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GBS smartWLI prime

Optical and Camera

Optical and Camera Configuration high speed camera 1936 x 1216 pixel / 166 Hz Scanning Speed up to 250 µm/s – full camera resolution Magnification 2.5x 5x 10x 20x 50x 100x FOV / mm² 7.2 x 4.5 3.6 x 2.3 1.8 x 1.1 0.9 x 0.56 0.36 x 0.23 0.18 x 0.11 Spacing / µm 3.7 1.9 0.9 0.47 0.19 0.09 WD / mm 10.3 9.3 7.4 4.7 3.4 2 high resolution camera 2456 x 2054 pixel / 86 Hz Scanning Speed up to 120 µm/s – full camera resolution Magnification 2.5x 5x 10x 20x 50x 100x FOV / mm² 5.4 x 4.5 2.7 x 2.2 1.3 x 1.1 0.67 x 0.56 0.27 x 0.22 0.13 x 0.11 Spacing / µm 2.2 1.1 0.55 0.27 0.11 0.05 WD / mm 10.3 9.3 7.4 4.7 3.4 2 4

Vertical Scanning using White-Light Interferometry (WLI) Vertical Scanning Principle • the Piezo lifts the objective in z axis and the camera the grabs images in equidistant steps • the image stack contains the information to calculate the profile data from the surface • each independent pixel will show an so named correlogram an the maximum sinus like light variation indicates an defined z-distance from the objective

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