Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
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PIXEL2002 - International Workshop on Semiconductor <strong>Pixel</strong> <strong>Detectors</strong> for <strong>Particle</strong>s <strong>and</strong> X-Rays<br />
Carmel Mission CA, USA, September 9-12, 2002<br />
Design <strong>and</strong> Performances of 3.5 cm 2 , 1M <strong>Pixel</strong> Device<br />
Grzegorz DEPTUCH<br />
deptuch@lepsi.<strong>in</strong>2p3.fr<br />
<br />
4 matrices of 510 × 512 pixels read-out <strong>in</strong> parallel<br />
etched down to 120 µm:<br />
<br />
<br />
<strong>Monolithic</strong> <strong>CMOS</strong> <strong>Pixel</strong> <strong>Detectors</strong><br />
<strong>in</strong> <strong>Particle</strong> <strong>and</strong> <strong>Nuclear</strong> Physics<br />
Prelim<strong>in</strong>ary results:<br />
Noise mean ENC: 20.74 e -<br />
S<strong>in</strong>gle pixel S/N mean: 22.73<br />
detection efficiency ε: 99.3%<br />
spatial resolution σ: 1.7 µm<br />
macro-scale ga<strong>in</strong> nonuniformity: 0.2%<br />
Twice noise MIMOSA I wider frequency b<strong>and</strong>width,<br />
double source follower stage...,<br />
Problem to be solved - fabrication yield.<br />
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