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Motion and manipulationSection 7.1Motion and manipulationReference tablesShaft deflection graphsThese graphs represent thedeflection caused by alateral or moment loadapplied to solidcylindricalcrosssectionrods.For test purposes, 6.4mmdiameter rods in lengths of 25.4 to229 and 9.5 and 12.7mm diameterrods in lengths of 50 to 300mmwere tested. Rods were mountedhorizontally with one end fixedand supported while opposite endswere left free and unsupported.Rod end deflectionmeasurements were madeafter applyingeach sample loadto eachunsupportedrod length.Loads for the 6.4mm diameterrods ranged from 0.4kg to 2.25kgand 2.25kg to 11.4kg for the 9.5and 6.4mm diameter rods. Rodmaterial is 304 stainless steel, asused in the shaft construction ofall Caburn-MDC motion andmanipulation instruments.These graphs are for referenceonly and do not represent actualmotion instrument shaft deflection.They are provided as visual aidsfor understanding the effects oflateral loading of any stainless steelrod.Since shaft deflection may have asignificant effect on thepositioning of samples,careful considerationmust be given to shaftloading and whetherthe shaft needs to besupported. Caburn-MDCrecommends that all shafts inexcess of 300mm must haveadditional linear or radial support.Deflection (mm)Deflection (mm) Deflection (mm)6.45.13.82.51.306.45.13.82.51.306.45.13.82.51.306.4mm ShaftOnce past the elastic limit for a rod,permanent deformation occursPermanentdeformationoccurs0 25.4 50.8 76.2 101.6 127.0 152.4 177.8 203.2 228.6Moment arm (mm)9.5mm ShaftOnce past the elastic limit for a rod,permanent deformation occursNo permanentdeformationoccurs0 50.8 101.6 152.4 203.2 254.0 304.8Moment arm (mm)12.7mm ShaftOnce past the elastic limit for a rod,permanent deformation occurs2.3 Kg1.4 Kg0.9 Kg0.5 Kg5.4 Kg4.5 Kg3.6 Kg2.7 KgPermanentdeformationoccurs11.3 Kg9.1 Kg6.8 Kg4.5 KgMotion and manipulation0 50.8 101.4 152.4 203.2 254.0 304.8Moment arm (mm)All dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk475


Motion and manipulationSection 7.1Motion and manipulationGlossaryCaburn-MDC precision micrometers measure alongunique plus-minus laser etched scales.Abbe errorLinear off-axis errorintroduced throughamplification oftilt and wobblewith a longmoment arm.This type oferror occurswhen the point undermeasurement is at a relatively longdistance from the axis of motion.AccuracyThe maximum expected differencebetween the actual and a desiredposition for a given input. Highlydependent on method of actualposition measurement.Accuracy, absoluteThe output of a systemversus the commanded orideal input.Accuracy, on-axisThe uncertainty of position afterall sources of linear error areeliminated. Linear errors include:cosine error, lead screw pitch error,abbe error and thermal expansioneffects.BacklashThe maximum magnitude of an inputthat produces no measurable outputupon reversing direction. Typically theresult of poor meshing betweendrivetrain components as with leadscrew threads.Display resolutionThe smallest motion detectable by amotion device’s precision rule,micrometer or motor controls.EccentricitySometimes called concentricity,eccentricity in a rotary device is thedeviation of the centre of rotationfrom its mean position as the deviceturns.ErrorThe difference between an obtainedperformance parameter and the idealor desired result. Errors fall into twoprimary categories, on-axis and offaxiserrors.FrictionFriction is defined as theresistance to motion between surfacesin contact. Friction can be constant orit can vary with speed. Elementscontributing to overall friction may bein the form of drag, sliding friction,system wear or lubricant viscosity.Friction, staticThe friction that must be overcometo impart motion to a body atrest. Since static friction ishigher than slidingfriction, the forcewhich must be appliedto impart motion isgreater than the forcerequired to keep thebody in motion.As a result, whena force is initiallyapplied, the body willbegin to move with a jump insome unpredictable and unrepeatablemanner, producing non-linear, nonrepeatablemotion.Gear ratio, drive trainA motion instrument’s drive train gearratio is the relationship betweenreceived input motion and thedelivered output motion. Ratios areexpressed in the numerical notationa:b, where “a” represents the receivedmotion or device input in revolutionsor some other unit, and “b”represents the delivered orresulting output motion inrevolutions for rotarydevices or 25.4 oftravel in linearmotion instruments.HysteresisThe difference in theabsolute position ofan object for a givencommanded inputwhen approached fromMotion and manipulationoppositedirections. Itis due to elasticforces accumulated in variousdrivetrain components, lead screwwind-up, for instance. Often confusedwith backlash.Load capacity, stageThe maximum centred load that canbe placed directly on an XYZ motionstage and is typically limited by theload capacity of the bearings.Load capacity, lateral ormomentAlso called side or bending loadcapacity, it is the maximum load thatcan be applied perpendicular to ashaft’s axis of motion.Load capacity, axialThe maximum centred and balancedcompressive or tensile load that canbe applied to a stage’s or shaft’slongitudinal or parallel axis of motion.Minimum incrementalmotionThe smallest motion a device iscapable of delivering reliably, not thesmallest display resolution increment.PlayUncontrolled movement due tolooseness of mechanical parts. Usuallyincreases with the components age.Play is a contributor to backlash.Position stabilityThe ability to maintain a constantposition over time. Variationfrom stable position iscalled drift.Contributors todrift includeworn parts,migration of lubricant,and thermal variation.All dimensions are nominal in millimetres unless specified476Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationPrecisionAlso known as repeatability, itis the range of deviations inoutput position that will occurfor 95% of the motionexcursions from the sameerror-free input. Accuracy andprecision are not the same.RepeatabilityThe ability of a motioninstrument to reliably achieve acommanded position over manyattempts regardless of thedirection from which theposition is approached.RunoutThe linear, not angular, portionof off-axis error. It is thedeviation between ideal straightline motion and actualmeasured motion in atranslation stage. Runout hastwo orthogonal components,straightness, a measure of inplanedeviation, and flatness, theout-of-plane deviation.SensitivityThe minimum input required toproduce output motion or theratio between output motionand input drive. Applicableparticularly to manuallyactuated motion devices.TiltThe angular portion of off-axiserror. It is the deviationbetween ideal straight linemotion and actual measuredmotion in a translation stage.Tilt and wobble have threeorthogonal componentscommonly referred to as roll,pitch, and yaw.WobbleWobble is the angular deviationof the axis of rotation over onecomplete revolution.nnSection 7.1Motion and manipulationGlossaryCommon motion deviationsLinear and rotary positionerror region is shown ingreenDesired positionStarting positionRotary drive inputmechanismLinear drive inputmechanismThis illustration is provided for reference onlyLinear and rotary deviations have been exaggerated for illustration purposes00Linear or rotary travel endingpositionDrive train imperfections suchas backlash, lead screw errorsand wobble can contribute tolinear and rotary traveldeviationWobble is the angulardeviation of the shaft’s axis of rotation over onecomplete revolutionThe amount of deviationincreases as the shaft islengthenedRotary and linear outputcan be affected by theamount of play in aninstrument’s drive trainmechanismPlay increases with theage of the productPort flange mountDisplay resolution is thesmallest motion detectableby a motion instrument’sscales or micrometersMotion and manipulationAll dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk477


Motion and manipulationSection 7.1MotionIntroductionCompact high-temperature linearmotion feedthroughs have a smallfoot-print and are constructed withhigh temperature vacuum-gradematerials. Linear position is measuredalong a laser-etched stainless steelbarrel graduated in 20 equally-spacedincrements. A full revolution of thebarrel translates into 1.25mm of lineartravel. Formed stainless steel bellows,a 1.25mm fine pitch lead screw designand the use of radial bearings providethis product with excellent durabilityand performance. All drive mechanismcomponents are located on theatmosphere side of the reentrantformed bellows.Miniature linear motion feedthroughsare specifically designed for light-dutyservice. Full revolution of the barreltranslates into 0.6mm of linear travel.Push-pull linear motion feedthroughsare the most basic of the manualmotion devices offered in thiscatalogue. They provide quick actionlinear motion via a stainless steelhand-held actuator shaft. They aretypically operated by observinginstrument motion through a vacuumviewport. For quick and easypositioning the feedthrough body hasbeen laser etched with linear travelgraduation marks in increments of0.025” (0.6mm). The actuator can belocked in position by tightening anintegral lock knob located on theactuator housing.Rack and pinion linear motionfeedthroughs are very similarto push-pull devices, butprovide finer controlof linear motion.The 90° rackand piniondrivemechanismprovides aquick-action drivewith greater control thanpush-pull devices. For quick and easypositioning the feedthrough body hasbeen laser etched with linear travelgraduation marks in increments of0.025” (0.6mm). A 31.8mm turn onthe handle generates 20mmapproximate of linear travel. Theactuator can be locked in position bytightening an integral lock knoblocated on the actuator housing.Pneumatic linear motion feedthroughsprovide two-position fast action linearmotion. Typical motion applicationswould include on-off, open-close andin-out motions similar to those ofin-vacuum shutters. Linear travel canbe shortened or lengthened via anintegral stroke adjustment knob. Forquick and easy positioning thefeedthrough body has been laseretched with linear travel graduationmarks in increments of 0.6mm.Heavy duty manual, pneumatic andpush pull linear motion feedthroughsallow linear displacement of heaviersamples and components. With theexception of the precisionmicrometer fitted unit, these devicesdo not provide position indication.Position of samples or componentsbeing moved must be verifiedvisually. Unlike conventionalmotion feedthroughs, heavy dutymodels employ reentrant weldedbellows construction.Multi-motionMulti-motion feedthroughs areinstruments with morethan one degree offreedom. This productcategory includescombinations of linear, rotaryand wobble motion.Rotary-linear standard devices offer360° of rotation and 25mm of lineartravel via two separate drive knobactuators. Both rotary and linearpositions are measured along a laseretched actuator barrel and housing.The 360° rotary scale is graduated in5° increments. The linear scale hasboth a linear and rotary scalecomponent, the linear portion isgraduated in 0.05” (1.3mm)increments while the rotary portion isgraduated in 0.001” (0.03mm)increments. Full revolution of thelinear scale produces 0.6mm of travel.Precision rotary-linear motioninstruments are a step higher than thestandard rotary-linear products. Theyoffer greater precision with very lowbacklash, a rotary display resolution of0.1°, and 12.7mm of micrometerprecision linear travel with 0.001”(0.03mm) resolution.Wobble stick multi-motion deviceswith linear, angular wobble, rotary andarticulated pincer configurations areavailable in this product category. Themost elaborate device provides 360°sample rotation, 114mm of push-pulllinear travel, 22° of angular tilt orwobble and a mechanical pincer jawwith 22.4mm diameter samplecapacity.MotionCautionAnodized aluminium finishes will begin to discolourwhen baked in excess of 150°C.This is only a cosmetic condition which does notimpact performance or reliability.All dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk479


Section 7.1Rotary motionStandardMotion and manipulationRotary motionUHV and HV seriesFeaturesnnnnnContinuous rotary motionManual or motorized actuatorRotary position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°CnCF and ISO KF port mountsBRM-133Ø42Ø19Position lockDescriptionCaburn-MDC standard rotary motion feedthroughs are apopular and economical solution for in-vacuum sample ordevice rotation. They are constructed of the highest gradevacuum compatible materials. Position is measured along a360° laser-etched, black anodized barrel graduated in5° increments. Welded stainless steel bellows, a uniqueoff-axis wobble design and the use of rotary shaft bearingsupports provide devices of unsurpassed reliability andperformance. Automation can be achieved with one offour motorization options and controls.3300 30Motor controls must be purchased separately.SpecificationsBØ37MaterialFlange/actuator bodyShaft sealVacuum range UHV/HVTemperature range 1 UHV/HVSpeedTorqueAxial loadLateral loadWeight and dimensions304ss/Anodized aluminiumAM 350 welded bellows1.3x10 -11 mbar/1.3x10 -8 mbar-20°C to +100°C20 rpm0.4 Nm2.7 kg4.5 kgSee tableAØ6.41UHV units are bakeable to 230°C with actuator removed and 30°C maximumwhen motorizednnShown with DN40CF flangeMetal-seal flanges are non-rotatable with clearance holesAll dimensions are nominal in millimetres unless specified480Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Rotary motionStandardUHV SeriesCF 100°CHV SeriesISO KF 100°CFlange Flange Wtsize OD A B M N kgDN16CF 34 40 109 143 118 0.5DN40CF 70 40 109 143 118 0.9Flange Flange Wtsize OD A B M N kgDN16KF 30 37 112 146 123 0.5DN40KF 55 41 108 142 119 0.9ReferenceBRM-133BRM-275ReferenceK075-BRMK150-BRMPartnumber670000670002Partnumber670020670022Rotary motionMotorization optionsOption -03Option -03In-line stepper motorM49571:1 Gear ratioOption -04N48Ø41MotorAdd-onMotorization 1 specification weight kgIn-line stepper D 0.9OptionNumber-0379Ø452.5:1 Gear ratio941When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 670036-03For total unit weight, add option weight to component weightAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk481


Section 7.1Rotary motionHigh temperature standardMotion and manipulationRotary motionUHV and HV seriesFeaturesnnnnnContinuous rotary motionManual actuatorRotary position lockUHV-compatible materialsWelded bellows sealn Bakeable to 230°CnnCF port mountsGuide tube included on extended modelsHTBRM-275-10HTBRM-275Ø19109Ø37Ø42Ø42Position lock330 0 30 1:1 Gear ratio 330 0 30Ø37Ø19109DescriptionCaburn-MDC high temperature rotary motionfeedthroughs are the perfect solution for UHV samplerotation. They are constructed of 304ss to endure therigors of high temperature vacuum service. Rotation canbe measured along a 360° laser etched barrel graduated in5° increments. Welded stainless steel bellows, a uniqueoff-axis wobble design and the use of rotary shaft bearingsupports provide a product of unsurpassed reliability andperformance. Extended length models are constructedwith bearing fitted shaft support guide tubes for maximumrigidity.Specifications40Ø6.4203254or305MaterialFlange/actuator bodyShaft sealVacuum range UHV/HV304ssAM 350 welded bellows1.3x10 -11 mbarTemperature range 1 UHV/HV -20°C to 230°CTorqueAxial loadLateral loadWeight and dimensions0.3 Nm2.7 kg4.5 kgSee tableShaftWtlength Flange kgReferencePartnumberØ19Ø6.451Standard UHV series40 DN16CF 0.540 DN40CF 0.9HTBRM-133HTBRM-275670004670005Extended UHV seriesnMetal-seal flanges are non-rotatable with clearance holes203 DN40CF 3.6254 DN40CF 3.6305 DN40CF 3.6HTBRM-275-8HTBRM-275-10HTBRM-275-12670006670007670008All dimensions are nominal in millimetres unless specified Weights given are approximate482Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


0Motion and manipulationSection 7.1Rotary motionPneumaticUHV and HV seriesFeaturesnnnnAdjustable 90° rotary motionPneumatic actuator with 24V DC solenoidUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nnnCF and ISO KF port mountsComplete with 24V DC air control solenoid valve240V AC air control solenoid valve optionalRotary motionABRM-133Includes solenoid28.5Air fittingfor 4.0OD tube(2 places)64.5128.5max0°30°Start endadjustment60°90°Finish endadjustmentDescriptionCaburn-MDC pneumatic rotary feedthroughs are designedfor in-vacuum shutters and other light-duty two-positionrotary motion applications. Feedthrough rotation has twoadjustable stops. One adjusts the start position from 0° to30°, and the other adjusts the finish position from 60° to90°. One air control solenoid valve is also included.Feedthroughs are available on CF metal seal flanges or ISOKF elastomer seal port mounts.Shaft end viewSpecificationsFlange LengthDN16CF 177DN40CF 177DN16KF 184DN40KF 18033030Adjustablestop(2 places)Solenoid valveremotely mounted(not shown)MaterialFlange/actuator body304ss/Anodized aluminiumShaft seal/piston seal AM 350 welded bellows/Viton ®Vacuum range UHV/HV1.3x10 -11 mbar/1.3x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CTorqueWeight and dimensions0.4 Nm maximumSee tableFlange LengthDN16CF 40DN40CF 40DN16KF 37DN40KF 41Ø37Ø6.4Solenoid valvesAir controlWtDescriptionUHV serieskg ReferenceDN16CFDN40CF0.91.4ABRM-133ABRM-275HV seriesDN16KF 0.9 K075-ABRMDN40KF 1.4 K150-ABRM1UHV units are bakeable to 230°C with actuator removedOption -01 (24V DC air control solenoid valve) fitted as standardPartnumber670050-01670051-01670052-01670053-01nnShown with DN16CF flangeMetal-seal flanges are non-rotatable withclearance holesDescription240V DC Air control control solenoid valveOptionnumber-02All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk483


Section 7.1Rotary motionMiniatureMotion and manipulationRotary motionUHV and HV seriesFeaturesnnnnnContinuous rotary motionManual or motorized actuatorRotary position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsDescriptionE-MBR-133Flange LengthDN16CF 87DN16KF 90Ø250Position lockCaburn-MDC miniature rotary feedthroughs arespecifically designed for in-vacuum light-duty applicationswhere torques will not exceed 0.1 Nm. Feedthroughs areavailable in both manual or low voltage DC motorconfigurations. Motors can be fitted with optionalmagnetic encoder. Motor controls must be purchasedseparately.SpecificationsMaterialFlange/actuator bodyShaft seal/piston sealVacuum range UHV/HV304ss/Anodized aluminiumAM 350 welded bellows/1.3x10 -11 mbarTemperature range 1 Manual -20°C to 100°CTorqueAxial loadLateral loadWeight and dimensions0.18 Nm maximum0.9 kg2.7 kgSee tableDescriptionWtkgReferencePartnumberUHV SeriesØ3.2DN16CF 0.9MBR-133671500HV SeriesDN16KF 0.9K075-MBR 671501Flange LengthDN16CF 25DN16KF 22Flange LengthDN16CF 154DN16KF 15701:1 Gear ratioØ25Option -01 & -02In-line 12V DC motorMotorAdd-onMotorization 2 specification weight kgMotor C 0.5Motor and encoder C 0.51UHV units are bakeable to 230°C with actuator removed and 30°C maximumwhen motorized2When ordering motorized options, add the option number and price to thedesired. UHV or HV component part number listed aboveFor example: 671507-02For total unit weight, add option weight to component weightOptionnumber-01-02nnShown with DN16CF flangeMetal-seal flanges are non-rotatable withclearance holesAll dimensions are nominal in millimetres unless specified Weights given are approximate484Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Section 7.1Rotary motionMagnetic and directMotion and manipulationRotary motionUHVFeaturesnnContinuous rotary motionManual actuatorn Bakeable to 100°CnnDN40CF port mountMagnetically coupledMagnetic drive61Ø57MRM-275DescriptionCaburn-MDC magnetically coupledrotary motion feedthroughs providebasic rotation and UHV compatibilitywithout the use of bellows. Thisproduct is intended for manuallyoperated light-duty service notexceeding 0.1Nm of torque. Conflat ®compatible DN40CF diameter CFmetal seal flanges are the standardmount.SpecificationsMaterialsUHV compatibleVacuum range1.3x10 -11 mbarTemperature range -20°C to 100°CSpeed50 rpm maximumTorque0.14 Nm maximumAxial load1.1kg maximumLateral load 2.3 kg @ 101.6mm extension maxn47.5111Ø6.4Position lock not availableWtDescriptionUHV Serieskg ReferenceManual actuation DN40CF 0.9 MRM-275DN40CF flange,non-rotatablewith clearanceholesPartnumber671000HVDirect driveFeaturesnnnContinuous rotary motionManual actuatorViton ® elastomer shaft sealn Bakeable to 100°Cn25.4mm bolt hole installation5.6 flat, typ1”-20 UNEF13 flat, typ73FRM-125DescriptionCaburn-MDC direct drive rotarymotion feedthroughs provide basicrotation and HV compatibility.Vacuum integrity is maintained by asingle preloaded Viton ® elastomershaft seal. Fitted with dual rotarybearing shaft supports, this productcan be manually or mechanicallyoperated at intermittent speeds upto 300rpm. It is mounted on thetraditional 25.4mm baseplate mount.SpecificationsMaterialsVacuum rangeDescriptionHV SeriesHV compatible1.3x10 -8 mbarTemperature range -20°C to 100°CSpeedTorqueAxial load300 rpm maximum0.71 Nm maximumLateral load higher loads at reduced rpm1.1kg maximum2.3 kgnnnO-ring6.425.4 maximumwall thicknessØ6.4Hex nut 38.1mm flat-to-flat (2 places).4138O-ring seals on vacuum side of chamber wall.Position lock not available.WtkgManual actuation 25.4mm baseplate HV 0.9ReferenceFRM-125Partnumber652000All dimensions are nominal in millimetres unless specified Weights given are approximate486Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Rotary motionDirect, differentially pumpedFeaturesnnnnUHV and HV seriesContinuous rotary motionManual actuatorUHV or HV-compatible materialsDifferentially pumped, Dual Viton ® elastomershaft sealn Bakeable to 100°C 1n CF and ISO KF port mountsRotary motionDDRM-275DescriptionKnob omittedfor clarity intop viewØ4.4 thro, 4 placesequally spaced on aØ43.7 bolt circlePosition locknot availableDifferentially pumped direct-drive rotary motionfeedthroughs provide 11Nm and 500rpm maximumrotation. The rotary shaft is supported by two radialbearings located inboard of dual Viton ® elastomer shaftseals. The region between the seals can be differentiallypumped through the 3.2mm female pipe thread portprovided and thus attain UHV compatibility to 1.3x10 -9 mbar.Specifications23Flange LengthDN40CF 64DN40KF 63Ø28.5Ø51Ø61 knob, includes8-32 UNC sockethead set screw1/8”-27 NPT thread,hex socket headMaterialFlange/actuator body304ssShaft seal Viton ®Vacuum range UHV/HV1.3x10 -9 mbarTemperature range 1 UHV/HV -20°C to 100°CSpeedTorqueAxial loadLateral load higher loads at reduced rpmWeight and dimensions(500rpm) 11 Nm11.3 Nm1.1 kg2.3 kgSee tableØ6.4Flange LengthDN40CF 24DN40KF 2512.7 flat,typ5.6 flat, typWtDescriptionkgUHV seriesDN40CF 0.9ReferenceDDRM-275Partnumber652100nnShown with DN40CF flangeMetal-seal flanges are non-rotatable with clearance holesHV seriesDN40KF 0.9 K150-DDRM 6521011UHV units are bakeable to 150°C with actuator removed.All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk487


Section 7.1Linear motionStandardMotion and manipulationLinear motionUHV and HV seriesFeaturesnnnnn25 to 152mm linear travelManual or motorized actuatorLinear position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C + 180°C 1nCF and ISO KF port mountsBLM-133-1BØ42Ø19Position lock(0.64mm travel/rev)Linear scale and shaftflat shown in line forclarity onlyActual orientationvariesDescriptionCaburn-MDC standard linear motion feedthroughs are theperfect solution for linear displacement of in-vacuumsamples or devices. They are constructed of the highestgrade vacuum compatible materials. Linear position ismeasured along a laser etched black-anodized barrelgraduated in 0.001” (0.03mm) increments. A full revolutionof the barrel translates into 0.025” (0.6mm) of linear travel.A linear scale on the body is also provided and is marked inboth inch and metric units. The inch scale is graduated inincrements of 0.025” (0.6mm) while the metric scale isgraduated in 1mm increments. Welded stainless steelbellows, a 40 pitch lead screw design and the use of linearbearing shaft support provide devices with excellentdurability and performance. They are available on industrystandard Conflat ® compatible CF metal seal flanges or ISOKF port mounts. A utomation can be attained with one offour motorization options and controls. Motor controlsmust be purchased separately.AØ37Ø6.46-32 tappedthro, 2 places4.614.219SpecificationsMaterialFlange/actuator body304ss/Anodized aluminiumShaft sealAM 350 welded bellowsVacuum range UHV/HV 1.3x10 -11 mbar/1.3x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°C + 180°CAxial load2.3 kgLateral load2.3 kg @ 50.8 extension maximumWeight and dimensionsSee table1UHV units are bakeable to 230°C with actuator removed and 30°C maximum5.4when motorizednnnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holesAll dimensions are nominal in millimetres unless specified488Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionStandardUHV SeriesCF 100°CFlange Linear A Wtsize travel Min – Max B M N kgDN16CF 25 90 115 140 172 152 0.5DN16CF 51 90 141 178 210 184 0.9DN16CF 102 90 192 256 299 273 1.4DN16CF 152 90 242 319 375 350 1.8DN40CF 25 90 115 140 172 152 0.5DN40CF 51 90 141 178 210 184 0.9DN40CF 102 90 192 256 299 273 1.4DN40CF 152 90 242 319 375 350 1.8ReferenceBLM-133-1BLM-133-2BLM-133-4BLM-133-6BLM-275-1BLM-275-2BLM-275-4BLM-275-6Partnumber660000660004660008660012660002660006660010660014Linear motionHV SeriesISO KF 100°CFlange Linear A Wtsize travel Min – Max B M N kgDN16KF 25 87 112 143 177 152 0.5DN16KF 51 87 138 181 216 190 0.9DN16KF 102 87 189 270 304 279 1.4DN16KF 152 87 239 350 381 355 1.8DN40KF 25 91 116 138 173 148 0.5DN40KF 51 91 142 177 211 186 0.9DN40KF 102 91 193 265 300 275 1.4DN40KF 152 91 243 342 376 351 1.8ReferenceK075-BLM-1K075-BLM-2K075-BLM-4K075-BLM-6K150-BLM-1K150-BLM-2K150-BLM-4K150-BLM-6Partnumber660020660024660028660032660022660026660030660034Motorization optionsOption -03Option -03In-line stepper motorM4957Option -04N1:1 Gear ratio4879Ø41Ø452.5:1 Gear ratio94MotorAdd-onMotorization 1 specification weight kgIn-line stepper D 0.9OptionNumber-031When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 670036-03For total unit weight, add option weight to component weightAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk489


Section 7.1Linear motionHigh temperature standardMotion and manipulationLinear motionUHV SeriesFeaturesnnnnn25 to 51mm linear travelManual actuatorLinear position lockUHV-compatible materialsWelded bellows sealn Bakeable to 230°CnCF port mountsHBLM-133-1Travel Length25 14051 178Ø42Ø19Position lock(0.64mm travel/rev)Linear scale andshaft flat shown inline for clarity onlyActual orientationvariesDescriptionCaburn-MDC high-temperature linear motion feedthroughsare the perfect solution for linear displacement of invacuumsamples or devices. They are constructed of 304ssto endure the rigors of high temperature vacuum service.Linear position is measured along a laser etched stainlesssteel barrel graduated in 0.001” (0.03mm) increments. Afull revolution of the barrel translates into 0.025” (0.6mm)of linear travel. A linear scale on the body is also providedand is marked in both inch and metric units. The inch scaleis graduated in increments of 0.025” while the metric scaleis graduated in 1mm increments. Welded stainless steelbellows, a 40 pitch lead screw design and the use of linearbearing shaft support provide devices with excellentdurability and performance.SpecificationsMaterialØ37Ø6.414.219.1Flange/actuator body304ssShaft sealAM 350 welded bellowsVacuum range1.3x10 -11 mbarTemperature range -20°C to 230°CAxial load2.3 kg maximumLateral load2.3 kg @ 50.8 extension maximumWeight and dimensionsSee tableTravel Length25 90 – 11551 90 – 1416-32 tappedthro, 2 places19.85.4LinearWttravel Flange kgReferencePartnumberUHV SeriesnnnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holes25 DN16CF 0.525 DN40CF 0.951 DN16CF 0.951 DN40CF 1.4HTBLM-133-1HTBLM-275-1HTBLM-133-2HTBLM-275-2660036660037660038660039All dimensions are nominal in millimetres unless specified Weights given are approximate490Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionHigh temperature compactUHV SeriesFeaturesnnnn51mm linear travelManual actuatorUHV-compatible materialsFormed bellows sealn Bakeable to 230°CnCF port mountsLinear motionE-LMD-133-2Description67 min118 maxØ3066Compact high-temperature linear motion feedthroughshave the smallest atmosphere side envelope and areconstructed with high temperature vacuum grade materials.Linear position is measured along a laser etched stainlesssteel barrel graduated in 20 equally spaced increments. Afull revolution of the barrel translates into 1.25mm of lineartravel. Air side linear clearance must be considered toaccommodate the rising lead screw mechanism. Formedstainless steel bellows, a 1.25mm pitch lead screw designand the use of radial bearings provide this product withexcellent durability and performance. All drive mechanismcomponents are located on the atmosphere side of theformed bellows.111 min162 maxPosition locknot availableSpecificationsMaterialFlange/actuator body304ssShaft sealType 312 stainless steel formed bellowsVacuum range1x10 -11 mbarTemperature range -20°C to 230°CAxial load4.5 kg maximumLateral load2.3 kg @ 50.8 extension maximumWeight and dimensionsSee table3.3M4 x 9.5 deep,Ø0.06 vent hole10.7 across flatsLineartravelWtkgReferencePartnumbernnShown with DN16CF flangeØ14Metal seal flanges are non-rotatable with clearance holesUHV SeriesDN16CF 0.5DN40CF 1.4E-LMD-133-2E-LMD-275-2665512665513All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk491


Section 7.1Linear motionMiniatureMotion and manipulationLinear motionUHV and HV seriesFeaturesnnnnn13 to 25mm linear travelManual or motorized actuatorLinear position lockUHV and HV-compatible materialsWelded bellows sealn Bakeable to 180°C 1nCF and ISO KF port mountsE-MBL-133-1Ø25Position lock(0.64mm travel/rev)DescriptionCaburn-MDC miniature linear feedthroughs are specificallydesigned for in-vacuum light-duty applications. Fullrevolution of the barrel translates into 0.6mm of lineartravel. These instruments are available in both manual orlow voltage 12V DC motor configurations. Motor optionswith an integral magnetic encoder are also available.Motor controls are not included with the motor optionsand must be purchased separately.BSpecificationsMaterialFlange/actuator body304ss/Anodized aluminiumShaft sealAM 350 welded bellowsVacuum range1x10 -11 mbarTemperature range 1 Manual -20°C to 100°CAxial load1.1 kgLateral load2.3 kg maximumWeight and dimensionsSee table1UHV units are bakeable to 230°C with actuator removed and 30°C maximumwhen motorizedA9.5Ø4.7Ø3.2nnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesAll dimensions are nominal in millimetres unless specified492Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionMiniatureUHV SeriesCF 100°CUHV SeriesCF 180°CFlange Linear A Wtsize travel Min – Max B kgDN16CF 13 25 38 114 0.9DN16CF 25 25 50 127 0.9Flange Linear A Wtsize travel Min – Max B kgDN16CF 13 25 38 114 0.9DN16CF 25 25 50 127 0.9ReferenceMBL-133-0MBL-133-1ReferenceE-MBL-133-0E-MBL-133-1Partnumber660500660501Partnumber660512660513Linear motionHV SeriesISO KF 100°CFlange Linear A Wtsize travel Min – Max B kgDN16KF 13 25 38 114 0.9DN16KF 25 25 50 127 0.9ReferenceK075-MBL-0K075-MBL-1Partnumber660502660503Motorization optionsOption -01In-line 12V DC motorOption -02 In-line 12V DCmotor and encoderTravel Length13 18125 194Ø2540:1 Gear ratioMotorAdd-onMotorization 1 specification weight kgMotor D 0.9Motor and encoder C 0.9Optionnumber-01-011When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 670036-03For total unit weight, add option weight to component weightAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk493


Section 7.1Linear motionPush-pullMotion and manipulationLinear motionUHV and HV seriesFeaturesnnnnn25 to 152mm linear travelManual actuatorLinear position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsSBLM-133-1B32Ø41Ø35 knob,0.25”-20 UNC threadLinear scale andshaft flat shown inline for clarity onlyActual orientationvariesDescriptionCaburn-MDC push-pull linear motion feedthroughs are themost basic of the manual motion devices offered in thiscatalogue. They provide quick action linear motion via astainless steel hand-held actuator shaft. They are typicallyoperated by observing the motion process through avacuum viewport. For quick and easy positioning referencethe feedthrough body has been laser etched with lineartravel graduation marks in increments of 0.025” (0.6mm).An attractive black anodized finish provides high contrastvisibility of the laser etched graduated scale. The actuatorcan be locked in position by simply tightening the positionlock located at the top end of the actuator body.PositionlockPush-pull linear motion feedthroughs are constructed of thehighest grade vacuum compatible materials. Weldedstainless steel bellows and the use of linear bearing shaftsupports provide reliability and smooth operation.AØ37Ø6.46-32 tappedthro, 2 places4.614.219SpecificationsMaterialFlange/actuator body304ss/Anodized aluminiumShaft sealAM 350 welded bellowsVacuum range UHV/HV 1.3x10 -11 mbar/1.3x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CAxial load4.5 kgLateral load2.3 kg @ 50.8 extension maximumWeight and dimensionsSee table1UHV units are bakeable to 230°C with actuator removed and 30°C maximumwhen motorized5.4nnnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holesAll dimensions are nominal in millimetres unless specified494Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Section 7.1Linear motionRack and pinionMotion and manipulationLinear motionUHV and HV seriesFeaturesnnnnn50 to 152mm linear travelManual actuatorLinear position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsRPLM-133-2Linear scaleBPositionlock32Ø4145(20mm travel/rev approx)Linear scale andshaft flat shownin line for clarityonlyActual orientationvariesDescriptionCaburn-MDC rack and pinion linear motion feedthroughsare very similar to push-pull devices, but provide finercontrol of linear motion. The rack and pinion drivemechanism is still considered quick-action when comparedto rotating actuator, linear motion devices. They too areoperated by observing the motion process through avacuum viewport. For quick and easy positioning referencethe feedthrough body has been laser etched with lineartravel graduation marks in increments of 0.6mm. A 1 1 4 turnon the handle generates 25mm of linear travel. Anattractive black anodized finish provides high contrast andvisibility of the laser etched graduated scale. The actuatorcan be locked in position by simply tightening the positionlock located at the top end of the actuator body.Rack and pinion linear motion feedthroughs areconstructed of high grade vacuum compatible materials.Welded stainless steel bellows and the use of linear bearingshaft supports provide reliability and smooth operation.Ø37SpecificationsMaterialAØ6.46-32tappedthro,2 places4.614.219Flange/actuator bodyShaft sealVacuum range UHV/HV304ss/Anodized aluminiumAM 350 welded bellows1.3x10 -11 mbar/1.3x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CAxial loadLateral loadWeight and dimensions4.5 kg2.3 kg @ 50.8mm extension maximumSee table5.41UHV units are bakeable to 230°C with actuator removednnnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holesAll dimensions are nominal in millimetres unless specified496Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionRack and pinionUHV SeriesCF 100°CFlange Linear A B Wtsize travel Min – Max Min – Max kgDN16CF 51 90 141 165 216 0.9DN16CF 102 90 192 254 356 1.4DN16CF 152 90 242 330 483 1.8DN40CF 51 90 141 165 216 1.4DN40CF 102 90 192 254 356 1.8DN40CF 152 90 242 330 483 2.3ReferenceRPLM-133-2RPLM-133-4RPLM-133-6RPLM-275-2RPLM-275-4RPLM-275-6Partnumber666000666002666004666001666003666005Linear motionHV SeriesISO KF 100°CFlange Linear A B Wtsize travel Min – Max Min – Max kgDN16KF 51 87 140 168 219 0.9DN16KF 102 87 189 257 359 1.4DN16KF 152 87 239 333 486 1.8DN40KF 51 91 142 164 215 0.9DN40KF 102 91 193 253 354 1.4DN40KF 152 91 243 329 481 1.8ReferenceK075-RPLM-2K075-RPLM-4K075-RPLM-6K150-RPLM-2K150-RPLM-4K150-RPLM-6Partnumber666006666010666014666008666012666016All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk497


Section 7.1Linear motionPneumaticMotion and manipulationLinear motionUHV and HV seriesFeaturesnnnnn25 to 51mm linear travelPneumatic actuatorAdjustable linear travel stopUHV or HV compatible materialsWelded bellows sealn Bakeable to 100°C 1nnnCF and ISO KF port mountsComplete with 24V DC air control solenoid valve240V AC air control solenoid valve optionalABLM-275-2Includes 24V DC solenoid.DescriptionBAir fittingfor 4OD tube(2 places)AdjustablestopSolenoid valve remotelymounted (not shown)Linear scale, shaft flatand air fittings shown inline for clarity onlyActual orientation variesPneumatic linear motion feedthroughs provide two-positionfast action linear motion. Typical motion applications wouldinclude on-off, open-close and in-out motions similar tothose of in-vacuum shutters. Linear travel can be shortenedor lengthened by turning the adjustment knob located atthe top end of the pneumatic actuator. Once adjusted thejam nut locks the knob in place. For quick and easypositioning the feedthrough body has been laser etchedwith linear travel graduation marks in increments of 0.025”(0.6mm). A black anodized finish provides high contrast andvisibility of the laser etched graduated scale. Pneumaticlinear motion feedthroughs are constructed of high gradevacuum compatible materials. Welded stainless steelbellows and the use of linear bearing shaft supports providereliability and smooth operation.SpecificationsMaterialAØ376-32 tappedthro, 2 places5.44.61914.2Flange/actuator body304ss/Anodized aluminiumShaft sealAM 350 welded bellowsPiston sealViton ® O-ringVacuum range UHV/HV1x10 -11 mbar/1x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CAxial load9.1 kg maximumLateral load2.3 kg @ 50.8mm extension maximumActuator pressure4 – 5.5 barPiston surface area 5.7 cm 2Solenoid valve24V DCWeight and dimensionsSee tablennnØ6.4Shown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holes1UHV units are bakeable to 230°C with actuator removedAll dimensions are nominal in millimetres unless specified498Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionPneumaticUHV SeriesCF 100°CFlange Linear A B Wtsize travel Min – Max Min – Max kgDN16CF 25 90 115 216 241 0.9DN16CF 51 90 141 279 330 1.4DN40CF 25 90 115 216 241 1.4DN40CF 51 90 141 279 330 1.4ReferenceABLM-133-1ABLM-133-2ABLM-275-1ABLM-275-2Partnumber662000-01662004-01662002-01662006-01Linear motionHV SeriesISO KF 100°CFlange Linear A B Wtsize travel Min – Max Min – Max kgDN16KF 25 87 112 218 244 0.9DN16KF 51 87 138 282 333 1.4DN40KF 25 91 116 216 241 0.9DN40KF 51 91 142 279 330 1.4ReferenceK075-ABLM-1K075-ABLM-2K150-ABLM-1K150-ABLM-2Partnumber662008-01662012-01662010-01662014-01Air controlsolenoid valvesDescription240V AC Air control solenoid valveOptionnumber-02All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk499


Section 7.1Linear motionHeavy dutyMotion and manipulationLinear motionUHV SeriesFeaturesnnnn50 to 152mm linear travelManual actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nDN40CF port mountHLM-275-2DescriptionTravel Length51 10976 124102 160153 210Ø51(4.2mmtravel/rev)Ø51Heavy duty linear motion feedthroughs allow lineardisplacement of larger in-vacuum samples andcomponents. This feedthrough has basic, rotary manualactuation and does not provide position indication.Position must be determined by visual inspection of the invacuumsample or component. A heavy duty acme threadlead screw provides 25mm of linear travel for every sixrevolutions of the actuator knob. Unlike conventionalmotion feedthroughs, heavy duty models have a re-entrantwelded bellows configuration.SpecificationsMaterialTravel Length51 39 – 9076 53 – 129102 60 – 162153 81 – 234DN40CFflange,non-rotatablewithclearanceholesFlange/actuator bodyShaft sealVacuum range304ss/Anodized aluminiumAM 350 welded bellows1x10 -11 mbarTemperature range 1 -20°C to 100°CAxial loadLateral loadWeight and dimensions1UHV units are bakeable to 230°C with actuator removed9.1 kg9.1 kg @ 101.6mm extension maximumSee tableØ33Nose piece face,10-32 x 9 deep,4 places, equallyspaced on a 25.4 BCwith side ventLinearWttravelkgUHV Series51 0.976 0.9102 0.9153 1.4ReferenceHLM-275-2HLM-275-3HLM-275-4HLM-275-6Partnumber661018661000661016661017All dimensions are nominal in millimetres unless specified Weights given are approximate500Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionHeavy duty, pneumaticUHV SeriesFeaturesnnnn25 to 76mm linear travelPneumatic actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nDN40CF port mountLinear motionALM-275-2Includes 24V DC solenoidØ43DescriptionHeavy-duty pneumatic linear motion feedthroughs providetwo-position fast-action linear motion for heavy sampleloads. Typical motion applications would include opencloseor in-out motions similar to those used for invacuumshutters.Travel Length25 12751 17876 229Air fitting for 4 OD tube,2 placesFittings, flange and nosepiece shown alignedfor clarity onlySolenoid valve remotelymounted (not shown)DN40CF flange,non-rotatable withclearance holesSpecificationsMaterialFlange/actuator body304ss/Anodized aluminiumShaft sealAM 350 welded bellowsActuator gaskets Viton ®Vacuum range1x10 -11 mbarTemperature range 1 -20°C to 100°CAxial load9.1 kgLateral load9.1 kg @ 76mm extension maximumSolenoid valve24V DCWeight and dimensionsSee table1UHV units are bakeable to 230°C with actuator removedTravel Length25 28 – 5351 39 – 9076 50 – 126Ø33Nose piece face,10-32 x 9 deep,4 places, equallyspaced on a 25.4 BCwith side ventLinearWttravelkgUHV series25 0.951 1.476 1.4ReferenceALM-275-1ALM-275-2ALM-275-3Partnumber661050-01661051-01661052-01All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk501


Section 7.1Linear motionHeavy duty, push-pullMotion and manipulationLinear motionUHV SeriesFeaturesnnnnn50 to 152mm linear travelManual actuatorLinear position lockUHV compatible materialsWelded bellows sealn Bakeable to 100°C 1nDN40CF port mountSLM-275-3 SpecialDescriptionTravel Length51 167 – 218102 167 – 269152 167 – 319Ø35 knob,0.5”-13 UNCthreaded,no through hole37Position lockØ51Heavy duty push-pull linear motion feedthroughs allowlinear displacement of heavier samples and componentsthan conventional designs. These devices do not provideposition indication. Sample or component position mustbe verified visually through a viewport. Sample linearposition can be fixed with an integral position lock knobmounted on the actuator housing. Unlike conventionalmotion feedthroughs, heavy duty models employ reentrantwelded bellows construction allowing the use ofsturdier and larger diameter shafts. Push-pull linear motionfeedthroughs provide two-position fast action motion idealfor applications including open-close or in-out motionssimilar to those used for in-vacuum shutters. Specialconfigurations, such as the 76.2mm version displayed inthe photograph, may be quoted upon request.SpecificationsTravel Length51 39 – 90102 60 – 162152 82 – 234DN40CF flange,non-rotatable withclearance holesMaterialFlange/actuator bodyShaft sealVacuum range304ss/Anodized aluminiumAM 350 welded bellows1x10 -11 mbarTemperature range 1 -20°C to 100°CAxial loadLateral loadWeight and dimensions9.1 kg9.1 kg @ 76mm extension maximumSee table1UHV units are bakeable to 230°C with actuator removedØ33Nose piece face,10-32 x 9 deep,4 places, equallyspaced on a 25.4 BCwith side ventLinearWttravelkgUHV series51 1.4102 1.8152 2.3ReferenceSLM-275-2SLM-275-4SLM-275-6Partnumber674001674003674005All dimensions are nominal in millimetres unless specified Weights given are approximate502Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Linear motionHeavy duty, tunnel accessUHV SeriesFeaturesnnnnn50 to 152mm linear travelManual actuatorLinear position lockUHV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nDN40CF port mountLinear motionTLM-275-2Ø35 knob,0.5”-13 UNCthreadTravel Length51 210 – 260102 210 – 311152 210 – 36232Ø88 wide slotPosition lockDescriptionHeavy duty tunnel access, push-pull linear motionfeedthroughs allow linear displacement of heavy samplesand components. The push-pull shaft is hollow providingtunnel access for instrumentation leads such as those usedfor thermocouple temperature measurements and otherlow voltage electrical applications. The vacuum nose pieceis shipped with a blank DN16CF flange which can beremoved or modified to accept electrical feedthroughs asrequired. These devices do not provide positionindication. Sample or component position must be verifiedvisually through a viewport. Sample linear position can befixed with an integral position lock knob mounted on theactuator housing. Unlike conventional motionfeedthroughs, heavy duty models employ re-entrantwelded bellows construction allowing the use of sturdierand larger diameter shafts.Ø51Travel Length51 45 – 96102 66 – 168152 88 – 24037DN40CF flange,non-rotatable withclearance holesSpecificationsMaterialFlange/actuator bodyShaft sealVacuum range304ss/Anodized aluminiumAM 350 welded bellows1x10 -11 mbarTemperature range 1 -20°C to 100°CAxial loadLateral loadWeight and dimensions1UHV units are bakeable to 230°C with actuator removed9.1 kg9.1 kg @ 76mm extension maximumSee table19Ø348-32 x 12 deep,6 places, with side ventØ17.5 counterboreDN16CF blank,non-rotatable flangeincluded, mountedto nose pieceØ11.1 thro, 6.4 deepLinearWttravelkgUHV series51 1.4102 1.8152 2.3ReferenceTLM-275-2TLM-275-4TLM-275-6Partnumber667000667001667002All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk503


Section 7.1Linear motionHeavy duty, micrometerMotion and manipulationLinear motionUHV SeriesFeaturesnnnn50mm linear travelManual, precision micrometer actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nDN40CF port mountLMM-275-2Plus-minus scaleØ51(0.64mmtravel/rev)DescriptionHeavy duty, micrometer driven linear motionfeedthroughs allow linear displacement of heavier samplesand components with the accuracy and precision of finepitch thread micrometers. These devices provide positionindication on both rotary and linear scales with displayresolutions of 0.0025” (0.06mm) on the rotary scale and0.025” (0.6mm) on the linear scale. A full revolution of therotary scale translates into 0.025” (0.6mm) of linear travel.Unlike conventional motion feedthroughs, heavy dutymodels employ re-entrant welded bellows constructionallowing the use of sturdier and larger diameter shafts.219 min270 maxPosition locknot availableDN40CFflange,non-rotatablewithclearanceholesSpecificationsMaterialFlange/actuator bodyShaft sealVacuum range304ss/Anodized aluminiumAM 350 welded bellows1x10 -11 mbarTemperature range 1 -20°C to 100°CAxial loadLateral loadWeight and dimensions4.5 kg maximum9.1 kg @ 100mm extension maximumSee table1UHV units are bakeable to 230°C with actuator removed39 min90 maxØ33Nose piece face,10-32 x 9 deep,4 places, equallyspaced on a 25.4 BCwith side ventLineartravelWtkgReferencePartnumberUHV series51 1.4LMM-275-2668002All dimensions are nominal in millimetres unless specified Weights given are approximate504Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Multi-motionRotary linear, standardUHV and HV seriesFeaturesnnnnn360° rotary motion and 25mm linear travelManual actuatorRotary position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsMulti-motionBRLM-133Ø41Flange LengthDN16CF 170 – 197DN40CF 170 – 197DN16KF 173 – 198DN40KF 168 – 193Flange LengthDN16CF 90 – 115DN40CF 90 – 115DN16KF 87 – 112DN40KF 91 – 1166.4 dia6-32tappedthro,2 places5.4Rotary position lock1:1 Rotary gear ratioLinear scale andshaft flat shown inline for clarity only.Actual orientationvariesLinear positionlock not available(0.64mm travel/rev)Ø574.514.219DescriptionRotary-linear standard devices offer 360° of rotation and25mm of linear travel via two separate drive knobactuators. Both rotary and linear positions are measuredalong laser etched scales on actuator barrel and housing.The 360° rotary scale is graduated in 5° increments. Thelinear scale has both a linear and rotary scale components,the linear portion is graduated in 0.025” (0.6mm)increments while the rotary portion is graduated in0.03mm increments. Full revolution of the linear scaleproduces 0.6mm of linear travel.SpecificationsMaterialFlange/actuator knobShaft sealVacuum range304ss/Anodized aluminiumAM 350 welded bellows1x10 -11 mbar /1x10 -8 mbarTemperature range -20°C to 100°CTorqueAxial loadLateral loadWeight and dimensions1UHV units are bakeable to 230°C with actuator removedWtDescriptionkgUHV SeriesDN16CF 1.4DN40CF 1.43.5 Nm maximum1.8 kg maximum1.8 kg @ 50mm extension maximumReferenceBRLM-133BRLM-275See tablePartnumber672000672002nnnShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesShaft flat is oriented visually between two flange bolt holesHV SeriesDN16CF 1.4DN40CF 1.4K075-BRLMK150-BRLM672004672006All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk505


Section 7.1Multi-motionRotary-linear, precisionMotion and manipulationMulti-motionUHV SeriesFeaturesnnnnnContinuous rotary motion and 13mm linear travelManual or motorized actuatorRotary position lockUHV-compatible materialsWelded bellows sealn Bakeable to 230°C 1nCF port mountPBRM2-10Linear driveDescription155Ø76(0.64mm travel/rev)Precision rotary-linear motion feedthroughs are lowbacklash instruments with a rotary display resolution of0.1° and a linear display resolution of 0.03mm. Fullrevolution of the linear drive translates into 0.6mm oflinear travel with a maximum overall linear travel of13mm. Welded stainless steel bellows, a unique off-axiswobble design and the use of rotary shaft bearing supportsprovide long life and smooth operation. Motorizationoptions are available for both linear and rotary drivecomponents. If motorization is required on both drives,add each option number to the end of the base partnumber.Ø33Position lockDN40CF flange,non-rotatable withclearance holesNote The entire linear drive mechanism (manual ormotorized) will rotate when the rotary drive is actuated.This must be considered when allocating space for itsinstallation.Motor controls are not included with the motorizationoptions and must be purchased separately.SpecificationsA13 retracted25 extendedØ9.5Ø3.2MaterialFlange/actuator bodyShaft sealPosition knob and internal washerVacuum range304ss/Anodized aluminiumAM 350 welded bellowsBrass1x10 -11 mbarTemperature range 1 -20°C to 230°CTorqueAxial loadRotaryLinearLateral loadWeight and dimensions0.7 Nm maximum2.3 kg maximum0.4 kg maximum4.5 kg @ 50mm extension maximumSee table1UHV units are bakeable to 30°C with actuator removedAll dimensions are nominal in millimetres unless specified506Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Multi-motionRotary-linear, precisionUHV SeriesCF 230°CFlangeWtsize A kgDN40CF 254 3.6DN40CF 400 3.6DN40CF 600 4.1DN40CF 800 4.1ReferencePBRM2-10PBRM2-15PBRM2-23PBRM2-31Partnumber670025670028670031670034Multi-motionMotorization optionsØ153Option -01Rotary motorizationOption -02Linear motorization0.64mm/rev50:1 Rotarygear ratio123248Motor Add-onMotorization 1 specification weight kgRotary axis D 2.3Linear axis D 0.9OptionNumber-01-021When ordering motorized options, add the option number and priceto the desired UHV or HV component part number listed aboveFor example: 670025-01-02For total unit weight, add option weight to component weight1557611886Top viewAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk507


Section 7.1Multi-motionRotary-linear, directMotion and manipulationMulti-motionUHV and HV seriesFeaturesnnnnContinuous rotary motion and 203mm linear travelManual actuatorUHV or HV-compatible materialsDifferentially pumped, Dual Viton ® elastomershaft sealn Bakeable to 100°C 1n CF and ISO KF port mountsCRPP-1Ø61 knob, includes8-32 socket head setscrew203.2 travelPosition locknot available1/8”-27 NPT thread,hex socket headFlange Min – MaxDN40CF 89 – 292DN40KF 88 – 291Ø51DescriptionDifferentially pumped direct drive rotary-linear motionfeedthroughs are a basic and economical solution forvacuum applications requiring both rotary and linearmotion. Their simple construction provides 11Nm ofmanual rotational torque.The rotary shaft is supported by two phosphor bronzebearings and uses dual Viton ® elastomer shaft seals. Theregion between the seals can be differentially pumpedthrough the 1 /8” female pipe thread port provided and thusattain UHV compatibility to 1x10 -9 mbar. Feedthroughs areavailable on industry standard Conflat ® compatible DN40CFmetal seal flanges or ISO KF DN40 port mounts.SpecificationsMaterialFlange/actuator body304 Stainless steelShaft seal Viton ®Vacuum range UHV/HV1x10 -8 mbar1x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CTorqueAxial load No lock to support weightLateral loadWeight and dimensions1UHV units are bakeable to 150°C with actuator removed11.3 Nm maximum1.1 kg2.3 kg @ 50mm extension maximumSee tableTravel stop Flange Min – MaxØ6.4DN40CF 32 – 235DN40KF 33 – 236WtDescriptionkgUHV SeriesDN40CF 1.4ReferenceCRPP-1Partnumber672008nnShown with DN16CF flangeMetal seal flanges are non-rotatable with clearance holesHV SeriesDN40KF 0.9K-CRPP-1 672009All dimensions are nominal in millimetres unless specified508Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Multi-motionWobble stickUHV and HV seriesFeaturesnnnnn114mm linear travel and 22° wobble motionManual actuatorAngular position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsMulti-motionSU-275Wobble actionDescription70 min184 maxØ35 knob, 0.5”-13UNC threadAngular positionlockLinear positionlock not availableWobble stick linear-angular motion feedthroughs are basicand manual sample motion devices. They provide quickaction linear travel and angular wobble motion via astainless steel hand-held actuator shaft with a ball andsocket joint design. They are typically operated byobserving sample motion through a vacuum viewport. Theactuators angular position can be locked in place bytightening the lock collar located on the port mount flange.Wobble stick linear-angular motion feedthroughs areoffered with 114mm linear travel and a maximum 22° ofangular wobble with unrestricted mating flange and portdiameter. Re-entrant, welded stainless steel bellows arestandard on these products.Ø37SpecificationsMaterial121 min235 maxØ34Flange/actuator bodyShaft sealVacuum range UHV/HV304ssAM 350 welded bellows1x10 -11 mbar /1x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CAxial load No lock to support weightLateral loadWeight and dimensions9.1 kg91 kg @ 50mm extension maximumSee table1UHV units are bakeable to 230°C with actuator removedØ6.4 x 9.5 deepØ15.78-32 set screwØ27DescriptionWtkgReferencePartnumbernnn22ºShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesRequires 41.3 port for full regular movementUHV SeriesDN40CF 1.4HV SeriesDN40KF 0.9SU-275696000K150-SU 696001All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk509


Section 7.1Multi-motionWobble stick, pincerMotion and manipulationMulti-motionUHV and HV seriesFeaturesnnnnn114mm linear travel and 22° wobble, with pincer-gripManual actuatorAngular position lockUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1nCF and ISO KF port mountsVGU-275Blank jawsDescription95 min210 maxØ35 knob,0.5”-13 UNC threadAngular position lockLinear position locknot availableWobble sticks with pincer action are identical to thewobble-linear products, except for the addition of anintegral and articulated sample holding pincer mechanism.The pincer is activated via two shaft mounted finger gripsallowing the pincer jaws to grip 22.4mm maximum samplediameters. These feedthroughs provide quick action linearangularmotion via a manually activated shaft with ball andsocket joint design. They are typically operated byobserving sample motion through a vacuum viewport.Angular position can be locked with an integral lock collarlocated on the port mount flange.Ø37Specifications165 min279 maxØ34MaterialFlange/actuator bodyShaft sealVacuum range UHV/HV304 Stainless steelAM 350 welded bellows1x10 -11 mbar /1x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CAxial loadLateral loadWeight and dimensions0.9 kg maximum0.9 kg maximumSee table1UHV units are bakeable to 230°C with actuator removed7032 closedDescriptionWtkgReferencePartnumberUHV SeriesDN40CF 1.4VGU-27569500022ºHV SeriesDN40KF 0.9K150-VGU 695001nnnShown with DN16CF flangeMetal seal flanges are non-rotatable with clearance holesRequires 41.3 port for full regular movementWtDescriptionkgJaw kit, blank 0.5ReferenceDG-275-BJPartnumber694001All dimensions are nominal in millimetres unless specified Weights given are approximate510Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.1Multi-motionWobble stick, rotary pincerUHV and HV seriesFeaturesnnnnnContinuous rotary motion, 114mm linear travel and22° wobble, with pincer-gripManual actuatorLinear and angular position locksUHV or HV-compatible materialsWelded bellows sealn Bakeable to 100°C 1n CF and ISO KF port mountsMulti-motionDG-275 Patented designBlank jawsDescription216 min330 max165 min279 maxØ58Ø51Ø37Ø34Linear position lockAngular position lockRotary position locknot availableThese products are rotary-linear-pincer action wobblesticks identical to the linear and linear-pincer wobble stickproducts with the addition of full 360° rotary motion. Thepincer mechanism is activated via two shaft mounted fingergrips allowing the pincer jaws to grip up to 22.4mm samplediameters. These feedthroughs provide quick action rotary,linear and angular motion with an actuator shaft ball andsocket joint design. Angular and linear positions can belocked with integral lock collars located on the port mountflange and actuator shaft.SpecificationsMaterialFlange/actuator bodyShaft sealVacuum range UHV/HV304ss/AluminiumAM 350 welded bellows1x10 -11 mbar /1x10 -8 mbarTemperature range 1 UHV/HV -20°C to 100°CTorqueAxial loadLateral loadWeight and dimensions0.3 Nm maximum0.9 kg maximum0.9 kg maximumSee table1UHV units are bakeable to 230°C with actuator removed7032 closedWtDescriptionkgUHV SeriesDN40CF 1.4ReferenceDG-275Partnumber694000nnn360º22ºShown with DN16CF flangeMetal-seal flanges are non-rotatable with clearance holesRequires 41.3 port for full regular movementHV SeriesDN40KF 0.9WtDescriptionkgJaw kit, blank 0.5K150-DG 694002ReferenceDG-275-BJPartnumber694001All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk511


Section 7.1Multi-motionWobble stick, wide angleMotion and manipulationMulti-motionUHV and HV seriesFeaturesn 13 or 50mm linear travel and 44° or60° wobble, respectivelyn Manual actuatorn UHV or HV-compatible materialsn Welded bellows sealn Bakeable to 230°Cn CF and ISO KF port mountsWS-13312.7 Linear travel 44° wobble312.763 min76 max50.8 Linear travel 60° wobble76 min88 max44ºDescriptionWide angle wobble sticks, the most basic products of thewobble stick family, provide an economical solution for lightduty sample motion and manipulation. They are strippeddown wobble sticks ideally suited for user customization.Under vacuum load the bellows are compressed and theshaft completely extended into the vacuum chamber.Offered in two models they provide 44° and 60° of angulardisplacement respectively.SpecificationsMaterialFlange/actuator bodyShaft sealVacuum range UHV/HVTemperature range304 Stainless steelAM 350 welded bellows1x10 -11 mbar /1x10 -8 mbarUHV -20°C to 230°CHV -20°C to 150°CWeight and dimensionsSee table60º6.425.4WtDescription Linear travel kgReferencePartnumber101 min152 max101 min152 maxUHV SeriesDN16CF 12.7 1.4DN40CF 50.8 1.4WS-133WS-275693001693000nnRequires 41.3 port for full regular movementPosition lock not availableHV SeriesDN16KF 12.7 1.4DN40KF 50.8 1.4K075-WSK150-WS693002693003All dimensions are nominal in millimetres unless specified Weights given are approximate512Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


0Motion and manipulationSection 7.2ManipulationIntroductionFeaturesnnnnnV-Plane ® XY and ZstagesV-Plane ® guidetubesCompact XY andZ stagesStandard XY and ZstagesRotatable axis stagesV-Plane ® XY and Z stagesCaburn-MDC’s V-Plane ® modularstages are building block componentsdesigned to streamline theimplementation of a samplemanipulation system. They can beused as stand alone components orcombined with other V-Plane ®instruments to attain customizedmotion and manipulation solutions. V-Plane ® dual axis XY stages aremicrometer driven and guided bycross roller bearing slides. Caburn-MDC micrometers have unique laseretched plus-minus scales that indicatepositive or negative portdisplacement.V-Plane ® single axis stages employhandwheel and worm gear reductiondrive mechanisms with lineardisplacement measured along thestage’s frame mounted scale.V-Plane ® guide tubesCaburn-MDC guide tubes providebellows support for V-Plane ®manipulator stages fitted with longstrokebellows as well as secondaryrotary and linear motion feedthroughsinstalled on the stage. They aresupplied with both rotary and linearbearing supports. For applicationsrequiring sample heating, cooling, highvoltage biasing, thermocoupletemperature measurements,etc., the guide tube tip hasbeen fitted with two slots180° apart through whichwires or tubes can befed. Four DN16CF andone DN40CF flangeaccessory ports allowthe installation of up tofive additional accessorycomponents. When amanipulator stage is notunder vacuum or is let up toair with the bellows in somestate of compression, thecompressed bellows’ springforce may force the bellowsto shift off-axis at somepoint during its travel.The off-axis shiftcould be suddenand violent causing userinjury or damage to thebellows. Caburn-MDCrecommends that alllong-stroke 38mmdiameter bore Z axisV-Plane ® stages, withlinear travelsexceeding 150mm,be fitted with guidetubes.Compact XY and Z stagesCompact stages are small footprintsingle or triple axis stages and areideally suited for applications withlimited space. They are available in aZ only or XYZ configuration.Standard XY and Z stagesStandard XYZ stages are large borestages which incorporate triple axismotion in a single stage. The XYtravels are micrometerdriven andguided bycross rollerbearingslides.Caburn-MDCmicrometers haveunique laser etchedplus-minus scales that indicate positiveor negative port displacement. The Zaxis employs a handwheel and wormgear reduction drive mechanism withdisplacement measured along thestage’s frame mounted scale.Rotatable axis stagesRotatable axis stagesreplace conventionalrotatable mounting tablespreviously offered byCaburn-MDC. Theyprovide 360°positioning with greaterprecision, control and ease ofuse. Rotatable stages are constructedwith worm gear drive mechanismswhich offer substantial mechanicaladvantage over non-geared designs,High torque stepper motors are alsoavailable for these stages. Caburn-MDC rotatable stages can be used torotate heavy samples or samplesupport apparatus and structures.Two spring energized PTFE face sealsare at the heart of the rotatablestage’s sealing mechanism. Withprovision for differential pumpingbetween the seals, theserotatable stages can be usedin UHV environments withnYXIntermediate hardware may be required forjoining components, these have been omittedfor claritybakeout temperatures as high asCaution200°C.Anodized aluminium finishes will begin to discolourwhen baked in excess of 150°C.This is only a cosmetic condition which does notimpact performance or reliability.ZIntroductionAll dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk513


.5.4.3.2.5.4.3.2Section 7.2V-Plane ®Dual axis XY stageMotion and manipulationV-Plane ®Bottom viewUHV SeriesFeaturesnnnnnnV-Plane ® building block componentPlus or minus 13 and 25mm off centre XY motion38 to 102mm bore diametersManual or motorized actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 230°CnCF port mountsXY-15DescriptionCaburn-MDC’s V-Plane ® modular stages are building blockcomponents designed to streamline the implementation ofa sample manipulation system. They can be used as standalone components or combined with other V-Plane ®instruments to attain customized motion and manipulationsolutions.V-Plane ® dual axis XY stages are micrometer driven andguided by cross roller bearing slides. Micrometers haveunique laser etched plus-minus scales that indicate positiveor negative port displacement. Caburn-MDC V-Plane ® dualaxis XY stages provide precise motion and manipulation ofsamples inside ultra-high vacuum environments. Dual axisXY stages can be stacked with V-Plane ® single axis Z stagesand also fitted with guide tubes to further expand theircapabilities.SpecificationsMaterialFlangeActuator bodyShaft sealVacuum range304 Stainless steelAnodized aluminiumAM 350 welded bellows1.3x10 -11 mbarTemperature range 1 -20°C to 230°CWeight and dimensions1UHV units are bakeable to 30°C maximum when motorizedSee tableOutline for XY-15S only139.7 x 166.9 X111.1BFigure 155.6143.5250BoreYTop flange,tapped holesBottom flange,tapped holes172FEGAll dimensions are nominal in millimetres unless specified514Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2V-Plane ®Dual axis XY stageBore Travel 4 Top Bottom Wtsize µ Figure flange flange B D E F G H J kg38.1 12.7 1 DN40CF DN40CF 127 – 83 146 157 194 209 10.938.1 12.7 1 DN63CF DN40CF 143 – 161 146 157 194 209 11.463.5 12.7 1 DN63CF DN63CF 146 – 161 165 175 210 224 12.763.5 12.7 1 DN63CF DN100CF 149 – 161 165 175 230 244 13.263.5 25.4 1 DN63CF DN63CF 168 – 161 232 248 235 251 12.763.5 25.4 1 DN63CF DN100CF 171 – 161 232 248 256 269 13.2101.6 3 12.7 2 DN63CF DN100CF 165 213 161 184 194 231 244 13.6101.6 12.7 2 DN100CF DN100CF 165 213 161 184 194 231 244 14.5101.6 3 25.4 2 DN63CF DN100CF 184 213 161 254 267 256 269 14.5101.6 25.4 2 DN100CF DN100CF 184 224 161 254 267 256 269 15.4ReferenceE-XY-15S*E-XY-15E-XY-25E-XY-26E-LXY-25E-LXY-26E-XY-40E-XY-44E-LXY-40E-LXY-44Partnumber677021677009677010677018677013677019677011677012677014677015V-Plane ®3101.6 bore diameter is reduced to 63.5 at DN63CF top flange4Match sample support structure and stage bore for maximum XY travel* E-XY-155 is a stand alone model unsuitable for combination with Z only columnsFigure 2XTop flange,tapped holesMotorization options Option -01In-line stepper motor111.155.6143.5250YMotorAdd-onMotorization 1 specification weight kgXY in-line stepper D 1.4Optionnumber-011When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 670020-01For total unit weight, add option weight to component weightBBoreBottom flange,tapped holesFar sideDYFXHEGJAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk515


Section 7.2V-Plane ®Single axis Z stageMotion and manipulationV-Plane ®UHV SeriesFeaturesnnnnnnV-Plane ® building block component152 to 914mm Z-axis travel38 to 102mm bore diametersManual or motorized actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 230°CnCF port mountsXY-15DescriptionBoreZACaburn-MDC’s V-Plane ® modular stages are building blockcomponents designed to streamline the implementation ofa sample manipulation system. They can be used as standalone components or combined with other V-Plane ®instruments to attain customized motion and manipulationsolutions. V-Plane ® single axis stages employ handwheeland worm gear reduction drive mechanisms with lineardisplacement measured along the stage’s frame mountedscale. Z axis linear travels of up to 914.4mm are available.Caburn-MDC V-Plane ® stages provide precise samplemotion and manipulation of samples inside ultra-highvacuum environments. Caburn-MDC recommends that alllong-stroke 38.1mm diameter bore Z axis V-Plane ® stages,with linear travels exceeding 150mm, be fitted with guidetubes.BSpecificationsMaterialFlange304 Stainless steelActuator bodyAnodized aluminiumShaft sealAM 350 welded bellowsVacuum range1.3x10 -11 mbarTemperature range 1 -20°C to 230°CWeight and dimensionsSee table1UHV units are bakeable to 30°C maximum when motorizednAll LMTA flanges are non-rotatableAll dimensions are nominal in millimetres unless specified516Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Section 7.2V-Plane ®Z Axis guide tubeMotion and manipulationV-Plane ®Accessory portsUHV SeriesFeaturesn V-Plane ® building block componentn Used with 38mm bore Z-axis V-Plane ® stages withgreater than 152mm traveln Bakeable to 230°Cn DN16CF access portsn Linear bearing guide tube supportn Includes 6.4 and 9.5mm diameter shaft rotarybearing supportsE-GT-1506DescriptionFlange 3DN16CFflanges,4 places,non-rotatablewith tappedholesFlange 2DN40CFflange,non-rotatablewith tappedholesFlange 1DN40CFflange,non-rotatablewith clearanceholes89A41.128.6 OD30º20.6 ID typ70 typ80º30º typ17.4 typCaburn-MDC guide tubes provide bellows support forV-Plane ® manipulator stages fitted with long-stroke bellowsas well as secondary rotary and linear motion feedthroughsinstalled on the stage. Guide tubes mount directly ontoV-Plane ® manipulator stages fitted with DN40CF portflanges with a bore clearance suitable for the 28.6mm guidetube diameter. They are supplied with both rotary andlinear bearing supports. Rotary bearings for 6.4 and 9.5mmdiameter shafts are included. For applications requiringsample heating, cooling, high voltage biasing, thermocoupletemperature measurements, etc., the guide tube tip hasbeen fitted with two slots 180° apart through which wiresor tubes can be fed. Four DN16CF and one DN40CFflange accessory ports allow the installation of up to fiveadditional accessory components. When a manipulatorstage is not under vacuum or is let up to air with thebellows in some state of compression, the compressedbellows’ spring force may force the bellows to shift off-axisat some point during its travel. The off-axis shift could besudden and violent causing injury or damage to thebellows.Caburn-MDC recommends that all long-stroke 38.1mmdiameter bore Z axis V-Plane ® stages, with linear travelsexceeding 150mm, be fitted with guide tubes.Linear bearing to beattached to baseplateof LMTA Z-only stageusing the four 6-32 x9.5 vented screwsprovided1238Rotary bearing forØ6.4 or Ø9.5 shaft,installed on guide tube63.5 OD48.5 ODNote The linear bearing support requires a 63.5 bore inany mating component.SpecificationsMaterialFlangeBearingsVacuum range304 Stainless steel300 Series stainless steel with Dicronite ® coating1x10 -11 mbarTemperature range -200°C to 230°CWeight and dimensionsSee tableAll dimensions are nominal in millimetres unless specified518Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2V-Plane ®Z Axis guide tubeUHV SeriesCF 230°CUse 2 Flange Flange Flange WtA with 1 2 3 kg495 665534 DN40 DN40 DN16 4546 665535 DN40 DN40 DN16 4648 665536 DN40 DN40 DN16 4800 665537 DN40 DN40 DN16 5.51105 665538 DN40 DN40 DN16 5.51562 665539 DN40 DN40 DN16 6.5Feedthrough multi-port assembly without guide tubeReferenceE-GT-1506E-GT-1508E-GT-1512E-GT-1516E-GT-1524E-GT-1536E-GTFAPartnumber6655826655836655846655856655866655871603051V-Plane ®2Use with 38.1 bore single axis Z stagesTypical guide tube applicationThe DN63CF base flange onV-Plane ® stages with 38.1mmbore is fitted with acounterbore and four tappedholes. This counterbore andtapped holes provide themeans of attaching the guidetube’s linear bearing support.The guide tube extends intovacuum beyond the linearbearing support. The rotarybearing radial screws, locatedat guide tube tip, may needremoving to properly fit guidetube through linear bearinghousing.The linear bearing support isshown fastened to theDN63CF base flange of a V-Plane ® single axis Z stage usingfour vented stainless steelsocket head screws suppliedwith each guide tube assembly.The linear bearing supportrequires a 63.5mm bore in anymating component.Six threaded studs are fastenedto the V-Plane ® Z axis stagetop flange prior to insertingthe guide tube through the topflange and bellows.Other motion products maybe attached to the guide tube’smain flange. Shown here is aprecision rotary-linearinstrument found in Section7.1.The rotary-linear drive shaftextends into vacuum beyondthe rotary bearing support onthe guide tube tip.The guide tube assembly issecured to the V-Plane ® Z axisstage top flange using the nutsand washers supplied.Four mini CF ports can beused for the input or output ofsample voltage biasing as wellas thermocouple and otherinstrumentation signals.Insulated wires exit intovacuum through slots on guidetube tip.All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk519


Section 7.2Single axisCompact Z stageMotion and manipulationSingle axisUHV SeriesFeaturesnnnnn25 to 102mm Z-axis travel13, 38 and 63mm bore diametersManual or motorized actuatorUHV-compatible materialsWelded bellows sealn Bakeable to 230°C 1nCF port mountsE-LMT-051 E-LMT-151 E-LMT-254DescriptionCompact single axis Z stages have smaller footprints thanV-Plane ® and other stages. They are a practical andeconomical solution for applications with limited space.Models with 25.4 to 101.6mm of linear travel and borediameters from 12.7 to 63.5mm are available. Theinstrument’s precision drive employs a fine pitch leadscrew mechanism. Approximate positions can be measuredalong a graduated machinist’s scale with both inch andmillimetre units included. Top and bottom port flanges areavailable in DN16CF, DN40CF and DN63CF compatible,tapped CF metal seal flanges. Edge welded stainless steelbellows are used to connect the port flanges on allSpecificationsMaterialFlange/body304 Stainless steelBellows AM 350Vacuum range1x10 -11 mbarTemperature range 1 -20°C to 230°CWeight and dimensionsSee tableFigure 160CDEØ351UHV units are bakeable to 30°C when motorized19A13.7Bore34BDN16CF flanges, non-rotatablewith tapped holesAll dimensions are nominal in millimetres unless specified Weights given are approximate520Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Single axisCompact Z stageBore Linear Flange A B Wtsize travel size Fig Min – Max Min – Max C D E F G kg38.1 25.4 DN40CF 2 221.2 – 246.7 55.9 – 81.3 161 100 57 219 212 438.1 50.8 DN40CF 2 221.2 – 272.0 55.9 – 106.7 161 100 57 244 212 438.1 101.6 DN40CF 2 278.1 – 374.7 74.9 – 176.5 161 100 57 387 133 538.1 152.4 DN40CF 2 349.3 – 501.7 82.6 – 235.0 161 100 57 514 212 663.5 25.4 DN63CF 2 180.8 – 206.2 55.9 – 81.3 207 117 73 219 250 463.5 50.8 DN63CF 2 180.8 – 231.6 55.9 – 106.8 207 117 73 244 250 463.5 101.6 DN63CF 2 273.1 – 374.7 74.9 – 176.5 207 117 73 387 250 5ReferenceE-LMT-151E-LMT-152E-LMT-154E-LMT-156E-LMT-251E-LMT-252E-LMT-254Partnumber665507665509665511665521665525665526665527Single axisFigure 2Motorization options Option -01Side mount stepper motorDC12.7 hexEMotorAdd-onMotorization 1 specification weight kgZ Side mount E 1.4Optionnumber-011When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 665518-01For total unit weight, add option weight to component weightØ5122GA134BoreTop flange,tapped holes225:1 Gear ratioBF maxBottom flange,tapped holesAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk521


Section 7.2ManipulationMini-Z-shifterMotion and manipulationManipulationUHV SeriesFeaturesnnnUHV-compatibleEdge welded bellows14mm clear boren Bakeable to 230°CnnnnZ Travel 25mm or 50mmParallelism of flanges: ± 0.25mm/cmResolution: 1 x 360° turn = 1mmBoth flanges DN16CF tapped M4DescriptionThis type of UHV-compatible Z-shifter for applicationswhere space is limited. The MZ types are designed for longservice life and high degrees of constructional stability.All dimensions are nominal in millimetres unless specified Weights given are approximate522Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2ManipulationMini-Z-shifterUHV SeriesCF 230°CWtDescription Flange Travel Min Max kgMini-Z-Shift DN16CF 25.4 55 30 0.3Mini-Z-Shift DN16CF 50.8 86 36 0.4ReferenceMZ16-25MZ16-50Partnumber16010001601001Manipulation34A maxB min520 10 20Thumbwheeladjustmentmm scale barAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk523


Section 7.2Triple axisCompact XYZ stageMotion and manipulationTriple axisUHV SeriesFeaturesnnnnnn50 or 102mm Z-axis travelPlus or minus 13mm off-centre XY motion38 and 63mm bore diametersManual or motorized actuatorsUHV-compatible materialsWelded bellows sealn Bakeable to 230°C 1nCF port mountsPSM-1504DescriptionCompact triple axis XYZ stages have smaller footprintsthan V-Plane ® stages. They are a practical and economicalsolution for applications with limited space. Models with 50and 100mm of linear travel and bore diameter of 38.1 and63.5mm are available. The instruments precision Z driveemploys a fine pitch lead screw mechanism withapproximate positions measured along a graduatedmachinist’s scale with both inch and millimetre unitsincluded. The XY axes are micrometer driven and guidedby cross roller bearing slides. Micrometers have uniquelaser-etched plus-minus scales that indicate positive ornegative port displacement. Caburn-MDC triple axis XYstages provide precise motion and manipulation of samplesinside ultra-high vacuum environments. Top and bottomport flanges are available in DN40 and DN63-compatible,tapped CF metal seal flanges. Edge welded stainless steelbellows are used to connect the port flanges on all XYZcompact stages.12.7 hexTop flange,tapped holesZDXCYEFSpecificationsMaterialFlange/Body304 Stainless steelBellows AM 350Vacuum range1x10 -11 mbarTemperature range 1 -20°C to 230°CWeight and dimensionsSee tableAØ27Bore1UHV units are bakeable to 30°C when motorizedBBottom flange,tapped holesAll dimensions are nominal in millimetres unless specified524Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Triple axisCompact XYZ stageBore µ XY Z A B Wtsize travel Travel Flange Min – Max Min – Max C D E F G H kg38.1 13 51 DN40CF 248 – 299 124 – 175 164 105 70 150 216 198 1138.1 13 102 DN40CF 299 – 401 124 – 226 164 105 70 150 216 198 1163.5 13 102 DN63CF 354 – 455 147 – 249 178 133 86 162 228 209 13ReferenceE-PSM-1502E-PSM-1504E-PSM-2504Partnumber678002678003678007Triple axisMotorization optionsOption -01XY motorizationOption -02Z motorization79Y8640:1 Gear ratio225:1Gear ratio(0.1mm/rev)Z40:1 Gear ratio(0.1mm/rev)HMotor Add-onMotorization 1 specification weight kgXY In-line stepper D 1.4Z Side mount E 1.4Optionnumber-01-02XG1When ordering motorized options, add the option number and priceto the desired UHV or HV component part number listed aboveFor example: 678002-01-02For total unit weight, add option weight to component weightBore Travel Min – Max38.1 51 261 – 31238.1 102 312 – 41463.5 102 312 – 414All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk525


Section 7.2Triple axisStandard XYZ stageMotion and manipulationTriple axisUHV SeriesFeaturesnnnnnn102 to 304mm Z-axis travelPlus or minus 13 and 25mm off-centre XY motion38, 63 and 102mm bore diametersManual or motorized actuatorsUHV-compatible materialsWelded bellows sealn Bakeable to 230°C 1nCF port mountsPSMA-1506DescriptionStandard XYZ stages are large bore stages whichincorporate triple axis motion in a single stage. The XYtravels are micrometer driven and guided by cross rollerbearing slides. Caburn-MDC micrometers have uniquelaser etched plus-minus scales that indicate positive ornegative port displacement and are available with either12.7 or 25.4mm of linear XY displacement. The Z axisemploys a handwheel and worm gear reduction drivemechanism with displacement measured along the stage’sframe mounted machinist’s scale. Z axis linear travels of upto 304.8mm are available. Caburn-MDC standard stagesprovide precise sample motion and manipulation of samplesinside ultra-high vacuum environments.CYDXEGSpecificationsMaterialFlangeActuator body304 Stainless steelAnodized aluminiumBellows AM 350Vacuum range1x10 -11 mbarTemperature range 1 -20°C to 230°CWeight and dimensions1UHV units are bakeable to 30°C when motorizedSee tableBore XY Travel Clearance38.1 ±13 7663.5 ±13 9663.5 ±25 124101.6 ±13 114101.6 ±25 143Top flange,tapped holesBoreZ95ABJBottom flange,clearance holesAll dimensions are nominal in millimetres unless specified526Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Triple axisStandard XYZ stageBore µ XY Z B Wtsize Travel Travel Flange A Min – Max C D E G J kg38.1 13 102 DN40CF 274 177 – 279 150 164 178 140 32 938.1 13 152 DN40CF 325 177 – 329 150 164 178 140 32 1238.1 13 203 DN40CF 404 208 – 411 150 164 178 140 32 1938.1 13 305 DN40CF 564 266 – 571 150 164 178 140 32 2163.5 13 102 DN63CF 297 210 – 312 162 178 196 181 57 2063.5 13 152 DN63CF 348 210 – 363 162 178 196 181 57 2163.5 13 203 DN63CF 406 216 – 419 162 178 196 181 57 2263.5 13 305 DN63CF 513 223 – 528 162 178 196 181 57 2363.5 25 102 DN63CF 315 228 – 330 206 225 229 187 57 2263.5 25 152 DN63CF 366 229 – 381 206 225 229 187 57 2363.5 25 203 DN63CF 429 236 – 439 206 225 229 187 57 2463.5 25 305 DN63CF 526 236 – 541 206 225 229 187 57 25101.6 13 102 DN100CF 315 228 – 330 184 195 252 213 64 22101.6 13 152 DN100CF 371 236 – 388 184 195 252 213 64 23101.6 13 203 DN100CF 429 241 – 444 184 195 252 213 64 24101.6 13 305 DN100CF 533 246 – 551 184 195 252 213 64 25101.6 25 102 DN100CF 335 246 – 348 254 267 264 224 64 24101.6 25 152 DN100CF 389 249 – 401 254 267 264 224 64 25101.6 25 203 DN100CF 450 259 – 462 254 267 264 224 64 26101.6 25 305 DN100CF 551 259 – 564 254 267 264 224 64 27ReferenceE-PSMA-1504E-PSMA-1506E-PSMA-1508E-PSMA-1512E-PSMA-2504E-PSMA-2506E-PSMA-2508E-PSMA-2512E-PSML-2504E-PSML-2506E-PSML-2508E-PSML-2512E-PSMA-4004E-PSMA-4006E-PSMA-4008E-PSMA-4012E-PSML-4004E-PSML-4006E-PSML-4008E-PSML-4012Partnumber678030678031678032678033678038678039678040678041678014678015678016678017678046678047678048678049678022678023678024678025Triple axisMotorization options40:1 Gear ratioBore XY Travel Length38.1 ±13 21663.5 ±13 22863.5 ±25 227101.6 ±13 264101.6 ±25 217Option -01XY motorizationOption -02Z motorization40:1GearratioBore XY Travel Length38.1 ±13 19863.5 ±13 20763.5 ±25 210101.6 ±13 249101.6 ±25 20625:1 Gear ratio112Motor Add-onMotorization 1 specification weight kgXY In-line stepper D 1.3Z In-line stepper F 1.3Optionnumber-01-021When ordering motorized options, add the option number and priceto the desired UHV or HV component part number listed aboveFor example: 678026-01-02For total unit weight, add option weight to component weightAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk527


Section 7.2Rotatable axis360° Adjustable stageMotion and manipulationRotatable axisHV SeriesFeaturesnnnnn360° continuous rotary positioningManual or motorized actuatorRotary position lockDifferentially pumped, dual PTFE elastomer sealsUHV-compatible materialsn Bakeable to 200°C 1nCF port mountsE-RMTG-450Figure 1DescriptionRotatable axis stages replace conventional rotatablemounting tables previously offered by Caburn-MDC. Theyprovide 360° positioning with greater precision, controland ease of use. Rotatable stages are constructed withworm gear drive mechanisms which offer substantialmechanical advantage over non-geared designs, a featurewhich allows effortless manual operation, even under a fullvacuum load. High torque stepper motors are also availablefor these stages.3738BoreACaburn-MDC rotatable stages can be used to rotate heavysamples or sample support apparatus and structures. Twospring energized PTFE face seals are at the heart of therotatable stage’s sealing mechanism. With provision fordifferential pumping between the seals, these rotatablestages can be used in UHV environments with bakeouttemperatures as high as 200°C.116ECSpecificationsMaterialFlangeActuator bodyGasket sealsVacuum rangeHV ApplicationsUHV Applications304 Stainless steelAnodized aluminiumPTFE1x10 -8 mbarDifferentially pumped to1x10 -2 mbarTemperature range 1 -20°C to 200°CWeight and dimensionsSee table60Ø50DB1UHV units are bakeable to 30°C when motorizednBoth top and bottom flanges have tapped holesAll dimensions are nominal in millimetres unless specified528Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Rotatable axis360° Adjustable stageHV SeriesCF 200°CBore Flange Wtsize size Fig A B C D E kg38.1 DN40 1 102 57 63 8 55 563.5 DN63 2 173 56 114 11 68 9108.0 DN100 2 212 56 122 10 119 12158.8 DN160 2 311 62 159 10 172 18209.6 DN200 2 324 62 184 10 178 25ReferenceE-RMTG-275E-RMTG-450E-RMTG-600E-RMTG-800E-RMTG-1000Partnumber665421665422665423665424665425Rotatable axisFigure 2Motorization options Option -01Side mount stepper motorBore49176AMotorAdd-onMotorization 2 specification weight kgSide stepper E & F 1.4Optionnumber-011When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 665518-01For total unit weight, add option weight to component weightCE Bore Length38.1 103Ø83Others 137DBnBoth top and bottom flanges have tapped holesBore Length38.1 57Others 74All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk529


Section 7.2Load-lock systemsIntroductionMotion and manipulationLoad-lock systemsUHV and HV seriesFeaturesnTransfer samples from atmosphere to UHV in minutesn Choice of 35mm (1 3 /8”), 65mm (2 3 /8”) and 95mm (3 3 /4”)nominal sample sizesn Magnetically coupled rotary/linear transporter rodn Sample chamber with viewport and quickopen/close doorn Vertical or horizontal mountingn Type 304 (1.4301) stainless steel constructionn UHV version bakeable to 200°CDescriptionE-FEL fast entry load-lock systems allow quick and easyloading and unloading of a sample in and out of the vacuumchamber, without breaking the system vacuum.Samples are loaded on to the E-FEL internal transporterthrough the quick access door on the sample transferchamber. Loading can be observed through a viewport.After the transfer chamber is evacuated to the desiredlevel through DNCF flange port, the C-Loc gate valve isopened for access into the main vacuum chamber.The sample can be moved 305mm (12”), 610mm (24”) or915mm (36”), from the centre of the entry load lock. Itcan also be rotated 360°. Positioning is controlled bysliding an external sleeve that is magnetically coupled withthe transporter rod, connected to the sample holder,inside the system.DN40CFrotatableCNBQuick-access doorViewport DAStop clampQuickaccessdoorViewportGFHJLEC-Locgate valveStopM6 x 15mm deep clampLinear guide barshown in dashed lines*Linear travel45°DN16CF non-rotatable flangeDN40CF non-rotatable flangeMC-LocgatevalveKE-FELSeriesValve HTBCView diaDEGHJKMNE-FEL-10027975.2E-FEL-10033.562.5113.3586360.261E-FEL-20031486.2E-FEL-20034.874.4174.5997158.770E-FEL-40052288.9E-FEL-40032.093.5210.11388972.9112All dimensions are nominal in millimetres unless specified530Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Load-lock systemsIntroductionUHV SeriesNominal Linear (A) Magnetic Door Valvesample travel transporter ID (F) ID (L)35 304.8 584.2 41.4 1 38.1 135 609.6 927.1 41.41 38.1135 914.4 1231.9 41.41 38.1160 304.8 584.2 60.5 63.560 609.6 927.1 60.5 63.560 914.4 1231.9 60.5 63.595 304.8 584.2 97.3 101.695 609.6 927.1 97.3 101.695 914.4 1231.9 97.3 101.6ReferenceE-FEL-112ME-FEL-124ME-FEL-136ME-FEL-212ME-FEL-224ME-FEL-236ME-FEL-412ME-FEL-424ME-FEL-436MPartnumber160001116000121600013160001516000161600017160001916000201600021Load-lock systems1The nominal ID of 100 series door and gate valve gasket is 38.8 ID when using CCG40HV SeriesNominal Linear (A) Magnetic Door Valvesample travel transporter ID (F) ID (L)35 304.8 584.2 41.4 1 38.1 135 609.6 927.1 41.41 38.1135 914.4 1231.9 41.41 38.1160 304.8 584.2 60.5 63.560 609.6 927.1 60.5 63.560 914.4 1231.9 60.5 63.595 304.8 584.2 97.3 101.695 609.6 927.1 97.3 101.695 914.4 1231.9 97.3 101.6ReferenceE-FEL-112E-FEL-124E-FEL-136E-FEL-212E-FEL-224E-FEL-236E-FEL-412E-FEL-424E-FEL-436Partnumber1600000160000116000021600004160000516000061600008160000916000101The nominal ID of 100 series door and gate valve gasket is 38.8 ID when using CCG40Customer note Load lock systems are shipped in component form, for customerassembly on-site.All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk531


Section 7.2Load-lock systemsRectangularMotion and manipulationLoad-lock systemsHV SeriesFeaturesnnnFast transfer of samples from atmosphere to UHVUp to 203mm (8”) diameter sample sizesMagnetically coupled rotary/linear transporter rodn Sample chamber with viewport fittedquick-access doorn Linear guide to lock rotationn Vertical or horizontal mountingn Type 304 (1.4301) stainless steel constructionn Bakeable to 200°CDescriptionE-RFEL rectangular fast entry load-locksystems allow quick and easy loading andunloading of a sample in and out of thevacuum chamber without breaking thesystem vacuum.Samples are loaded on to the E-RFELinternal transporter through the quickaccessdoor on the sample transferchamber. Loading can be observedthrough a viewport. After the transferchamber is evacuated to the desiredlevel through a CF flange port, the C-Loc rectangular port valve is opened foraccess into the main chamber.The sample can be moved 305mm (12”),610mm (24”) or 915mm (36”), from thecentre of the load lock chamber. It canalso be rotated 360° or locked in anyposition during linear transfer.Positioning is controlled by sliding anexternal sleeve that is magneticallycoupled with the transporter rod,connected to the sample holder, insidethe system.The quick-access door swings clear forsample entry and removal. The tip of themagnetic transporter is accessible throughthis door. Various sample handlingaccessories including Cab-Fast ® andAuto-Dock sample handling systems areavailable. Doors are sealed with Viton ®elastomer gaskets. High temperatureKalrez ® elastomers can be used to increasethe systems bakeout temperature to 200°C.Rectangular entry load-lock systems arefitted with UHV-rated magnetic transportersand include a transporter guide rodmechanism. The guide rod mechanismallows rotation lock during sample transfer.The magnets in the transporter actuator(black cylinder in photograph) must beremoved for 150°C service or bakeout. Themagnets must not be subjected totemperatures in excess of 30°C.Rectangular to circular flange adaptorsprovide connectability between rectangularentry load-lock system gate valves and anyvacuum chamber fitted with a 13 1 4”CFmating flange. These flange adaptors arealso available in other sizes for use with thefull range of Caburn rectangular gate valves.See Section 1 to order other adaptor sizes.All dimensions are nominal in millimetres unless specified Weights given are approximate532Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Load-lock systemsRectangular entryHV SeriesElastometer seal 150°CFlange adaptorThis drawing only represents theflange adaptor used with therectangular entry load-lock systemspresented in this section.Non Linear Transporter Valve Wtsample travel A aperture kg203 304.8 584 25.4 x 210.9 48203 609.6 927 25.4 x 210.9 49203 914.4 1232 25.4 x 210.9 5025.4ReferenceLLR-812LLR-824LLR-836Partnumber66560966561066561176 x 262 rectangular flangewith clearance holesLoad-lock systemsA photograph and description appearon the previous page.240215.913 1 /4” CF flange,non-rotatable withclearance holesWtReferencekgF1X8 20.9PartNumber66580159.9 typ59.9133.4DN40CFnon-rotatableflange171391139A 159 255Stop clampValve slot25.4 x 210.8DN16CFnonrotatableflange34M16 x 12.7 deepStop clamp75 Linear guide barLinear travel210.8 (door)openingsQuick-access door withviewport136.7(View Ø)Rootvalve318Rectangulargate valveRGV-18Customer note Load lock systems are shipped in component form, for customer assembly on-site.All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk533


Section 7.2Magnetic transportersGuided and unguidedMotion and manipulationMagnetic transportersHigh vacuum versionUHV SeriesFeaturesnnnnnnnnUHV-compatible materialsAll-metal with ball bearing guidesMagnetically coupled rotary/linear transporter rodVertical or horizontal mountingGuided and unguided models2.27kg maximum axial force1Nm maximum torqueType 304 (1.4301) stainless steel constructionn Bakeable to 200°CnVacuum range 10 -11 mbarE-GMTM-12 Guided transporterDescriptionMTM series UHV magnetically coupled sampletransporters allow samples to be moved 305mm (12”),610mm (24”) or 915mm (36”), depending on the model,into the chamber.They can also be rotated 360°. Linear positioning iscontrolled by sliding an external sleeve which ismagnetically coupled with the transporter rod and sampleholder inside the system.GMTM models have linear guide bar to lock the rotationin any position during linear travel..250-28 thread x .50 deep(screw and washerincluded)598989ALinear travelØ37.5Stop clamp25.43125.49.415.6Stop clampLinear guide barshown in dashed linesDN40CFnon-rotatable flangeØ7.9 throØ3.6 throØ12.7 Ø9.4±0.025All dimensions are nominal in millimetres unless specified534Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Magnetic transportersGuided and unguidedUHV Series Transporter Nominal Transporter Wttype travel A kgBall bearings 200°C Unguided 305 699 4.5Unguided 610 1041 5.5Unguided 915 1346 6.3Guided 305 699 4.5Guided 610 1041 5.5Guided 915 1346 6.3HV Series Transporter Nominal Transporter Wttype travel A kgVespel ® bearings 150°C Unguided 305 584 4.5Unguided 610 927 5.5Unguided 915 1232 6.3Guided 305 584 4.5Guided 610 927 5.5Guided 915 1232 6.3ReferenceMTM-12MTM-24MTM-36GMTM-12GMTM-24GMTM-36ReferenceMT-12MT-24MT-36GMT-12GMT-24GMT-36Partnumber665700665701665702665700-01665701-01665702-01Partnumber665100665101665102665100-01665101-01665102-01Magnetic transportersTransporter optionsDN40CF, non-rotatable withclearance holesLinear travel25 retracted0.375”-12Acme leadscrewLinear guide barRef UHV-12 765-24 1108-36 191396Option -01Guide rodOption -02In-line 90V DC motor4598Motorized UHV transporterMotorized option includes a linear guide bar.MotorAdd-onMotorization 1 specification weight kgMotor 90V DC B 1.4Optionnumber-021When ordering motorized options, add the option number and price to thedesired UHV or HV component part number listed aboveFor example: 665700-02For total unit weight, add option weight to component weightAll dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk535


Section 7.2Quick-access doorsBlank and viewportMotion and manipulationQuick-access doorsQD-450-VP-CHHV SeriesFeaturesnnnBlank or viewport fitted doorsViton ® elastomer door sealHV-compatible materialsn Bakeable to 150°CnnCF port mountsClearance hole mounting port flangeQD-450-CHSpecificationsMaterialFlange304ssDoor Seal Viton ®Viewport7056 GlassVacuum range1x10 -8 mbarTemperature range 1 -20°C to 150°CWeight and dimensionsSee tableBolt hole orientationReferenceOn centrelineQD-275DescriptionQuick-access doors provide convenient and fast manualloading of samples in and out of vacuum chambers. Doorsare hinged and fitted with a swing-away hand knob lockingmechanism. viewport fitted doors are constructed withCorning type 7056 glass fused to a Kovar ® nickel-irontransition sleeve. All access doors are supplied with Viton ®elastomer seals suitable for high vacuum service. Hightemperature Kalrez ® elastomers can be used to increase adoor’s maximum temperature rating.Quick-access doors with clearance mounting holes areintended for installation on chamber ports with tappedholes.Socket-cap head bolts must be used.Straddles centrelineQD-450QD-600QD-800QD-10001Contact factory for high temperature ratingAll dimensions are nominal in millimetres unless specified Weights given are approximate536Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Quick-access doorsBlank and viewportBlank doorClearance holesADCEClearanceholesDoor IDQuick-access doorsBFlange Clear Door Wtsize holes diameter A B C D E kgDN40CF 6.7 34.9 2 70 23 44 57 37 1DN63CF 8.4 64 114 27 70 96 47 3DN100CF 8.4 102 152 33 87 121 67 5DN160CF 8.4 25 203 35 118 147 71 9DN200CF 8.4 204 253 38 143 172 74 12ReferenceQD-275-CHQD-450-CHQD-600-CHQD-800-CHQD-1000-CHPartnumber665210665211665212665213665214viewport doorClearance holesAEClearanceholesDViewdiaDoor ID 3CBFlange Clear Door Wtsize holes diameter A B C D E kgDN40CF 6.7 34.9 70 23 44 57 37 1DN63CF 8.4 68 114 27 70 96 47 3DN100CF 8.4 98 152 33 87 121 67 5DN160CF 8.4 136 203 35 118 147 71 9DN200CF 8.4 136 253 38 143 172 74 122Nominal ID of door gasket is 38.83For viewport door ID, use blank door ID in table aboveReferenceQD-275-VP-CHQD-450-VP-CHQD-600-VP-CHQD-800-VP-CHQD-1000-VP-CHPartnumber665215665216665217665218665219All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk537


Section 7.2Port alignersLoad-lock gimbalMotion and manipulationPort alignersUHV SeriesFeaturesnnnn10° horizontal tilt3.2mm axial displacementMicrometer actuators with position lockFormed bellows sealn Bakeable to 200°CnnCF port mountsIncludes magnetic transporter extension kitAG-150Parallel axisadjustment ±3.235DescriptionPort aligners are adjustable port flange interfaces thatprovide motion instruments with angular tilt and axial shift.They can also be used to correct mate-up betweencomponents with minor alignment imperfections.14092DN40CFnon-rotatableflange138Load-lock gimbals are unique port alignment instrumentsspecifically designed for the precision alignment ofmagnetically coupled transporters as used with circular andrectangular entry load-lock systems. Load-lock gimbal portaligners are fitted with precision micrometer adjustmentsfor both horizontal tilt (above and below a horizontal planeof travel) and side to side parallel axis displacement. Loadlockgimbals are intended for horizontal installation with itstilt adjustment micrometer at a bottom 6 o’clock position.They include a stainless steel formed bellows adaptorwhich mates between the magnetic transporter and thesample staging chamber. A transporter shaft extension kitto compensate for the increase in the transporters overalllength is also included.SpecificationsMaterial9.5579.5115DN40CFrotatableflangeHorizontal tiltadjustment ±10º12.7FlangeBodyBellows, formedVacuum range304 Stainless steelAnodized aluminium316 Stainless steel1x10 -11 mbarTemperature range -20°C to 200°CWeight and dimensionsSee table6-32 UNC thro11191.5Shaft extensionWtDescriptionkgAlignment gimble 1ReferenceAG-150Partnumber665300All dimensions are nominal in millimetres unless specified Weights given are approximate538Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2Port alignersStandard gimbaln Shown with bellowsn Bellows not includedFeaturesnnnnnnUHV SeriesIndependent planes provide 15° tilt about X and Y axisTilt position lock for each planeMicrometer or screw adjustment actuatorsUHV-compatible materialsBakeable to 230°C with screw type actuatorsDesigned for use with CF port mount formedbellows adaptorsPort alignersFGC-275-MID Length69.3 118113.5 169ID Length69.3 118113.5 169Plate IDCentre of rotation, 2 places at 90º95ID Nom Ht69.3 76113.5 152DescriptionThe standard gimbal geometry consists of three parallel andequidistant aluminium plates interconnected in a universaljoint geometry. The top and bottom plates are equally spacedfrom the centre plate and held in a parallel and neutralposition with eight coil springs. Top and bottom plates arefitted with precision micrometers used to produce a 15° tiltabout the centre plates X and Y axis respectively. When alladjustment mechanisms are disengaged the springs force theplates back to a neutral and parallel position. Economicalscrew type adjustments are also available in place ofmicrometers.Standard gimbals are designed for use with Caburn-MDCformed bellows flexible adaptors with 50.8 and 31.8mm borediameters. Flexible bellows adaptors are not included withstandard gimbal assemblies and must be purchased separately.SpecificationsMaterialFlangeBodyVacuum rangeTemperature range304 Stainless steelAnodized aluminium1x10 -8 mbarScrew type -20°C to 230°CMicrometer type -20°C to 100°CWeight and dimensionsWtPlate ID Type kg69.3 Micrometer 269.3 Screw 2113.5 Micrometer 3113.5 Screw 369.3 Bellows 1113.5 Bellows 2ReferenceFGC-275-MFGC-275-SFGC-450-MFGC-450-S150-X250-XSee tablePartnumber676000676001676002676003400003400005All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk539


In-vacuum accessoriesFeaturesnnnSection 7.2In-vacuum accessoriesIntroductionCab-Fast ® right angle samplehandlersAuto-Dock in-line samplehandlersRotary-linear accessoriesCab-Fast ® right-anglesample handlersThe Cab-Fast ® sample handling systemprovides a simple yet versatile meansof loading samples for transportationto manipulators, parking carousels,deposition stations and otherlocations inside ultra-high vacuumsystems. They allow the transfer ofsamples between linear driveinstruments positioned at rightangles. Samples are first securedto platens using sample mountingstrips. The loaded platen is placedinside a load-lock sample stagingchamber through the chambers quickaccessdoor. Inside, the platen issecured and attached to the platenfork previously installed to the tip of amagnetic transporter. Once thestaging chamber is evacuatedto the desiredvacuum leveland thegate valveis openedthe sampleis ready fortransfer.Motion and manipulationAuto-Dock in-line samplehandlersThe Caburn-MDC's Auto-Dock sample handling system is a patentedgroup of modular sample handlingcomponents ideally suited for thetransfer of samples between chambersand typically used in tandem withCaburn-MDC magnetic transporters.In contrast with the Cab-Fast ® system,Auto-Dock allows the transfer ofsamples between linear driveinstruments positioned in-line witheach other. The Auto-Dock systemis comprised of three basiccomponents, a sample-holder plate, avacuum-dock and a transport-dock.Samples are shuttled back and forthbetween a vacuum process chamberand a load-lock’s sample stagingchamber attached to it by fasteningsamples to the sample-holder plate.The sample-holder plate is manuallysecured to a transport-dock fixed tothe tip of an Caburn-MDC magnetictransporter inside the load-lock’ssample staging chamber. The sample isthen transported to the processchamber where thevacuum-dockcomponent isstrategicallypositioned andready to receivethe sample-holderplateCautionAnodized aluminium finishes will begin to discolourwhen baked in excess of 150°C.This is only a cosmetic condition which does notimpact performance or reliability.All dimensions are nominal in millimetres unless specified540Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationRotary-linear accessoriesRotary-linear accessories are an assortment of in-vacuumhardware components used to complement and expandthe capabilities of Caburn-MDC rotary and linearmotion and manipulationinstruments. Various drive shaftattachments are offeredincluding universal joints,bellows couplings, extensioncouplings, rotary and linearbearings and bearingmounts, ground shaftstock, set-screwcollars and ventedcap screws.Section 7.2In-vacuum accessoriesIntroductionIn-vacuum accessoriesAll dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk541


In-vacuum accessoriesSection 7.2In-vacuum accessoriesSample handling systemsCab-Fast ® right-angle samplehandlersThe Cab-Fast ® sample handling system provides asimple yet versatile means of loading samples fortransportation to manipulators, parkingcarousels, deposition stations and other locationsinside ultra-high vacuum systems. They allow thetransfer of samples between linear driveinstruments positioned at right angles to eachother. They are ideally suited for use withmagnetically coupled transporters and othermotion and manipulation instruments.Motion and manipulationAuto-Dock in-line samplehandlersThe Auto-Dock sample handling system is agroup of modular sample handling componentsideally suited for the transfer of samples betweenvacuum chambers when used with Caburn-MDCmagnetic transporters. Auto-Dock allows thetransfer of samples between linear driveinstruments positioned in-line with each other.The Auto-Dock system is comprised of threebasic components, a docking sample-holder, avacuum-dock and a transport-dock.Cab-Fast ® sample handling tools are designed to transport samplesin and out of vacuum systems. This diagram shows a dualinstrument arrangement which allows right angle sample transfer.FeaturesnnnUHV sample handlingFast sample transfer304ss constructionAuto-Dock sample handling tools are ideally suited for for usewith Caburn-MDC magnetic transporters in sample transferload-lock systems. They are designed for in-line sample transfer.Platen fork57.739.6M6 threadReferenceFOR-1Partnumber766502921.0 15.4 6.725.42.566.88650.8M3 socketcap screwØ9.5Cab-Fast ® platen forks are designedto lock on to and hold Cab-Fast ®platens during the transport andtransfer of samples betweenchambers or other motion andmanipulation instruments.Platen sample holderSAM-3Ø76.2,includes12 holesSAM-2Ø50.8,includes8 holesSAM-1Ø25.4,includes4 holes4-40 thro typ2.011.42.88-32x6dpØ15.9Ø22.21.9ReferenceSAM-1SAM-2SAM-3Partnumber766502676650277665028Cab-Fast ® sample platens aredesigned to hold samples duringin-vacuum sample processing.Samples can be secured in placeusing sample mounting strips andscrews.All dimensions are nominal in millimetres unless specified542Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2In-vacuum accessoriesCab-fast ® sample handlersSample mount stripsSAM-M2SAM-M1SAM-M1Ø 3.12.9R303.1Ø2.9(5 places)SAM-M26.4 typ31.833.37.93.30.4ReferenceSAM-M1SAM-M2Partnumber665039665040Caburn-MDC sample mountingstrips offer a versatile means offastening samples to Cab-Fast ®sample platens and Auto-Dock docking sample-holders.Sold in packages of 5.In-vacuum accessoriesDock sample-holder5.138.1M2.5 thro(6 places)ReferenceSTA-1Partnumber6650166.412.7 typ19.1 31.83.26.2Auto-Dock docking sampleholdersare designed to holdsamples during in-vacuum sampleprocessing. Samples are secured inplace using sample mounting stripsand screws.Vacuum-dock7047.012.7ReferenceSTA-2Partnumber66501731.8 19.13.2 dia thro(2 places)Ø7.9Auto-Dock vacuum-docks aredesigned to receive and holdAuto-Dock sample-holders duringin-vacuum sample processing. Theyare typically fixed inside a vacuumchamber as part of a sampleprocessing structure.Transport-dock42.4ReferenceSTA-3Partnumber66501512.7Ø9.5 Ø4.7Use with extension rod.(Part numbers 680060, 680061, 680062 and 680063)20.1Auto-Dock transporter-docks aredesigned to receive, hold andtransport Auto-Dock sampleholdersin and out of vacuumsample processing chambers. Theyare attached to the end of Caburn-MDC magnetic transporter shafts.Screws, non-vented4-40 UNC2.3 long threadReferenceSAM-S1Partnumber665041Socket head screws made of 300ssideal for Cab-Fast ® and Auto-Dock sample handling systems and comein packages of 25 pieces. Thesescrews are not vented and shouldonly be installed into tappedthrough holes.All dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk543


In-vacuum accessoriesSection 7.2In-vacuum accessoriesRotary and linear motionRotary-linear accessoriesRotary-linear accessories are an assortment ofin-vacuum hardware components used tocomplement and expand the capabilities ofCaburn-MDC rotary and linear motion andmanipulation instruments. Various drive shaftattachments are offered including universal joints,bellows couplings, extension couplings, rotaryand linear bearings and bearing mounts, groundshaft stock, set-screw collars and vented capscrews.Motion and manipulationThe components presented in this section canalso be used in combination with productspresented in the Cab-Fast ® and Auto-Dock accessories sections of this catalogue. Customdesigned hardware is also available if required.Please contact Caburn-MDC’s technical salesengineers with your inquiries.Caburn-MDC rotary and linearaccessories can provide intricatemotion paths to mobilize samplesor devices inside a vacuum system.Motion instrument input shaftUniversal joint couplingFeaturesnnnUHV sample handlingFast sample transfer304ss constructionMitre and bevel gearRadial bearing blockswith radial bearingsBellows couplingOutput shaftMitre and bevel gearStainless steel7.6Ø12.7ReferenceAM48-1-SPartnumber6850004.717.4+ 0.13Ø15.9 pitch3.22 x 6-32 set screwMitre and bevel gears provide themeans of rotary input with 90°output rotation. They accept6.4mm diameter shafts and come ina set of two gears fitted with 6-32UNC set screws for fastening toshafts.Universal joint2 x pin spotØ6.4 -011.5Stainless steel / Phosphor bronze382 x 6-32set screwReferenceAUJ-3Partnumber680000+ 0.013Ø6.4 -019Ø12.7Universal joints provide rotarymotion input with variable anglerotary output for 6.4mm shaftdiameters. The maximum operatingangle is 30° at low speeds and 10°at high speeds.All dimensions are nominal in millimetres unless specified Weights given are approximate544Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2In-vacuum accessoriesRotary and linear motionBellows coupling24Ø6.4 Ø11 Ø154 x 6-32 set screw7ReferenceACO4-4Partnumber682000Bellows couplings for 6.4mm shaftdiameters provide 0.4 Nmmaximum torque at a maximum tiltangle of 5° or maximum axialmisalignment of 0.3mm. Theyprovide zero backlash and uniformangular velocity with low vibration.In-vacuum accessoriesSleeve coupling2 x pin spotReference4ACT-3Ø12.7+ 0.013Ø6.4 -014.52 x 6-32 set screwPartnumber683000Sleeve couplings are used tocustomize and extend 6.4mmdiameter shafts inside a vacuumsystem. They are fitted with two 6-32 UNC set screws to lock shaftsin position.Set screw collarReferenceØ12.7ACS-22Set screw+ 0.0136.4Ø6.4 -0Partnumber690000Set screw collars are used to createmechanical stops along a shaft’slength. Supplied with 6-32 UNC setscrews for position lock.Bearing mount, radial198ReferenceABME-1Partnumber68800032Retainingring25.4grooves+ 0.013Ø12.7 2xØ3.6 thro-0Radial bearing mounts are made ofvacuum grade aluminium. They aredesigned to accept a radial bearingfor a 6.4mm shaft diameter. Theyinclude two retainer rings to holdthe bearing assembly in place.Screws, non-ventedS-1Set screw, 8-32 x 4 threadReferenceS-1S-2Partnumber680100680101S-2Cap screw, 8-32 x 4 thread, withflat washer (not shown)These are 300 series stainless steelsocket head screws. They come inpackages of 25 pieces.All dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk545


Section 7.2In-vacuum accessoriesRotary and linear motionMotion and manipulationIn-vacuum accessoriesLinear ball bearingØ6.4Ø12.719ReferenceALMB-1Partnumber687000Linear bearings support 6.4mmdiameter linear motion drive shafts.They are constructed of 300 seriesstainless steel and coated withDicronite ® dry lubricant suitable forUHV service.Bearing mount, linearØ12.7+ 0.013-04xØ3.6 thro24Reference1917.5ALME-13225.4RetainingringgroovesPartnumber689000Linear bearing mounts are made ofvacuum grade aluminium. They aredesigned to accept a linear bearingfor a 6.4mm shaft diameter. Theyinclude two retainer rings to holdthe bearing assembly in place.Ground stockn6.3246+ 0.013-0A±3MGS3 = 3mmMGS5 = 5mmThree standard lengths: ASI-6 ASI-12 ASI-24150 (6”) 305 (12”) 610 (24”)Custom lengths available on requestReferenceASI-6ASI-12ASI-24MGS3-600MGS5-600Partnumber68400068400168400215113001511301Precision ground 304 stainless steelshafts offered in 150, 305 and610mm lengths. With couplingaccessories these shafts can be usedto extend motion instrument driveshafts.Extension rods12.7Length12.77.94Ø7.92ReferenceER-1ER-2ER-3ER-4Partnumber6800606800616800626800638-32 thread 2xØ2.4 thro 8-32 x 6.4 deepFour standard lengths: ER-1 ER-2 ER-3 ER-425.4 (1”) 76.2 (3”) 152.4 (6”) 304.8 (12”)Extension rods have 8-32 UNCmale and female threads onopposite ends. They can beconnected end to end for customlength structures.All dimensions are nominal in millimetres unless specified546Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationPrecision bearingsA +.000-0.13Section 7.2In-vacuum accessoriesRotary and linear motionB +.000-0.13CFeaturesn UHV cleann No lubricantsIn-vacuum accessoriesIDODA B CStainless steel6.35 ( 1 4”) 12.7 ( 1 2”) 3.17 ( 1 8”)9.52 ( 3 8”) 22.22 ( 7 8”) 5.55 ( 7 32”)5 11 35 16 53 7 23 10 4ReferencePBS63PBS95PBS5-11PBS5-16PBS3-7PBS3-10Partnumber155110015511011551102155110315511041551105Precision bearings CeramicB +.000-0.13FeaturesnnnUHV cleanNo lubricantsVery long life in UHVA +.000-0.13Cn Ceramic ball races are used for the most demandinglong life UHV applicationsIDODA B CReferencePartnumberStainless steel6.35 ( 1 4”) 12.7 ( 1 2”) 3.17 ( 1 8”)9.52 ( 3 8”) 22.22 ( 7 8”) 5.55 ( 7 32”)5 11 35 16 53 7 23 10 4PBC63PBC95PBC5-11PBC5-16PBC3-7PBC3-10155120015512011551202155120315512041551205All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk547


Section 7.2In-vacuum accessoriesVented screwsMotion and manipulationIn-vacuum accessoriesDescriptionWhen making screw attachments in vacuum it is importantto avoid trapping even the smallest volumes of gas whichcan give rise to a ‘virtual leak’ within the system.Caburn-MDC offers a full range of vented screws whichallow gas to escape down a machined hole through themiddle of the screw and through a gap in a vented washer(see drawing). For situations where pump-down isaccompanied by high bakeout temperatures we offermolybdenum disulphide coated screws which avoid theproblem of seizure due to heat expansion. All screws arecleaned and packed ready for UHV use.VentedspringwasherVentedscrewFeaturesnnnStainless steel – UHV cleanedOptional MoS 2 coated for high bakeout applicationsAdditional vented washers are offered instainless steelGaspocketsVented metric socket headscrewsLengthVent holeQuantityThread Length per packM1.6 1 4 10M1.61 8 10M2 4 10M2 6 10M2 10 10M2.5 4 10M2.5 8 10M2.5 16 10M3 4 10M3 8 10M3 16 10M4 5 10M4 10 10M4 20 10M5 6 10M5 12 10M5 25 10ReferenceVMS-16-4VMS-16-8VMS-20-4VMS-20-6VMS-20-10VMS-25-4VMS-25-8VMS-25-16VMS-30-4VMS-30-8VMS-30-16VMS-40-5VMS-40-10VMS-40-20VMS-50-6VMS-50-12VMS-50-25Partnumber161000016100011610002161000316100041610005161000616100071610008161000916100101610011161001216100131610014161001516100161This size has gas relief flat in place of vent holeVented hexagonal head screwsMoS 2 coatedQuantityThread Length per packM4 6 10M4 12 10M4 25 10M5 6 10M5 12 10M5 25 10ReferenceVMHMO-40-6VMHMO-40-12VMHMO-40-25VMHMO-50-6VMHMO-50-12VMHMO-50-25Partnumber161007816100791610080161008116100821610083Vent holeLengthAll dimensions are nominal in millimetres unless specified548Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2In-vacuum accessoriesVented screwsVented metric hexagon headscrewsQuantityThread Length per packM4 6 10M4 12 10M4 25 10M5 6 10M5 12 10M5 25 10ReferenceVMH-40-6VMH-40-12VMH-40-25VMH-50-6VMH-50-12VMH-50-25Partnumber161003016100311610032161003316100341610035In-vacuum accessoriesVent holeLengthVented metric set screwsQuantityThread Length per packM2.5 4 10M3 4 10M4 5 10M5 6 10ReferenceVMSS-25-4VMSS-30-4VMSS-40-5VMSS-50-6Partnumber1610037161003816100391610040Vent holeLengthVented spring washersQuantityThreadper packM2 10M2.5 10M3 10M4 10M5 10ReferenceVMSW-20VMSW-25VMSW-30VMSW-40VMSW-50Partnumber16100421610043161004416100451610046Vent gapAll dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk549


Section 7.2In-vacuum accessoriesVented screwsMotion and manipulationIn-vacuum accessoriesVented socket headsUNC ThreadQuantityThread Length per pack6-32 6.4 106-32 12.7 108-32 6.4 108-32 12.7 1010-32 6.4 1010-32 12.7 101 4”-28 19.1 10ReferenceVUNCS-6-32-25VUNCS-6-32-50VUNCS-8-32-25VUNCS-8-32-50VUNCS-10-32-25VUNCS-10-32-50VUNCS-1/4-28-75Partnumber1610095161009616100971610098161009916101001610101Vent holeLengthVented socket head screwsMoS 2 coatedLengthVent holeQuantityThread Length per packM2 4 10M2 8 10M2.5 4 10M2.5 8 10M2.5 16 10M3 4 10M3 8 10M3 16 10M4 5 10M4 10 10M4 20 10M5 6 10M5 12 10M5 25 10ReferenceVMSM0-20-4VMSM0-20-8VMSM0-25-4VMSM0-25-8VMSM0-25-16VMSM0-30-4VMSM0-30-8VMSM0-30-16VMSM0-40-5VMSM0-40-10VMSM0-40-20VMSM0-50-6VMSM0-50-12VMSM0-50-25Partnumber16100481610049161005016100511610052161005316100541610055161005616100571610058161005916100601610061Vented spring washersUNC ThreadQuantityThreadper pack6-32 108-32 1010-32 101/4”-28 10ReferenceVUNCSW-6-32VUNCSW-8-32VUNCSW-10-32VUNCSW-1/4-28Partnumber1610103161010416101051610106Vent gapAll dimensions are nominal in millimetres unless specified550Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2In-vacuum accessoriesScrewsVented metric set screwsMoS 2 coatedQuantityThread Length per packM2.5 4 10M3 4 10M4 5 10M5 6 10ReferenceVMSSMO-25-4VMSSMO-30-4VMSSMO-40-5VMSSMO-50-6Partnumber1610085161008616100871610088In-vacuum accessoriesVent holeLengthVented spring washersMoS 2 coatedQuantityThreadper packM2 10M2.5 10M3 10M4 10M5 10ReferenceVMSWMO-20VMSWMO-25VMSWMO-30VMSWMO-40VMSWMO-50Partnumber16100901610091161009216100931610094Vent gapMolybdenum screwsQuantityThread Size per packMolybdenum screws M2 x 8 10Molybdenum screws M3 x 10 10Molybdenum nuts M2 10Molybdenum nuts M3 10ReferenceMOM2-8MOM3-10MOM-2NMOM-3NPartnumber1611400161140116114121611413FeaturesnCleaned for UHV with gas relief flatsTantalum screwsQuantityThread Size per packTantalum screws M2 x 5 1Tantalum screws M3 x 10 1ReferenceTAM2-5TAM3-10Partnumber16114021611403FeaturesnCleaned for UHV with gas relief flatsAll dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk551


Section 7.2In-vacuum accessoriesHeater and sample transfer accessoriesMotion and manipulationIn-vacuum accessoriesCeramic split bushesCSB-2MCSB-2F CSB-3SF CSB-3LFCSB-3SMCSB-3LMDescriptionCeramic split bushes can be used with UHV manipulatorsto enable sample plate or heater filaments to bemechanically clamped in position while maintainingelectrical isolation. These items are cleaned to UHVstandards and supplied in packs of 10.GDE HABFCBAType A B C D E F G HStentite KERZZO – DIN40685Male 6.85 2.4 – – – 4.4 4.1 2.55Female 6.85 2.4 4.85 5.55 2.8 – – –Male 7.95 3.05 – – – 5.3 4.75 2.55Female 7.95 3.05 5.7 5.55 2.8 – – –Male 9.52 3.05 – – – 6.1 6.35 4.1Female 9.52 3.05 6.5 7.15 4.9 – – –ReferenceCSB-2MCSB-2FCSB-3SMCSB-3SFCSB-3LMCSB-3LFPartnumber161140516114061611407161140816114091611410MachinableceramicsDescriptionMGC-1FeaturesMacor ® machinable glass ceramic can be worked withordinary tools and does not require firing after machining.It has the same electrical and thermal properties asordinary ceramic. Caburn-MDC will be happy to quoteagainst your drawings for custom machined parts.nnnnnnSample kits in varioussizesChoice of materialsMacor ® – machinableglass ceramicShapal MBoron Nitride HP gradeCustomer machiningavailable on requestSpecificationsMacor ® sample kit 4 pieces in following mm sizesCylinder13 diameter x 77 longBlock 64 x 8 x 8Block 39 x 19 x 6Block 54 x 20 x 20Boron nitride HP grade sample kit3 pieces in following mm sizeCylinder10 diameter x 75 longBlock 20 x 20 x 75Plate 10 x 20 x 5Shape M sample kit 2 pieces in following mm sizesCylinder10 diameter x 50 longPlate 22 x 9.5 x 3Mixed ceramic technology All machinableShapal M10 diameter x 50 longMacor10 diameter x 50 longXSBH (composite)10 diameter x 50 longBoron nitride HP grade10 diameter x 50 longNumberDescriptionof piecesMacor ® 4Shapal M 2Boron nitride HP grade 3Mixed ceramic technology 4ReferenceMGC-1SHM-1BNHP-1MCT-1Partnumber1611300161130116113021611303All dimensions are nominal in millimetres unless specified552Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationCeramic tubesSection 7.2In-vacuum accessoriesHeater and sample transfer accessoriesBACFeaturesnUHV cleann One, two andfour holetypesn Material 99.7%A1203n Maximumtemperature1700°CIn-vacuum accessoriesLength Number of QuantityProduct A B C holes per packCeramic tube 1.0 0.4 50 1 10Ceramic tube 2.0 1.0 50 1 10Ceramic tube 3.0 2.0 50 1 10Ceramic tube 6.0 4.0 50 1 10Ceramic tube 2.0 1.0 300 1 10Ceramic tube 3.0 2.0 300 1 10Ceramic tube 5.0 3.0 300 1 3Ceramic tube 10.0 7.0 300 1 3Ceramic tube 3.0 0.8 50 2 10Ceramic tube 3.0 0.8 300 2 1Ceramic tube 2.7 0.8 50 4 10Ceramic tube 2.6 0.6 300 4 1Ceramic tube 4.6 1.0 50 4 10Ceramic tube 4.5 1.0 300 4 1ReferenceCERT0-50CERT1-50CERT2-50CERT4-50CERT1-300CERT2-300CERT3-300CERT7-300CERT08-50-2CERT08-300-2CERT06-50-4CERT06-300-4CERT1-50-4CERT1-300-4Partnumber16111001611101161110216111031611105161110616111071611108161111016111111611112161111316111141611115All dimensions are nominal in millimetres unless specifiedCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk553


In-vacuum accessoriesKapton ® filmSection 7.2In-vacuum accessoriesHeater and sample transfer accessoriesFeaturesnnnVery high electrical insulationFlexible – can be cut with scissorsUHV compatible – low outgassingn Bakeable to 230°CnnnnnUseable to 4kDielectric strength: 154V per mmDielectric constant: 3.5V per mmDissipation factor: 0.0026V per mmVolume resistivity: 10 17 Ω cmMotion and manipulationDescriptionKapton ® film, 300 x 25 x 0.13mm thickReferenceKAPF1Partnumber1611411All dimensions are nominal in millimetres unless specified Weights given are approximate554Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk


Motion and manipulationSection 7.2In-vacuum accessoriesHeater and sample transfer accessoriesDescriptionCaburn-MDC can offer sample holders with resistiveheating to 900°C and complete sample transfersystems for bringing samples into the UHVenvironment and docking them on a parking carouselor UHV manipulator. Please contact the sales office,with details of your application, for a quotation.The sample loading stage allows the sample holder tobe loaded in a fast entry lock and brought into theUHV analysis chamber. The Omicron sample pick-upfits on to a standard MTM series magnetictransporter.From the loading stage the sample holder can betransferred directly to a transfer head. From thetransfer head the sample can be translated to anomicron sample heater on a UHV manipulator.In-vacuum accessoriesOmicron ® type sample heaternnnnnnUHV compatibleAccepts Omicron ® style sample plates from transferhead (TH-C)Sample heating to 900°C (1200°C with optionaldirect heating)Fits E-PBRM1-10 or PBRM2-10 and all standardUHV manipulatorsIncludes K-type thermocoupleWiring kits available on requestPlease contact sales office stating length and type of UHVmanipulatorDescriptionThe Omicron sample heater which is used in thewell-established full lab surface science machine isoffered as a self-assembly component by Caburn-MDC. As offered, the sample heater includes thesample stage, the acceptor mechanism to group thesample plate, the resistive heater and the brushes fordirect heating. The sample is electronically isolated.Sample plates carried on the transfer head TH-C maybe transferred (without use of a wobble stick) to thesample heater RH1-C or RH2-C.Azimuthal (secondary) sample motor is optional. Thisrequires RH2-C and precision dual axis rotary drivetype E-PBRM-2. A K-type thermocouple is included.Feedthroughs and connector wires are not included.These are offered as options with the demountablein vacuum connection block.DescriptionHeater and sample transferPlease contact technical sales for details.All dimensions are nominal in millimetres unless specified Weights given are approximateCaburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk555


556 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk

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