3. Silicon Microphone Market Opportunity MEMS ... - I-Micronews

SiMM07 

Silicon Microphone Market Report 2007 

A sustainable market for 15+ silicon microphone manufacturers? 

Source: Knwoles Acoustics 

Source: Motorola 

Source: SonionMEMS 

Source: Harisscomm 

Source: MEMSTECH 

Source: Akustica 

Source: Jaguar 

Source: Monodrive 

© 2005

Content 

• 1. Executive Summary (p.4) 

• 2. Methodology (p.6) 

• 3. Market Opportunity (p.11) 

– ECM markets Key points 

– Market opportunity for MEMS microphones 

– Description of applications 

– Market evaluation per application 

– Market trends 

• 4. Industry Status of Development (p.41) 

– Product introduction schedule 

– Silicon Microphone Player Profiles 

• 5. Industry Organization and Trends (p.123) 

– Business model comparison 

– Evolution of the ECM competition 

– From Analog to Digital evolution 

– Technology winners: monolithic vs. several 

chip solution? 

– Key drivers of microphone manufacturer and 

handset manufacturers relationship 

– From microphone device to microphone 

module 

– M&A 

© 2005• 2 

• 6. Silicon Microphone Technology 

Overview (p.137) 

– Microphone definition 

– Advantages of Silicon Microphones vs. ECM 

– Silicon MEMS Technology 

– Detection principle description 

• 7. Silicon Microphones Manufacturing 

Challenges (p.156) 

– Design 

– Processes 

– Cost analysis on several device types 

– Opportunity to decrease price 

– Development costs per players 

• 8. Appendix 

• 8.1 General overview of the MEMS 

Business (p.164) 

– MEMS History & Genealogy 

– MEMS market challenges 

• 8.2 MEMS Manufacturing Overview (p.168) 

– Key Differences between MEMS and IC Lines 

– MEMS typical flow chart 

– Micromachining technologies 

– Why integrated MEMS: from MEMS to 

Microsystems 

– MEMS processes challenges 

SiMM’05 Sept. 2005 Copyrights © Yole Développement SARL. All rights reserved.

Content of the report 

”150+ slides giving a complete understanding of the silicon 

microphone markets “ 

Technology 

Process / 

Materials 

Devices 

Systems 

Markets 

Overview of detection 

principle 

Description of the main 

manufacturing 

challenges 

Market estimation per 

applications: Handests 

–VoIP –Consumer 

electronics – Hearing 

heads – Automotive - 

Security 

Evaluation of the 

system market and 

requirements 

Players 

R&D 

20+ Company profiles describing the activity, the products, the technology, the 

processes, R&D works and the main patents 

Trends 

Technology trends 

among industrial 

players 

Impact on the 

equipment and material 

market 

Trends of product size 

and power 

consumption 

Product introduction 

schedule 

© 2005• 3 


3. Silicon Microphone Market Opportunity 

© 2005• 4 



Market Descriptions 

• Silicon Microphone potential applications are identified on the schematic 

above 

• Market penetration is estimated to be in the following order: 

1. Consumer 

2. Medical 

3. Automotive 

4. Industrial 

Hand free sets 

Mobile phones 

Laptops 

CONSUMER 

AUTOMOTIVE 

Acoutics crash sensors 

Active noise cancellation 

PDAs 

PCs 

SILICON MICROPHONE 

INDUSTRIAL 

MEDICAL 

Hearing aids 

Active noise 

cancellation 

© 2005• 5 



MEMS Microphone Advantages 

• Advantages of MEMS microphone 

vs. conventional microphones 

• 1 - Surface Mountable 

– Auto pick-n-place 

– Lead-Free 

– No manual insertion process 

• 2 - Robust design superior 

temperature/humidity performance 

– Sensitivity does not shift with 

change in temperature 

– Withstands typical reflow solder 

temperatures 

Source: Knowles 

© 2005• 6 



MEMS Microphone Advantages 

• 3 - Design flexibility 

– Reduced height possible 

– with “Zero Height” SiSonicTM 

– Port hole in contact pad plane 

– Simplified acoustic gasketing 

• 4 - Flexible Package for Circuitry 

Integration 

– Amplified output 

– Differential Amplifier 

– Integrated A/D converter 

– Other customized solutions 

possible 

Source: Knowles 

© 2005• 7 



6 MEMS microphone players among the TOP30 

2006 TOP30 MEMS Manufacturers 

(* Yole Estimations) 

1000 

900 

800 

2005 

2006 

700 

600 

500 

400 

300 

200 

100 

0 

TEXAS INSTRUMENTS* 

HEWLETT PACKARD* 

ROBERT BOSCH * 

LEXMARK * 

SEIKO EPSON * 

STMICROELECTRONICS 

CANON * 

FREESCALE 

ANALOG DEVICES * 

DENSO * 

GE INFRASTRUCTURE SENSING * 

SYSTRON DONNER (SDA - SDI) 

HONEYWELL * 

DELPHI DELCO ELECTRONICS * 

INFINEON TECH. * (incl. Sensonor) 

OLIVETTI I JET* 

VTI TECHNOLOGIES 

PANASONIC (MEI - MEW)* 

BOEHRINGER INGELHEIM MICROPARTS* 

FORMFACTOR 

CONTINENTAL AUTOMOTIVE * 

KNOWLES ACOUTICS * 

MEASUREMENT SPECIALTIES INC. (including HL Planartechnik) 

MURATA * 

AVAGO TECHNOLOGIES * 

OMRON 

SILICON SENSING SYSTEMS * 

ULIS* 

COLIBRYS* 

KIONIX 

MEMS manufacturers having silicon microphone activities (Sales & product development) 

© 2005• 8 



Market Estimation 

2006 2007 

2008 

2009 2010 

2011 

MICROPHONE 

MARKET 

Million 

units 

ASP 

($) 

Market 

(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

TOTAL MICROPHONE MARKET 2683 2999 3314 3580 3869 4141 

Total Silicon Microphone Market 269 116 428 143 642 189 909 237 1220 282 1605 330 

Penetration rate 10% 14% 19% 25% 32% 39% 

• MEMS microphone market is estimated to have jumped from XXX Munits in 2005 to 

XXX Munits in 2006 

– It represents an average 90% annual growth 

– Yole plans a steady XX% unit CAGR on the 2006 – 2011 period 

• The saturation of the handset penetration to XX% of the production in 2011 is compensated by the use 

of MEMS technologies for consumer electronic goods. 

• MEMS products have XX% volume share over ECM microphones in 2006 

– It will reach XX% penetration rate in 2011 

– This ratio will increase until 2015 at least, not been affected by the saturation in the wireless 

handset applications 

• Volume is mainly driven by mobile phone application today and until 2011 

– XX% of 2006 sales 

– Still XX% of 2010 shipments 

• The use of microphones in other consumer electronics like headsets and notebooks 

represent the next large market opportunity 

© 2005• 9 



All applications 

• Silicon microphone market opportunity summary table: 

MICROPHONE 

MARKET 

Mobile phone 

applications 

Million 

units 

2006 2007 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

2008 

ASP 

($) 


(M$) 

Million 

units 

2009 2010 

269 $0,43 116 411 $0,33 136 556 $0,28 156 699 $0,24 169 851 $0,21 179 1011 $0,18 187 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

2011 

ASP 

($) 


(M$) 

Hearing Aids 0,09 $5,00 0,4 0,19 $4,90 0,9 0,30 $4,70 1,4 0,52 $4,50 2,3 

Notebook 5 $0,43 2,2 24 $0,37 8,6 50 $0,31 15,5 79 $0,28 22,1 111 $0,25 27,8 

Earbud headset 8 $0,37 3 33 $0,31 10 70 $0,26 18 147 $0,22 33 

Consumer Electronic 

(Camera / Camcorders / 

…) 

12 $0,43 5 55 $0,37 20 126 $0,31 39 217 $0,26 57 333 $0,22 75 

Automotive applications 0,04 $3,00 0,1 0,46 $2,50 1,2 0,97 $2,25 2,2 2,0 $2,03 4,1 3,2 $1,82 5,8 

TOTAL MICROPHONE MA 2683 2999 3314 3580 3869 4141 

Total Silicon Microphone 269 116 428 143 642 189 909 237 1220 282 1605 330 


© 2005• 10 



Focus on each application 

© 2005• 11 



Mobile phones application 

MICROPHONE 

MARKET 

Mobile phone 

applications 

Million 

units 

2006 2007 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

TAM 960 1054 1157 1271 1395 1532 


2008 

ASP 

($) 


(M$) 

Million 

units 

2009 2010 

SiMicro Market 269 $0,43 116 411 $0,33 136 556 $0,28 156 699 $0,24 169 851 $0,21 179 1011 $0,18 187 

ASP 

($) 


(M$) 

Million 

units 

ASP 

($) 


(M$) 

Million 

units 

2011 

ASP 

($) 


(M$) 

• Main players: 

– XXXX 

• Market status 

– Knowles Acoustics is clearly the leader in this field 

• First sales started in 2003 

• Knowles announced to have shipped a cumulated XXXMunits in Q3 2006 

– XXXXXXXXXXXXXXX are strong challengers in production since Q1 2006 

– Since Q4 2006, four additional players are sampling or producing 

• XXXXXXXXXXXXXX is in production and very active 

• Other companies include XXXXXXXXXXXXX with available samples but no information on sales level 

© 2005• 12 




• Business trends 

– The MEMS microphone market benefit 

from the “thin handset” design trend 

• Motorola RAZR V3 success raised North 

Marican sales of Motorola by 40% between 

2004 and 2005 

• Before the RAZR, the typical thickness of 

a clamshell phone was 25-30mm 

• Today, ultra-slim clamshell devices 

thickness ranges from 11mm to 15 mm 

thick (depending if it is 3G or not) 

• Manufacturers are using thickness in the 

same way that retailers use price points to 

attract customers 

– ………………. 

Evolution of the ultrathin handsets – Source Strategy Analytics 

© 2005• 13 




• Business trends 

– ………………… 

© 2005• 14 


4. Industry status of development 

© 2005• 15 


20+ 4. Silicon Microphone Players! 

Markets Consumer Medical Industrial Automotive 

Applications 

Wireless 

Telecom 

PC/Laptop 

Consumer 

Electronics 

Hearing aids 

Equipment 

monitoring 

Security…? 

Crash Impact 

Sound Sensor 

Remote voice 

control 

MEMS 

microphone 

manufacturers 

in production 

MEMS 

developments 

© 2005• 16 


80% of players uses capacitive detection 

Markets Consumer Medical Industrial Automotive 

Applications 

Wireless 

Telecom 

PC/Laptop 

Consumer 

Electronics 

Hearing aids 

Equipment 

monitoring 

Security…? 

Crash Impact 

Sound Sensor 

Remote voice 

control 

Capacitive 

Principle 

Optical 

Principle 

Piezoelectrical 

Principle 

© 2005• 17 


4. Silicon Microphone Players 

Example of Yamaha 

23 profiles included in total 

© 2005• 18 



Yamaha (1/5) 

• Company : 

– Japanese company founded in 1897 

– Begins production of custom-made LSIs in 1983 

– Development of MEMS began in 2002 

– Development of silicon microphones started in 2004 

• Product : 

– Yamaha is selling two different silicon microphones : 

• YAM551 without a built-in amplifier 

• YAM 552 with a built-it amplifier than can be set 

• Status : 

– In production 

– Yamaha has announced its commercial silicon microphones on March 9, 2007 

– Sample shipments will begin on March 2007 

– Sample price : 210 Yen (1.31 euro) 

– Expected Sales : 500, 000 units per month 

Silicon microphone 

YAM551from Yamaha 

• Markets targeted : 

– Mobile phones, PDA’s, game consoles, cameras, camcorders and other portable devices. 

© 2005• 19 



Yamaha (2/5) 

• Description : 

– Two chips on a single package 

• A MEMS condenser microphone chip 

• A LSI chip 

– Yamaha has announced that its silicon microphones are ultra compact 

• 4.3mmx3.4mmx1.28mm 

– Single-channel analog output 

• Product features 

– Noise reduction, directionality control 

Other specifications : 

– Power supply voltage : 1.5V to 3.6V 

– Sensitivity : -42dBV/Pa ( 1Khz, 94dBSPL) 

– Signal to noise ratio : 55dB (1Khz, 94dBSPL) 

– Package size : 4-pin CSON (ceramic small outline non-leaded package), 

• 4.3mmx3.4mmx1.28mm 

– Thin package 

Silicon microphone 

YAM551from Yamaha 

© 2005• 20 



Yamaha (3/5) 

• Process Description : 

– Production began with 0.18µm process 

• MEMS Microphone activities is estimated to be part of LSI Yamaha activity. 

– Three LSI facilities are located in three areas : 

• YAMAHA TOYOOKA FACTORY (Iwata, Shizuoka) : LSI research and development position 

• YAMAHA KAGOSHIMA SEMICONDUCTOR (Yusui-cho Aira-gun, Kagoshima) : LSI mass production 

fab. 

• Subsidiary YHD (Yamaha High-tech design Corporation) : LSI designing 

© 2005• 21 



Yamaha (4/5) 

• Strategy : 

– Yamaha Business Plan for Silicon Mic : 24.6 M€ in 2010 (Medium-term) 

– Roadmap coming from « Yamaha growth plan 2010 » 

– Yamaha exports its MEMS activity to leverage from its LSI products and manufacturing 

capabilities. 

© 2005• 22 



Yamaha (5/5) 

• Strategy of Yamaha « The Sound Company » : 

© 2005• 23 


5. Industry organization and trends 

© 2005• 24 


6. Silicon Microphone technology overview 

© 2005• 25 



Detection principle 

• Three types of silicon microphones have been identified so far: 

– Capacitive detection is of high growth and interest today 

• Dedicated to low cost and moderate performances devices: i.e. the replacement market of the ECM 

– Microflow detection is related to fine sound measurements 

• Oriented toward measurement market 

– Optical detection is more military /security oriented 

• This detection is very accurate and allow lot of noise reduction 

• It main feature is to be undetectable compared to other technologies 

• They are mainly developed for military applications 

• This technology analysis will only cover the capacitive silicon microphones 

– 90 of developments and production are using capacitive detection principle 

Detection principles 

Capacitive 

Optical 

Microflow 

Piezoresistive 

Piezoelectric 

© 2005• 26 



Detection principle 

• All silicon microphone detection principle rely 

on the same element: the membrane 

• Fabrication of a Membrane chip 

– Fabrication of a membrane starts with 

depositing the membrane material on the front 

side of the wafer. 

• This is a critical process step, because the 

properties of the deposited layer influence the 

mechanical characteristics and therefore the 

acoustical behaviour strongly. 

• The internal stress , for example, is an important 

factor for the value of the resonance frequency. 

– Step two is to deposit a masking layer on the 

backside of the wafer. 

• Anisotropic etch solution gets grooves with the 

characteristic v-shape 

• Since the deposited membrane layer consists of an 

etch-resistant material, it survives the etch process 

and forms the membrane. 

• Typical dimensions are : 

– wafer thickness : 500 µm, 

– membrane thickness : submicron range, 

– lateral membrane size: in the range of 1mm by 1mm. 

© 2005• 27 


Presentation of Yole Developpement 

July 2007 

© 2005 

45 rue Sainte Geneviève, F-69006 Lyon, France 

Tel : +33 472 83 01 80 - Fax : +33 472 83 01 83 

Web: http://www.yole.fr

Presentation of Yole Développement 

• Yole Développement is a market research and strategy 

consulting company, founded in 1998. 

• We are involved in the following fields: 

• MEMS fields (including microfluidics), strategy and market 

research 

World market research leader 

• Photovoltaic process, equipment and materials 

• Nanomaterials 

• 3D IC business 

World market research leader 

• Yole Développement has 18 consultants, with both technical 

and marketing/management background, operating worldwide 

© 2005• 29 


Presentation of Yole Développement 

• We have different activities : 

– Custom strategic and market research analysis: 

• Market research and market analysis 

• Strategic consulting 

• Technology analysis, process cost analysis 

• Company evaluation and M&A services 

– Most complete collection of reports on MEMS markets, microfluidics, nanomaterials 

and compound semiconductor industry 

• Status of the MEMS Industry 07, Light Enfine, Memsfoundries 

06… 

• 3D IC business and technology trends 

– Edition of a free monthly newsletter Micronews: 

• English & Japanese version 

• 16 000 subscribers, 4% growth per month 

– Edition of a MEMS executive bulletin, MEMSEntry 

• Subscription based, English and Japanese version 

• 800 subscribers 

© 2005• 30 


Our references (partial list) 

© 2005• 31 


For more information … 

Take a look at our web site 

www.yole.fr 

You can register on line for free issues of Micronews 

© 2005• 32

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