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In-situ Monitoring of Atomic Layer Deposition Processes

In-situ Monitoring of Atomic Layer Deposition Processes

In-situ Monitoring of Atomic Layer Deposition

NanoZEIT seminar @ SEMICON Faculty of Electrical and Computer Engineering -Institute of Semiconductors and Microsystems 2011 In-situ Monitoring of Atomic Layer Deposition Processes M. Knaut*, M. Junige, M. Geidel, M. Albert, and J. W. Bartha Dresden, 12.10.2011 *contact: Martin.Knaut@tu-dresden.de

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