Precision electrical measurement for small-scale ... - H TEST a.s.

Solutions Overview
See It. Touch It.
Measure It.®
Precision
electrical
measurement
for small-scale
technologies

Dear Cascade Customer:
As never before, you are being challenged to bring devices to market
faster, cheaper and with higher performance. Competition is intense.
IC manufacturers are asked to probe smaller line elements, with new
materials, on denser devices.
Since 1984, Cascade Microtech, Inc. has supported the IC industry
by providing probing solutions for its toughest measurement challenges.
We are passionate about ensuring our customers’ success, no matter
how complex or customized the solution. All of the 15 largest semiconductor
manufacturers are our customers. They rely on us for our
in-depth application experience, world-class service and support, and the
proven ability to provide trusted measurement technology. They count
us on to provide precision data while reducing design cycle time and
manufacturing costs.
We pioneered electrical metrology for semiconductor wafers by
being the first to deliver RF microwave probes, calibration standards,
calibration software and microwave probe stations in 1984. This
contribution was acknowledged in a prestigious award given to Cascade
by the IEEE Microwave Theory and Techniques Society.
We continue to be the worldwide leader in the design, development,
and manufacture of advanced wafer probing solutions for the electrical
measurement and test of integrated circuits (ICs) in wafer, die or
packaged form.
We understand your measurement challenges and meet them
with world-class probing solutions. Please visit our website at
www.cascademicrotech.com, or contact us at askanexpert@cmicro.com.
Thank You
John Pence
Vice President and General Manager, Engineering Products Division

The markets
we serve.
The solutions
we deliver.

Device Characterization/Modeling
Industry standard systems
designed for uncompromised
device measurements
Cascade Microtech systems have many designed-in
features that support the full measurement range of
today’s most advanced DC and RF instrumentation.
The high integrity test environment assures a
low-capacitance, low-noise signal path for precision
measurements from DC to 220 GHz.
RF/Microwave parameter extraction
WinCal Calibration Software
• The simplest, most accurate, and
repeatable network-analyzer calibrations
for precision on-wafer measurements
Infinity Probe ®
• Unsurpassed RF measurement
accuracy, repeatability, and low
and stable contact resistance
• Small scrub minimizes pad
damage
• Typical contact resistance

Cascade Characterization/Modeling Measurement Advantage
Measurement/Technology Application Need Solution
1/f
DC/CV parameter extraction
RF/Microwave parameter
extraction
MEMS
Nano devices
High power
Noise/Load pull
Differential/Multiport
Optical
Package/PCB/Board Test
Low electrical noise, RFI immunity,
device oscillation suppression
Wafer temperature control from -55ºC
to 300ºC, low current, low capacitance
measurement capability
Measurements up to 220 GHz; Wafer
temperature control from -65ºC to
200ºC; accurate VNA calibration;
EMI-RFI shielding
Viewing of fine features, motion
analysis, DC/CV, RF measurements
Contacting and measuring ultra-small
features
Precise voltage measurement, high
voltage capability
Low insertion loss, tuners securely
mounted close to DUT
Low cross talk, multi-channel phase
integrity
Measurement of top, side, and
backside emitters, LIV measurement
and responsivity measurement
Flexibility to mount small packages
as well as large boards (e.g. 60 cm x
60 cm). Double sided RF probing
S300 or 12000 Series probe System w/MicroChamber and enhanced
shielding, DCP probes, G-S probes, ultra-low-noise accessories
S300 or 12000 Series probe System w/MicroChamber, AttoGuard
and low noise thermal capability, Infinity/DCP Probes, Impedance
Standards, low leakage probe card
S300/12000/9000 Series Thermal Probe System with auxiliary
chucks, Infinity Probes, WinCal calibration software, RF accessories,
Wavevue measurement software
12000/9000 Series Probe System, RF/DC Probes and accessories,
high powered microscopes
Ultra Stable Probe System, Atomic force microscope, atomic force
probes, DC Probes and accessories
12000/9000 Series Probe System with Kelvin chuck connection, high
voltage and Kelvin DCP probes
S300/12000/9000 Series Probe System, RF Probes (low loss), test
head positioning, test modules, WinCal and Wavevue
S300/12000/9000 Series Probe System with Infinity Dual probes and
differential calibration standards, ENA WaferCal multiport software
Lightwave Probe System, Lightwave probes, RF and DC probes and
positioners
R1000, RF/DC probes, RF accessories
DC/CV parameter extraction
DCP Probe
• Ultra-low, fA-level current and fF-level
capacitance measurements
• Full electrical guarding and shielding with
triaxial design
S300 Probe System
• AttoGuard ® chuck allows 1 fA substrate
current measurements
• Ultra-low noise thermal system
provides up to 3,000× more sensitivity
for substrate current measurements
• Guarded chuck reduces chuck
capacitance by 50 times
9100 Series Probe System
• Cost effective highfrequency
device and circuit
characterization, and highspeed
interconnect, package,
and device testing
• Complete, compact,
low-cost and versatile
probing system

Process Development/Reliability
Precision and versatility for
the most advanced processes
Accurate reliability and lifetime-in-use data is
critical for development of robust processes.
With lab grade performance and measurement
versatility, Cascade systems have the capability
needed for developing the most aggressively scaled
new semiconductor processes.
Thin gate oxide -TDDB, NBTI
S300 Probe System
• Patented low-volume MicroChamber
measurement enclosure
• Large area microscope travel
• 300ºC thermal systems
• High rigidity probe card holders
DCP HTR Probes
• Ultra-low, fA-level current and
fF-level capacitance measurements
from -65°C to 300°C
• Dual input for Kelvin
measurement
• Easily replaceable ceramic blades

Cascade Process Development/Reliability Measurement Advantage
Application Application Need Solution
Thin gate oxide -TDDB
High frequency CV
Hot carrier
Electromigration
ILD
1/f
Up to 300ºC low electrical noise
measurement environment, multisite
probe cards
Up to >110 MHz CV capability,
accurate SOL calibrations
Thermal control from -55ºC to
200ºC, low current substrate
noise, low-leakage measurements
Up to 300ºC, multi-site probe
cards, low voltage measurements
Up to 300ºC multi-site probe
cards, low electrical noise
Low electrical noise, RFI
immunity, device oscillation
suppression
S300 or 12000 Series Probe System w/MicroChamber, AttoGuard and low
noise thermal capability, low leakage probe card, low noise accessories, high
rigidity probe card holder, DCP-HTR probe
S300 or 12000 Series Probe System w/MicroChamber, AttoGuard and low
noise thermal capability, 110 MHz accessories, Impedance Standard Substrates,
Infinity Probes, 4TP probes
S300 or 12000 Series Probe System w/MicroChamber, low leakage probe card,
low-noise accessories
S300 HT or 12000 Series HT Probe System, large-area high-powered
microscope bridge, multi-site probe card, high-rigidity probe card holder,
Kelvin probes
S300 or 12000 Series Probe System w/MicroChamber, AttoGuard and Low
Noise Thermal capability, large area microscope bridge, low-noise accessories,
high-rigidity probe card holder, DCP-HTR probe
S300 or 12000 Series probe System w/MicroChamber and enhanced shielding,
DCP probes, G-S probes, ultra-low-noise accessories
High Frequency-CV
Summit 12000 Probe System
• Off-wafer auxiliary chucks for
impedance standards
• Nucleus software stores cal locations
• Roll-out stage for fast and convenient
wafer access
Impedance Probe Support
• Single-sided topside-only
measurements can be made
with an Agilent 4294
impedance probe and
Cascade’s Infinity probe
• Stable positioner mounting
with cable
Impedance Standard
Substrates
• Ensures greater accuracy and
better repeatability in onwafer
calibration of impedance
analyzers.
• Convenient reference capacitors
for system verification
• Fast SOL calibrations

Advanced Technology/Research
Precision measurements
of advanced materials
and new technologies
Researchers rely on Cascade Microtech
probing systems for developing today’s
advanced new materials and devices.
Whether the application is lab on a chip,
microfluidics, organic transistors, polytec
neurons, MEMS, high K or low K insulators,
or conductors, Cascade systems support a
full range of precision measurements.
Nanotechnology
C150A Probe System
• Ideal general-purpose R&D lab
solution
• Compact, low-cost design.
• Precision movement and stability
for contacting samples or materials
Summit 12000 Series Probe
System
• Noise, leakage, and measurement
settling times are greatly reduced
• Ideal for thermal applications, the
MicroChamber’s low volume allows
fast dry air or nitrogen purging

Cascade Advanced Technology/Research Measurement Advantage
Measurement/Technology Application Need Solution
Conductors
Insulators
Superconductors
Low-resistance and capacitance
measurements, low current
measurements
High resistance measurements
Fast, low noise measurements
S300/12000/9000 Series Probe System w/MicroChamber, low noise
thermal capability, Kelvin probes, low noise accessories, LCR accessories
S300/12000/9000 Series Probe System w/MicroChamber, low noise
thermal capability, low leakage probes, accessories, LabView Toolkit
S300/12000/9000 Series Probe System w/MicroChamber, low noise
thermal capability, low leakage probes, accessories, LabView Toolkit
Nano
Resistivity, charge capacity, ion
mobility
9000 Series Probe System, high powered microscope, low leakage
probes accessories, LabView Tookit, DCP Probes
MEMS
Nano devices
Optical
Viewing of fine features,
motion analysis, DC/CV, RF
measurements
Nanometer scale device
characterization
Measurement of top, side,
and backside emitters, LIV
measurement and responsivity
measurement
12000/9000 Series Probe System, RF/DC Probes and accessories, high
powered microscopes
Ultra Stable Probe System, Atomic force microscope, atomic force
probes, DC Probes and accessories
Lightwave Probe System, Lightwave probes, RF and DC probes and
positioners
Optical
Package, Board Test
Lightwave Probe System
• Flexible placement of RF, DC and
optical probes
• Highly repeatable and accurate
probe placement
• Ability to probe wafers, slabs,
discretes and modules
Lightwave Probe
• Supports most photonic
tests including LIV, spectral,
responsivity, modulation
R1000 Probe System
• Highly flexible, multiple
configuration system
• Custom designed for accurate
probe placement on packages,
LCDs, printed circuit boards,
motherboards with mounted
components and other large area
substrates

Failure Analysis
Multi-purpose analysis
of the smallest features –
on-wafer or in-package
Viewing and making electrical contact to
sub-micron internal IC features can be challenging.
Mechanical stability and precision, easy application
changeover, coupled with precision electrical
measurement capability, make Cascade systems
the right choice for failure analysis.
Sub-Micron Probing
6100 Series Probe System with
Dark Box
• Quick-release dark box side and
back panels for easy access to the
entire probe and test interface
R4800 Probe System
• Submicron resolution and excellent
stability for probing small features
• High precision stage for internaldie
probing
• Tilt away microscope for easy
application changeover
10

Cascade Failure Analysis Measurement Advantage
Measurement/Technology Application Need Solution
IC or memory design debug
Sub-micron probing
Emission microscopy
Internal node probing
Hot spot detection
Internal node test with IC powered up, IC
timing analysis, signal verification, localized
deprocessing, FIB pad probing
High impedance probing, viewing and probing

World Class Service and Support
Customers direct their service, support and sales
questions to their local Cascade representative or
to one of Cascade's six regional corporate offices.
With offices in the United States, Singapore,
Japan, China, Taiwan and the United Kingdom,
we offer world class, responsive service to help
ensure maximum uptime wherever you are.
Service contracts, extended warranties and
periodic maintenance calls are all designed
to minimize unexpected downtime. Training
and applications support is a large part of our
commitment. Our state-of-the-art upgrades
ensure a profitable partnership to last the
lifetime of your system. Whether you work in a
fab, fabless company, educational laboratory or
institute, your probing system will continue year
after year to be the cornerstone of your success.
Contact us:
Corporate Headquarters
Cascade Microtech, Inc.
Toll Free: +1-800-550-3279
Phone: +1-503-601-1000
Email: sales@cmicro.com
Customer Service: cmisupport@cmicro.com
Europe
Cascade Microtech Europe, Ltd.
Phone: +44-1295-812828
Email: cmesales@cmicro.com
Customer Service: cmesupport@cmicro.com
Asia
Cascade Microtech (Shanghai) Co., Ltd.
Phone: +86-21-6340-4183
Email: cmc_sales@cmicro.com
Customer Service: cmc_support@cmicro.com
Cascade Microtech Japan, Inc.
Phone: +81-3-5478-6100
E-mail: cmjsales@cmicro.com
Customer Service: cmjsupport@cmicro.com
Cascade Microtech Singapore, Pte., Ltd.
Phone: +65-6873-7482
Email: cms_sales@cmicro.com
Customer Service: cmssupport@cmicro.com
Cascade Microtech Taiwan, Co., Ltd.
Phone: +886-3-5722810
Email: cmt_sales@cmicro.com
Customer Service: cmt_support@cmicro.com
Cascade Microtech, Inc.
2430 NW 206th Ave., Beaverton, Oregon 97006, USA
Toll Free: +1-800-550-3279 Phone: +1-503-601-1000
Europe: +44-1295-812828 China: +86-21-6340-4183
Japan: +81-3-5478-6100 Singapore: +65-6873-7482
Taiwan: +886-3-5722810
Email: sales@cmicro.com
http://www.cascademicrotech.com
Copyright © 2006 Cascade Microtech, Inc. MicroChamber, FemtoGuard,
AttoGuard and the Cascade Microtech logo are trademarks of Cascade
Microtech, Inc. All other trademarks are the property of their respective
owners. All specifications subject to change.
SEGMENT-DS-0706
Data subject to change
without notice