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Microelectromechanical

Resonators

Kaylee Benson

Duc Duong

Priscilla Gomez

Henry Muro

Mentor: Barry Ernest DeMartini

Faculty Advisor: Prof. Kimberly Turner, Jeff Moehlis

1


Objective

• Exploit the benefits of micro/nano

scale resonant mechanical structures

for real world applications

• Characterize the dynamics of

different MEMS resonators

Courtesy of Wikipedia

2


What is a MEMS resonator

• Micro= objects 10 - 6 m (Nano=10 - 9 m)

• Electro= electricity or electronics

• Mechanical= moving parts

• Systems= unifying elements

• Resonator= part or device that vibrates with

waves

Courtesy of Barry DeMartini

3


Resonator Basics

• ω o = resonant

frequency

• k = stiffness

• m = mass

4


Laser Vibrometry

• Microscope-laser system used to

determine resonant frequency, velocity,

and quality factor of resonator

• Helium neon laser coupled with acousto-

optic mirror system

• Doppler frequency shift

Courtesy of Polytec

5


In-plane MEMS resonator

• Horizontal mass

sensor

• Capacity comb drive

• Frequency affects

amplitude

6


Broadband Spectrum Graph

Resonant Frequency with Varying Voltages

1.80E-02

1.60E-02

1.40E-02

Velocity (m/s)

1.20E-02

1.00E-02

8.00E-03

6.00E-03

4.00E-03

2.00E-03

0.00E+00

7500

7533

7566

7598

7631

5 Voltz

3 Voltz

1 Volt

7664

7697

7730

7763

7795

7828

7861

7894

7927

7959

7992

Frequency (Hz)

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Atomic Force Microscope

Resonator (AFM)

AFM Resonant Modes

8.00E-03

7.00E-03

Velocity (mm/s)

6.00E-03

5.00E-03

4.00E-03

3.00E-03

2.00E-03

1.00E-03

0.00E+00

1 st mode of Sensor (425kHz)

156.2

40313

80469

12062

16078

20093

24109

28125

32140

36156

40171

44187

48203

52218

56234

60250

64265

68281

72296

76312

80328

84343

88359

92375

96390

Frequency (Hz)

1 st mode of Actuator (89.4kHz)

Actuation method:

Piezoelectric shaker

2 nd mode of Actuator (560kHz)

Courtesy of Benedikt Zeyen

8


Microelectromechanical System

(MEMS) Resonators

• Real World Applications:

• Chemical/Biological Sensing (Weapons)

• Accelerometer

• Atomic Force Microscope

Courtesy of Wikipedia

9


Microelectromechanical System

(MEMS) Resonators

• Real World Applications:

• Chemical/Biological Sensing (Weapons)

• Accelerometer

• Atomic Force Microscope

Bobo loves

MEMS!

Courtesy of Wikipedia

10


Special Thanks To:

• Barry DeMartini

• Kimberly Turner and Jeff Moehlis

• Benedikt Zeyen

• National Science Foundation

• Members of Turner/MacDonald Lab

• Leaders of SIMS program

• Fellow SIMS members

• VIBROMETER!

11

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