 

openings. This effect seemed even 

enhanced when the particle where enlarged 

using specific metal deposition. 

68 

Fig. 3.8.: Synthesis of gold-silver core-shell nanoparticles 

yields designer particles with adjustable 

surface plasmon resonance peak between the 

bands of pure gold and pure silver nanoparticles. 

The particles were formed using specific silver 

deposition onto gold particles using various silver 

salt concentrations. All spectra are ensemble 

measurements. 

Fig. 3.9: Light transmission of microfabricated 

holes with sub-wavelength dimensions in a 

chromium layer in dependence on the presence 

of metal nanoparticles. AFM images (top) and 

optical images (bottom) of three holes without 

particle (left), with an individual particle (center), 

and with a particle aggregate (right).


B. DNA-chip Technology 

Characterization of specific metal deposition 

at single particle level 

(G. Festag, W. Fritzsche) 

Specific reductive deposition of silver on gold 

nanoparticles has a tremendous importance for 

numerous processes in molecular construction 

as well as in various kinds of bioanalytical methods 

for signal enhancement. AFM was used to 

study this process at the single particle level in 

order to reveal the influence of parameters like 

particle size, composition of enhancement solution, 

length of incubation etc. Because on-line 

measurements were not feasible, techniques 

were developed to relocate certain positions at 

the sample in order to image particle arrangements 

after every enhancement step. 

Target DNA binding is detected by a significantly 

reduced resistance in the respective gap 

because binding of the labeled target DNA will 

lead to metal deposition in a subsequent signal 

enhancement step. The results showed that the 

electrical DNA chip detection is able to clearly 

differentiate between the different species and 

allows for a straightforward identification of 

microorganisms. 

Fig. 3.10: AFM study of the growth of a silver 

shell on gold nanoparticles at the single particle 

level. Top: Three images of the same sample 

position after different growth times; Bottom: 

Dependence of particle height on growth time 

and various start diameters. 

Fig. 3.11: Measurements from a typical experiment 

with the electrical DNA-chip system show a 

clear signal for the species K. setea (set, left column) 

and the positive control from a consensus 

sequence (uni). An optical view on an electrical 

chip visualizes the silver deposition (especially in 

the 1+2 row and the last one) that leads to the 

electrically detectable signal at these positions. 

Electrical identification of microorganisms 

by DNA-chip technology 

(T. Schüler, R. Möller, W. Fritzsche) 

The electrical DNA-detection system that has 

been developed at the IPHT was for the first time 

applied to biological samples (PCR fragments). 

In collaboration with the Leibniz Institute for Natural 

Product Research and Infection Biology – 

Hans-Knöll-Institute (HKI) Jena, the electrical 

DNA detection was utilized to identify species 

of microorganisms. Therefore, capture DNA 

sequences, specific for each of the studied 

species, were immobilized into the electrode 

gaps prior to incubation with the target DNA. 

3.2.3 Micro system technology 

(Th. Henkel) 

Photonic instrumentation strongly depends on 

the integration of micromechanical and microoptical 

components with critical dimensions in the 

nanometer scale. Furthermore, LabOnChip systems 

for integrated sample placement and sample 

preparation are required for high-throughput 

microoptical applications, the retrieval of spatialand 

time-resolved spectral information and localized 

photochemical activation of sample ingredients. 

The aim of the microsystem technologies 

department is the development and fabrication of 

components for photonic instrumentation and the 

69


70 

application of LabOnChip based microfluidic 

devices for integrated sample preparation and 

placement in micro optical systems. The newly 

developed technology for the preparation of allglass 

microfluidic devices with coplanar faces are 

in compliance with the requirements of microoptical 

systems. 

A. Microfluidics of liquid-liquid 

segmented sample streams 

Liquid-liquid segmented flow based on highly 

integrated LabOnChip devices offers a powerful 

and versatile approach for high-throughput processing 

of linearly organized sample streams. 

Currently, these fluidic networks are built up from 

individual chip modules which are interconnected 

by HPLC-capillaries. Since all operations have to 

be in plug mode, micro droplets need to be large 

enough, to seal a given channel completely. For 

widely used HPLC capillaries with an inner diameter 

of 0.5 mm this critical volume is about 

64 nl. With respect to this, modular systems are 

limited in compartment size and thus in throughput 

and sample density. Processing of segmented 

sample streams uses interface-generated 

forces for the maniplation of the micro droplets at 

functional nodes with optimized geometry and 

wetting conditions. Miniaturization of the channel 

system and the droplet volume increases the curvature 

of the interfaces and thus the pressure 

drop generated at the interface. In conclusion, 

not only throughput and sample density, but also 

reliability of the processes benefit from miniaturization 

and integration. Considering this, our work 

in development of LabOnChip devices is focused 

on the development of integrated LabOnChip 

devices for segmented flow based application. 

Toolkit for computational fluidic simulation 

and interactive parametrization 

of segmented-flow based fluidic networks 

(N. Gleichmann, M. Kielpinski, D. Malsch, 

T. Henkel) 

The main objectives of this work are the application 

of principles of electronic design automation 

(EDA) to the model based design and parameterization 

of segmented-flow based micro fluidic 

networks. This approach will significantly increase 

the efficiency in development of highly 

integrated LabOnChip devices for custom fluidic 

and micro chemical protocols. By that way, 

research and development of micro chemical and 

screening applications will benefit of the promising 

micro droplet-based approach of segmented 

flow. Our toolkit is based on a computational network 

of fluidic nodes, which are interconnected 

by virtual fluid ports for the transfer of segment 

streams. The particular behaviour of a functional 

node may be given by user definable rules, which 

are derived from experimental data and Computational 

Fluid Dynamics (CFD) simulations of the 

functional element. The geometry is dynamically 

generated from photolithographic mask data and 

process parameters. Segmented sample streams 

are implemented as lists. For interactive inspection 

of the interface geometries inside a functional 

node a software interface to the surface evolver 

is implemented. 

Fig. 3.12: Geometry of a drop passing a T- 

shaped junction with nozzle. 

The surface evolver starts with a dynamically 

generated mesh of the node itself and the correct 

position of the micro droplets inside the element. 

Wetting conditions and local contact angles 

are non-constraints and dynamically calculated 

from the interface energies. Channel geometry is 

generated from the photo lithographical mask 

data and the parameters of the etch process. The 

parameterization is realized by interactively 

changing the mask geometry of the fluidic nodes 

and analysing the results of the fluidic simulation. 

A complete run for a dynamic simulation takes a 

view minutes only. The network can operate with 

pressure and volume flow constraints. Currently it 

is implemented for non compressible liquid/liquid 

two-phase flows and the micro system technology 

of isotropic wet etching. The Toolkit consists of 

a C++ class library of components for fluidic network 

simulation, for user interaction and network 

visualization and for interfacing the surface 

evolver. In a first test case it was successfully 

applied for modelling a double injector module. 

Conceptual work on self-controled fluidic 

networks for segmented-flow based applications 

(M. Kielpinski, D. Malsch, G. Mayer, J. Albert, 

T. Henkel) 

Functional elements for sample generation, dosing 

of liquid into droplets and retrieval of individual 

samples from the sample stack, generation of 

stacked sequences and controlled fusion of adjacent 

segments within it’s segment stream have 

been reported and successfully applied for highthroughput 

applications. These processes are 

mainly effected and controlled by the dynamics of 

interface evolution at functional nodes and spe-


Fig. 3.14: y-Shaped junction for self syncronized 

droplet fusion of two generated sample streams 

(above) and microfluidic device, consisting of the 

element and a total of four injectors for sample 

stream generation and postprocessing by dosing 

operations (below). 

cial flow dynamics inside the micro droplets. 

Additional functionality is requested and proposed. 

This includes controlled 1:N fusion of multiple 

droplet sequences and controlled 1:N segment 

splitting. Unfortunately, these operations 

require synchronization of the flow of multiple 

droplet sequences and seem to require integration 

of actors and sensors for closed loop flow 

control into the micro fluidic device. Application of 

these approaches to fluidic networks would 

require a huge amount of integrated sensors and 

actors, each of them interfering with the others 

and thus, the software for control of these networks 

would be very complicated. 

Analyzing a segmented flow based system we 

can recognize, that all prerequisites for application 

of self control to these special micro fluidic 

systems are available. There are mobile interfaces, 

which can be used to seal junctions of the 

main channels temporarily. Obstructions can be 

used to increase or widenings to decrease the 

pressure, generated by the curved droplet interface. 

By that way, segmented flow provides the 

basics for the implementation of self-controlled 

functional elements and their integration into 

micro fluidic networks. 

Actual development has been focused on a first 

implementation of these concepts for the selfsynchronized 

1:1 fusion of two segment sequences. 

The functional node consists of a Y-shaped 

junction, where each inlet is equipped with an 

obstruction. The two inlet ports are connected by 

a bypass. If one segment reaches the obstruction 

it stops and the carrier flow is guided along the 

bypass to the second inlet of the Y-junction. It 

remains at the obstruction until a second droplet 

from the opposite channel reaches the junction. 

After this, fusion occurs followed by ejection of 

the formed droplet. 

Microfluidic devices for investigation of the fusion 

process have been developed and fabricated. 

Fig. 3.13: CFD-Simulation (right column) and 

experimental data (left column) of self-synchronized 

1:1 droplet fusion at a Y-junction with integrated 

bypass. Two sequences of micro droplets 

are transported each with constant flow rate to 

the Y-junction. The droplet, which first arrives at 

the stricture stops (Part B) and the carrier flow is 

guided through the bypass until a droplet from the 

opposite sequence arrives (Part C). Now droplet 

fusion occures (Part D) and the coalesced volume 

is ejected from the element. 

LabOnChip based system for identification 

of cancer cells 

(J. Felbel, M. Urban, M. Kielpinski, G. Mayer, 

T. Henkel) 

Main aim of the collaboration between health professionals, 

molecular biologists and micro system 

experts is the development of a LabOnChip based 

analysis system permitting the partly automated 

execution of micro flow-through-RT-PCR for the 

detection and counting of cancer cells in samples 

71


72 

from cancer patients. The device combines techniques 

of segmented flow with thermal management 

of sample streams, according the given molecular 

biological protocol and real-time optical 

readout of the amplification process. The PCR 

reaction unit was developed as all-glass microchannel 

chip module, which is based on a patented 

flow-through thermocycler-chip. Thermal management 

is realized by a micro system made heat 

plate, providing thermal control and management 

for up to four thermal zones with minimized dimensions 

of the thermal gap between the heater 

zones. The PCR sample droplets are cycled during 

the flow over specific temperature zones (see figure 

3F on the color page). Main advantage of this 

LabOnChip module is the ability to process a high 

number of individual samples, each embedded in 

a single micro droplet by the serial flow regime. 

Possible fields of application of the RT-PCR are 

clinical diagnostics. For the establishment of the 

system disseminated tumour cells in the blood of 

patients with cervical carcinoma will be detected. 

A special characteristic of these tumour cells is 

the expression of oncogenes encoded by Human 

Papillomaviruses (HPV), which can be specifically 

amplified by this procedure. 

A successful PCR reaction of HPV targets in 

microchannels was demonstrated. 

B. Chipmodules for analysis 

of micro combustion 

(G. Mayer, J. Albert, T. Henkel) 

Chip modules for investigation of miniaturized 

combustion processes have been developed and 

successfully tested during an internal collaboration. 

Integrated static micro-mixers allow the efficient 

mixing of fuel gas and oxygen at macroscopic 

explosive conditions and the controlled combustion 

at the outlet nozzle. Up to 2300 K may be 

generated in micro-flames with a width of 2 mm 

and a height of 3 mm during micro combustion of 

Fig. 3.15: All-glass chip with integrated static 

mixer for analysis of micro flames. 

oxygen and hydrogen. Detailed results on the 

analysis of these micro chemical high temperature 

processes are shown in the contribution of 

the laser diagnostics department in this annual 

report. 

3.3 Appendix 

Partners 

National co-operation 

• Alphacontec, Berlin 

• Analytik AG, Jena 

• Applikationszentrum Mikrotechnik, Jena 

• ART-Photonics GmbH, Berlin 

• Bartec Componenten und Systeme GmbH, 

Gotteszell 

• Berliner Glas KGaA Herbert Kubatz GmbH & 

Co., Berlin 

• Bosch und Siemens Hausgeräte GmbH, 

Traunreuth 

• Cetoni GmbH, Gera-Korbußen 

• Deutsches Zentrum für Luft- und Raumfahrt 

e.V., Berlin 

• Entec GmbH, Ilmenau 

• eta_max space GmbH, Braunschweig 

• Fachhochschule Jena 

• Fachhochschule Hannover, FB Elektrotechnik 

• Fachhochschule Wiesbaden, 

FB Physikalische Technik 

• Faseroptik Jena GmbH, Bucha 

• Fraunhofer Institut für Biomedizinische 

Technik (IBMT) Nuthetal 

• Friedrich-Schiller-Universität Jena 

– Institut für Materialwissenschaft und Werkstofftechnologie 

– Institut für Physikalische Chemie 

– Institut für Physiologie II 

– Klinik für Frauenheilkunde 

• Fritz-Lipmann-Institut, Jena 

• Hans-Knöll-Institut, Jena 

• Hermsdorfer Institut für Technische Keramik 

e.V., Hermsdorf 

• HL-Planartechnik, Dortmund 

• HSG, Institut für Mikrotechnik und Informationstechnik 

e.V., Villingen-Schwenningen 

• IL Metronic Sensortechnik GmbH, Ilmenau 

• IMPAC Infrared GmbH, Frankfurt/Main 

• Industrieanlagen-Betriebsgesellschaft mbH, 

Ottobrunn 

• Institut für Bioprozess- und Analysenmesstechnik 

e.V. (iba), Heiligenstadt 

• Institut für Mikrotechnik (IMM), Mainz 

• Jena Bioscience GmbH, Jena 

• JENOPTIK Laser, Optik, Systeme GmbH, 


• JENOPTIK Mikrotechnik GmbH, Jena 

• Kayser-Threde GmbH, München 

• Labor Diagnostik Leipzig GmbH, Leipzig 

• Max-Born-Institut, Berlin 

• Micro-Hybrid Electronic GmbH, Hermsdorf


• Mikrotechnik + Sensorik GmbH, Jena 

• NFT Nanofiltertechnik, Bad Homburg 

• Optris GmbH, Berlin 

• PTB, Labor „Wechsel-Gleich-Transfer“, 

Braunschweig 

• Quantifoil Instruments GmbH, Jena 

• RapID, GmbH, Berlin 

• Raytek GmbH, Berlin 

• Scanbec GmbH, Halle/Saale 

• Schering AG, Berlin 

• Seleon GmbH, Dessau 

• SurA Chemicals GmbH, Jena 

• Technische Universität Bergakademie 

Freiberg, Institut für Physikalische Chemie 

• Technische Universität Ilmenau 

– Physikalische Chemie/Mikroreaktionstechnik 

– Zentrum für Mikro- und Nanotechnologie 

• Universität Leipzig, Institut für Virologie 

• Universität Dortmund 

• Universität Würzburg 

International co-operation 

• ALBEDO Technologies, Razès, France 

• Anhui Institute of Optics and Fine Mechanics, 

Hefei, China 

• Bundesamt für Eich- und Vermessungswesen 

(BEV), Wien, Austria 

• CAL-Sensors, Inc., Santa Rosa, CA, USA 

• CEA, Saclay, France 

• Centro National de Metrologia (CENAM), 

Querétaro, Mexico 

• Dalhousie University, Dept. of Physics and 

Atmospheric Science, Halifax, Canada 

• EDAS-Astrium-CRISA, Madrid, Spain 

• Foster-Miller, Waltham, MA, USA 

• Hebrew University, Jerusalem, Israel 

• HORIBA Jobin Yvon, Villeneuve, France 

• IR System Co. Ltd., Tokyo, Japan 

• Institutul National de Metrologie (INM) 

Bukarest, Romania 

• Istituto Elettrotecnico Nazionale (IEN), Turin, 

Italy 

• Karolinska Institutet, Clinical Research Center, 

Stockholm, Sweden 

• Key Techno Co., Ltd. Tokyo, Japan 

• Nanoprobes, Inc., Yaphank, NY, USA 

• Nanotec Electronica S.L., Madrid, Spain 

• National Institute of Metrology (NIMT), 

Bangkok, Thailand 

• National Measurement Institute (MNI), 

Lindfield, Australia 

• National Metrology Laboratory (NML), Sepang, 

Malaysia 

• National Research Counsil (NRC), Ottawa, 

Canada 

• Országos Mérésügyi Hivatal (OMH), 

Budapest, Hungary 

• Politechnika Śla¸ska, Gliwice, Poland 

• Slovenian Institute of Quality and Metrology 

(SIQ), Ljubljana, Slovenia 

• Standards, Productivity and Innovation Board 

(SPRING), Singapore 

• Tokyo University, Mechanical Engineering, 

Japan 

• Ukrmetrteststandart (UkrCSM), Kiev, Ukraine 

• Ulusal Metroloji Enstitüsü (UME), Gebze, 

Turkey 

• University of Bologna, Dipartimento di Biochimica, 

Italy 

• Universidad Carlos III, Optoelectronics and 

Laser Technology Group, Madrid, Spain 

• University of Copenhagen, Department Medical 

Biochemistry and Genetics, The Panum 

Institute, Denmark 

• University of Newcastle, Department of 

Chemistry, UK 

• University Warsaw, Institute of Micromechanics 

and Photonics, Poland 

Editor 

W. Fritzsche, W. Knoll: 

Special Issue “Nanoparticles for Biotechnology 

Applications” 

IEE Proceedings Nanobiotechnology, 2005 

Book chapters 

G. Festag, U. Klenz, T. Henkel, A. Csáki, 

W. Fritzsche: 

“Biofunctionalization of metallic nanoparticles 

and microarrays for biomolecular detection” 

in “Nanotechnologies for the Lifesciences” 

(book series) – Vol.1 “Biofunctionalization of 

Nanomaterials” (Ed. by C. Kumar, Wiley-VCH, 

2005) 

Publications 

V. Baier, R. Födisch, A. Ihring, E. Kessler, 

J. Lerchner, G. Wolf, J. M. Köhler, M. Nietzsch, 

M. Krügel: 

“Highly sensitive thermopile heat power sensor 

for micro-fluid calorimetry of biochemical processes” 

Sensors and Actuators A 123–124 (2005) 

354–359 

B. Dietzek, R. Maksimenka, W. Kiefer, 

G. Hermann, J. Popp, M. Schmitt: 

“The excited state dynamics of magnesium 

octaethylporphyrin studied by femtosecond timeresolved 

four-wave-mixing” 

Chem. Phys. Lett. 415, (2005) 94–99 

T. Eick, A. Berger, D. Behrendt, U. Dillner, 

E. Kessler: 

“An Alternative Method for Measuring the 

Responsivity of Thermopile Infrared Sensors” 

Proceedings of Sensor 2005, 12th International 

Conference, Vol. I (2005) 109–114 

73


74 

J. Felbel, A. Reichert, M. Kielpinski, M. Urban, 

D. Malsch, T. Henkel: 

„Entwicklung von mikrofluidischen Chipsystemen 

für biologische Anwendungen“ 

7. Dresdner Sensor-Symposium in Dresdner 

Beiträge zur Sensorik (Editor: G. Gerlach, H. Kaden), 

TUDpress Vol. 24 (2005), Ergänzungsband, 

Seite LMP3 

J. Felbel, A. Sondermann, M. Kielpinski, 

M. Urban, T. Henkel, N. Häfner, M. Dürst, 

J. Weber, W. Fritzsche: 

“Single-cell-diagnostics with in-situ RT-PCR in 

flow-through microreactors: thermal and fluidic 

concepts” 

Proceedings of BioPerspektives 2005, Pub. 

Dechema, Vol. 2 (2005) 265 

G. Festag, A. Steinbrück, A. Wolff, A. Csaki, 

R. Möller, W. Fritzsche: 

“Optimization of Gold Nanoparticle-Based DNA 

Detection for Microarrays” 

Journal of Fluorescence 15 (2005) 161–170 

T. Funck, M. Kampik, E. Kessler, M. Klonz, H. Laiz, 

R. Lapuh: 

“Determination of the AC/DC Voltage Transfer 

Standards at Low Frequencies” 

IEEE Transactions on Instrumentation and Measurement 

Vol. 54, No. 2 (2005) 807–809 

F. Garwe, A. Csaki, G. Maubach, A. Steinbrück, 

A. Weise, K. König, W. Fritzsche: 

“Laser pulse energy conversion on sequencespecifically 

bound metal nanoparticles and its 

application for DNA manipulation” 

Medical Laser Application 20 (2005) 201–206 

A. Grjasnow, R. Riesenberg, A. Wuttig: 

“Lenseless coherent imaging by multi-plane interference 

detection” 

Proceedings of the 106 th Conference of the 

DGaO (2005) A39 

P. M. Günther, F. Möller, T. Henkel, J. M. Köhler, 

G. A. Groß: 

“Formation of Monomeric and Novolak Azo Dyes 

in Nanofluid Segments by Use of a Double Injector 

Chip Reactor” 

Chemical Engineering & Technology 28, Iss. 4 

(2005) 520–527 

Z. Guttenberg, H. Müller, H. Habermüller, 

A. Geisbauer, J. Pipper, J. Felbel, M. Kielpinski, 

J. Scriba, A. Wixforth: 

“Planar chip device for PCR and hybridization 

with surface acoustic wave pump” 

Lab on a Chip, Vol. 5, Iss. 3 (2005) 308–317 

M. Harz, P. Rösch, K.-D. Peschke, 

O. Ronneberger, H. Burkhardt, J. Popp: 

“Micro-Raman spectroscopic identification of 

bacterial cells of the genus Staphylococcus and 

dependence on their cultivation conditions” 

Analyst, 130 (2005) 1543–1550 

E. Kessler, V. Baier, U. Dillner, J. Müller, A. Berger, 

R. Gärtner, S. Meitzner, K.-P. Möllmann: 

“High-Temperature Resistant Infrared Sensing 

Head” 

Proceedings of Sensor 2005, 12 th International 

Conference, Vol. I, (2005) 73–78 

J. M. Köhler, T. Henkel: 

“Chip devices for miniaturized biotechnology” 

Applied Microbiology and Biotechnology 69, 

Iss. 2 (2005) 113–125 

J. M. Köhler, J. Wagner, J. Albert, G. Mayer, 

U. Hübner: 

„Bildung von Goldnanopartikeln und Nanopartikelaggregaten 

in statischen Mikromischern in 

Gegenwart von Rinderserumalbumin“ 

Chemie Ingenieur Technik 77, No. 7 (2005) 

867–873 

J. Lerchner, A. Wolf, G. Wolf, V. Baier, 

E. Kessler: 

„Chip-Kalorimeter zur on-line-Detektion biomolekularer 

Prozesse“ 

7. Dresdner Sensor-Symposium (Editor: G. Gerlach, 

H. Kaden) TUDpress (2005) 211–214 

An-Hui Lu, W. Schmidt, S. Tatar, B. Spliethoff, 

J. Popp, W. Kiefer, F. Schueth: 

“Formation of amorphous carbon nanotubes on 

ordered mesoporous silica support” 

Carbon, 43(8) (2005) 1811–1814 

G. Maubach, D. Born, A. Csaki, W. Fritzsche: 

“Parallel Fabrication of DNA-Aligned Metal 

Nanostructures in Microelectrode Gaps by a Self- 

Organization Process” 

Small 1 (2005) 619–624 

R. Möller, R. D. Powell, J. F. Hainfeld 

W. Fritzsche: 

“Enzymatic control of metal deposition as key 

step for a low-background electrical detection for 

DNA chips” 

Nano Letters (2005) 1475–1480 


“Chip-based electrical detection of DNA” 

IEE Proceedings Nanobiotechnology 152 (2005) 

47–51 

U. Neugebauer, A. Szeghalmi, M. Schmitt, 

W. Kiefer, and J. Popp: 

“Vibrational Spectroscopic Characterization of 

Fluoroquinolones” 

Spectrochimica Acta Part A, 61 (2005) 1505–1517 

R. Riesenberg: 

“Pinhole array and lenseless microscopic microimaging” 

Proceedings of the 106 th Conference of the 

DGaO (2005) A26


P. Rösch, M. Schmitt, K.-D. Peschke, 

O. Ronneberger, H. Burkhardt, H-W. Motzkus, 

M. Lankers, S. Hofer, H. Thiele and J. Popp: 

“Chemotaxonomic identification of single bacteria 

by micro-Raman spectroscopy: Application to 

clean room relevant biological contaminations” 

Appl. Environm. Mikrobiol. 71 (2005) 1626–1637 

P. Rösch, M. Harz, M. Schmitt, J. Popp: 

“Raman spectroscopic identification of 

yeast cells” 

J. Raman Spectrosc. 36 (2005) 377–379 

M. Schmitt and J. Popp: 

„Femtosekundenlaser-Mikroskopie“ 

Laser Technik Journal, 4 (2005) 67–71 

single 

M. A. Strehle, P. Rösch, M. Baranska, H. Schulz, 

J. Popp: 

“On the way to a quality control of the essential 

oil of fennel by means of Raman spectroscopy” 

Biopolymers, 77(1) (2005) 44–52 

A. Wuttig: 

“Optimal transformations for optical multiplex 

measurements in the presence of photon noise” 

Appl. Opt. 44 (14) (2005) 2710–2719 

Invited talks 

W. Fritzsche, G. Maubach, R. Kretschmer, 

A. Csáki, D. Born: 

“Parallel approaches for the integration of individual 

molecular structures into electrode arrangements” 

EU Workshop “Nanotechnology Information 

Devices”, Madrid (Spain), January 31–February 


W. Fritzsche: 

“Nanoparticle-Based Detection of DNA” 

German BioSensor Symposium, Regensburg, 

March 15–18, 2005 

W. Fritzsche: 

“Nanoparticle-Based DNA Nanotechnology” 

German-Israeli Foundation G.I.F. Meeting on 

Nanotubes and Nanowires, Dresden, June 


W. Fritzsche: 

„Mikro- und Nanosysteme für die Biosensorik“ 

2. Jenaer Technologietag, September 12, 2005 

W. Fritzsche: 

“Nanoparticle-Based DNA Nanotechnology” 

EU Workshop “DNA-Based Nanowires”, Modena 

(Italy), October 7–8, 2005 

W. Fritzsche: 

„Metallische Nanopartikel für die Bioanalytik“ 

BioHyTec Workshop „Moderne Aspekte der Biosystemtechnik“, 

Luckenwalde, November 17, 2005 

W. Fritzsche: 

“Metal Nanoparticles in Bioanalytics” 

Bioinspired Nanomaterials for Medicine and 

Technologies BioNanoMaT, DECHEMA Conference, 

Marl, November 23–24, 2005 

M. Kittler, X. Yu, M. Birkholz, T. Arguirov, 

M. Reiche, A. Wolff, W. Fritzsche, M. Seibt: 

“Self Organized Pattern Formation Of Biomolecules 

At Si Surfaces” 

European Materials Research Society Meeting, 

Strasbourg (France), May 31–June 3, 2005 


“Metal nanoparticle-based molecular detection: 

Principles and applications” 

Annual Meeting of the German and Austrian 

Societies for Clinical Chemistry and Laboratory 

Diagnostics, Jena, October 6–8, 2005 

J. Popp: 

“Raman-Spectroscopy for a Rapid Identification 

of Single Microorganisms” 

5 th International Conference on Photonics, 

Devices and Systems, Prague (Czech Republic), 

June 8–11, 2005 

J. Popp: 

“Photonics meets Life Science – Innovative 

Aspects of Laser Spectroscopy” 

XIV. Krakow – Jena Symposium on Physical 

Chemistry, Dornburg, October 4–6, 2005 

J. Popp: 

„Innovative Bioanalytik mit Laserspektroskopischen 

Methoden“ 

Jenaer Technologie Tage (JETT), Jena, September 


J. Popp: 

„Schwingungsspektroskopie zur Identifikation 

von einzelnen Mikroorganismen“ 

Fraunhofer IPA Technologieforum, Institutszentrum 

der Fraunhofer-Gesellschaft, Stuttgart-Vaihingen, 

November 24, 2005 

J. Popp: 

“Rapid Microbe Identification by means of 

Raman-Spectroscopy” 

ECSBM 2005, Aschaffenburg, September 3–8, 


J. Popp: 

„Vision Biophotonik – Licht für die Gesundheit: 

Ein BMBF-Forschungsschwerpunkt stellt sich 

vor“ 

Kaiser-Friedrich-Forschungspreis 2005 – Biophotonik, 

Goslar, May 3, 2005, 

J. Popp: 

“Biophotonik – Photonics meets Life Science”, 

Instituts-Kolloquium, Hochschule Reutlingen – 

Reutlingen University, May 18, 2005 

75


76 

J. Vesenka: 

“Progree Towards Growth and Colloidal Gold 

Decoration of G-wire DNA” 

EU Workshop “DNA-Based Nanowires”, Modena, 

(Italy), October 7–8, 2005 

Presentations/Posters 

A. Brösing, B. R. Kracht, J. Felbel, M. Urban, 

M. Kielpinski, A. Reichert, T. Henkel, J. Weber, 

C. Gärtner, H.-P. Saluz, H. Krügel, T. Häfner, 

M. Dürst, U. Liebert, J. M. Köhler: 

“Serial DNA Amplification in Submicroliter Volumes 

by Implementation of Segmented Flow in 

Flow-through Micro Devices” 

14 th International Conference of Medical Physics 

and 39 th Annual Meeting of the German Society 

for Biomedical Engineering, Nürnberg, September 

14–17, 2005, talk 

A. Csáki, G. Maubach, F. Garwe, A. Steinbrück, 

K. König, W. Fritzsche: 

“A novel DNA restriction technology based on 

laser pulse energy conversion on sequence-specific 

bound metal nanoparticles” 

SPIE Photonics West, San Jose (USA), February 

23–28, 2005, poster 

A. Csáki, G. Maubach, F. Garwe, A. Steinbrück, 

K. König, W. Fritzsche: 

“Sequence-Specific Bound Nanoparticles For A 

Novel Sub-Wavelength DNA Restriction Technology 

Based On Laser Pulse Energy Conversion” 

International Meeting “Focus on Microscopy”, 

Jena, March 20–23, 2005, poster 

A. Csáki, A. Steinbrück, S. Schröter, T. Glaser, 

W. Fritzsche: 

“Fabrication and characterization of nanophotonic 

metal structures” 

Intern. Symposium on Molecular Plasmonics, 

Jena, May 19–21, 2005, poster 

A. Csáki, F. Garwe, A. Steinbrück, A. Weise, 

G. Maubach, K. König, W. Fritzsche: 

“Laser-based sequence-specific DNA processing 

with sub-wavelength precision using DNAnanoparticle 

conjugates” 

Intern. Symposium on Molecular Plasmonics, 


A. Csáki, A. Steinbrück, W. Fritzsche: 

“Nanoparticle-based molecular plasmonics” 

3. German-Canadian Workshop “Young Scientist 

in Photonics”, München, June 10–14, 2005, talk 

A. Csáki, F. Garwe, A. Steinbrück, A. Weise, 

G. Maubach, K. König, W. Fritzsche: 

“Novel DNA restriction technology based on laser 

pulse energy conversion on sequence-specific 

bound metal nanoparticles” 


in Photonics”, München, June 10–14, 2005, poster 

T. Eick, A. Berger, D. Behrendt, U. Dillner, 

E. Kessler: 

“An Alternative Method for Measuring the 

Responsivity of Thermopile Infrared Sensors” 

Sensor 2005, 12 th International Conference, 

Nürnberg, May 10–12, 2005, talk B1.1 

J. Felbel, A. Sondermann, M. Kielpinski, 

M. Urban, I. Bieber, T. Henkel, W. Fritzsche: 

„Chip-Thermocycler für die Polymerase Kettenreaktion 

(PCR)“ 

Micro Systems Technology Congress 2005, 

Freiburg, October 10–12, 2005, Proceedings: VDE 

VERLAG GMBH•Berlin•Offenbach, p. 54, talk 

W. Fritzsche, A. Csáki, A. Steinbrück, 

M. Raschke: 

“Metal nanoparticles as passive and active tools 

in bioanalytics” 

SPIE Photonics West, San Jose (USA), February 


W. Fritzsche, A. Csaki, A. Steinbrück, F. Garwe, 

K. König, M. Raschke: 

“Metal Nanoparticles As Passive And Active Sub- 

Wavelength Tools For Biophotonics” 

International Meeting “Focus on Microscopy”, 

Jena, March 20–23, 2005, talk 

W. Fritzsche: 

“DNA-based nanoparticle plasmonics for a highly 

parallel and integrated molecular nanotechnology” 

International Symposium on Molecular Plasmonics, 

Jena, May 19–21, 2005, talk 

W. Fritzsche: 

“DNA nanotechnology with metal particle conjugates 

for applications in bioanalytics and molecular 

construction” 

University of Southern Danemark, Odense, February 

11, 2005, talk 

W. Fritzsche: 

„Charakterisierung im Nanobereich“ 

Weiterbildungsveranstaltung „Nanotechnologie“ 

im Haus der Technik, Essen, March 4, 2005, talk 

W. Fritzsche, A. Csáki, F. Garwe, G. Maubach, 

R. Möller, A. Steinbrück, M. Raschke, K. König: 

„Biokonjugierte metallische Nanopartikel als Tool 

für optische Detektion und Manipulation mit 

molekularer Spezifität“ 

Symposium im Rahmen des Biophotonik- 

Schwerpunkts „Struktur und Dynamik biologischer 

Zellen mit optischen Methoden auf der 

Spur“, Jena, March 15–17, 2005, talk 

W. Fritzsche: 

“Nanoparticle-DNA-complexes for bioanalytics, 

nanoelectrics and nanophotonics” 

Weizmann Institute Rehovot, December 1, 2005 

and Hebrew University Jerusalem, December 4, 

2005, (Israel), talks


P. Grigaravicius, K. O. Greulich, S. Peters, 

P. Schellenberg: 

“Examining the influence of immobilization of 

proteins and their binding to ligands by probing 

their intrinsic UV-fluorescence decay” 

BioNanoMaterials, Marl, November 23–24, 2005, 

poster 

T. Henkel: 

“Measurement of phase internal flow of liquid/ 

liquid two phase flow in microchannels – 

approaches for control of mixing efficiency in 

microdroplets” 

Joint International PIVNET II/ERCOFTAC Workshop 

on Micro PIV and Applications in Microsystems, 

Delft (The Netherlands), April 7–8, 2005, 

talk 

E. Kessler, V. Baier, U. Dillner, J. Müller, A. Berger, 

R. Gärtner, S. Meitzner, K.-P. Möllmann: 

“High-Temperature Resistant Infrared Sensing 

Head” 

Sensor 2005, 12 th International Conference, 

Nürnberg, May 10–12, 2005, talk A3.1 

M. Kittler, X. Yu, O. F. Vyvenko, M. Birkholz, 

W. Seifert, M. Reiche, T. Wilhelm, T. Arguirov, 

A. Wolff, W. Fritzsche, M. Seibt: 

“Self-organized pattern formation of biomolecules 

at silicon surfaces” 

2 nd International Symposium on Complex Material, 

Volkswagen Foundation, Stuttgart, June 2–3, 

2005, talk 

J. Lerchner, A. Wolf, G. Wolf, V. Baier, 

E. Kessler: 

“A new micro-fluid chip calorimeter for screening 


7 th MEDICTA 2005, Thessaloniki (Greece), July 


J. Lerchner, R. Hüttl, A. Wolf, G. Wolf, V. Baier, 

R. Födisch: 

“Chip Calorimeter for Bioanalytical Applications” 

4. Deutsches BioSensor Symposium 2005, 

Regensburg, March 13–16, 2005, talk 

R. Petry, K. Gaus, K.-D. Peschke, H. Burkhardt, 

A. Wuttig, R. Riesenberg, J. Popp: 

„Modifiziertes, hochauflösendes UV-Mikro-Raman-Setup 

zur schwingungsspektroskopschen 

Untersuchung von Mikroorganismen“ 

Biophotonik-Symposium „Struktur und Dynamik 

biologischer Zellen mit optischen Methoden auf 

der Spur“, Jena, March 15–17, 2005, poster 

R. Riesenberg, A. Wuttig, R. Petry: 

„Neue leistungsfähige Spektrometer-Architekturen“ 

Biophotonik-Symposium „Struktur und Dynamik 

biologischer Zellen mit optischen Methoden auf 

der Spur“, Jena, March 15–17, 2005, talk 

R. Riesenberg: 

“Spectral Bioreader, spectral High-Throughput 

Screening” 

Presentation of the Campus Beutenberg in the 

MIREIKAN, Tokyo (Japan), September 11–14, 

2005, poster 

A. Steinbrück, A. Csaki, C.-C. Neacsu, 

M. Raschke, W. Fritzsche: 

“Preparation and optical characterization of coreshell 

bi-metal nanoparticles” 

International Symposium on Molecular Plasmonics, 


A. Steinbrück, A. Csáki, G. Festag, W. Fritzsche: 

“Preparation and optical characterization of coreshell 

bi-metal nanoparticles” 


in Photonics”, München, June 10–15, 2005, poster 

A. Steinbrück, J. Vesenka, A. Csaki, G. Festag, 

W. Fritzsche: 

“Bi-metal nanostructures: Fabrication and characterization” 

4. Internationaler Workshop “Scanning Probe 

Microscopy in Life Sciences”, Berlin, October 13, 


J. Vesenka, A. Wolff, A. Reichert, C. Holste, 


“Progress towards growth and decoration of G- 

wire DNA with gold nanoparticles” 

EU Workshop “DNA-Based Nanowires”, Modena 

(Italy), October 7–8, 2005, poster 

J. Weber, J. Felbel, W. Fritzsche: 

„Biologische Gefahrstoffe unter Beobachtung – 

Biotechnologische Mikrosysteme zur Gewinnung 

von Sicherheitsinformationen“ 

Workshop „Neue Technologien – Ausblick in eine 

wehrtechnische Zukunft“, BMVg Bonn, November 

17, 2005, talk 

A. Wolff, A. Csaki, W. Fritzsche: 

“Directed DNA-Immobilization on Solid Substrates” 

2 nd International Symposium on Complex Material, 

Volkswagen Foundation, Stuttgart, June 2–3, 


A. Wolff, A. Csaki, W. Fritzsche: 

“DNA Stretching and Positioning for Nano-electronics” 

German-Israeli Foundation G.I.F. Meeting on 

Nanotubes and Nanowires, Dresden, June 18–23, 


Patents 

R. Riesenberg, A. Wuttig: 

„Anordnung zur hochauflösenden digitalen Inline- 

Holographie“ 


77


78 

Lectures 

W. Fritzsche: 

„Nanobiotechnologie“ 

FSU Jena, Chemisch-Geowissenschaftliche Fakultät, 

Sommersemester 2005 

W. Fritzsche: 

„Metallische Nanopartikel – Präparation, Charakterisierung, 

Anwendungen“ 

FSU Jena, Chemisch-Geowissenschaftliche Fakultät, 

Wintersemester 2005 

W. Fritzsche: 

„Nanocharakterisierung“ 

TU Ilmenau, Fakultät für Mathematik und Naturwissenschaften, 

Wintersemester 2005 

P. Schellenberg (mit R. Glaser, K. O. Greulich): 

„Biophysikalische Chemie II“ 

FSU Jena, Biologisch-Pharmazeutische Fakultät, 

Sommersemester 2005 

P. Schellenberg: 

„Biomoleküle: Visualisierungen und Rechnungen 

am Computer“ 

FSU Jena, Biologisch-Pharmazeutische Fakultät 

und Multimediazentrum, Wintersemester 2005/ 

2006 

Diploma Thesis 

Thomas Schüler: 

„Chip-basierter elektrischer DNA-Nachweis zur 

Identifikation von Mikroorganismen“ 

Fachhochschule Jena, FB Medizintechnik, 09/05 

Eileen Heinrich: 

„Chip-basierter Nachweis von DNA und Proteinen 

mittels Molekülklassen-spezifischer Markierung“ 

Fachhochschule Jena, FB Medizintechnik, 12/05 

Laboratory exercises 

A. Csáki, A. Wolff, W. Fritzsche: 

„AFM-Untersuchungen an gestreckt-immobilisierter 

DNA“ 

Praktikum „Biophysikalische Chemie“ (Biochemie 

5. Semester) für Studenten der FSU Jena 

WS 2004/2005, SS 2005, WS 2005/2006 

A. Csáki, A. Wolff, W. Fritzsche: 

„AFM-Untersuchungen von DNA-Molekülen“ 

Ergänzungspraktikum für Genetik (11. Klasse) 

27.6.2005–1.7.2005 

J. Felbel, A. Reichert, W. Fritzsche: 

„PCR in Chip-Bauelementen“ 




G. Festag, Th. Schüler: 

„DNA-Goldnanopartikel-Addukte auf Chipoberflächen“ 

Praktikum „Molekulare Nanotechnologie“ für Studenten 

der TU Ilmenau, 12.–14.09.2005 

G. Festag, G. Nitzsche: 

„Sequenzspezifischer DNA-Nachweis mittels Glasfasern“ 

Praktikum „Nanobiotechnologie“ für Schüler des 

Gymnasiums Rudolstadt (11. Klasse), 

17.–28.10.2005 

T. Henkel, D. Malsch: 

“Microparticle imaging velocimetry (µ-PIV)” 

Praktikum für Studenten der TU Ilmenau 

September 2005 

R. Möller, G. Festag, W. Fritzsche: 

„Mikroskopische Untersuchungen an DNA-Nanopartikel-Komplexen“ 




A. Wolff, A. Csaki: 

„Einführung in die Mikrosystemtechnik“ 

Betriebspraktikum des Carl-Zeiss-Gymnasiums 

Jena (9. Klasse) 

31.01–03.02.05, 30.06.–12.07.05 

Practical Trainee 

Georg Ziegenhardt: 

„Aufbau von Anordnungen zur objektivlosen 

Mikroskopie“ 

practical semester, Fachhochschule Jena, 

04–09/05 

Guest Scientists 

Prof. Dr. J. Vesenka 

University of New England, Department of 

Chemistry and Physics, Biddeford, ME (USA) 

September 2005–January 2006 

Dr. Shin-ichi Tanaka 

Osaka University, Graduate School of Frontier 

Biosciences (Japan) 

May 2004–April 2005 

Memberships 

V. Baier 

Deutscher Verband für Schweißen und verwandte 

Verfahren e.V. (DVS), AG Waferbonden 

H. Dintner 

• Member of the Thuringian VDI/VDE working 

group „Mikrotechnik”


• Member of scientific council of AMA, Fachverband 

für Sensorik e.V. 

W. Fritzsche 

• Scientific Advisory Committee of the International 

Society for Nanoscale Science, Computation 

and Engineering (ISNSCE), 

• Working Committee “Micro Systems for Biotechnology” 

E. Keßler 

Gesellschaft für Thermische Analyse e.V., 

AK Thermophysik 

J. Popp 

• Editorial Board Member Journal of Raman 

Spectroscopy 

• Editorial Board Member ChemPhysChem 

• Member of Steering committee “International 

Conference on Raman Spectroscopy” 

• Member of Steering committee “Advanced 

Spectroscopies on Biomedical and Nanostructured 

Systems” 

• Member advisory board BioRegio Jena e.V. 

• Personal member: DPG, GDCh, 

Bunsen society 

R. Riesenberg 

• IRS2, International Conference and Exhibition 

on Infrared Sensors & Systems, programme 

committee and chair 

• CLEO Europe, 16 th International Conference 

on Lasers and Electrooptics Europe of the 

Optical Society of America (OSA), programme 

committee 

• Participant of the Humboldt Foundation, 

German-American Frontiers of Engineering 

in Optics 

• Personal member: SPIE, DPG 

Awards 

Winner of the Poster Award of the 7. Dresdner 

Sensor Symposium, 12.–14.12.2005, Dresden, 

Poster Title: „Entwicklung von mikrofluidischen 

Chipelementen für biologische Anwendungen” 

The Cetoni GmbH was the winner of the “Innovationspreis 

Thüringen Ost 2005” for the development 

of an innovative microsyringe based multichannel, 

high precision liquid handling plattform, 

optimized for R&D and automation of microfluidic 

applications. The device is based on results of a 

joint project, between Cetoni GmbH and the 

IPHT, funded by the German Federation of Industrial 

Cooperative Research Associations “Otto 

von Guericke” (AiF). 

Conference Organization 

W. Fritzsche 

International Symposium “Molecular Plasmonics”, 

Jena, May 19–21, 2005 

J. Popp 

Symposium „Struktur und Dynamik biologischer 

Zellen mit optischen Methoden auf der Spur“, 

Jena, March 15–17, 2005 

79

LASERTECHNIK / LASER TECHNOLOGY 

4. Lasertechnik / Laser Technology 

Leitung/Head: Prof. Dr. H. Stafast 

e-mail: herbert.stafast@ipht-jena.de 

Laserchemie / Laser Chemistry 

Leitung/Head: PD Dr. F. Falk 

fritz.falk@ipht-jena.de 

Laserdiagnostik / Laser Diagnostics 

Leitung/Head: Prof. Dr. W. Triebel 

wolfgang.triebel@ipht-jena.de 

80 


Der Bereich Lasertechnik nutzt Laser als subtiles 

Werkzeug (Laserchemie) und als kontaktfreie 

Sonde (Laserdiagnostik). Die Hauptanwendungen 

als Werkzeug betreffen die 

Laserkristallisation von Silizium-Dünnschichten 

hauptsächlich für Solarzellen und zunehmend 

die Präparation von Silizium-Nanodrähten. Die 

Laserdiagnostik dient im Wesentlichen zur Charakterisierung 

von optischen Materialien, Dünnschichten 

und Komponenten sowie von Flammen. 

Für die Flammendiagnostik unter Mikrogravitation 

wird für den Fallturm Bremen ein 

abstimmbares und gepulstes UV-Scheibenlasersystem 

entwickelt. In allen genannten Gebieten 

zeigen die konsequente Aufbauarbeit in der 

Lasertechnik und ihre hohen Qualitätsstandards 

sehr gute Erfolge. 

4.1 Overview 

The division for Laser Technology applies lasers 

as subtle tools and as remote probes. The most 

important applications as a tool refer to laser 

crystallisation of silicon thin films for solar cells 

and increasingly to the preparation of silicon 

nanowires. Laser diagnostics is essentially used 

to characterise optical materials, thin films, and 

components as well as flames. For flame diagnostics 

under microgravity in the drop tower Bremen, 

a tuneable and pulsed UV disk laser system 

has been developed. Overall, the thorough establishment 

of laser technology and high quality 

standards are putting forth very good results. 

The Laser Chemistry section at IPHT is dominantly 

active in the field of solar cells (design and 

preparation) and is well established in the photo-


Combination of prisms and mirror to achieve single line operation in the F 2 laser of TUI Laser company. 

Diode laser crystallised seed layer with large grained crystalline silicon on glass (grains 10 – some 

100 µm wide, several mm long). 

81


82 

Die Abteilung Laserchemie arbeitet zum größten 

Teil auf dem Gebiet der Solarzellen (Design und 

Herstellung) und ist in der Photovoltaik(PV) fest 

verankert, in F&E-Fachkreisen (z.B. PVUniNetz 

und Solar INPUT) und Industriepartnerschaften 

(z.B. Firma Ersol, Erfurt und Antec Solar, Arnstadt). 

Herausragendes Projektergebnis im Jahr 

2005 ist die produktionsnahe Präparation von 

Silizium-Kristallkeimschichten mit einem industrietauglichen 

Diodenlasersystem, das neben 

einer deutlichen Kapazitätssteigerung durch eine 

Laserleistung von 0,7 kW gegenüber 10–20 W 

aus einem Ar + -Laser auch eine Kristallkeimvergrößerung 

von 0,01–0,1 mm auf 0,1 bis wenige 

mm bewirkt (s. Farbbildseite). 

In enger Zusammenarbeit mit dem Institut für 

Festkörperphysik der Friedrich-Schiller-Universität, 

dem MPI für Mikrostrukturphysik, Halle und 

der Uníversität Halle ist das neue Arbeitsfeld mit 

nanostrukturierten Halbleitern auf eine breitere 

Basis gestellt worden. Zu der bereits 2004 etablierten 

CVD-Methode sind zur Präparation von 

Nanodrähten aus Silizium die Elektronenstrahlverdampfung 

und die Laserablation hinzugekommen. 

Inzwischen gelingt es, Nanodrähte in 

Vorzugsrichtungen wachsen zu lassen (Abb. 4.2). 

Die Abteilung Laserdiagnostik hat ihre Methodenvielfalt 

um die Frequenzverdopplung (SHG = 

second harmonic generation) von Femtosekundenlaserpulsen 

an Grenzflächen erweitert (Doktorarbeit 

T. Scheidt „summa cum laude“, vgl. auch 

Abb. 4.6) und kann damit selbst monomolekulare 

Dünnschichten diagnostizieren. Die an optischen 

Massivmaterialien erprobten Transmissions- und 

Absorptionsmessungen haben mit der Doktorarbeit 

von Ch. Mühlig („magna cum laude“) einen 

neuen Qualitätsstandard erreicht (Abb. 4.4 und 

4.5). Absorptionsmessungen mit Teststrahlablenkung 

(LID = laser induced deflection) und die 

laserinduzierte Fluoreszenz (LIF) gelingen zunehmend 

auch an Dünnschichten und optischen 

Komponenten durch Empfindlichkeitssteigerungen 

und/oder Konzeptverbesserungen der Messmethoden. 

Die Entwicklung des Scheibenlasersystems 

(ADL-FT = Advanced Disk Laser für Fallturm) 

machte 2005 – in bewährter Zusammenarbeit mit 

dem IFSW (Stuttgart) und ZARM (Bremen) – 

große Fortschritte. Die Ergebnisse aus den 

ersten Fallturm-Abwürfen haben inzwischen zu 

Konzeptverbesserungen geführt. Im IPHT gelang 

mit diesem Lasertyp auch die kurzwellige Anregung 

von OH-Radikalen für die Flammendiagnostik, 

in Zusammenarbeit mit dem Bereich 

Mikrosysteme auch an Mikroflammen (ca. 5 mm 

breit, 35 mm hoch, Abb. 4.7). In Kooperation mit 

dem Bereich Optik gelang auch die Laserdiagnostik 

an Partikel-„beladenen“ Flammen, die beispielsweise 

zur Glassynthese dienen. 

voltaics R&D community (e.g. PVUniNetz and 

Solar INPUT) and in industrial partnerships (e.g. 

Ersol company, Erfurt and Antec Solar, Arnstadt). 

The prominent success in 2005 consists of the 

production relevant preparation of silicon crystalline 

seed layers with a laser diode system suitable 

for industrial application. Not only was 

the throughput increased by using a 0.7 kW 

diode laser instead of the previous 10–20 W Ar + 

laser but also an enlargement of the crystallite 

size from 0.01–0.1 mm to 0.1–several mm was 

achieved (cf. coloured page). 

In close cooperation with the Institute of Solid 

State Physics at the Friedrich-Schiller-University, 

the Max-Planck-Institute of Microstructural Physics 

at Halle and the University of Halle, the new field 

of nanostructured semiconductors has been put 

onto an enlarged basis. The CVD method available 

in 2004 for nanowire preparation has been 

complemented by electron beam evaporation 

and laser ablation of silicon. Meanwhile we manage 

to grow epitaxial nanowires into preferred 

directions (Fig. 4.2). 

The Laser Diagnostics section has added frequency 

doubling (SHG = second harmonic generation) 

of femtosecond laser pulses on surfaces 

to its variety of experimental methods (PhD thesis 

of T. Scheidt “summa cum laude”, also cf. 

Fig. 4.6) enabling to characterize even monomolecular 

thin layers. The transmission and absorption 

measurement methods established with optical 

bulk materials achieved a new quality standard 

(PhD thesis of Ch. Mühlig, “magna cum 

laude”, also cf. Figs. 4.4 and 4.5). Absorption 

measurements with laser induced deflection 

(LID) of a probe beam and the laser induced fluorescence 

(LIF) now can more and more be 

transferred to thin films and optical components 

due to sensitivity enhancements and/or improved 

concepts of the measurement methods. 

The development of the disk laser system (ADL 

FT = Advanced Disk Laser for “Fallturm”) showed 

– in the experienced cooperation with IFSW 

(Stuttgart) and ZARM (Bremen) – much progress 

in 2005. The results of the first experiments in the 

drop tower meanwhile induced several conceptual 

improvements. At IPHT, experiments with this 

kind of laser were performed at short wavelengths 

suitable to excite OH radicals in flames, in 

cooperation with the division for Microsystems 

even in microflames (5 mm broad, 35 mm high, 

Fig. 4.7). In cooperation with the Optics division 

laser diagnostics could be shown for particle 

“loaded” flames suitable e.g. for glass synthesis. 

Due to the extraordinary efforts of all coworkers 

during 2005 the division for Laser Technology 

managed to nearly maintain its project funds, 

level of publications, and patents in spite of the 

tough situation with governmental funds and the


Dank besonderem Engagement aller Mitarbeiter 

konnte der Bereich Lasertechnik 2005 trotz der 

verschärften Situation bei den öffentlichen Fördermitteln 

und des allgemein geringen Wirtschaftswachstums 

sein Niveau bei den Drittmittelprojekten, 

Veröffentlichungen und Patenten wenigstens 

in etwa halten. Das Drittmittelaufkommen von rund 

1,0 Mio “ liegt merklich unter dem Niveau des Vorjahres 

(1,2 Mio “). Insgesamt haben jedoch die 

mit dem Umzug erreichten kurzen Wege zu den 

anderen IPHT-Forschungsbereichen einen deutlichen 

Zuwachs bei der bereichsübergreifenden 

Zusammenarbeit bewirkt. 

generally poor rate of economic growth. The project 

funds in 2005 of about 1.0 Mio are close to 

the amount of 2004 (1.2 Mio “). Overall the move 

to the Beutenberg campus yielded, however, a 

considerable strengthening of trans-divisional 

cooperation due to the short distances to the 

other IPHT research divisions. 

4.2 Selected Results 

4.2.1 Laser chemistry 

Laser chemistry at IPHT is essentially concerned 

with the deposition of thin films and thin film systems, 

their physicochemical modification (particularly 

laser crystallisation) and some special 

items like spectroscopic diagnostics of thin film 

processing, nanowire preparation, and fs laser 

micromachining. 

Laser crystallisation 

(Gudrun Andrä, Joachim Bergmann, 

Arne Bochmann, Fritz Falk, Annett Gawlik, 

Ekkehardt Ose) 

For several years, IPHT has been aiming at the 

preparation of thin film solar cells consisting of 

large grained crystalline silicon on glass. The 

development of this new cell type is based on the 

deposition of amorphous silicon either by plasma 

CVD from SiH 4 (13.6 MHz) or by electron beam 

evaporation of bulk silicon and its in situ laser 

crystallisation. In a first step large crystal grains 

are obtained from 300–500 nm thick amorphous 

silicon layers by cw laser crystallisation (seed 

layer formation). Subsequently the seed layer 

undergoes epitaxial thickening by pulsed Layered 

Laser Crystallisation (LLC), an IPHT patented 

method. So far laboratory cells with an open circuit 

voltage of 510 mV and a conversion efficiency 

of 4.8% based on an absorber thickness of 

5 µm were obtained. Recent work addressed the 

acceleration (industrial application) and optimisation 

of the seed layer formation by applying a 

700 W diode laser focused to a line and scanned 

across the substrates to achieve crystallite sizes 

of 0.1 to several mm (cf. coloured page). Additional 

progress for the solar cell performance is 

expected from improving light trapping, improving 

contact and shunt resistances as well as minimising 

charge carrier recombination. The related 

work benefits from the discussions and cooperation 

with the Hahn-Meitner-Institute (HMI) at 

Berlin, Solar-Zentrum Erfurt at CiS, Ersol company 

at Erfurt, and INPUT Solar, a Thuringian association 

of photovoltaic industrial companies and 

R&D institutes. 

Thin film deposition and nanowire growth 

(Gudrun Andrä, Fritz Falk, Herbert Stafast, 

Thomas Stelzner) 

The deposition of Si/C/N thin films for tribological 

applications by RF plasma enhanced CVD using 

single source precursors was performed within 

the DFG program SPP 1119 in close cooperation 

with TU Darmstadt and RWTH Aachen. IPHT 

contributed to the understanding of the complex 

CVD processes by comparing Si/C/N thin films 

obtained from two precursors, hexamethyldisilazane 

(CH 3 ) 3 Si-NH-Si(CH 3 ) 3 (HMDS) and 

bis(trimethylsilyl)carbodiimide (CH 3 ) 3 Si-N=C=N- 

Si(CH 3 ) 3 (BTSC). Hard Si/C/N thin films were 

obtained on the RF powered, but not on the 

grounded electrode. Therefore a heating system 

for the RF electrode was developed which 

allowed to investigate the substrate temperature 

dependence of the thin film properties. As an 

example the temperature dependence of the film 

hardness is sketched out in Fig. 4.1. 

Fig. 4.1: Martens hardness of Si/C/N thin films 

obtained from HMDS or BTSC as a function of 

the subtrate temperature. 

83


As a new field of research at IPHT, silicon 

nanowires are grown by thermal and plasma 

enhanced CVD from SiH 4 or electron beam evaporation 

via a gold nanodot supported vapor-liquid-solid 

mechanism. This work is performed in 

close cooperation with the universities of Jena 

and Halle as well as the Max-Planck-Institute of 

Microstructural Physics at Halle. Evidently the 

nanowire growth conditions now can be sufficiently 

controlled to achieve well oriented epitaxial 

silicon wires with diameters ranging from 

50 nm to 1 µm (Fig. 4.2). 

Laser ablation 

(Gudrun Andrä, Fritz Falk, Joachim Bergmann, 

A. Bochmann) 

Femtosecond (fs) laser ablation for micromachining 

of hard metal tools as a spin-off from an 

InnoRegio project was presented at the LASER 

2005 fair at Munich. The potential of fs laser 

micromachining could, in addition, be demonstrated 

in case of a diamond tip sharpened by fs 

laser ablation (Fig. 4.3). This result demonstrates 

the importance of nonlinear processes as diamond 

has an indirect bandgap of 5.48 eV (direct: 

7.3 eV) which is very large in comparison to the 

laser photon energy of 1.6 eV. 

Fig. 4.3: Diamond tip sharpened by fs laser ablation. 

4.2.2 Laser diagnostics 

The Laser Diagnostics section applies different 

types of lasers as remote and contactless probes 

particularly to characterise optical materials, 

components, and thin films and to investigate 

flames. Some years ago, the development of 

solid state lasers dedicated to flame diagnostics 

has been successfully established. 

Fig. 4.2: Silicon nanowires grown by CVD on 

Si(111), Si(100), and Si(110) surfaces (top to 

bottom). 

In 2005 two high ranking PhD theses were 

submitted to the Friedrich-Schiller-University: 

Ch. Mühlig could considerably improve the 

understanding of the ArF laser pulse absorption 

by fused silica and CaF 2 (magna cum laude). In 

both materials laser absorption is related to the 

generation and annealing of defects. T. Scheidt 

revealed 5 new laser induced effects at the technologically 

important Si/SiO 2 interface applying 

the surface second harmonic generation (SSHG) 

method using fs laser pulses (summa cum 

laude). He performed his experiments at the 

Laser Research Institute at the University of Stellenbosch, 

South Africa, after having built up the fs 

laser laboratory from scratch. 

84


UV optical materials 

(Alfons Burkert, Siegfried Kufert, 

Christian Mühlig, Wolfgang Triebel) 

UV laser lithography and other laser applications 

impose severe challenges on the optical quality 

and laser durability of bulk and thin film materials. 

IPHT has specialised for more than one decade 

on selected methods for their characterisation. 

Experience has been accumulated in close cooperation 

with Schott Lithotec company as the longstanding 

industrial partner as well as Jenoptik 

L.O.S. and Layertec companies and the FhG IOF 

within the last few years. The facilities, knowledge 

and experience of these institutions and 

IPHT complement each other to their mutual benefit, 

making Jena a place of high standards at the 

leading edge worldwide. 

The measurement methods at IPHT using 

excimer lasers at 248, 193, and 157 nm comprise 

(i) UV laser beam transmission, (ii) measurement 

of absorption by the laser induced probe beam 

deflection (LID) method, (iii) laser induced fluorescence 

(LIF), (iv) pulsed UV laser Raman spectroscopy, 

(v) vacuum UV spectroscopy, and (vi) 

wavefront deformation (S-H sensor). These have 

been complemented by (vii) surface second harmonic 

generation (SSHG) using fs laser pulses. 

small H values and unequivocally revealed a nonlinear 

dependence. This finding has a great 

impact on the extrapolation of the α(H=0) values 

which usually are used to estimate the materials` 

quality and laser durability. The α(H) data are 

reproduced by an empirical absorption model in 

the whole investigated H range (Fig. 4.4: solid 

line). 

In addition, the LID method can be calibrated 

absolutely and can separate laser absorption in 

the bulk material from that on surfaces. Bulk and 

surface absorption are calibrated by applying 

electrical resistance heaters introduced into the 

sample or attached to the selected sample surface 

area, respectively (Fig. 4.5). The method of 

sample surface heating has also been used to 

calibrate laser absorption in optical thin films, e.g. 

absorption in dielectric layers of highly reflective 

mirrors. 

The progress in investigating bulk absorption of 

excimer laser pulses by fused silica gained by 

applying the LID method becomes easily apparent 

in Fig. 4.4. Looking at the fluence dependence 

of the ArF laser absorption, it previously 

appeared to be a linear relation between the 

absorption coefficient α and the fluence H. These 

results from the Laser Laboratory Göttingen 

obtained by calorimetry were, however, limited to 

the high H region. The improved sensitivity of the 

LID method at IPHT (cf. e.g. annual report 2004) 

enabled us to investigate the α(H) behaviour at 

Fig. 4.5: Samples prepared for absolute calibration 

of laser absorption by using electrical resistance 

heaters introduced into the sample (bulk 

absorption) or attached to the sample surface 

(surface absorption). 

Fig. 4.4: ArF laser absorption coefficients α of 

fused silica as a function of the applied laser 

energy fluence H; α values in high H range 

obtained by calorimetry and α values in low H 

range by LID method (cf. text). 

The investigation of (inner) surfaces and thin 

films can be conveniently performed by SSHG. 

As an example Fig. 4.6 demonstrates that the 

SSHG signal obtained from the interface 

between silicon and its 5 nm thin natural oxide 

layer is sensitive to p-type doping of the silicon 

sample: The electric field induced SH (EFISH) 

signal at the beginning of irradiation is very small 

(no or low doping, upper part) or large (high doping, 

lower part). The signal development during 

irradiation shows how the doping induced field 

85


Fig. 4.7: 2D-LIF image of OH in small flame on 

top of microburner with 380 µm channel width. 

86 

Fig. 4.6: EFISH signal development (cf. text) at 

Si/SiO 2 surfaces with oxidized silicon of low 

(upper part) and high p-type doping (lower part). 

across the Si/SiO 2 interface is steadily compensated 

and overwhelmed by laser induced electron 

injection into the SiO 2 layer building up an 

electric field of opposite direction. In addition the 

SSHG method was successfully applied to detect 

the damage of monomolecular surface layers 

induced by excimer laser irradiation. 

Further investigations of optical materials and 

components in 2005 refer to the laser durability of 

fused silica (undesired microchannel formation), 

CaF 2 (HELD = high energy laser durability project), 

optical layers (impurity and defect detection) 

as well as the performance of optical functional 

elements. 

Combustion processes 

(Dirk Müller, Wolfgang Paa, Wolfgang Triebel) 

Laser diagnostics is applied to investigate steady 

state and dynamic flames up to pulse repetition 

rates of 1 kHz. The well-established detection of 

OH radicals by LIF now has – in cooperation with 

the Optics division – also successfully been 

applied to flames of industrial burners containing 

particles (loaded flames) and used to determine 

local gas temperatures. On the other hand, the LIF 

method is capable of characterising very small 

flames created by microburners which were prepared 

in the division for Microsystems (Fig. 4.7). 

The breadboard model of the advanced disk 

laser system (ADL) at IPHT Jena was further 

improved and tested to generate 2D-LIF images 

of OH in flames. This required generating the 

third harmonic of the ADL pulses efficiently with 

sufficiently high pulse energy. Furthermore, some 

preliminary work has been performed towards 

fast wavelength switching of the ADL system 

using the available tuning components at the high 

laser pulse repetition rate. 

Moreover the ADL-FT (Fallturm) system was tested 

in several drops with maximum deceleration of 

about 35 g in polystyrene granulate: Evidently the 

laser system survives these procedures. Convection, 

however, is still present in front of the laser 

disk and changes when microgravity conditions 

start. These changes are small but sufficient to 

influence the laser operation so that some revisions 

of the laser system and operation are required. 

4.3 Appendix 

Partners (in alphabetical sequence) 

in Jena and Thuringia: 

• CiS Institut für Mikrosensorik, Erfurt 

• Ersol Solar Energy AG, Erfurt 

• Fachhochschule (University of Applied Sciences) 


• Fraunhofer-Institut für Angewandte Optik und 

Feinmechanik (IOF), Jena 

• Friedrich-Schiller-Universität, Jena 

Institut für Festkörperphysik und Astrophysikalisches 

Labor 

• Institut für Fügetechnik und Werkstoffprüfung 

(IFW), Jena 

• ITP GmbH, Weimar 

• Jenoptik Laser.Optik.Systeme GmbH, Jena 

• Jenoptik Laserdiode GmbH, Jena 

• Layertec GmbH, Mellingen 

• LLT Applikation GmbH, Ilmenau 

• MWS Schneidwerkzeuge GmbH&Co. KG, 

Schmalkalden


• PV Silicon GmbH, Erfurt 

• Schott Lithotec AG, Jena 

• Technische Universität Ilmenau, Institut für 

Physik 

• Technische Universität Ilmenau, Institut für 

Werkstofftechnik 

• U. Speck Sensorsysteme GmbH, Jena 

in Germany: 

• Carl Zeiss Oberkochen GmbH (CZO) 

• Carl Zeiss SMT AG 

• DLR Verbrennungsforschung, Stuttgart 

• Hahn-Meitner-Institut (HMI), Berlin 

• Heraeus Tenevo, Bitterfeld 

• Innovavent GmbH, Göttingen 

• Institut für Solarenergieforschung GmbH, 

Hameln 

• Lambda Physik AG, Göttingen 

• Laser Labor Göttingen (LLG) 

• Laser Zentrum Hannover (LZH) 

• Leica Microsystems Wetzlar GmbH 

• Martin-Luther-Universität Halle, Fachbereich 

Physik 

• Max-Planck-Institut für Mikrostrukturphysik, 

Halle 

• Neon Products GmbH (NP), Aachen 

• Neon Technik Leipzig GmbH (NEL) 

• Öl-Wärme-Institut gGmbH, Aachen 

• Schott FT, Mainz 

• Technische Universität München, Lehrstuhl für 

Thermodynamik 

• TUI Laser AG, Germering/München 

• Universität Erlangen, Lehrstuhl für Technische 

Thermodynamik 

• Universität Stuttgart, Institut für Strahlwerkzeuge 

• Universität Stuttgart, Institut für Thermodynamik 

• TU Dresden, Lehrstuhl für Verbrennungsmotoren 

• Zentrum für Angewandte Raumfahrttechnik 

and Mikrogravitation (ZARM), Universität 

Bremen 

in foreign countries: 

• NASA, Glenn Research Center, Cleveland, 

Ohio, USA 

• University of Lund, Sweden, Combustion 

Physics 

• University of New Mexico, USA, Dept. Physics 

and Astronomy 

• University of Rennes I, France, Sciences et 

Propriete de la Matiere 

• University of Stellenbosch, South Africa, 

Physics Department 

• University of Vigo, Spain, Dept. of Applied 

Physics 

Publications 

G. Andrä, J. Bergmann, F. Falk, E. Ose, 

S. Dauwe, T. Kieliba, C. Beneking 

“Characterization and Simulation of Multicrystalline 

LLC-Si Thin Film Solar Cells” 

Proc. 20 th Europ. PVSEC, Barcelona, Spain, June 

06–10, 2005, pp. 1171–1174 

G. Andrä, J. Bergmann, F. Falk 

“Laser crystallized multicrystalline silicon thin films 

on glass” 

Thin Solid Films 487 (2005) 77–80 

A. Baum, D. Grebner, W. Paa, W. Triebel, 

M. Larionov, A. Giesen 

“Axial Mode Tuning of a Single Frequency Yb:YAG 

Thin Disk Laser” 

Appl. Phys. B 81 (2005) 1091–1096 

A. Burkert, W. Triebel, Ch. Mühlig, D. Keutel, 

L. Parthier, U. Natura, S. Gliech, S. Schröder, 

A. Duparré 

“Investigating the ArF laser stability of CaF 2 

elevated fluences” 

Proc. SPIE 5878 (2005) pp. E-1–E-8 

F. Garwe, U. Hübner, T. Clausnitzer, E.-B. Kley, 

U. Bauerschäfer 

“Elongated gold nanostructures in silica for metamaterials: 

theory, technology and optical properties” 

Proc. SPIE 5955 (2005) pp. 59550T-1–59550T- 8 

Ch. Mühlig, W. Triebel, J. Bergmann, S. Kufert, 

S. Bublitz, H. Bernitzki, M. Klaus 

“Absorption and fluorescence measurements of 

DUV/VUV coatings” 

Proc. SPIE 5963 (2005) pp. 59630P-1–59630P-8 

D. Müller, W. Paa, W. Triebel, C. Menzel, 

K. Lucka, H. Köhne 

„PLIF – Diagnostik von Formaldehyd mit kHz- 

Repetitionsrate in der Mischzone von flüssigen 

Brennstoffen und vorgeheizter Luft“ 

VDI-Berichte Nr. 1888 (2005) 355–360 

W. Paa, D. Müller, A. Gawlik, W. Triebel 

“Combined Multispecies PLIF Diagnostics with 

kHz Rate in a Technical Fuel Mixing System 

Relevant for Combustion Processes” 

Proc. SPIE 5880 (2005) pp. N-1–N-8 

D. Probst, H. Hoche, H. Scheerer, E. Broszeit, 

C. Berger, Y. Zhou, R. Hauser, R. Riedel, 

Th. Stelzner, H. Stafast 

“Development of PE-CVD Si/C/N:H-films for Tribological 

and Corrosive Complex-Load Conditions” 

Surf. Coat. Technol. 200/1-4 (2005) 355–359 

T. Scheidt, E. G. Rohwer, H. M. v. Bergmann, 

H. Stafast 

“Femtosecond laser diagnostics of thin films, surfaces 

and interfaces” 

South African J. Science 101(2005) 267–271 

T. Scheidt, E. G. Rohwer, H. M. von Bergmann, 

E. Saucedo, L. Fornaro, E. Dieguez, H. Stafast 

“Optical second harmonic imaging of Pb x Cd 1-x Te 

ternary alloys” 

J. Appl. Phys. 97 (2005) 103104-1–103104-6 

Th. Stelzner, M. Arold, F. Falk, H. Stafast, 

D. Probst, H. Hoche 

“Single source precursors for plasma-enhanced 

CVD of SiCN films, investigated by mass spectrometry” 

Surf. Coat. Technol. Vol 200/1-4 (2005) 372–376 

at 

87


88 

Th. Stelzner, F. Falk, H. Stafast, D. Probst, 

H. Hoche 

“Plasma-enhanced CVD of hard SiCN thin films 

using bis-(trimethylsilyl)-carbodiimide or hexamethyl 

disilazane as single source precursors” 

Proc. Internat. Symp. EUROCVD-15, Bochum 

Vol. 2005-09 pp.1014–1020 

W. Triebel, Ch. Mühlig, S. Kufert 

“Application of the laser induced deflection (LID) 

technique for low absorption measurements in 

bulk materials and coatings” 

Proc. SPIE 5965 (2005) pp 59651J-1–59651J-10 

Presentations (Talks and Posters) 

H. Stafast 

„Der Laser als kontaktfreie Sonde“ 

Vortragsreihe Heinrich-Böll-Gymnasium/Rotary 

Club 

Talk at Heinrich-Böll-Gymnasium, Saalfeld, 

February 14, 2005 

H. Stafast, D. Müller, W. Paa, W. Triebel, 

A. Burkert 

„Moderne Entwicklungen der planaren 

laserinduzierten Fluoreszenz für die Laserdiagnostik 

von Verbrennungsprozessen“ 

Poster at 19. Vortragstagung GDCh-Fachgruppe 

Photochemie, Jena, March 29–31, 2005 

F. Falk 

„Laserkristallisation von Halbleitern“ 

Talk at WIAS-Kolloquium, Berlin, April 4, 2005 

H. Stafast 

„Laserdiagnostik an Flammen – Methoden- und 

Geräteentwicklung“ 

Talk at Colloquium, Institute of Physical and Theoretical 

Chemistry, University of Frankfurt/Main, 

May 23, 2005 

G. Andrä, J. Bergmann, F. Falk, E. Ose, 

S. Dauwe, T. Kieliba, C. Beneking 

“Characterization and Simulation of Multicrystalline 

LLC-Si Thin Film Solar Cells” 

Poster at 20 th Europ. PVSEC, Barcelona, Spain, 

June 06–10, 2005 

J. Bergmann, A. Bochmann, R. Stober 

„Mikromaterialbearbeitung mit dem Ultrakurzpulslaser“ 

Poster at “Laser 2005”, München, June 13–16, 


F. Falk 

“Laser crystallization – a way to produce crystalline 

silicon films on glass or on polymer substrates” 

Talk at 16 th Amer. Conf. Crystal Growth and Epitaxy, 

Big Sky, Montana, USA, July 10–14, 2005 

W. Paa, D. Müller, A. Gawlik, W. Triebel 

“Combined Multispecies PLIF Diagnostics with 

kHz Rate in a Technical Fuel Mixing System 

Relevant for Combustion Processes” 

Talk at SPIE Optics & Photonics 2005, San Diego, 

USA, July 31–August 4, 2005 

A. Burkert, W. Triebel, Ch. Mühlig, D. Keutel, 

L. Partier, U. Natura, S. Gliech, S. Schröder, 

A. Duparré 

“Investigating the ArF laser stability of CaF 2 at 

elevated fluences” 

Talk at SPIE Optics & Photonics, San Diego, USA, 

July 31–August 4, 2005 

F. Garwe, U. Hübner, T. Clausnitzer, E.-B. Kley, 

U. Bauerschäfer 

“Elongated gold nanostructures in silica for metamaterials: 

theory, technology and optical properties” 

Talk at SPIE, Warschaw, Poland, August 28– 

September 2, 2005 

Th. Stelzner, F. Falk, H. Stafast, D. Probst, 

H. Hoche 

“Plasma-enhanced CVD of hard SiCN thin films 

using bis-(trimethylsilyl)-carbodiimide or hexamethyl 

disilazane as single source precursors” 

Talk at EUROCVD-15, Bochum, September 


W. Triebel, Ch. Mühlig, S. Kufert 

“Application of the laser induced deflection (LID) 

technique for low absorption measurements in 

bulk materials and coatings” 

Talk at SPIE Optical Systems Design, Jena, September 


Ch. Mühlig, W. Triebel, J. Bergmann, S. Kufert, 

S. Bublitz, H. Bernitzki, M. Klaus 

“Absorption and fluorescence measurements of 

DUV/VUV coatings” 

Talk at SPIE Optical Systems Design, Jena, September 


W. Triebel 

“Characterization of DUV optical materials by LIF 

and direct absorption measurements” 

Talk at Boulder Damage Symposium, Boulder, 

USA, September 19–21, 2005 

D. Müller, W. Paa, W. Triebel, C. Menzel, 

K. Lucka, H. Köhne 

„PLIF – Diagnostik von Formaldehyd mit kHz- 

Repetitionsrate in der Mischzone von flüssigen 

Brennstoffen und vorgeheizter Luft“ 

Talk at 22. Deutscher Flammentag, Braunschweig, 

September 21–22, 2005 

H. Stafast 

“Laserdiagnostics in Flames – Development of 

methods and tools” 

Talk at Colloquium of Laser Research Institute, 

University of Stellenbosch, South Africa, October 


F. Falk, G. Andrä 

„Herstellung von Dünnschichtsolarzellen mit Hilfe 

von Excimerlasern“ 

Talk at Technologieseminar: Laseranwendungen 

in der Photovoltaik, Göttingen, November 8, 2005


F. Falk 

„Mikromaterialbearbeitung mit dem Ultrakurzpuls-Laser“ 

Poster at TransferX-Messe, Dresden, November 


W. Triebel 

„Charakterisierung UV-optischer Dünnschichten 

durch LIF und direkte Absorptionsmessung“ 

Talk at TransferX-Messe, Dresden, November 


Patents 

G. Andrä, F. Falk 

„Dünnschichtsolarzelle und Verfahren zur Herstellung 

eines Halbleiterbauelements“ 

DE 10 2005 045 096.2 (21.09. 2005) 

Lectures 

H. Stafast 

„Angewandte Lasertechniken“, 2-stündige Wahlvorlesung 

über 4 Semester an der Friedrich- 

Schiller-Universität, Winter 2004/2005 bis Winter 

2005/2006 

F. Falk 

„Photovoltaik“, 2-stündige Wahlvorlesung an der 

Friedrich-Schiller-Universität, Winter 2004/2005 

„Elastizitätstheorie“, 2-stündige Wahlvorlesung 

an der Friedrich-Schiller-Universität, Sommer 2005 

„Thermodynamik der Phasenübergänge“, 2- 

stündige Wahlvorlesung an der Friedrich-Schiller- 

Universität, Winter 2005/2006 

PhD Theses 

Torsten Scheidt: Charge Carrier Dynamics and 

Defect Generation at the Si/SiO 2 Interface 

Probed by Femtosecond Optical Second Harmonic 

Generation*) 

Friedrich-Schiller-University, Jena, Faculty of Physics 

and Astronomy 

Supervisor: Prof. H. Stafast 

*) work at University of Stellenbosch, South Africa 

Christian Mühlig: Zur Absorption gepulster ArF- 

Laserstrahlung in hochtransparenten optischen 

Materialien 


and Astronomy 


Diploma and Bachelor Theses 

Markus Arold: Massenspektroskopie an Ausgangsstoffen 

zur PE-CVD von Si-C-N-Schichten 


and Astronomy 


Björn Eisenhawer: Wachstum von Si-Nanowires 

mittels Chemical Vapor Deposition 


and Astronomy 

Supervisors: Dr. F. Falk/Dr. G. Andrä 

Sven Germershausen: Untersuchungen zur 

Laserkristallisation von Germaniumschichten auf 

Glassubstraten 

University of Applied Sciences, Jena, SciTec 

Supervisor: Dr. G. Andrä 

Michael Kaiser: Präparation von Solarzellen in 

multikristallinen LLC-Si-Schichten 

Technical University of Ilmenau, Mechanical 

Engineering 

Supervisors: Dr. F. Falk/Dr. G. Andrä 

Laboratory Exercises 

Ch. Noppeney, Fachhochschule Jena, Physikalische 

Technik 

Ch. Voigtländer, Friedrich-Schiller-Universität, Jena, 

Technische Physik 

J. Grasemann, O. Pabst, D. Rettig, Carl-Zeiss- 

Gymnasium (Spezialklasse), Jena 

M. Aubel und R. Pagel, Staatl. Berufsbildendes 

Schulzentrum Jena Göschwitz, Höhere Berufsfachschule 

M. Röder, FH Coburg 

Commitees 

G. Andrä 

– Executive Committee, INPUT Solar, Thuringia 

W. Triebel 

– Program Committee “Optical Diagnostics”, 

SPIE Conf., San Diego, USA, August 2005 

– DUV/VUV Optics, Common working group 

of PhotonicNet and OptoNet 

– GET-UP initiative for start-up companies 

Award 

H. Stafast, professor extraordinary of University 

of Stellenbosch, South Africa 

Exhibitions 

– LASER 2005, World of Photonics, Munich 

– TransferX fair, Dresden 

– Faszination Licht, Goethegalerie, Jena 

New Equipment 

Thin film deposition unit with several material 

sources 

89

INNOVATIONSPROJEKT / INNOVATION PROJECT 

E. Innovationsprojekt 2005 / Innovation Project 2005 

90 

Nanostructured Ta 2 O 5 layers 

for optochemical/biophotonic 

sensors and solar cells 

(S. Schröter, U. Hübner, W. Morgenroth, 

R. Boucher, R. Pöhlmann, G. Schwotzer, 

T. Wieduwilt, S. Brückner, U. Jauernig, 

A. Csáki, W. Fritzsche, G. Andrä, E. Ose) 

Tantalum pentoxide layers are particularly suitable 

for a variety of optical applications due to 

their high refractive index, low absorption from 

the visible to the infrared, good adhesion to glass 

and silicon substrates, and high resistance to 

acids and bases. Furthermore, nanoporous 

Ta 2 O 5 layers could be a promising material for 

optical sensors. We have investigated several 

fabrication technologies for optical waveguide 

grating couplers and two-dimensional resonant 

gratings in compact and nanoporous Ta 2 O 5 layers 

as devices for optochemical and biophotonic sensors, 

and characterised their optical properties. 

Because of the afore mentioned optical properties 

and the high melting point of about 1800 °C, 

Ta 2 O 5 has potential as an intermediate layer for 

thin film solar cells. 

Waveguide grating couplers 

Electron beam exposure (LION LV1) or DUV 

interference lithography at 244 nm were applied 

to the patterning of about 300 nm thick resist 

(ZEP or ARP610) gratings with periods of 410 to 

420 nm atop a NiCr/C/NiCr hard mask sputtered 

onto the Ta 2 O 5 layers on quartz or borofloat glass 

substrates. The resist gratings were transferred 

by a multi-step etching process into the bottom 

NiCr layer, and from this by Ar-IBE, 40 to 70 nm 

into the Ta 2 O 5 layer. An example is shown in 

Fig. E1. 

Fig. E1: SEM picture of a grating with a period of 

416 nm etched 67 nm into a 147 nm thick Ta 2 O 5 

layer. The visible surface texture is created by the 

gold coating for the SEM. 

For the nanoporous layers it was necessary to 

cool the substrate down to –20 °C during etching 

in order to maintain porosity. At higher temperatures 

it is supposed that a compaction of the 

material occurs. The sensor functionality for the 

nanoporous layers was also verified by considering 

the adsorption isotherms in water vapour as 

an example. 

Fig. E2 shows the transmission spectra of a grating 

coupler for the case of a grating with a period 

of 416 nm etched into a 600 nm thick nanoporous 

Ta 2 O 5 layer at two different water vapour 

pressures of 3.5·10 –2 mbar (dry) and 22 mbar 

(wet). The magnitude of the spectral shifts 

depends on the quantity of water molecules 

adsorbed in the nanopores and the related 

refractive index change. 

Fig. E2: Spectral shift of transmission minima 

with humidity due to the coupling of the normally 

incident TE polarised light with two different 

waveguide modes. 

The observed shifts of 8.5 and 9.3 nm for the 

short and long wavelength minimum, respectively, 

are in good agreement with a change in the 

refractive index from about 2.01 to 2.05. 

2D resonant waveguide gratings 

Resonance diffraction effects from 2D dielectric 

gratings can be used to create very sensitive 

angle and/or wavelength encoded sensors. Ta 2 O 5 

layers perforated with square or triangular lattices 

of air holes are suitable for this purpose. Gratings 

with a period of e.g. 620 nm exhibit, for hole 

diameters between about 200 and 400 nm, pronounced 

resonant diffraction properties at least 

within the spectral region from 700 to 1350 nm. 

The fabrication technology was essentially the 

same as for the grating couplers. The ARP671 

resist masks were created by e-beam exposure 

(ZBA23). In order to obtain steep edge profiles an 

ECR-RIE process with a CF 4 /CHF 3 plasma was 

applied to transfer the pattern from the NiCr mask

into the Ta 2 O 5 layers. Unlike for porous layers the 

samples of compact material had to be heated 

up to 150 °C for optimal results. 

An example of a triangular grating in nanoporous 

Ta 2 O 5 is shown in Fig. E3. 


Fig. E3: Triangular grating with a period of 

620 nm and an average hole diameter of about 

230 nm at the top etched 150 nm into a 600 nm 

thick layer of porous Ta 2 O 5 imaged at 0° and 

60°. 

The polarisation independent transmission spectra 

for normal incident light for the case of a dry 

and wet environment are displayed in Fig. E4. 

The pronounced transmission minima at λ > 

830 nm are caused by resonant diffraction 

effects. 

Fig. E5: Simulated transmission properties of a 

grating with the parameters given in Fig. E3, 

assuming cylindrical holes with a diameter of 

210 nm. 

A variety of different devices which include the 

square lattices of holes have been fabricated in 

compact and humidity sensitive Ta 2 O 5 layers and 

are currently under detailed investigation. 

The nanoporous tantalum pentoxide samples 

were provided by the Fraunhofer IOF in Jena and 

investigated here mainly because it could be possible 

selectively to measure the moisture content 

of other than water vapour analytes. 

The filling of the holes of two-dimensional gratings 

with metallic nanoparticles provides an 

opportunity for the biosensing of e.g. DNA molecules 

immobilised on gold nanoparticles. This 

method utilises the special plasmon scattering 

properties of the ordered arrays. 

Chemically activated samples with 2D-gratings 

were placed at an angle into preheated (80 °C) 

colloidal nanoparticle solutions (30 nm in diameter) 

with a concentration of 2 · 10 11 particles/ml. 

During the drying process the receding meniscus 

causes an influx of the metal nanoparticles into 

the holes, see Fig. E6. 

Fig. E4: Spectral shift of the transmission minima 

between dry and wet samples (∆λ min = 10.4 and 

13.5 nm for the first and second resonance wavelength, 

respectively). 

By simulating the transmission behaviour with a 

rigorous coupled wave method, a sufficient 

agreement with the experiment was obtained for 

150 nm deep cylindrical holes with a diameter of 

210 nm, see Fig. E5. 

A change of the refractive index from 1.97 to 2.01 

yields ∆λ min = 13 and 15 nm for the first and second 

transmission minimum, respectively, and all 

wavelengths of the transmission minima differ 

from the experimental values by less than 1.5 nm. 

Fig. E6: Transmission mode optical micrograph of 

a 2D grating in Ta 2 O 5 (square array with a period 

of 620 nm) when the holes are partially filled with 

gold particles. 

91


The varying shades (spectrum from white to 

greenish-blue in a colour picture) indicate the different 

level of filling and positioning accuracy. In 

order to improve the homogeneity a further optimisation 

of this technique is required. 

Thin film solar cells 

For the first time layered laser crystallised (LLC) 

thin film solar cells were prepared on borofloat 

glass substrates covered with a tantalum pentoxide 

layer. 

Our standard cell structure is sketched in Fig. E7. 

Immediately on top of the borofloat glass sub- 

Fig. E7: Design of a standard LLC cell. 

strate a multicrystalline silicon layer system with 

grains exceeding 100 µm in size is deposited. 

The layer system consists of a p + -doped highly 

conductive seed layer, a p-doped absorber layer 

and an n-doped emitter layer. A metal electrode 

acts as a light reflector. The seed layer is prepared 

by cw laser crystallisation of amorphous 

silicon. The absorber and emitter are prepared by 

continuously depositing amorphous silicon on top 

of the seed combined with repeated excimer 

laser irradiation in order to guarantee epitaxial 

growth. In various papers it has been demonstrated 

that intermediate layers between the 

glass and silicon may increase the cell efficiency 

by reducing the reflection loss. Moreover, the barrier 

may act as a light trapping structure due to 

surface scattering and as a diffusion barrier 

against foreign atoms of the glass. In the case of 

LLC cells the intermediate layer has to withstand 

the laser crystallisation process. Standard layers 

usually applied in solar cells such as SnO 2 , ZnO 

or a-SiN x :H do not meet this requirement. 

Because of its suitable optical properties and 

high melting point of above 1800 °C we expect 

tantalum pentoxide layers to be an interesting 

alternative. Therefore, we tested the laser stability 

of this material. We demonstrated that on 

Ta 2 O 5 layers LLC solar cells can be prepared successfully. 

However, it turned out that Ta 2 O 5 layers 

require an excimer laser pretreatment. Without 

the pretreatment layer damage was observed 

after laser crystallisation of amorphous silicon 

due to the formation of gas bubbles. Moreover, 

due to the laser pretreatment the Ta 2 O 5 layer surface 

roughens so that increased light scattering 

is observed which is beneficial for the solar cell. 

In Fig. E8 a current-voltage diagram of a 2 µm 

thick cell with a tantalum pentoxide intermediate 

layer is shown, as compared to a standard cell. In 

both cases no metal reflector for light trapping 

was present. Even though the Ta 2 O 5 cell has inferior 

properties as compared to the standard cell it 

is still a positive result. It was demonstrated that 

the intermediate layer has the desired properties. 

In order to improve the cell parameters the 

excimer laser pretreatment has to be optimised 

so that the crystal quality of the silicon is 

increased to that of the standard cells. 

Fig. E8: I–V-diagram of a LLC cell with tantalum 

pentoxide intermediate layer (full line) as compared 

to a standard LLC cell (broken line). 

92

Annual Report 2005 - IPHT Jena

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