SERIES

Issue 1
We want to increase productivity by suppressing vibration of equipment.
Problem
Vibration occurs at two different frequencies at the
edges of equipment and it takes a while for the
vibration to stop.
Solution
Vibration at two different low-frequencies is suppressed
simultaneously with the automatic adjustment function.
No vibration
Vibration
occurs.
Vibration at
edge of
equipment
Position deviation
Position command speed
Positioning Completion signal
Position deviation
Vibration at edge of equipment
Position command speed
Positioning Completion signal
Two different low-frequencies
can be suppressed simultaneously.
No vibration occurs
Issue 32
We want to improve positioning accuracy to handle parts that are becoming increasingly smaller.
Problem
Positioning accuracy needs to be improved
because parts that are handled are becoming
increasingly smaller.
Solution
High-precision positioning
becomes possible for precision
workpieces by replacing the
existing drive with the
Servo Drive.
SERVOPACKs
Just the
trick!
0 5 10 μm
Vibration when stopped
±10nm level also possible
Note: This will depend on the
installation conditions.
Must improve
accuracy
0 5
10 μm
Highest performance in the industry
3.1 kHz response frequency
Improved vibration suppression
Servomotors
High-resolution encoders
24 bits = 16,777,216 pulses/rev
For 20 mm lead ball screws
1.2 nm resolution
7