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Rotary and Planar Sputtering Targets

Rotary and Planar Sputtering Targets

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<strong>Rotary</strong><strong>and</strong> <strong>Planar</strong><strong>Sputtering</strong><strong>Targets</strong>


2<strong>Rotary</strong> <strong>Targets</strong>Putting the “I” in CIGCIGCu/GaHigh ThroughputCylindrical, rotatable sputtering targets increasematerial utilization <strong>and</strong> system throughputwhile reducing the total cost of ownership.The cylindrical, rotatable shape offers greaterthan 70% material utilization with less systemdowntime <strong>and</strong> high system throughput.The targets are made by Indium Corporation’s verticallyintegrated proprietary process utilizing aerospace powdermetallurgy technology. The production process outputresults in a consistently homogeneous alloy, with lowcontaminate levels <strong>and</strong> consistent density throughout thetarget.Copper-Indium-GalliumCIG alloy targets have very low levels of impurities, whichenable the manufacture of high efficiency solar cells. Thisis because we can control the impurity levels before <strong>and</strong>during our manufacturing process.<strong>Targets</strong> can be used in reactive or non-reactive modes.Using fully alloyed targets with various Cu/III <strong>and</strong> Ga/III ratios enable grading of the deposited CIG chemicalcomposition. This replicates the process used formanufacturing high-efficiency solar cells.Shows homogeneitythroughout the targetTypical Dimensions:Length: 304.8 – 1651mm (12 - 65 inches)Diameter: 76.2 – 152.4mm (3 - 6 inches)Thickness: 3.175 – 12.7mm (0.125 – 0.5 inches)Copper-GalliumThe targets can be produced in chemistry ranges from50% to 80% Cu atomic weight, with Ga making up thebalance of the alloy. They are produced as a monolithicmaterial, bonded onto the backing tube during IndiumCorporation’s unique hybrid consolidation process.www.indium.com


<strong>Planar</strong> <strong>Targets</strong>3Rectangular <strong>Planar</strong>:Length:up to 1524mm (60 inches)Width:up to 381mm (15 inches)Thickness:up to 12.7mm (0.5 inches)Custom Solutions<strong>Targets</strong> are available in custom shapes, sizes, <strong>and</strong> alloycomposition to suit your unique needs. Consistent, tightlycontrolled chemistry throughout the target enable bettercontrol on the resulting solar cell chemistry <strong>and</strong>morphology.Superior Quality• Capability to analyze <strong>and</strong> control impurities to the partper billion levels.• Tightly controlled Fe, Ni, Zn, Cd, <strong>and</strong> Hg enable highersolar conversion efficiency.Hg=10 ppm max*Fe=25 ppm max*Ni=25 ppm max*Zn=25 ppm max**Typical values. Higher purities are available upon request.Oneway (JMP) Analysis of Data By Sample Attribute=GaSpec LimitsDataRound <strong>Planar</strong>:Diameter: 50.38 – 254mm (2 – 10 inches)Thickness: 9.525mm (0.375 inches)1 2 3 3A 4 5 6 6A 7 8 9SampleAll PairsTukey-Kramer0.05Oneway (JMP) AnalysisAnalysisof DataofBy SampleData ByAttribute=GaIIISample Attribute=GalllSpec LimitsData• Alloys available with Cu/III ratios 0.1 –0.99 <strong>and</strong> Ga/IIIratios 0.2 – 0.3.• The targets are securely packed to avoid contamination<strong>and</strong> damage during shipment. Custom packaging isavailable on request.1 2 3 3A 4 5 6 6A 7 8 9SampleStd DeviationsLevel Number Std Dev1 3 0.0002982 3 0.0004263 3 0.0003023A 3 0.0003934 3 0.0003975 3 0.0002366 3 0.0001256A 3 0.0004567 3 0.0003488 3 0.0002719 3 0.000616All PairsTukey-Kramer0.05askus@indium.com


Dedicated R&DIndium Corporation’s R&D includes research scientists <strong>and</strong> applications engineerswith decades of experience in solar, thin film, semiconductor, flat-panel display, <strong>and</strong>electronics technologies. In addition, our global network of industry experts providesfurther depth of knowledge <strong>and</strong> experience. This, together with our customized productdevelopment <strong>and</strong> commitment to confidentiality, is why Indium Corporation is a trustedpartner for large <strong>and</strong> small companies throughout a wide variety of industries.SOLAR ASSEMBLY MATERIALS: The Complete Package<strong>Sputtering</strong> <strong>Targets</strong>• The cylindrical, rotatable shapeoffers greater than 70% materialutilization• <strong>Planar</strong> targets available forprototyping <strong>and</strong> high-volumeproduction• Available in custom shapes, sizes,<strong>and</strong> alloy composition to suit your unique needs• Cu/In/Ga, Cu/Ga, In/Sn, ITO, Sn/O, AZO, <strong>and</strong> custom alloysSolar Tabbing <strong>and</strong> Bus Ribbon• Custom purities <strong>and</strong> base metals• Coatings of various solders <strong>and</strong>thicknesses available• Unique low temperature alloycoatingsEvaporation Sources• Custom-shaped startersources• Low levels of oxygen• Tear-drop <strong>and</strong> roundshotAlloy Powders• Various particle sizedistributions <strong>and</strong>chemistries• Tightly controlledimpurity levelsMetallization Pastes• Metallization pastes available forboth thin film <strong>and</strong> crystalline siliconsolar cells• Finer line resolution <strong>and</strong> minimal• shadowing effect• Lower series resistance• Increased usable life of solar cellSolders• 300+ alloys to matchyour processrequirements• Variety of Pb-free alloys• Pastes, preforms, wire,ribbon, bar• Various shapes <strong>and</strong>sizes to suit your requirementsFluxes• Wide range of fluxes to match yourneeds• Customized packaging• Suitable for high <strong>and</strong> lowtemperature solderingNanoFoil ® for SputterTarget Bonding• Low stress roomtemperature bonding• Flux-free• High strength• Solar sputter targetassembly prototyping<strong>and</strong> bonding availableForm No. 98610 (A4) R0www.indium.com/solarsolar@indium.comASIA: Singapore, Cheongju: +65 6268 8678CHINA: Suzhou, Liuzhou: +86 (0)512 628 34900EUROPE: Milton Keynes, Torino: +39 011 655331USA: Utica, Clinton, Chicago: +1 315 853 4900©2010 Indium Corporation

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