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How Bad's the Damage?

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<strong>How</strong> Bad’s <strong>the</strong> <strong>Damage</strong>?<br />

Innovating Test<br />

Technologies<br />

for production<br />

probe cards<br />

Abstract:<br />

• New, thinner metals and softer dielectrics<br />

make it important to minimize probe<br />

damage and provide reliable evaluation<br />

tools. Accurate comparisons of probe<br />

damage measurements from different<br />

technologies lack a common standard to<br />

talk about <strong>the</strong>se parameters. This paper<br />

proposes some standard measurement<br />

methods for evaluating probe damage, and<br />

identifies probing issues on several<br />

different customer products.

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