05.09.2016 Views

High performance HBM Known Good Stack Testing

S06_02_Loranger_SWTW2015R

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<strong>HBM</strong> <strong>Stack</strong> Probing<br />

• Bottom of SoC device in the stack provides test<br />

pads in the field of Micro bumps<br />

Test Pad<br />

137.5 µm<br />

25µm<br />

25um<br />

68.4 µm<br />

240 µm<br />

Micro Bump<br />

144µm<br />

165 µm<br />

Marc Loranger<br />

John Oonk<br />

7

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