Vacuum Technology Know How - Triumf

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Pfeiffer Vacuum Page 132 Vacuum Technology 1 2 3 Figure 6.8: High vacuum angle valve Gate valves Figure 6.9: Electropneumatically actuated high vacuum inline valve 1) Bellows 2) Valve plate seal 3) Valve seat 4) Valve plate 5) Housing 4 5 www.pfeiffer-vacuum.net
www.pfeiffer-vacuum.net In principle, inline valves are designed the same as the above-described angle valves, however they differ from them in that the connection flanges are located on one axis. Due to their design, the flow resistance of inline valves is usually higher than that of comparable angle valves. Gate valves Gate valves are used for large nominal diameters (> DN 100). They are characterized by their low flow resistance and short physical height. Valve plates, usually of double design, move back and forth to open and close these valves. In the closed position, both elements are forced apart and against the sealing surfaces by means of balls. Depending upon the direction of movement of the valve gate, a distinction is made between rebound valves, shuttle valves and rotary vane valves. While most gate valves can seal against a differential pressure of 1 mbar on the valve plate due to their special design, they can only open in the presence of a low differential pressure on the valve plate. “Closed” position “Open” position Figure 6.10: Rebound gate valve Plate and butterfly valves In valves of this type, the sealing valve plate is swung open by a lever (plate valve) or tilted open by means of a simple rotary motion (butterfly valve), with the valve plate remaining in the valve opening. Plate valves, in particular, are used to close larger nominal diameters. 1 2 Page 133 Vacuum Technology
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Vacuum Vacuum Technology Technology
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Vacuum www.pfeiffer-vacuum.net Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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www.pfeiffer-vacuum.net Vacuum Tech
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Formula 1-3 Definition of pressure
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Pa bar mbar μbar Torr micron atm a
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Formula 1-8 Mean free path www.pfei
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Formula 1-9 Knudsen number Formula
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Pa m 3 / s mbar l / s Torr l / s at
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Formula 1-17 Blocking Formula 1-18
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Formula 1-23 Molecular pipe conduct
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www.pfeiffer-vacuum.net Solid Liqui
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www.pfeiffer-vacuum.net 1.3.4 Bake-
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Formula 2-1 Compression ratio www.p
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Formula 2-7 Water vapor capacity ww
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www.pfeiffer-vacuum.net Filters Wit
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Model Penta 10 Penta 20 Penta 35 Mo
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www.pfeiffer-vacuum.net The ultimat
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www.pfeiffer-vacuum.net Inlet Appli
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Model MVP 006-4 MVP 015-2 MVP 015-4
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Model XtraDry 150-2 XtraDry 250-1 w
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www.pfeiffer-vacuum.net This result
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Model Hepta 100 Hepta 200 Hepta 300
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www.pfeiffer-vacuum.net 2.6.1 Desig
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Compression ratio K 0 10 2 30 10 1
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www.pfeiffer-vacuum.net Due to thei
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www.pfeiffer-vacuum.net 2.6.4.1 Sta
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www.pfeiffer-vacuum.net Soundproofi
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Model OnTool Booster 150 www.pfeif
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Formula 2-9 Turbopump K 0 Formula 2
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www.pfeiffer-vacuum.net 2.8.1.2 Hol
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www.pfeiffer-vacuum.net 2.8.1.3 Tur
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www.pfeiffer-vacuum.net Analytical
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Characteristic Pure turbo stages Tu
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www.pfeiffer-vacuum.net The magneti
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www.pfeiffer-vacuum.net With the ai
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www.pfeiffer-vacuum.net Figure 3.1:
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www.pfeiffer-vacuum.net A Pirani va
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www.pfeiffer-vacuum.net When instal
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www.pfeiffer-vacuum.net Pirani ther
Page 81 and 82: www.pfeiffer-vacuum.net Table 3.2:
Page 83 and 84: www.pfeiffer-vacuum.net DigiLine se
Page 85 and 86: www.pfeiffer-vacuum.net The followi
Page 87 and 88: www.pfeiffer-vacuum.net Inlet Syste
Page 89 and 90: Formula 4-2 Stability parameter a F
Page 91 and 92: Formula 4-7 Shot orifice Formula 4-
Page 93 and 94: www.pfeiffer-vacuum.net The higher
Page 95 and 96: Material Y 2O 3 / lr W Re Relative
Page 97 and 98: www.pfeiffer-vacuum.net A lattice i
Page 99 and 100: www.pfeiffer-vacuum.net Some of the
Page 101 and 102: www.pfeiffer-vacuum.net 4.1.2.3 Det
Page 103 and 104: Detectors www.pfeiffer-vacuum.net T
Page 105 and 106: Inlet System No pressure reduction
Page 107 and 108: www.pfeiffer-vacuum.net In the pres
Page 109 and 110: www.pfeiffer-vacuum.net The potenti
Page 111 and 112: www.pfeiffer-vacuum.net Mass discri
Page 113 and 114: 5 www.pfeiffer-vacuum.net Leak dete
Page 115 and 116: www.pfeiffer-vacuum.net Test gas V
Page 117 and 118: Formula 5-1 Leakage rate conversion
Page 119 and 120: Suitable With test chamber External
Page 121 and 122: www.pfeiffer-vacuum.net Bypass Opti
Page 123 and 124: Thickness � 1.00 1.20 1.50 1.60 1
Page 125 and 126: www.pfeiffer-vacuum.net Trapezoid s
Page 127 and 128: www.pfeiffer-vacuum.net 6.3 Detacha
Page 129 and 130: www.pfeiffer-vacuum.net Figure 6.7:
Page 131: www.pfeiffer-vacuum.net 6.5 Valves
Page 135 and 136: www.pfeiffer-vacuum.net Venting val
Page 137 and 138: www.pfeiffer-vacuum.net Figure 6.15
Page 139 and 140: Formula 7-2 K o of a Roots vacuum p
Page 141 and 142: p a / mbar 1,000.0000 800.0000 600.
Page 143 and 144: Formula 7-9 Calculation of the cond
Page 145 and 146: www.pfeiffer-vacuum.net The Roots p
Page 147 and 148: Formula 7-10 Diffusion coefficient
Page 149 and 150: www.pfeiffer-vacuum.net The turbopu
Page 151 and 152: www.pfeiffer-vacuum.net Since p 2 =
Page 153 and 154: www.pfeiffer-vacuum.net Vacuum Tech
Page 159 and 160: www.pfeiffer-vacuum.net Acknowledge
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Vacuum Technology Know How - Triumf

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