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High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

Buried Mesa

Buried Mesa APD with Regrown Guard-Ring • Mesa Etch and Regrowth Isolation Layer (Patented) • No Diffused Junctions and Multiple Implanted GRs • Regrowth p-InP Guard Ring + Implanted Guard Ring • Bandwidth< 4GHz for OC-48 Applications (2.5 GHz) • GB Product=37 GHz • Sensitivity= -33 dBm • Excess Noise Factor=0.4 Regrown p-InP P+-InP n-InP Mulutplication InGaAsP i-InGaAs n-InP Proton Implant Isolation WOCC-2005

Planar InGaAlAs/InAlAs MQW APD • SI InP Substrate • Inverted Mesa Junction • Ti Implanted Guard-Ring to Decrease p-concentration of Field-Buffer Layer • Dark Current Increase Due to Implantation • SiN X Passivation • p+ Zn Diffusion Isolation • Contact Metal Deposition • Flip-Chip Bonding • Cd=0.15pF, Cp=0.06pF • RL=25 Ω to achieve Bandwidth=15.2GHz • Id=0.36µA@ M=10 • GB Product = 120GHz AR Coating SI-InP Substrate Zn Diffused Region Sn Bump p-contact Ti Implanted Guard-Ring n+ InAlAs Cap p+ InP P - InGaAs p+ InP Field Buffer InGaAlAs/ InAlAs Superlattice WOCC-2005

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