M-414 Datasheet (PDF), High-Load Precision-Translation Stages ...

M-414High-Load Precision-Translation Stages with Stepper and DC-Motors© PI 1998-2006. Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. R1 06/08/30.02 High Precision Components Part of the M-403, M-404, M-413, M-414 Modular Family Travel Range 100 to 300 mm Min. Incremental Motion to 0.1 µm Resolution to 0.0232 µm Stress-Relieved Aluminum Base for Highest StabilityThe modular M-414 family ofprecision-linear stages provideshigh-performance at avery attractive price.High-value components offeroptimum results in motion andpositioning.The integrated low-frictionball-screw combines high dutycyclesand velocities with minimumincremental motion of0.1 µm. These stages are designedwith a precisionmachined,high-density, stressrelievedaluminum base forexceptional stability and highloads.Travel ranges from 100 to300 mm are available.Application Examples Automation R&D Semiconductor technology Metrology Quality assurance testingM-414.2PD High load linear stage with 200 mm travel rangeHigh-Load and Maintenance-FreeAll models are equipped withhigh-precision linear guidingrails and recirculating ballbearings. The recirculating ballbearings are maintenance freeand immune to cage migration.The choice of componentsand careful mountingguarantees high load capacity,longer lifetime and high guidingaccuracy.Three Motor Drive OptionsThe top-of-the-line M-414.xPDversions feature the high-performanceActiveDrive system.The ActiveDrive design,developed by PI, features ahigh-efficiency PWM (pulsewidth modulation) servoamplifiermounted side-by-sidewith the DC-Motor and offersseveral advantages: Increased efficiency, byeliminating power lossesbetween the amplifier andmotor Reduced cost of ownershipand improved reliability,because no external driveris required Elimination of PWM amplifiernoise radiation, bymounting the amplifier andmotor together in a single,electrically shielded caseM-414.xDG models are equippedwith a DC-Motor with alow-backlash gearhead and ashaft-mounted optical encoder,providing a minimum incrementalmotion of 0.1 µm.M-414.x2S models feature adirect-drive, 2-phase steppermotor, providing very smoothoperation and a resolution of0.2 µm per step.Limit and Reference SwitchesFor the protection of yourequipment, non-contact Halleffectlimit and referenceswitches are installed. The direction-sensingreferenceswitch supports advancedautomation applications withhigh precision.M-403/M-413 and M-404/M-414series of linear stages form amodular system. The M-403 isthe basic family, providingtravel ranges from 25 to 200mm. M-413 is designed forhigher loads with travel rangesfrom 100 to 300 mm. TheM-404 and M-414 stages havethe same travel ranges andload capacities, but offer higherprecision and more speed.Ordering InformationM-414.1PDPrecision-Linear Stage, 120 mmwide, 100 mm Travel Range,ActiveDriveM-414.1DGPrecision-Linear Stage, 120 mmwide, 100 mm Travel Range,DC-MotorM-414.12SPrecision-Linear Stage, 120 mmwide, 100 mm Travel Range,Stepper MotorM-414.2PDPrecision-Linear Stage, 120 mmwide, 200 mm Travel Range,ActiveDriveM-414.2DGPrecision-Linear Stage, 120 mmwide, 200 mm Travel Range,DC-MotorM-414.22SPrecision-Linear Stage, 120 mmwide, 200 mm Travel Range,Stepper MotorM-414.3PDPrecision-Linear Stage, 120 mmwide, 300 mm Travel Range,ActiveDriveM-414.3DGPrecision-Linear Stage, 120 mmwide, 300 mm Travel Range,DC-MotorM-414.32SPrecision-Linear Stage, 120 mmwide, 300 mm Travel Range,Stepper MotorLow Cost of OwnershipThese PI stages are especiallycost-effective in high performance,high-duty-cycle applications,when combined with thenetworkable single-axis controllersC-862 Mercury (seepage 9-6) and C-663 Mercury-Step.Profile comparison between M-403/M-404(left side) and M-413/M-414, which wasdesigned for higher load and travel ranges

Piezo • Nano • PositioningPiezo-AktorenPiezoaktorenPiezo-NanopositioniersystemeAktive Optik /Piezo-StrahlsteuerungPiezokippspiegelTutorium: Nanopositionierenmit Piezos mit PiezosKapazitive Nanoposi-SensorenPiezo-ElektronikPiezoelektronikHexapoden / /MikropositionierungPiezo-MotorenFaserpositionierungFaserpositionierungMotorsteuerungenPiezomotoren /MotorsteuerungenenStelltischeIndexM-413 linear stage series, dimensions in mmThe guiding accuracy of the M-414–200 mm of travel shownhere–is better than 15 arcseconds (75 µrad)3

Technical DataModels PD (ActiveDrive) versions DG (gearhead) versions 2S (stepper) versions Units ToleranceM-414.1PD/M-414.2PD/ M-414.1DG/M-414.2DG/ M-414.12S/M-414.22S/M-414.3PD M-414.3DG M-414.32SActive axes X X XMotion and positioningTravel range 100 / 200 / 300 100 / 200 / 300 100 / 200 / 300 mmIntegrated sensor Rotary encoder Rotary encoderSensor resolution 4000 2000 cts./rev.Design resolution 0.5 0.0232 0.2 µm typ.Min. incremental motion 0.5 0.1 0.2 µm typ.Backlash 0.5 4 2 µm typ.Unidirectional repeatability 0.5 1 1 µm typ.Pitch 100 100 100 µrad typ. over 100 mmYaw 100 100 100 µrad typ. over 100 mmMax. velocity 100 3 6 mm/sOrigin repeatability 1 1 1 µm typ.Mechanical propertiesSpindle pitch 2 2 2 mm/rev.Gear ratio 42.9206Motor resolution 10,000* steps/revStiffness in motion direction 6000 6000 6000 N/mm ±20 %Load** 500 500 500 N max.Push-/pullforce 50 50 50 N max.Lateral force 200 200 200 N max.Drive propertiesDrive type DC-Motor, ActiveDrive DC-Motor, gearhead 2-phase stepper motorOperating voltage 24 (PWM) 0–12 differential, polarity 24 Vdetermines directionElectrical power 42 3.6 W nominalMiscellaneousOperating temperature range -20 to +65 -20 to +65 -20 to +65 °CMaterial Al (black anodized) Al (black anodized) Al (black anodized)Mass 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 4.4 / 5.4 / 6.6 kg ±5Cable length 3 3 3 m ±10 mmConnector Sub-D 15 (m) Sub-D 15 (m) Sub-D 15 (m)Recommended controller/driver C-843, C-862 C-843, C-862 C-600, C-630, C-663* 2-phase stepper motor: 24 V chopper voltage, max. 0.8 A/phase, bipolar, 3.3 ohm/winding, torque 21 Ncm; 400 full steps/rev.: 10,000 microsteps/rev. with C-600, C-630 controllers** Load: Max. normal load capacity: Centered, vertical load (horizontal installation)4