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GBS smartWLI prime

Without the Limitation

Without the Limitation of Stylus Tips 5 µ m Resolving of much more finer details compared to tactile scans with min tip radii of app. 2 ... 3 µm. Algorithms for the compensation of the tactile limits based on the high resolution data are part of the software. 14

Accurate Reproduction of Certified Roughness Parameters certificate Ra: 24.1 Uncertainty: +- 11 % measurement results: Ra / Average value: Standard deviation: 24.24 nm 0.1 nm Technical Specification field of view: 1.9 x 1.1 mm² scan time: < 2 s point density: 0.9 µm z-resolution: 0.1 nm 24.500 24.400 24.300 24.200 Ra / nm 24.100 24.000 23.900 0 5 10 15 20 25 30 15

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