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ebeam.org

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Full-Chip MB-MDP is Here

Aki Fujimura

CEO, D2S, Inc.

www.ebeam.org


Full-Chip MB-MDP is Here

Write Time

Reduction

Accuracy

(MTT & CDU)

Full Chip

Processing Time

2


Full-Chip Accuracy Enabled by the

Computational Design Platform

• 400 TFLOPS of CPU + GPU computing

• Coarse-grain, multi-threaded CPU and

GPU parallelism

• Built for the Mask Shop

• 11 TBytes RAID storage

• Redundant InfiniBand Network

3


Fully Automated Shot Synthesis Flow

for Accuracy and Processing Speed

Design Data In

(Manhattan, ILT, Curvilinear)

Processor

Shot

Synthesis

Assembly and Verification



Processor Processor Processor Processor

Shot

Synthesis

Shot

Synthesis

Shot

Synthesis


Shot

Synthesis

Shot Synthesis

Shot Generation

- Rough Simulation

- Approximate Shots

Simulation-Based

Shot Generation

- Analysis

- Precise Shots

eBeam Writer

Format File

4


Billion Shots/day

Full-Chip MB-MDP is Here:

Processing Time As Fast as the Mask Writer

D2S Full-Chip MB-MDP produces the shots in 80-300B shots/day, depending on the system

configuration. Full-chip data for a typical system-on-chip (SOC) with 1600 mm 2 mask dimensions

and with a shot density of ~50 shots/μm 2 without exploiting shape hierarchy and repetition is

processed in 24 hours or less on the standard D2S Computational Design Platform.

1000

100

10

1

D2S Full-Chip MB-MDP

Average runtime

“A chip a day”

(80B shots/day)

0.1

Apr-12 May-12 Jun-12 Jul-12 Aug-12 Sep-12 Oct-12 Nov-12 Dec-12

5


Summary: Full-Chip MB-MDP is Here

Collaboration across the mask ecosystem

Write Time

Reduction

Accuracy (MTT &

CDU)

Full Chip

Processing Time

6


Hoya presentation

Thursday 11:20am [8522-53]

“Shape-dependent dose margin correction using

model-based mask data preparation”

Yasuki Kimura, Ryuuji Yamamoto, Takao Kubota, Kenji Kouno of Hoya Corp,

and Shohei Matsushita, Kazuyuki Hagiwara, Daisuke Hara of D2S

7

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