Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
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PROVE ®<br />
Schematic optical layout<br />
Autofocus system<br />
CCD camera<br />
Flexible<br />
illumination<br />
<strong>for</strong> transmission or<br />
reflection<br />
Imaging optics<br />
=193nm, NA=0.60<br />
pellicle compatible<br />
Image processing<br />
Auxiliary optics<br />
<strong>for</strong> coarse alignment<br />
Reticle<br />
(face-up)<br />
Stage<br />
actively controlled in 6 dof<br />
ultra precise stage metrology system<br />
Carl Zeiss SMS GmbH, Klaus Edinger<br />
03/27/2013 6
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