Karl Suss 6 Analytical Probe System - PTB Sales

Karl SussPM 56 AnalyticalProbe SystemEfficient and CompactThe SUSS PM5 Analytical Probe System is intended for costeffectiveand precision analysis of wafers and substrates upto 150 mm (6).High application flexibility is guaranteed with the PM5, whichis suitable for the whole spectrum of DC and HF measurements.An exceptional failure analysis tool, it can be used asa flexible probecard, allowing up to 50 SUSS ProbeHeads atone time.All probing accessories can be added onto the SUSS PM5ensuring field upgrades at any time as well as an excellentcost of ownership.FEATURES AND BENEFITSFor use with wafers and substrates up to 6Cost effective, small footprintEasy to install and set upVersatile system concept meets laboratoryuser requirementsFull range of SUSS accessories andupgrade path availableDC and High Frequency configurationsSUSS. Our Solutions Set Standards.

Challenges and SolutionsAnalytical ProbingThe PM5 provides the stability and resolution required forprecise probe positioning. The SUSS modular design conceptprovides an upgrade path for future development.SUSS PM5 microscope options include stereo zoom, highmagnification and emission microscopy. Microscope traveloptions vary from very simple manual movements to completeautomation using the powerful SUSS ProberBench ®operating system.Analytical DC testThe microscope lifts manually or pneumatically with aminimum of three inches clearance. This creates clear andeasy access to the probes and device under test (DUT).Laser cuttingThe platen has enough area and heavy mass to provideextreme rigidity and accessibility to the probeheads.Platen Z travel has 40 mm (1.57) of linear motion witha 0.2 mm contact /separation stroke. This provides flexibleclearance options from wafers to packaged parts mountedon large test boards.HF ProbecardThe chuck is mounted on a rigid X/Y table with ergonomiccoaxial controls. The chuck position can be finely tunedin the Z direction. A pull-out stage moving along the Y axispermits quick and safe device loading as well as superiorpositional repeatability for packaged devices and substrates.High frequency testAll system controls are ergonomically designed and locatedfor optimum operator comfort.The SUSS PM5 Probe System combines flexibility with submicronresolution. The linear platen movement, rigid castbase and a stiff microscope bridge are qualities featured inall SUSS probers.High frequency probe tipsPM5 as “flexible Probecard”Probecard and Packaged Part TestAll SUSS probecard holders quickly insert directly into theplaten opening. This creates a low profile environmentallowing standard probeheads to probe easily over the topof the probecard to the DUT. As the PM5 chuck stage hasrapid independent X-Y movement, fast and accurate locationsof random die are easily accomplished.2OUR SOLUTIONS SET STANDARDS

SAW Filter characterization with SUSS PM5The PM5 accepts packaged part adapters that either fixon top of the chuck by vacuum or mount directly in placeof the vacuum chuck giving extra clearance for high profiletest boards.SUSS’ unique bayonet locking system allows adaptersand vacuum chucks to be easily exchanged by hand whilemaintaining system planarity.Low Current MeasurementsLow current test requirements need a shielded environmentwith low leakage and low noise. SUSS provides thekey components to create this environment. Low femtoamp measurements are obtained by incorporating theSUSS ShieldEnclosure, guarded triaxial chuck and triaxialprobearms.High Frequency ApplicationsThe modular design of the SUSS PM5 allows the choiceof either a dedicated HF set-up or in combination withDC probes.SUSS HF probing components can be easily added to existingstandard configurations.The HF vacuum chuck has additional vacuum patterns forcalibration substrates or burnishing pads.VersatilityA wide range of additional accessories as well as otherapplications are available (see pages 6/7).Return on InvestmentThe cost of failure analysis will increase, particularly forleading edge technology, necessitating higher equipmentutilization and uptime.The HF platen will accept all SUSS ProbeHeads regardlessof the base type: vacuum, magnetic or bolt down.The optional platen kinematic mount for the SUSS PH250HF ProbeHead, gives valuable travel flexibility in north,south, east and west directions.3

The DesignBaseThe SUSS PM5 combines stability and fine resolutionwith correct user ergonomics, a direct result of advancedmechanical engineering of the complete system.Scope liftSuperior vibration attenuation and stability starts at thebase of the system, which consists of a torsion stiff platen.Platen DriveThe base houses the linear rotational mechanics of theplaten drive, eliminating the need for awkward leveractuation.The heavy duty linear platen drive distributes the forceequally over two massive, stable columns. Each platenhas its own separation column with guide bearings forprecise and repeatable travel. The SUSS platen driveprovides coarse and fine Z travel.Coarse platentravel knobThe large area platen surface is 20 mm thick and precisionmachine ground for flatness.Wafer StageThe versatile wafer stage design has fast and repeatabletravel as well as ergonomic operation.The wafer stage glides on the base platen. An ergonomiccoax knob allows fast independent X andY indexing. The pull-out (90 mm) along the Y axispermits quick and safe substrate loading.An adjustable contact-separation stroke allows easyto-useoperation and provides the flexibility for probingsubstrates with different thicknesses.The standard 360° theta rotation can be optionallyreplaced by a fine theta movement with ±10° travelrange.4OUR SOLUTIONS SET STANDARDSFine platen travel knobXY-positioning stage

SUSS PM5 Analytical Probe SystemVarious microscopeoptionsRigid microscopebridgeMicroscope StageSUSS microscope stability starts with the massivebridge support system. The bridge spans the widthof the probe system and secures to the base. Thisisolates the microscope stage from all other movingsubassemblies.The SUSS modular design concept gives the user anupgrade path from the simplest manual microscopestages to sophisticated programmable microscopemovements.Stable platenThe standard PM5 microscope stage has a travelrange of 5050 mm. However, other travel rangesare available.Microscope lift options, manual or pneumatic, areeasy to use and allow convenient access to the probesand DUT. Repeatability of returning to the focus positionis ± 1 micron.All popular microscopes currently available on themarket are adaptable to SUSS Probe Stations.-Theta chuck system5

The PM5 Modular Probe SystemMicroscope StagesStage Type Resolution Travel Access Lift Options Microscope Type ApplicationManual 40 mm/rev. 50 x 50 mm Fixed, manual or High magnification Pad to internal die probingpneumatic tilt-backor stereo viewManual, high resolution 0.25 mm/rev. 50 x 50 mm Fixed, manual or High magnification Laser cuttingpneumatic tilt-backManual, large travel 40 mm/rev. 100 x 150 mm Fixed, manual or Stereo view Large substratespneumatic tilt-backi.e. MCM, stress testAdjustable env. 30 x 30 mm Fixed Stereo view Minimal movementrequiredMicroscopesMicroscope Type Models Available ApplicationStereo view Olympus SZ40 & 60 Series, Leica M5-12 Series, other Pad probing and internal features down to 5 µmHigh magnification Mitutoyo FS-60/FS-70 Series, A-Zoom, Zeiss PSM, other Offers the most flexible options for features down to 0.4 µmAccessoriesProbesProbe TipsProbecardsActive, passive, HF, triaxial, coaxial, low impedance, KelvinTungsten, tungsten-carbide, palladium, copper shaft, otherSUSS supports all major probecard manufacturersManual ProbeHeads Contacting bond pads and internal nodes down to1 µmRemote Controlled ProbeHeadsDark BoxLaser CutterUtility Pumps.Standard ChucksTriaxial ChucksHigh Insulation Chucks.Microwave ChucksThermal ChucksPackaged Device HoldersFixtures and Chuck AccessoriesChuck SurfacesCamera and MonitorsTablesFor submicron probing, programmableLight-tight, electrically shieldedDepassivating, cutting traces, trimming and blowing fusesVacuum, pressure or combinationsFrom 4 to 6, usually made of stainless steelFor low-current measurementsPower device test, low capacitance demandsDesigned for brittle III-IV compounds and high measurement stability.Auxiliary chucks for calibration and burnishing substratesAdaptor kits for all hot chucks on the market availableHeld down by vacuum on the chuck’s surfaceQuickly manufactured to hold down substrates, provide alignment pins, or allow bottom side probingStandard: stainless steel. Options: gold plated, Teflon coated, aluminum hard coated, nickel plated, otherFacilitates ease of viewing devicesVibration isolating tables6OUR SOLUTIONS SET STANDARDS

Flexible and VersatileProbeHead PlatensPH MountsVacuumMagneticMechanicalHF UniversalCustomizedApplicationMost common, offers ease of use and flexibilityOffers more rigidity than vacuum. Commonly used when magnetic base probeheads are already usedMechanical T-nut mount providing high rigidityOffers vacuum, magnetic, bolt down and kinematic mounting. Kinematic requires additional kitCustom designs are available for specialized applications, such as test head docking, substrates and MCM test490490Platen travel range40488Waferlevel9019010Chucktravelrange160 Platen Microscope movement Microscope bridge Loading sledge Carrier Chuck Base plate Probe platen Platen base Vacuum outlets Microscope bridge Microscope movement Microscope holder Microscope adapter MicroscopeDimensions in mmSUSS PM5 Analytical Probe System7

TECHNICAL DATAWafer/Substrate sizeSizeXYTheta Wafer Stageup to 6/150 mm diameter: Wafer, single chips and fragmentsPlanarity over 6 < 10 µmResolution 5 µmRange of movementIndependent X-Y brakingLoad stroke Y axisZ height adjustment rangeZ contact/separation stroke155 x 155 mm90 mm10 mm0 – 3 mmTheta range of travel, standard 360°Theta range of travel, fine (optional) ±10°ChuckAdjustable vacuum diametersVertical rigidity 6< 15 µm/10 NPlanarity 3 µmProbeHead PlatenFixed or manual drive with contact strokeVacuum, magnetic, mechanical fixation or high frequencyRange of travelContact /separation stroke40 mm0.2 mmRepeatability 1 µmUtilitiesVacuumCompressed air (Pneumatic lift only)Dimensions and WeightWidth x Depth x HeightWeight– 0.8 bar4 bar490 x 490 x 480 mm,20 x 20 x 1960 kg/133 lbKarl Suss WorldwideNorth AmericaKARL SUSS America, Inc.228 Suss Drive · Waterbury Center, VT 05677 · USAPhone (802) 244-5181 · Fax (802) 244-5103KARL SUSS America, Inc.Western Regional Regional Sales & Service Center4710 East Elwood St. · Suite 21 · Phoenix, AZ 85040 · USAPhone (480) 557-9370 · Fax (480) 557-9371KARL SUSS America, Inc.Western Region Sales Region & Service Sales Center2694 Orchard Parkway · San Jose, CA 95134-2020 · USAPhone (408) 432-3071 · Fax (408) 432-3072GermanyKARL SUSS KG GmbH & Co.Schleissheimer Strasse 90 · D-85748 Garching b. München · GermanyPhone (+49)-[0] 89/3 20 07-0 · Fax (+49)-[0] 89/3 20 07-162KARL SUSS Dresden GmbHSüss - Strasse 1 · D-01561 Sacka b. Dresden · GermanyPhone (+49)-[0] 35240-73-0 · Fax (+49)-[0] 35240-73-700KARL SUSS Vaihingen GmbHPlanckstr. 9 · D-71665 · Vaihingen/Enz · GermanyPhone (+49)-[0] 7042 / 955-0 · Fax (+49)-[0] 7042 / 955-100FranceKARL SUSS France S.A.Avenue des Colombières · F-74490 Saint Jeoire · FrancePhone (+33) [0] 4 50 35 83 92 · Fax (+33) [0] 4 50 35 88 01Great BritainKARL SUSS Great Britain Ltd.23 Ivanhoe Road · Hogwood Lane Industrial EstateFinchampstead · Wokingham · BerkshireGB - RG40 4QQ · EnglandPhone (+44) [0] 11 89-732144 · Fax (+44) [0] 11 89-734395JapanKARL SUSS Japan K.K.GITC 1-18-2, Hakusan, Midori-ku · Yokohama, Kanagawa 226-0006Phone (+81)-45-931-5600 · Fax (+81)-45-931-5601AsiaKARL SUSS Asia Co., Ltd.212/2 Soi Ladprao 10Ladprao Road, Ladyao · Jatujak · Bangkok 10900 · ThailandPhone (+66)-2 938 44-26, -27 · Fax (+66)-2 512 5569Come visit our website!www.suss.comRepresentatives in over 30 countries. Please ask for our address list.PS.PM5.T/B.0700.1.SGM, Copyright, Karl Suss ©2000SUSS. Our Solutions Set Standards.PS.PM5.M.T./B.0700.1.SGM, Copyright, Karl Suss ©2000