NTEGRA Vita
NTEGRA Vita
NTEGRA Vita
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<strong>NTEGRA</strong> <strong>Vita</strong><br />
Scanning probe microscopy<br />
SPM methods<br />
in air & liquid<br />
in air only<br />
AFM (contact + semi-contact + non-contact) / Lateral Force<br />
Microscopy / Adhesion Force Imaging/ Force Modulation/ Phase<br />
Imaging/ AFM Lithography (scratching)/ Force-Distance curves<br />
STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy /<br />
Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/<br />
Spreading Resistance Imaging/ Lithography: AFM (Current), STM<br />
Sample size<br />
XY sample<br />
positioning range<br />
Scan range<br />
Non-linearity, XY<br />
(with closed-loop sensors***)<br />
Noise level, Z<br />
(RMS in bandwidth 1000 Hz)<br />
Scanning by sample Scanning by probe*<br />
in air 40 mm, 15 mm in height 100 mm, 15 mm in height<br />
in liquid Up to 14x14x2.5 mm Up to 15x15x3 mm<br />
in air<br />
5x5 mm, 5 µm readable resolution, 2 µm sensitivity<br />
in liquid<br />
1x1 mm, 5 µm readable resolution, 2 µm sensitivity<br />
100x100x10 µm, 3x3x2.6 µm 100x100x10 µm, 50x50x5 µm<br />
Up to 200x200x20 µm** (DualScan mode)<br />
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