Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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This page intentionally blank.ivEXT Compound Molecular Pumps
1 INTRODUCTION1.1 Scope and definitionsThis manual provides installation, operation and maintenance instructions for the BOCEdwards EXT70H, EXT70Hi, EXT250H and EXT250Hi Compound Molecular Pumps. You mustuse the Pumps as specified in this manual. You cannot purchase an EXT70Hi pump; an EXT70Hipump is an EXT70H/ISO63 pump fitted with an interstage-port accessory: see Section 7.The EXT Compound Molecular Pumps are designed for use with a BOC Edwards EXCTurbomolecular Pump Controller (abbreviated to EXC Controller in the remainder of thismanual) or an EXDC Turbomolecular Pump Drive Module (abbreviated to EXDC Drive Modulein the remainder of this manual). Read this manual and the instruction manual supplied withyour EXC Controller or EXDC Drive Module before you attempt to install or operate theequipment. The instruction manual supplied with your EXC Controller or EXDC Drive Modulecontains details of how to set up a pumping system and how to control accessories such as anair-cooler, vent-valve and bakeout band.Important safety information in this manual is highlighted as WARNING and CAUTIONinstructions; you must obey these instructions. The use of WARNINGS and CAUTIONS isdefined below.WARNINGWarnings are given where failure to observe the instruction could result in injury or deathto people.CAUTIONCautions are given where failure to observe the instruction could result in damage to theequipment, associated equipment and process.In accordance with the recommendations of EN61010, the following warning symbols mayappear on the pump or its accessories:Caution - refer toaccompanying documents.Caution - hot surface.Caution - risk of electric shock.Protective conductor terminal.The units used throughout this manual conform to the SI international system of units ofmeasurement. Also throughout this manual, wherever flow rates are specified, the abbreviation‘sccm’ is used to mean ‘standard cm 3 min -1 : this is a flow of 1 cm 3 min -1 at an ambienttemperature of 0 o C and a pressure of 1013 mbar (1.013 x 10 5 Pa).EXT Compound Molecular Pumps 1
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 12 and 13: 2 TECHNICAL DATA2.1 GeneralPerforma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 16 and 17: Parameter EXT250H EXT250Hi NotesMas
Page 18 and 19: 1. Vent-valve2. Backing-port3. Cool
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 32 and 33: 4.5 BakeoutCAUTIONWhen you bake the
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 38 and 39: Symptom Check ActionThe EXT is very
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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