EPP Europe P2.2022

» PCB & ASSEMBLY
FOUPs and other storage facilities should
be cleaned to prevent cross-contamination
of the wafers
Source: Microcare
of the hydrofluoro-olefin fluids results in
greater drag forces acting on the particles.
This makes it easier to dislodge the
particulate from the substrate. The particles
push away from the substrate and
wash away, dispersing into the cleaning
fluid.
Low boiling point
Particle displacement fluids are lowboiling
with typical boiling points between
40˚C/105˚F and 65°C/165°F. This
minimizes the risk of damage to wafers
and other delicate components. Vaporization
displacement fluids (below 100°C)
are aggressive enough to remove the particles,
yet won’t damage the substrate,
including composite materials. They are
compatible with most hard plastics, ceramic,
glass and metal.
Low boiling fluids also allow the vapor
degreaser to run more efficiently. And
since vapor degreasing cleans and dries in
one step, there is no need for blowers, air
knives or any other drying method that
uses power. This translates into less fossil
fuel consumption, lower carbon emission
and reduced greenhouse gas output. All
with the added benefit of energy cost
savings.
Environmentally friendly
Environmentally-friendly HFO-based
displacement fluids replace higher GWP
(Global Warming Potential) hydrofluorocarbon
(HFC) and hydrofluoroethers
(HFE)-based fluids. They also are better
for the environment than high ODP
(Ozone Depleting Potential) solvents like
CFC-113, HCFC-141b, HFC-225 and 1,1,1
trichloroethane. They meet strict regional
air quality regulations and many are not
considered HAPs (Hazardous Air Pollutants).
Many fluids are accepted by key
environmental and governmental regulatory
agencies in the United States and
most countries around the globe. They
meet global environmental directives including
the European F-Gas and REACH
(Registration, Evaluation, Authorisation
and Restriction of Chemicals) legislation.
Environmentally sustainable
Vapor degreasing with particle displacement
fluids uses no water, conserving
this precious non-renewable resource.
In addition, the process doesn’t produce
wastewater that requires specialty filtration
or treatments before disposal.
Another environmental benefit of particle
displacement through vapor degreasing
is its suitability for recycling. The
displacement fluid is used for hundreds of
cycles before it requires refreshing or replacing.
Additionally, the vapor degreaser
concentrates the contaminants as it
works. This reduces waste generation and
lowers hazardous waste disposal costs.
Wrapping up
Particle contamination is detrimental
to intricate semiconductors and silicon
wafers. Removing contamination is essential
to ensuring their performance.
Vapor degreasing using particle displacement
fluid not only ensures semiconductor
cleanliness, it also addresses environmental
and regulatory concerns.
Companies looking for help with displacement
cleaning should partner with
an expert that has displacement fluid and
vapor degreasing expertise. They can conduct
on-site audits or perform in-lab
tests with sample wafers to ensure cleaning
success. Based on the wafer substrate
and the particulate, these specialists can
recommend, or engineer, the fluids and
processes that achieve the best results.
www.microcare.com
Zusammenfassung
Die Entfernung von Verunreinigungen bei komplexen Halbleitern
und Silizium-Wafern ist durch Dampfentfettung mit Partikelverdrängungsflüssigkeit
gewährleistet und berücksichtigt zudem Umweltaspekte
sowie gesetzliche Vorgaben.
Résumé
L'élimination des impuretés dans le cas de semi-conducteurs complexes
et de plaquettes de silicium est assurée par un dégraissage à
la vapeur avec un liquide de déplacement des particules. Elle tient
également compte des aspects environnementaux et des exigences
légales.
Резюме
Удаление загрязнений в случае сложных полупроводников и
кремниевых пластин осуществляется методом паровой
очистки с использованием вытесняющей жидкости, при этом
учитываются аспекты охраны окружающей среды и
требования законодательства.
24 EPP Europe » 11 | 2022