Design and Fabrication of Topologically Optimal Miniature ...
Design and Fabrication of Topologically Optimal Miniature ...
Design and Fabrication of Topologically Optimal Miniature ...
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<strong>Design</strong> <strong>and</strong> <strong>Fabrication</strong> <strong>of</strong> <strong>Topologically</strong> <strong>Optimal</strong> <strong>Miniature</strong> Microgripper Integrated with<br />
an Electro-Thermal Microactuator<br />
175<br />
Figure 9.<br />
V-shape Bent Beam Strain Sensor<br />
3.2 <strong>Design</strong> <strong>and</strong> Simulation <strong>of</strong> Microactuator<br />
Figure 10 shows the configuration <strong>of</strong> V-shape beam microactuators. The dimensions <strong>of</strong> V-shape beam<br />
microactuator are described in Table 2.<br />
Figure 10.<br />
The V-shape beam microactuator dimension scheme<br />
Table 2.<br />
<strong>Design</strong> dimension <strong>of</strong> V-shape beam microactuator<br />
V-shape beam microactuator<br />
L1<br />
L2<br />
L4<br />
W1<br />
D1<br />
4.56mm<br />
4.84mm<br />
2.84mm<br />
0.14mm<br />
2.7mm
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