Vacuum Technology Know How - Triumf

www.pfeiffer-vacuum.net
The ultimate pressures of the rotary vane vacuum pumps that are specified in the catalog
can only be ensured when using the operating fluid recommended by Pfeiffer Vacuum. The
manufacturer cannot accept any liability for damage attributable to the use of other operating
fluids. Different types of oil should never be mixed. Some oils do not mix and can thus cause
damage to the pumping system.
Table 2.7: Oil types for backing pumps and Roots pumps
P3
D1
F4
(for pumps < 20 m³ / h)
F5
(for pumps > 20 m³ / h)
High quality mineral oil for standard applications
Extremely low vapor pressure
Achievable ultimate pressure: < 1 ∙ 10-3 mbar
Max. operating temperature: 95 °C
For pumping down:
Air, inert gases, noble gases
Diesteröl für Standard- und Sonderapplikationen
Achievable ultimate pressure: < 5 ∙ 10-2 mbar
Max. operating temperature: 120 °C
For pumping down:
Air, inert gases, noble gases, oxygen,
weakly aggressive and organic solvents
Perfluorpolyether for special applications
Achievable ultimate pressure: < 1 ∙ 10 - 3 mbar
Max. operating temperature: 120 °C
For pumping down:
Oxygen, ozone, halogens, organic and
inorganic solvents, HCl, BF , HF, fluorine
3
2.2.3.4 Accessories
Dust separators (STP, STR, STZ)
If the process produces dust, the pump must be installed downstream from a dust separator.
Different versions are available, depending upon the degree of contamination of the pumpeddown
gases and molecule size.
Condensate separator (KAS)
Condensates can form in the inlet and outlet lines of a vacuum system when pumping down
vapors. To protect the pump against these condensates, we recommend providing a condensate
separator in both the inlet and outlet lines.
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Vacuum
Technology