12.07.2015 Views

Outgassing and Permeation

Outgassing and Permeation

Outgassing and Permeation

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<strong>Outgassing</strong> <strong>and</strong> <strong>Permeation</strong>Beware: <strong>Outgassing</strong> <strong>and</strong> <strong>Permeation</strong> areoften merged in casual vacuum discussionsThe devil is in the details!virtual leaksreal leaks<strong>Permeation</strong>Semi-infinite De-VolatilizationThermal decompositionSurface gas desorbtion.Effects on Ultimate BasePressure! <strong>Outgassing</strong> <strong>and</strong> permeation from o-rings often constrain the ultimatebase pressure of a vacuum system.! The outgassing rate of an o-ring canbe reduced by baking or time.! The permeation rate of an o-ringusually remains constant, but issteeply temperature dependent.5

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