UHV Design Catalogue

Introduction to UHV Design to UHV Design 

Welcome to the UHV Design product 

catalogue. As specialists in UHV motion 

and heating products, UHV Design sets 

the pace in innovative product development for the 

vacuum industry. 

Our primary focus is to provide high-quality lowmaintenance 

manipulation solutions for vacuum 

applications. 

Excellence is assured through in-house control of 

the entire process from design, to manufacture, 

assembly, test and after sales support. A customerorientated 

approach combined with a desire to 

achieve unrivalled product excellence is key to our 

continued success. 

UHV Design has developed and manufactured 

vacuum manipulation solutions for over 15 years. 

In that time it has accumulated a ‘productionproven’ 

product range, positioning UHV Design 

at the forefront of high and ultra high vacuum 

manipulation. 

It also ensures technical 

knowledge and 

expertise is maintained 

within the company. 

As well a standard 

portfolio of products, 

much of UHV Design’s 

heritage is based upon 

working closely with the customer to offer specifi c 

custom solutions. 

Today a high percentage of business is generated 

by the company’s ability to adapt and modify 

standard products to meet the needs of specifi c 

applications. 

Over the years UHV Design has developed ideas in 

conjunction with some of the most prestigious and 

forward thinking scientifi c and technical institutions. 

Many of these products have proved so popular 

www.uhvdesign.com sales@uhvdesign.com Tel:+44(0)1323 811188

that they have become standard product ranges 

in their own right. It is this continual 

process of development, review and 

improvement that has enabled UHV 

Design to stay at the forefront 

of vacuum technology for 

over a decade. 

Working closely with 

our customers has not 

only enabled us to 

assemble a genuinely 

cutting edge product 

portfolio but also gain 

valuable insight into 

the challenges that 

vacuum manipulation 

can sometimes involve. 

By taking an innovative 

approach, UHV Design 

often eliminate problems 

that have become common 

place in standard manipulation 

product ranges. For example, the 

kinematic movements of our LSM 

UHV Design 

Z shift range, the magnetic coupling technology 

of our linear and rotary probes, and the 

choice of materials, bearings and 

sealing methods in all our product 

ranges, have led to a range of 

signifi cant improvements and 

developments in the vacuum 

industry. 

The rapidly changing face 

of research technology 

has led to the creation of 

new scientifi c disciplines 

that rely upon the 

capability to move 

components precisely 

and reliably within ultra 

clean environments. 

UHV Design is proud to 

have supplied manipulation 

solutions to pioneering 

laboratories around the world 

specialising in Nanosciences, 

Synchrotron and Beamline 

applications and many others. 

Design Manufacture Cleaning Assembly 

Tel:+44(0)1323 811188 sales@uhvdesign.com www.uhvdesign.com 

UHV Design

Contents 

Section 1 Rotary Drives MagiDrive rotary feedthroughs 001 

Section 2 Shutters Rotary source shutters, viewport shutters, linear shutters 039 

Section 3 Push Pull Drives Linear and linear/rotary push-pulls 047 

Section 4 Sample Transfer Tools Linear and linear/rotary PowerProbes and wobble sticks 055 

Section 5 Linear Motion and Port Aligners Linear shift mechanisms and port aligners 079 

Section 6 Y, XY, XYZ and Sample Manipulators Y-Shifts, MultiBase, MultiStage, MultiCentre, cryostats 103 

Section 7 Sample Heater/Deposition Stages EpiCentre deposition manipulation stages 127 

Section 8 Heater Modules UHV heater modules 145 

Section 9 MicroProducts Micro- Flanges / Shifts / Drives / Feedthroughs 149 

Section 10 UHV Flanges UHV fl ange range 161 

Section 11 Bellows Edge-welded bellows series 165 

Section 12 Goniometers Custom multi-axis solutions 171 

Section 13 Motion Controllers DC and stepper motor control options 175 

Section 14 Synchrotron Solutions Beam alignment probe 183 

Section 15 Customised Solutions Bespoke and special builds 187 


Section 1 

Rotary Drives 

Introduction to the MagiDrive Range 002 

Torque Level Graphs 002 

Selecting Your Drive 003 

Standard ‘Solid’ Body Drives 

Low/medium Torque 

MD10 Range 008 

MD16/ MD19 Range 011 

MD20/ MD21 Range 014 

Medium Torque 



High Torque 



Hollow Body Drives 

Introduction to Hollow MagiDrive Range 028 

MD35H Hollow Range 030 



Custom MagiDrives 038 

Magnetic Rotary Drives 

sales@uhvdesign.com www.uhvdesign.com 001 

Magnetic Rotary Drives


002 


Introduction to the 

MagiDrive range 

The MagiDrive range of rotary feedthroughs enable 

rotation to be transferred into a vacuum system, 

using a stiff high fl ux magnetic coupling. This 

removes the need for bellows or sliding seals, 

and provides an extremely robust design, fully 

compatible with UHV environments. As testament 

to this, MagiDrives have been used successfully 

in demanding production environments for over a 

decade. 

The MagiDrive range is supplied with CF UHV fl anges 

as standard and are available in twelve sizes to 

match the fl ange and torque requirements of each 

application. 

The series includes unique hollow options, permitting 

services to be passed through the centre and also 

allows MagiDrives to be ‘stacked’ one atop another 

providing up to four axes of independent rotation 

(see page 028). 

A number of actuation methods are available from 

manually driven units, to pneumatic and motorised 

drives. Additional options include the use of state-ofthe 

art ceramic bearings for ultra-clean applications, 

such as semiconductor production. MagiDrives are 

compact, bakeable to 250ºC and offer true UHV 

performance. 

MagiDrive concept 

Using the latest magnetic materials technology, a 

large number of high fl ux magnetic fi elds interlock 

inner and outer rotating assemblies through a solid 

stainless steel enclosure. 

This enclosure or ‘vacuum envelope’ is manufactured 

from one-piece ensuring vacuum integrity. The high 

density of interlocking fi elds ensures exceptionally 

high torsional rigidity. 

MagiDrives used in excess of their torque rating 

simply release their ‘magnetic grip’ and lock back 

onto the next magnetic pole. This protects the 

drive and whatever it is driving from incurring any 

damage, thereby avoiding expensive maintenance. 

MagiDrives offer high precision rotation with zero 

angular backlash under low load and acceleration. 

All drives are fi tted with magnetic shielding. 


Selecting your MagiDrive 

The drives have been divided into solid and hollow 

body variants. The main difference being that the 

hollow version allows you to pass services down 

through the drive body, or stack multiple drives 

together allowing up to four axes of independent 

rotation, (see page 028 for more detail). 

The drives are subsequently organised by torque 

level and fl ange size as depicted in the chart 

opposite, which can be used to fast-track to the 

drive that meets your needs. 

Each section then includes detailed specifi cations, a 

part number generator and dimensional drawings. 

The following section includes a comprehensive 

description of MagiDrive sizes, actuation methods, 

shaft and bearing options. 

MagiDrive range 

The MagiDrives are available in twelve sizes, to suit 

the torque and fl ange size requirements for the 

majority of applications. 

MagiDrives are manufactured as standard with CF 

UHV fl anges, from CF10 to CF100. Customised ‘O’ 

ring fl anges are available upon request. 

The four largest MagiDrives are available in a ‘hollow’ 

confi guration, terminating with a CF fl ange at the 

rear. This allows services to be passed through the 

drive, or an additional MagiDrive to be mounted 

to the rear, providing additional axes of concentric 

rotation. Up to four independent axes of rotation 

can be provided by combining the MD16, MD35H, 

MD64H and MD100H MagiDrives. 

This ‘stacking’ capability is typically used to provide 

simple solutions to sophisticated manipulation 

requirements, such as the provision of primary, 

azimuthal and tilt rotation of a sample. 



Standard manual actuation (T) 

Dual shaft (D) 

Calibrated thimble (CF, CB) 

Stacked MagiDrives 

003 

Selecting Rotary Drives

Selecting Rotary Drives 

004 


Actuation method 

The MagiDrive range is available with a variety of manual, pneumatic and motorised actuation methods. 

Manual actuation 

Code Item Description 

T Standard drive The standard manual drive. 

F Friction control An adjustable friction system enables the drive to hold its position 

when the desired position is reached. Resistance to turn is adjusted 

by tightening/ loosening a single screw located at the rear of the 

drive. 

B Brake A thumbscrew brake facility enables the drive to be locked in any 

position. 

BF Brake with friction 

control 

CF Calibrated thimble with 

friction control 

CB Calibrated thimble with 

brake 

For applications where a drive should have adjustable friction control 

as well as a brake facility. 

A calibrated thimble gives a visual indication of the drive position 

with one degree increments. It is fi tted with the friction control 

system as standard. 

As above but including the capability to lock the drive in any position. 

K Knurled end cap If a drive is intended for Manual actuation it may be convenient to 

utilise a knurled end cap. This affords the user a better grip when 

manually turning the drive thimble. 

D Dual shaft MagiDrives can be supplied with both input and output shafts. This 

allows the customer to retrofi t their own motorisation option or to fi t 

a position encoder. 

P Timing pulley A pulley is mounted on the end of the drive allowing users to install 

their own motor assembly. 

Pneumatic actuation 


RA Rotary actuator Pneumatically actuated MagiDrives are fi tted with an adjustable rotary 

actuator providing from 30-170 o sweep. Flow controllers enable input 

and exhaust to be throttled to control speed. 

RAI Rotary actuator with 

visual position indicators 

and reed switches for 

position feedback 

As above but fi tted with two reed switches to provide position feedback 

for system interlock facilities. This option also includes LEDs allowing 

the user to see the position of the shutter in open or closed states. 




Motorised MagiDrives can be driven with DC or stepper motors, and are available with a selection of motor 

and gearbox combinations to cover a wide range of load, speed and positioning requirements. 

Motors can be mounted either to the side (as shown below) or in-line with the drive, to suit the space available. 

Motors are easily removed for bakeout and have pre-set mounting brackets to ensure the correct re-alignment 

and belt tension is maintained when the motor is replaced. 

UHV Design offer a full range of motor controllers which are described on pages 175 - 181. 


Stepper Motors 

IS In-line stepper motor A co-axially mounted stepper motor providing minimum lateral 

footprint. 

ISS In-line stepper motor 

with switches 

SS Side mounted stepper 

motor 

SSS Side mounted stepper 

motor with switches 

DC Motors 

As above but with a rear disk and switch assembly, providing a datum 

point ‘home position’. 

A stepper motor mounted to the side of the drive. 

A side mounted stepper motor with a rear disk and switch assembly to 

provide a datum ‘home position’. 

ID In-line DC motors A co-axially mounted DC motor providing minimum lateral footprint. 

SD Side mounted DC motor A DC motor mounted to the side of the drive. 

Timing pulley (P) Side mounted stepper motor (SS) 

005 


Selecting Rotary Drives 

006 


Motorised MagiDrive gearing options 

Each motorised MagiDrive is offered with a range of gearbox options allowing a variety of torque and spin 

speed solutions to be offered as standard. Simply add the ‘Gear Option’ number you require to the MagiDrive 

part number as shown in each section. Special confi gurations are available on request. 

Drive Motor type Gear option Maximum output 

torque Nm 

MD10 

MD16 

MD19* 

MD20 

MD21* 

MD25 

MD35 

MD35H 

MD64 

MD64H 

In-Line DC (ID) 

In-Line stepper motor (IS) 

In-Line DC (ID) 


Side mounted DC motor (SD) 

In-Line DC motor (ID) 

Side mounted stepper motor (SS) 










Maximum output 

spin speed RPM 

1 0.04 363 

2 0.18 82 

3 0.18 44 

4 0.18 19 

1 0.04 1,800 

2 0.18 360 

3 0.18 113 

4 0.18 72 

1 0.2 230 

2 0.2 135 

3 0.3 70 

4 0.45/ 0.56* 42 

5 0.45/ 0.56* 21 

6 0.45/ 0.56* 8 

1 0.12 1000 

2 0.45 300 

3 0.45 150 

4 0.45 60 

1 0.7 213 

2 2.0 80 

3 2.4 40 

4 2.4 20 

1 0.4 320 

2 1.0 120 

3 2.0 60 

4 2.4 30 

1 1.0 500 

2 1.5 200 

3 2.0 80 

4 2.4 40 

1 1.0 500 

2 2.4 120 

3 2.4 60 

4 2.4 30 

1 0.8 175 

2 2.0 65 

3 3.5 33 

4 4.0 16 

1 0.4 320 

2 1.0 120 

3 20 60 

4 4.0 30 

1 1.0 500 

2 1.6 165 

3 2.0 66 

4 4.0 33 

1 1.0 500 

2 2.4 120 

3 4.0 60 

4 4.0 30 

1 3.8 235 

2 7.5 117 

3 10 48 

4 10 24 

1 2.0 440 

2 4.0 220 

3 10 88 

4 10 44 

1 4.5 160 

2 9.0 80 

3 10 32 

4 10 16 

1 2.5 300 

2 5.0 150 

3 10 60 

4 10 30 



X000 Stub shaft or spigot Dependant upon drive size. 



Shaft options 

Lower torque MagiDrives are offered as standard with short stub shafts for end users to connect to. They are 

also offered with a modular shaft assembly. This option provides an arbitrary 300 mm length shaft which is 

easily demounted/reconnected via a rigid collet type coupling with precision mounting to ensure shaft and 

drive concentricity. The shaft can then be modifi ed to suit specifi c requirements. 

The Medium/ High torque MagiDrives are supplied with spigot fl anges to provide a rigid coupling to the driven 

load, whilst ensuring drive and shaft concentricity. 

Special shafts are available upon request. For longer shafts, where concentricity and stability of the rotating 

shaft is critical, UHV Design offer a range of extended bearing housings to support the shaft along its axis of 

rotation. Details are available upon request. 

MagiDrives can be supplied with both input and output shafts, allowing end users to fi t their own motorisation 

or encoder solutions. 

X030 Shaft with fl at 30 mm long stub shaft with a machined fl at to aid connection. 

M Modular shaft The drive is provided with a precision bore to accept a 300 mm long 

modular shaft. The shaft can be adapted by the customer to suit their 

application, then mounted to the drive with a compression coupling, 

which ensures shaft concentricity (see picture below). 

DX Dual shaft Drive is provided with both input and output shafts. 

Bearing type 

In addition to our standard ‘Z’ bearings two other options are offered:- 


Z Standard bearing As standard, the MagiDrive range uses high performance molybdenum 

disulphide lubricated bearings providing long life and true UHV 

performance. 

CE CeramaDrive Uses state-of-the-art ceramic bearing technology. The SiN bearings 

require no lubrication and provide smooth, ultra-clean performance. 

SE SemiDrive Uses totally dry, self-lubricating bearings. These give extremely long 

life in harsh conditions. Particularly benefi cial for Semiconductor 

applications. 

Modular shaft (M) Spigot fl ange 

007 


MD10 MagiDrive Range 

008 


Spec box 

MD10 - 25.4 mm CF MicroFlange 

 

 

 

 

 

Smallest UHV drive on market 

High torque / size ratio 

No bellows or dynamic seals 

Bakeable to 250°C 

Zero-backlash under low load 

This miniature drive is made possible through the 

use of the new CF10 Micro-Flange (page 151), 

which has an outside diameter of just 25.4 mm. 

The body diameter is no bigger than the fl ange 

OD, which makes the MD10 ideal for rotating small 

instrumentation loads, in applications where space 

is at a premium. 

MagiDrive body MD10 

System mounting fl ange CF10 25.4 mm (1” OD) 

Construction 

Shaft style Solid 

Machined from one piece 

316L 

Break-away torque 0.18 Nm (0.13 lbf) 

Maximum no load spin 

speed (standard 

bearings) 

Maximum shaft axial 

thrust 

200 rpm 

Bakeout 250 ° C 

20 N (4.5 lbf ft) 

MD10TX000Z 


MD10 part code generator 

Actuation options Shaft options Bearing options 



Manual 000 Standard 10 mm shaft Z Standard bearing 

T Standard thimble 

TF Standard with friction control 

CF 

Calibrated thimble with friction 

control 

P Timing pulley 

Motorised 

IS In-Line stepper motor 

ID In-Line DC motor 

Pneumatic 

RA Pneumatic actuator 

RAI 

Size Actuation Gearing options Shaft Bearings 

MD10 X 000 Z 

Pneumatic actuator with 2 x 

reed switches and visual 

position indicators 

T 

TF 

CF 

P 

IS (1-4)* 

ID (1-4)* 

RA 

RAI 

Special and custom variants available 

please contact sales. 

For a full explanation of the partcodes 

please see pages 004 - 007. 

* For information on gearing options 

for motorised MagiDrives please see 

page 006. 

Example partcode: MD10TX000Z 

MD10 - MD10 MagiDrive 

T - Standard thimble 

X000 - Standard shaft 

Z - Standard bearings 

009 

MD10 MagiDrive Range


010 


MD10CFX000Z MD10PX000Z 

MD10ISX000Z 

MD10IDX000Z 

MD10RAX000Z 

MD10RAIX000Z 


MD16 /MD19 - 34 mm OD CF 

Flange 

 

 

 

 

 

True UHV rotation 

High torque to size ratio 




The MD16 is the ‘work horse’ of the MagiDrive series. 

The standard drive provides suffi cient torque for the 

majority of miniature feedthrough requirements. 

The MD19 variant maintains the same dimensions as 

the MD16 but provides increased levels of torque. 

MagiDrive body MD16 MD19 

System mounting fl ange CF16 34 mm (1.33” OD) 

Construction 

Machined from 

one piece 316L 


Break-away torque 



bearings) 


thrust 

0.45 Nm 

(0.33 lbf ft) 

1000 rpm 

66 N (15 lbf) 


0.56 Nm 

(0.41 lbf ft) 



MD16TX000Z 

011 



012 


MD16/ MD19 part code generator 


MD16 T 000 Z 

MD19 TF 030 CE 

BF M 

P 

CF 

K 

KF 

D 

IS (1-4)* 

ISS (1-4)* 

ID (1-6)* 

RA 

RAI 


Manual 000 Standard shaft Z Standard bearing 

T Standard thimble 030 30 mm shaft CE Ceramic bearing 

TF Standard with friction control M Modular shaft 

BF Brake with friction control 


CF 


control 

K Knurled end cap 

KF 

Knurled end cap with friction 

control 

D Dual shaft 

Motorised 


ISS 

In-Line stepper motor with 

switches 


Pneumatic 


RAI 




X 





* For information on gearing options for 

motorised MagiDrives please see page 

006. 







MD16CFX000Z 

MD16IDX000Z 

MD16ISX000Z 

MD16RAX000Z 

MD16RAIX000Z 

MD16PX000Z 

MD16TXMZ 



MD16DX000Z 

013 



014 


MD20 / MD21 - 70 mm OD CF 

Flange 

 

 

 

 

 






The MD20 MagiDrive provides suffi cient torque for 

the majority of miniature feedthrough applications 

requiring a CF38 (70 mm / 2-3/4” OD) fl ange. The 

MD21 variant maintains the same dimensions as 

the MD20 but provides increased levels of torque. 

MagiDrive body MD20 MD21 


Rear fl ange None 

Construction 


316L 


Break-away torque 



bearings) 


thrust 

0.45 Nm 

(0.33 lbf ft) 

500 rpm 

66 N (15 lbf) 


0.56 Nm 

(0.41 lbf ft) 

MD20TX000Z 


MD20 / MD21 part code generator 




MD20 T 000 Z 

MD21 TF 030 CE 

BF M 

P 

CF 

K 

KF 

D 

IS (1-4)* 

ISS (1-4)* 

ID (1-6)* 

RA 

RAI 



T Standard thimble 030 30 mm shaft CE Ceramic bearing 

TF Standard with friction control M Modular shaft 



CF 


control 

K Knurled end cap 

KF 

Knurled end cap with friction 

control 

D Dual shaft 

Motorised 


ISS 


switches 


Pneumatic 


RAI 




X 







006. 






015 



016 


MD20CFX000Z MD20TXMZ 

MD20PX000Z 

MD20DX000Z 

MD20IDX000Z 

MD20ISX000Z 

MD20RAX000Z 

MD20RAIX000Z 


MD25 - 70 mm OD CF Flange 

 

 

 

 

 

 





Bearing options 

Multiple shaft options 

The MD25 provides a medium torque solution for 

various rotation applications. 




Construction 



316L 

Break-away torque 2.4 Nm (1.77 lbf ft) 



bearings) 


thrust 

500 rpm 


100 N (22.5 lbf) 



MD25TX000Z 

017 



018 




MD25 X 

T 000 Z 

D M CE 

P 

CB 

IS (1-4)* 

ISS (1-4)* 

SS (1-4)* 

SSS (1-4)* 

ID (1-4)* 

SD (1-4)* 

RA 

RAI 



T Standard thimble M Modular shaft CE Ceramic bearing 

D Dual shaft 


CB 

Motorised 

Calibrated thimble with 

thumbscrew brake 


ISS 


switches 

SS Side mounted stepper motor 

SSS 

Side mounted stepper motor 

with switches 


SD Side mounted DC motor 

Pneumatic 


RAI 








* For information on gearing options 

for motorised MagiDrives please see 

page 006. 







MD25CBX000Z 

MD25PX000Z 

MD25IDX000Z 

MD25ISX000Z 

MD25RAX000Z 

MD25RAIX000Z 

MD25DX000Z 



MD25SDX000Z 

MD25SSX000Z 

019 



020 



 

 

 

 

 


High torque 




The MD35 MagiDrive provides the highest torque, 

within the range, on a 70 mm OD (2-3/4” OD CF) 

fl ange. The drive is ideally suited to applications 

such as the rotation of samples and small platens, 

where stability is key. The MD35 is also available in 

a hollow confi guration (see page 030). 


System mounting fl ange 


Construction 

CF38 70 mm (2.75” 

OD) 

Machined from one 

piece 316L 

Shaft style Spigot fl ange 


Maximum no load spin speed 

(standard bearings) 

500 rpm 

Maximum shaft axial thrust 200 N (45 lbf) 


MD35TX000Z 






MD35 X 000 

T Z 

B CE 

CB SE 

P 

D 

IS (1-4)* 

ISS (1-4)* 

SS (1-4)* 

SSS (1-4)* 

ID (1-4)* 

SD (1-4)* 

RA 

RAI 


Manual 000 Spigot fl ange Z Standard bearing 

T Standard thimble CE Ceramic bearing 

B Standard with friction control SE Semiconductor bearing 

CB Calibrated thimble with thumbscrew brake 


D Dual shaft 

Motorised 


ISS In-Line stepper motor with switches 


SSS Side mounted stepper motor with switches 



Pneumatic 


RAI 

Pneumatic actuator with 2 x reed switches 

and visual position indicator 

Special and custom variants available please 

contact sales. 

For a full explanation of the partcodes please 

see pages 004 - 007. 


motorised MagiDrives please see page 006. 






021 



022 


MD35CBX000Z 

MD35PX000Z 

MD35IDX000Z 

MD35ISX000Z 

MD35RAX000Z 

MD35RAIX000Z 

MD35DX000Z 

MD35SDX000Z 

MD35SSX000Z 



 

 

 

 

 


High torque 




The MD64 MagiDrive provides high power rotation 

through a high stiffness coupling. This drive would 

be ideally suited to robot type or platen rotation 

applications. The MD64 drive is also available in a 

hollow confi guration (see page 033). 




Construction 

CF64 114 mm (4.5” 

OD) 


piece 316L 


Break-away torque 10 Nm (7.38 lbf ft) 



500 rpm 





MD64TX000Z 

023 



024 




MD64 X 000 

T Z 

BF SE 

CB 

P 

IS* (1-4)* 

ISS* (1-4)* 

SS* (1-4)* 

SSS* (1-4)* 

ID* (1-4)* 

SD* (1-4)* 

RA 

RAI 



T Standard thimble SE Semiconductor bearing 


CB Calibrated thimble with brake 


Motorised 

IS In-line stepper motor 

ISS 

In-line stepper motor with 

switches 


SSS 


with switches 



Pneumatic 


RAI 










006. 









MD64CBX000Z MD64DX000Z 

MD64PX000Z 

MD64SDX000Z 

MD64SSX000Z 

MD64IDX000Z 

MD64ISX000Z 

MD64RAX000Z 

MD64RAIX000Z 

025 



026 


MD100 - 152.4 mm OD CF Flange 

 

 

 

 

 

 

Largest rotary drive in range 

Stiff, high torque coupling 



Zero-backlash under low loads 


The MD100 is ideally suited to demanding 

applications requiring very high torque and stiffness 

characteristics, such as indexing robots or rotating 

large loads. The MD100 is also available in a hollow 

confi guration (see page 036). 


System mounting fl ange CF100 152 mm (6” OD) 


Clear bore 65 mm 

Construction Fabrication 




speed (standard bearings) 

200 rpm 

Max’ shaft axial thrust 400 N (90 lbf) 


MD100TX000Z 





Size Actuation Shaft Bearings 

MD100 X 000 Z 

T 

P 

SS* 

SSS* 

SD 

Special and custom variants available please contact sales. 

For a full explanation of the partcodes please see pages 004 - 007. 

* For information on gearing options for motorised MD100 MagiDrives please contact sales. 





Motorised 


SSS 







with switches 


For further drawing information please contact UHV Design. 

027 


Hollow MagiDrive Range 

028 


Hollow MagiDrive Range 

The four largest MagiDrives are available in a ‘hollow’ 

confi guration, terminating with a CF fl ange at the 

rear. This allows services to be passed through the 

drive or alternatively, an additional MagiDrive to be 

mounted to the rear, providing a secondary axes of 

rotation. Up to four independent axes of rotation 

can be provided by combining the MD16, MD35H, 

MD64H and MD100H MagiDrives. 

This ‘stacking’ capability is typically used to provide 

simple solutions to sophisticated manipulation 

requirements. 

A typical example is the EpiCentre 282 right angled 

manipulator, which heats a silicon wafer to 1000°C 

whilst rotating it on the primary and azimuthal axes 

(a photograph of which is included at the bottom 

of this page). The use of hollow MagiDrives greatly 

simplifi es the design preventing the need for special 

head positioning gears. 

Details of the ‘hollow’ range are included in the 

following pages. 


Schematic of stacked ‘hollow’ 

range illustrating three concentric 

rotations 



029 

Hollow MagiDrive Range

MD35H MagiDrive Range 

030 


MD35H - 70 mm OD CF Flange 

 

 

 

 

 

 

Hollow drive 

12 mm clear bore 

Medium torque 




The MD35H is a medium torque, medium stiffness 

rotary drive. Confi gured with a hollow body 

the MD35H has a rear fi xed CF16 fl ange enabling a 

component to pass through the centre, such as UHV 

Design’s cold lance, or a second MagiDrive rotary 

feedthrough. 

MagiDrive body MD35H 


Rear fl ange 

Construction 

CF38 70 mm 

(2.75” OD) 

CF16 34 mm 

(1.33” OD) 


piece 316L 





500 rpm 



MD35HTX000Z 


MD35H part code generator 




MD35H X 000 

T Z 

CB CE 

P SE 

SS (1-4)* 

SSS (1-4)* 

SD (1-4)* 

SRA 

SRAI 



T Standard thimble CE Ceramic bearing 

CB Brake with friction control SE Semiconductor bearing 


Motorised 


SSS 


with switches 


Pneumatic 

SRA 

SRAI 

Example partcode: MD35HTX000Z 

MD35H - MD35H MagiDrive 




Side mounted Pneumatic 

actuator 

Side mounted Pneumatic 

actuator with 2 x reed switches 

and visual position indicators 



* For information on gearing options for motorised MagiDrives 

please see page 006. 

031 

MD35H MagiDrive Range


032 


MD35HCBX000Z MD35HPX000Z 

MD35HRAX000Z 

MD35HRAIX000Z 

MD35HSDX000Z 

MD35HSSX000Z 


MD64H - 114 mm OD CF Flange 

 

 

 

 

 

 

Hollow drive 

High torque /stability 





The MD64H MagiDrive provides high power rotation 

through a high stiffness coupling. This drive is ideally 

suited to platen rotation or robot type applications. 

The MD64H has a rear rotatable fl ange enabling a 

component to pass through the centre such as UHV 

Design’s cold lance, or a second MagiDrive rotary 

feedthrough. 



Rear fl ange 

Construction 

CF64 114 mm 

(4.5” OD) 

CF38 70 mm 

(2.75” OD) 


piece 316L 





500 rpm 





MD64HTX000Z 

033 



034 




MD64H X 000 

T Z 

P SE 

SS (1-4)* 

SSS (1-4)* 

SD (1-4)* 

SRA 

SRAI 



T Standard thimble SE Semiconductor bearing 


Motorised 


SSS 


with switches 


Pneumatic 

SRA 

SRAI 






Pneumatic actuator with 

switches 


reed switches, visual position 

indicators and switches 



* For information on gearing options for motorised MagiDrives 

please see page 006. 


MD64HRAX000Z 

MD64HRAIX000Z 

MD64HPX000Z 



MD64HSDX000Z 

MD64HSSX000Z 

035 



036 


MD100H - 152.4 mm OD CF Flange 

 

 

 

 

 

 

Hollow drive 


Powerful, stiff coupling 



Zero-backlash under low loads 

The MD100H is selected for demanding high torque 

and stiffness applications, such as indexing robots 

or rotating large loads. The MD100H has the largest 

clear bore in the range and a rear rotatable fl ange. 

This enables a component to pass through the 

centre such as UHV Design’s cold lance, or a second 

MagiDrive rotary feedthrough. 


System mounting fl ange CF100 152 mm (6” OD) 

Rear fl ange CF64 114 mm (4.5” OD) 

Clear bore 65 mm 

Construction Fabrication 




speed (standard bearings) 

200 rpm 

Max’ shaft axial thrust 400 N (90 lbf) 


MD100HTX000Z 





Size Actuation Shaft Bearings 

MD100H X 000 Z 

T 

P 

SS* 

SSS* 

SD* 





Motorised 


SSS 







with switches 


For dimensional and drawing information please contact UHV Design 



* For information on gearing options for motorised MD100H 

MagiDrives please contact sales. 

037 


Customised Drives 

038 


Customised MagiDrives 

MD16 MagiDrive with viewing window 

MD16 MagiDrives with 3 position locking facility 

MD16 MagiDrive with Rotary Source Shutter 

MD20 MagiDrives with extended 

bearing housing 

MD16 MagiDrive with rear switch 


Shutters 

2 

Shutters 

Rotary Source Shutters 040 

Viewport Shutters 043 

Linear Shutters 046 


Shutters

Rotary Source Shutters 

040 

Shutters 



Adjustable sweep (30 °-170 °) 

 

 

 

Specifi cation Table 

MagiDrive Mounting fl ange Sweep Break-away torque 

MD10 CF10 * (1” OD CF) 

30 ° -170 ° 

Adjustable actuation speed 

Position feedback switches 

Visual position indicator 

UHV Design’s high quality rotary source shutters are 

becoming an industry standard for fl ux switching 

solutions. The pneumatic actuation provides a 

simple low cost solution for shutter applications such 

as sputter sources, ion guns or viewport shutters. 

Range 

Based on the MagiDrive rotary feedthroughs (see 

section one), the range includes six different sizes, 

to match the torque requirements for an array of 

applications. Technical assistance with size selection 

is available on request. Each drive is fi tted with an 

external pneumatic actuator, providing adjustable 

sweep between 30-170 o . Flow control valves are 

also supplied to adjust the speed of actuation. Use 

of the MagiDrive range ensures ultimate vacuum 

integrity through the single piece ‘vacuum envelope’ 

design. 

Actuation details 

A solenoid operated spool valve switches compressed 

gas between the actuator ports. Energising the 

solenoid will sweep the shutter through the 

required angle; de-energising the solenoid returns 

the shutter to its start position. Actuators can also 

be fi tted with ‘Auto Switch’ assemblies, complete 

with reed switches for system feedback and visual 

position indicators. 

Shaft and shutter blades 

Source shutters are supplied with standard Magidrive 

shaft options (see page 042 for drawings). 

Customised shafts and shutter blades can also be 

quoted upon request. Extended bearing housings 

can be provided for longer shafts. Please contact 

sales for further information. 

Torsional 

stiffness 

0.18 Nm (0.13 lbf ft) See Page 008 

MD16 CF16 (1.33” OD CF) 0.45 Nm (0.33 lbf ft) See Page 011 

MD20 


MD25 CF38 (2.75” OD CF) 

(adjustable) 


MD35 2.5 Nm (1.84 lbf ft) See Page 020 

MD64 CF64 (4.5” OD CF) 10 Nm (7.38 lbf ft) See Page 023 

Maximum air 

input pressure 

6.8 bar 

(98 PSI) 

Flow control 

port size 

4 mm OD 

pipe 

* For more information on the CF10 MicroFlange please see page 151 


Rotary Source Shutter part code generator 

Size Shutter type Shaft Bearings 

MD10 RA 000 

MD16 RAI M 

MD20 

MD25 

MD35 

MD64 

Customer Name: 

Postal address: 

Tel: Fax: Email: 

Flange to shutter distance (L) 

Shutter width (W) 

Offset (O) 

Shutter material, typically 316 stainless steel, Molybdenum, 

or Tantalum 

and fi nally it would be useful for us to know the shutter 

speed so we can size the MagiDrive accordingly for torque 


X Z 

Shutter type Shaft Bearing options 

RA Pneumatically actuated 000 

RAI 

Pneumatically actuated with 

two reed switches and visual 


Special and custom variants 

available please contact 

sales. For a full explanation 

of the partcodes please see 

pages 004 - 007. 

Shaft and shutter blades 

Due to the diverse requirements for shutter 

designs, UHV Design do not offer a standard 

shutter; rather we customize a basic ‘teardrop’ 

concept shown in the adjacent fi gure 

to the users specifi c requirement. 

To this end please supply the information 

indicated in the table below, photocopy 

and fax to UHV Design on +44 (0)1323 

811999. 

Extended bearing housings can be provided 

for longer shafts. Please contact sales for 

further information. 

Standard stub shaft or spigot 

fl ange 

M Modular shaft 

Z Standard bearing 

Shutters 

Example partcode: MD10RAX000Z 

MD10 - MD10 Rotary Source Shutter 

RA - Pneumatically actuated 



041 

Rotary Source Shutters


042 

Shutters 

MD10RAX000Z 

MD10RAIX000Z 

MD16RAX000Z 

MD16RAIX000Z 

MD20RAX000Z 

MD20RAIX000Z 

MD35RAX000Z 

MD35RAIX000Z 

MD25RAX000Z 

MD25RAIX000Z 

MD64RAX000Z 

For MD64 shaft detail please see page 025 


Viewport Shutters 

 

 

 

 

Manual or pneumatic actuation 

Position switch option 

Fully bakeable to 250°C 

Friction control system 

Introduction to Viewport Shutters 

UHV Design offers a range of viewport shutters 

to protect system windows during process, such 

as vacuum deposition. Utilising the magneticallycoupled 

MagiDrive rotary feedthroughs (section 1) 

for the shutter actuation, the range can be actuated 

manually or pneumatically, where remote control is 

required. The MagiDrive’s low stray magnetic fi eld 

ensures compatibility with RHEED measurements. 

The range also includes the unique ‘AutoClose’ 

series, preventing accidental coating of the viewing 

window. Viewport shutters are available on four 

fl ange sizes from CF38 to CF150 (2-3/4” to 8” 

OD). 

Manual Actuation 

Manually actuated viewport shutters are fi tted with 

an external friction control system, ensuring the 

blade remains in the desired position without the 

need for position locks. 

Manual ‘AutoClose’ shutters 

The unique ‘AutoClose’ shutter safeguards viewport 

windows from accidental deposition. It allows endusers 

to manually open the shutter for viewing, 

but upon release, automatically closes, protecting 

the window from accidental coating, for example. 

‘AutoClose’ motion is driven by an inherent position 

bias, with intrinsic deceleration. The ‘AutoClose’ 

prevents the costly and time-consuming requirement 

to break vacuum in order to replace/clean windows 

accidentally coated. This is particularly undesirable 

for UHV systems. ‘AutoClose’ shutters can be 

mounted in any orientation and are bakeable to 

250 o C. 


Viewport shutters can also be fi tted with a 

pneumatically actuated MagiDrive. Used in their 

simplest form, they could be operated remotely from 

a control panel or switch. For more sophisticated 

protection the pneumatically actuated MagiDrive 

could be interlocked to the ‘vacuum process’, such 

that activating a deposition source, for example, 

would automatically close the viewport shutter. 

Furthermore, for critical applications, an optional 

‘feedback-switch’ assembly can be fi tted to the 

drive to confi rm to the process controller that the 

shutter is in the closed position. Specifi c features 

of the pneumatically actuated MagiDrives can be 

found on page 040. 


Shutters 

Miniature actuator 

Viewport shutters are fi tted with the MD16 MagiDrive 

(page 011) as standard. The two smaller shutters 

can also be confi gured with the miniature MD10 

MicroDrive (page 008) for applications where space 

is a primary constraint. 

Selection tables and drawings can be found 

overleaf. 

043 

Viewport Shutters

Viewport Shutters 

044 

Shutters 

Viewport Shutter part code generator 

Standard actuator 

Viewport shutter Flange size Actuation (optional) 

VPS 


38 AC 

64 RA 

100 RAI 

150 

Viewport shutter Flange size Actuation (optional) 

VPSM 

Flange size Actuation 

38 CF38 70 mm (2.75”) OD None Manual rotary drive with friction control 

64 CF64 114 mm (4.5”) OD AC AutoClose manually actuated self-closing shutter 

100 CF100 152 mm (6”) OD RA Pneumatically actuated 

150 CF150 203 mm (8”) OD RAI 

38 RA 

64 RAI 

Example partcode: VPS38 

VPS - Viewport Shutter 

38 - CF38 OD 


Pneumatically actuated with two Reed switches for 

position feedback and visual position indicators 


Standard actuator 

Actuation Code Flange size 

Manual 

Pneumatic 



Dimension (mm) 

Shutters 

A B C D 

VPS38/ VPS38AC CF38 (2.75” OD) 37.0 32.8 10.0 116.0 

VPS64/ VPS64AC CF64 (4.5” OD) 63.5 57.0 19.5 135.0 

VPS100 / VPS100AC CF100 (6” OD) 101.6 87.0 35.5 158.0 

VPS150/ VPS150AC CF150 (8” OD) 152.4 133.2 52.5 173.0 

VPS38RA/ VPS38RAI CF38 (2.75” OD) 37.0 31.8 10.0 179.5 

VPS64RA/ VPS64RAI CF64 (4.5” OD) 63.5 56.9 19.5 198.5 

VPS100RA/ VPS100RAI CF100 (6” OD) 101.6 87.0 35.5 221.5 

VPS150RA / VPS150RAI CF150 (8” OD) 152.4 133.2 52.5 236.5 

Actuation Code Flange size 

Manual 

Pneumatic 

Dimension (mm) 

A B C D 

VPSM38 CF38 (2.75” OD) 37 32.8 10 106.5 

VPSM64 CF64 (4.5” OD) 63.5 57 19.5 125 

VPSM38RA/ VPS38RAI CF38 (2.75” OD) 37 32.8 10 157.5 

VPSM64RA/ VPS64RAI CF38 (2.75” OD) 63.5 57 19.5 176 

045 

Viewport Shutters

Linear Shutters 

046 

Shutters 

Linear Shutters for UHV 

Deposition 

 

 

 

 

 

Ideal for MBE and sputtering 

applications 

Fully bakeable to 250°C 

Based on MagiDrive technology 

Choice of blade size and material 

Dedicated shutter control unit 

available 

Introduction to Linear Shutters 

UHV Design manufacture a range of linear stroke 

shutters for fl ux switching various deposition 

sources. Originally designed for the demanding 

requirements of Molecular Beam Epitaxy, the low 

particulate generation of the shutter makes it 

ideal for production applications like sputtering. 

All products in this range are fully bakeable and 

constructed from materials compatible with ultra 

high vacuum. 

Rocking Beam Shutter 

UHV Design’s Rocking Beam Shutter relies on our 

MagiDrive range to pass motion into the vacuum 

envelope, eliminating the need for bellows. This 

elegant, simple and reliable pneumatically actuated 

component utilises a camshaft to reduce end of 

travel shock in high speed applications. 

The design ensures that only the rotating pivot 

bearings are inside the vacuum enclosure. 

All Linear Shutters have the option of molybdenum, 

tantalum, PBN or stainless steel shutter blades to 

suit customer requirements. 

For detailed specifi cations and customer drawings 

for this range of products please contact sales. 


Push Pull Devices 

3 

Introduction to Push Pull Devices 048 

MPPRL - Rotary and Linear Motion 049 

MPPL - Linear Guided Motion 051 

MPP - Linear Non-guided Motion 053 



Push Pull Devices


048 



 

 

 

 

 

Linear and linear + rotary motion 

High power-to-size ratio 

No bellows - no vacuum thrust 

Manual, motorised or pneumatic 

actuation 


Introduction to the Magnetic Push/Pull range 

The Magnetic Push/Pull range provides linear and 

linear plus rotary motion solutions with up to 

250 mm (10”) stroke. This compact range is 

specifi cally designed for low load applications, such 

as specimen transfer, thermocouple ‘contacting’ 

or manual shutters, for high or ultra high vacuum 

applications. 

Production proven coupling technology 

The Magnetic Push/Pull series benefi ts from a 

high power-to-size ratio, inherited from coupling 

technology pioneered by UHV Design for the 

‘PowerProbe’ sample transfer arms. The result is a 

rigid linear coupling with over 90 N (20 lbf) linear 

thrust and torque in excess of 0.4 Nm (0.29 lbf ft). 

Please see diagrams on this page. 

Utilising UHV Design’s magnetic coupling technology 

removes the need for edge-welded bellows, 

incorporated within traditional ‘push/pull’ designs. 

Their elimination maximises vacuum integrity, 

providing a robust, cost effective solution. Also, 

unlike a bellows-sealed device, the Magnetic Push/ 

Pull is not subject to the thrust due to vacuum, 

resulting in smooth, free-moving operation. 

The range consists of three series with varying 

actuation options such as manual, pneumatic and 

stepper or DC motorised. 

The Magnetic Push/Pull range provides a simple and 

intrinsically safe alternative to bellows push/pull 

systems. 


MPPRL Series - 

Rotary and Linear Motion 

 

 

 

 

 


No bellows, no vacuum thrust 


Position lock facility 


The MPPRL provides linear and continuous rotary 

motion of the vacuum shaft. The range provides a 

simple and intrinsically safe alternative to bellows 

push/pull systems. Linear strokes between 50 mm 

and 250 mm are offered as standard, with special 

strokes available upon request. 

Utilising UHV Design’s magnetic coupling technology, 

the Magnetic Push/Pull removes the need for 

edge-welded bellows ‘stacks’, incorporated within 

traditional ‘push/pull’ designs. Their elimination 

maximises vacuum integrity, providing a robust, 

cost effective solution. Also, unlike a bellows-sealed 

device, the MPPRL is not subject to the thrust 

due to vacuum, resulting in smooth free-moving 

operation. 

Push Pull 

Model 

MPPRL-50 

MPPRL-100 

MPPRL-150 

MPPRL-250 



Flange Stroke ‘A’ Rotation 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

50 mm 

(2” travel) continuous 

100 mm 


150 mm 


250 mm 

(10” 

travel) 

continuous 

049 

Rotary and Linear Motion

Rotary and Linear Motion 

050 


MPPRL Series - Rotary and Linear motion part code generator 

If you have a special requirement that is not offered in the standard partcode structure please contact sales. 

Series Stroke Actuation 

MPPRL - - 

50 H 

100 

150 

250 


Stroke Actuation 

50 50 mm (2” travel) H Manual thimble 

100 100 mm (4” travel) 

150 150 mm (6” travel) 

250 250 mm (10” travel) 

Example partcode: MPPRL-50-H 

MPPRL - Rotary and Linear Push Pull 

50 - 50 mm travel 

H - Manual thimble 


MPPL Series - 

Linear Guided Motion 

 

 

 

 

 




Robust design 

Manual, motorised and pneumatic 

actuation 

Based on the larger Linear PowerProbe series 

(page 58), the MPPL provides internally guided 

linear motion of the vacuum shaft, guaranteeing 

rotation-free motion. Furthermore, the high axial 

thrust coupling produces no torque and so external 

rotation of the thimble does not apply a rotational 

force internally, ensuring smooth motion. 

The range can be actuated manually, pneumatically 

or motorised with DC or stepper motors. Additionally, 

switches can be provided to prevent over-travel and 

to aid system interlocks. 

The MPPL provides a simple and intrinsically safe 

alternative to bellows push/pull systems. Utilising 

UHV Design’s magnetic coupling technology the 

Magnetic Push/Pull removes the need for edgewelded 

bellows ‘stacks’, incorporated within 



cost effective solution. Also, unlike a bellowssealed 

device, the MPPL is not subject to the thrust 

due to vacuum, resulting in smooth, free-moving 

operation. 

Push Pull 

Model 

MPPL-50 

MPPL-100 

MPPL-150 

MPPL-250 



Flange Stroke ‘A’ Bakeout 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

50 mm 

(2” travel) 

100 mm 

(4” travel) 

150 mm 

(6” travel) 

250 mm 

(10” travel) 

250°C 

250°C 

250°C 

250°C 

051 

Linear Guided Motion

Linear Guided Motion 

052 


MPPL Series - Linear guided motion part code generator 


Size Stroke Actuation 

MPPL - - 



50 H 

100 P 

150 ID 

250 IS 


100 100 mm (4” travel) P Pneumatic 

Example partcode: MPPL-50-H 

MPPL - Linear Push Pull 



150 150 mm (6” travel) ID In-line DC motor 

250 250 mm (10” travel) IS In-line Stepper motor 


MPP Series - 

Linear Non-guided Motion 

 

 

 

 

 




Robust design 

Manual, motorised and pneumatic 

actuation options 

MPPs provide linear motion of an ‘unguided’ vacuum 

shaft (free to rotate). This is used to manipulate 

slides or pivot arms where a guided system may 

confl ict with the mechanism. Please note that 

although the vacuum shaft is free to rotate the MPP 

does not provide rotation. 

The range can be actuated manually, pneumatically 

or motorised with DC or stepper motors. Additionally, 

switches can be provided to prevent over-travel and 

to aid system interlocks. 

The MPP range provides a simple and intrinsically 

safe alternative to bellows push/pull systems. 

Utilising UHV Design’s magnetic coupling technology 

the Magnetic Push/Pull removes the need for 

edge-welded bellows ‘stacks’, incorporated within 



cost effective solution. Also, unlike a bellowssealed 

device, the MPP is not subject to the thrust 

due to vacuum, resulting in smooth, free-moving 

operation. 

Push Pull 

Model 

MPP-50 

MPP-100 

MPP-150 

MPP-250 



Flange Stroke ‘A’ Bakeout 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

34 mm OD 

(1.33” OD CF) 

50 mm 

(2” travel) 

100 mm 

(4” travel) 

150 mm 

(6” travel) 

250 mm 

(10” travel) 

250°C 

250°C 

250°C 

250°C 

053 

Linear Non-Guided Motion

Linear Non-Guided Motion 

054 


MPP Series - Linear non-guided motion part code generator 


Series Stroke Actuation 

MPP - - 



50 H 

100 P 

150 ID 

250 IS 


100 100 mm (4” travel) P Pneumatic 

150 150 mm (6” travel) ID In-line DC motor 

Example partcode: MPP-50-H 

MPP - Non-guided Linear Push Pull 



250 250 mm (10” travel) IS In-line Stepper motor 


Section n 4 

Sample Transfer Tools 

Introduction to Professional Transfer Tool Range 056 

Torque, Thrust and Defl ection Graphs 056 

Sample Transfer Tool Selection Criteria 057 

Linear PowerProbe 058 

Linear/Rotary PowerProbe 061 

Axis Selectable PowerProbe 064 

Elevating PowerProbe 066 

Dual Axis PowerProbe 068 

Port Aligners 071 

PowerProbe Hand-off System 072 

Wobble Sticks 074 

Pincer / Gripper Wobble Sticks 076 



Sample Transfer Tools


056 


Figure 1 

Figure 2 

Figure 3 

Reference conversion data: 1 Nm = 0.738 lbf ft 

Note: PowerProbes with a stroke of more 

than 609 mm employ hollow shafts to reduce 

weight and are therefore slightly less stiff. 

Professional Transfer Tools 

 

 

 

 

 

Linear or linear/rotary motion 

Fully bakeable to 250 o C 

High power coupling 

Zero backlash under low load 

Unrivalled performance 

Introduction to the PowerProbe range 

Building on the success of the MagiDrive as 

the premier magnetically coupled UHV rotary 

feedthrough, UHV Design developed a second 

magnetic coupling specifi cally for linear motion. This 

coupling forms the basis of the Professional Transfer 

Tool range, providing linear or combined linear and 

rotary motion within ultra high vacuum. These 

unique probes avoid the limitations of conventional 

designs, offering up to an order of magnitude 

improvements in key aspects of performance. 

Performance power 

Professional Transfer Tools have unrivalled 

transmission performance. The standard linear 

coupling has a break-away force of 180 N (40 

lbf), in comparison to the 26-50 N of our nearest 

competitors. A high power option is also available, 

with a staggering 310 N (69 lbf). 

Figure 1 illustrates the axial stiffness of the coupling 

under load, demonstrating that the standard probe 

defl ects by less than 1 mm for a 98 N (22 lbf) load. 

In terms of rotation, the rotary transmission is 

essentially based upon the MD35 MagiDrive (see 

page 020) delivering 4 Nm (3 lbf ft) break-away 

torque. This is four times the level offered by our 

nearest competitor. The unique rotary coupling 

retains the renowned angular rigidity of the 

MagiDrive series (see Figure 2). 

Figure 3 shows the vertical defl ection at the end of 

a horizontally mounted PowerProbe transfer arm as 

a function of extended length, and with an applied 

weight/load of 10 N. The relationship between load 

and defl ection is approximately linear for typical 

transfer loads. 

The crucial aspect of these performance 

characteristics is not necessarily the load carrying 

capacity, but the stiffness of the coupling. The 

probes are, therefore, ideal for sample transfer 

applications. 

The Professional Transfer Tools are fully bakeable to 

250°C and do not require dismantling. The probes 

are suitable for use between atmospheric pressure 

and ultra high vacuum. 


Selecting your Sample Transfer Tool 

The Range 

There are several sample transfer solutions in the range offering a variety of solutions. 



Item and Code Description Page 

Linear PowerProbe (LPP) Linear motion only 058 

Linear/rotary PowerProbe (PP) Linear and rotary motion 061 

Axis selectable PowerProbe (ASP) Independent linear, rotary, or combined linear and rotary 

motion 

Elevating PowerProbe (EPP) Linear motion with 12 mm of vertical lift of the end 

effector to facilitate sample transfer 

Dual Axis PowerProbe (DAP) Linear motion of the main shaft and rotary motion of a 

second internal through shaft 

A range of port aligners is offered (page 071) to allow fi nal alignment of the sample transfer arm with internal 

system components. Additionally, each of the above can be mounted on a ‘Y Shift’, which lifts and lowers the 

entire sample transfer tool providing a complete sample transfer system (page 072). 

Actuation Options 


H Manual actuation Manual actuation provides the most basic method for motion 

adjustment. Simple movement of the guide thimble actuates both 

linear and linear/rotary motion in one action. 

HR Manual with bakeable 

limit switches 

This option includes a bakeable proximity reed switch for the retracted 

position to aid system interlocks. 

E Extension handle Extension handles enable users to operate the transfer tool from a 

distance whilst maintaining full control of the actuation. This would prove 

useful for applications where the user has to observe an experiment 

in-vacuum whilst moving the transfer tool. This is particularly useful 

for long travel variants. 

SS Stepper motor driven Linear PowerProbes can be stepper motor driven. They are supplied 

with bakeable limit switches at each end of travel along with a ‘home’ 

switch to act as a datum point. The Linear PowerProbe is provided 

within an overall enclosure to shield moving components. 

SD DC motor driven DC motorised Linear PowerProbes are supplied with limit switches (no 

home switch) and an overall enclosure to shield moving parts. 

Manual PowerProbe (H) Stepper motor driven linear PowerProbe (SS) 

064 

066 

068 

057 

Sample Transfer Tools

Linear PowerProbe 

058 


Linear PowerProbe (LPP Series) 

 

 

 

 

 

 

 

Linear motion only 

No external guidance required 

10 x the thrust of conventional probes 


Motorisation options 

Position switch options 

Adjustable stop collar 

The Linear PowerProbe should be selected where 

only linear motion is required and twisting or turning 

of the sample would be undesirable. 

An anti-rotation system is fi tted internally ensuring 

straight, in-line motion, despite any rotation of the 

external drive carriage. This removes the need for 

the unwieldy external linear guide bars used by 

other manufacturers. 

The manual LPP can be fi tted with a bakeable limit 

switch for the retracted position to aid system 

interlocks. The motorised confi guration is fi tted 

with similar switches for both the extended and 

retracted positions. 

Extension handle 

The extension handle option allows the user to 

operate the device from a distance whilst maintaining 

full control of the actuation. This would prove useful 

for applications where the user has to observe an 

experiment in-vacuum whilst applying linear motion 

and is particularly useful for long travel variants. 

Linear Power Probe Low Power Standard High Power 

Mounting fl ange size CF38 70 mm (2.75”) OD 

Linear axial coupling breakaway force 70 N (15.75 lbf) 180 N (40.5 lbf) 310 N (69.75 lbf) 

Sample weight / load capacity 

Maximum recommended internally applied load 

when vertically installed 

Maximum recommended internal load carrying capacity will 

be a function of probe extension, but we recommend not to 

exceed a moment of 50 Nm. 

See Figure 3 on page 056 for defl ection versus load. 

Not suitable for 

vertical mounting 

This is a function of the load acceleration. 

In a static case the load may approach 

the coupling break-away force, 

however, it would be wise to apply a 

sensible safety factor. 

Pressure range Atmosphere to 5x10 -11 mbar 

Bakeout temperature 

Fully bakeable to 250 o C without the removal of any 

components (except for motors) 

Position locking Thumbscrew 


Linear PowerProbe range part code generator 



Series Flange size Linear Stroke Actuation method 

35 - - 

LPPL 250 H 

LPP 304 HR 

LPPH 457 E 

Series Linear stroke Actuation method 

LPPL 

LPP 

LPPH 

Example partcode: LPP35-250-H 

LPP - Linear PowerProbe 

35 - CF38 70 mm OD 



Low Power Linear 

PowerProbe 

Linear 

PowerProbe 

High Power Linear 

PowerProbe 

250 mm (10”) H Manual 

609 SD 

914 SS 

1219 

304 mm (12”) HR Manual with bakeable limit switch for retracted position 

457 mm (18”) E Extension handle 

609 mm (24”) SD 

914 mm (36”) SS 

1219 mm (48”) 

Stroke 250mm 304mm 457mm 609mm 914mm 1219mm 

‘A’ Dimension 396 450 668.4 821 1225 1529.6 

Side mounted 24V DC motor with bakeable limit switches at 

extended and retracted positions 

Side mounted stepper motor with bakeable home and limit 

switches at extended and retracted positions 


059 

Linear PowerProbe

Linear PowerProbe 

060 


Motorised actuation 


PowerProbe (PP Series) 

 

 

 

 

 

 

 

Linear and rotary motion 

10 x the thrust, 4 x torque of 

conventional probes 


Retracted switch options 




The PowerProbe provides both linear and rotary 

motion of the sample, via a single actuator. 

The PowerProbe’s powerful magnetic coupling 

technology combined with its innovative guidance 

system provides performance far in advance of 

conventional probes on the market. 

The high torque characteristics are achieved by 

utilising MagiDrive rotary coupling technology. 

this combined with a high thrust linear coupling 

ensures optimum drive performance on both axes. 

Therefore, actuation of the external drive carriage 

in either axis will result in the precise translation of 

this motion to the sample. 

The Power Probe can be fi tted with a bakeable limit 

switch for the retracted position, aiding system 

interlocks. 



PowerProbe Low Power Standard High Power 

Mounting fl ange size 

CF38 70 mm (2.75”) OD 

CF64 114 mm (4.5”) OD for ‘long travel’ variant 

Linear coupling breakaway force 70 N (15.75 lbf) 180 N (40.5 lbf) 310 N (69.75 lbf) 

Rotary coupling breakaway torque 4 Nm (2.95 lbf ft) 


Maximum recommended internally applied load 

when vertically installed 

Bakeout temperature 





Not suitable for 

vertical mounting 

This is a function of the load 

acceleration. In a static case the load 

may approach the coupling break-away 

force, however, it would be wise to 

apply a sensible safety factor. 

PowerProbes are bakeable to 250 o C without the removal of 

any components. 


061 

PowerProbe

PowerProbe 

062 


PowerProbe range part code generator 

Series Flange Size Linear Stroke Actuation method 

- - 

PPL 35 304 H 

PP 64* 457 HR 

PPH 609 

Example partcode: PP35-304-H 

PP - PowerProbe 

35 - CF38 70 mm OD 



914 

1219 

1524* 

*1524 mm (60”) stroke ‘Long PowerProbes’ are mounted on CF64 114 mm (4.5”) OD fl anges 

Series Linear Stroke Actuation method 

PPL Low power PowerProbe 304 mm (12”) H Manual 

PP PowerProbe 457 mm (18”) HR Manual with bakeable limit switch retracted position 

PPH High power PowerProbe 609 mm (24”) 

914 mm (36”) 

1219 mm (48”) 

1524 mm (60”) 

Stroke 304mm 457mm 609mm 914mm 1219mm 

‘A’ Dimension 515 668.4 821 1225 1529.6 




063 

PowerProbe

Axis Selectable PowerProbe 

064 


Axis Selectable PowerProbe 

(ASPP Series) 

 

 

 

 

 

Linear, rotary, linear & rotary motion 

Maximum user fl exibility 





The Axis-Selectable PowerProbe provides both 

linear and rotary motion, but unlike the standard 

PowerProbe range each axis can be separately 

locked if required. Four separate modes of operation 

are therefore possible: - 

• Linear motion only, rotation locked 

• Rotation only, linear motion locked 

• Linear and rotary motion combined 

• Linear and rotary both locked 

The PowerProbe’s powerful magnetic coupling 

technology combined with its innovative guidance 

system provides performance far in advance of 

conventional probes on the market. The design also 

includes a general position lock to prevent motion 

of either axis. 

Axis Selectable PowerProbe Standard 

Mounting fl ange CF38 70 mm (2.75”) OD 

Linear coupling breakaway force 180 N (40 lbf) 

Rotary coupling breakaway torque 4 Nm (2.95 lbf ft) 


Max recommended internally applied load when 

vertically installed 





This is a function of the load acceleration. In a static case 

the load may approach the coupling break-away force, 

however, it would be wise to apply a sensible safety factor. 


Bakeout temperature Bakeable to 250 o C without the removal of any components 


Rotary position index locking Spring loaded pin 


Axis Selected PowerProbe range part code generator 



Series Size Stroke Actuation method 

ASPP - - H 

Example partcode: ASPP35-304-H 

ASPP - Axis Selectable PowerProbe 

35 - CF38 70 mm OD 



35 - 304 

If you have a special requirement that is not offered in the standard partcode structure please contact 

sales. 

457 

609 

914 

Series Stroke Actuation method 

ASPP Axis Selectable PowerProbe 304 mm (12”) H Manual 

457 mm (18”) 

609 mm (24”) 

914 mm (36”) 

Stroke 304mm 457mm 609mm 914mm 

‘A’ Dimension 558 711 862 1168 

065 

Axis Selectable PowerProbe

Elevating PowerProbe 

066 


Elevating PowerProbe 

(EPP Series) 

 

 

 

 

 

Linear motion with ‘elevation’ 

12 mm lift throughout stroke 

10 x the thrust of conventional probes 



Elevating PowerProbe Standard 

The Elevating PowerProbe transforms conventional 

approaches to sample transfer. In addition to its 

internally guided linear motion, the probe has the 

ability to elevate its end effector throughout its 

stroke, providing 12 mm of lift in the Y axis for 

sample hand-off. 

This PowerProbe variant greatly simplifi es sample 

transfer techniques, providing a single device to 

provide both linear motion for sample introduction 

and the lift/lower motion to collect or hand-off the 

sample. 

Essentially the Elevating PowerProbe provides a 

complete sample handling system in its own right 

removing the need for secondary motion tools. 

This in turn reduces cost and simplifi es the transfer 

process itself. For additional fl exibility, automated 

transfer or increased ‘Y’ motion, see page 072. 


Elevating (lift/lower) motion 12 mm 

Linear coupling breakaway force 180 N (40.5 lbf) 


Maximum recommended internal load carrying capacity will be a 

function of probe extension, but we recommend not to exceed a 

moment of 50 Nm. 



Bakeout temperature Bakeable to 250 o C without the removal of any components. 



Elevating PowerProbe range part code generator 



Series Size Stroke Actuation method 

EPP 35 - - 

Example partcode: EPP35-250-H 

EPP - Elevating PowerProbe 

35 - CF38 70 mm OD 


H - Manual 

250 H 

304 HR 

457 

609 

914 

1219 

If you have a special requirement that is not offered in the standard partcode 

structure please contact sales. 

Series Stroke Actuation method 

EPP Elevating PowerProbe 250 mm 10” H Manual 

304 mm 12” HR 

457 mm 18” 

609 mm 24” 

914 mm 36” 

1219 mm 48” 


‘A’ Dimension 461 515 668.4 821 1225 1529.6 

Manual with bakeable limit switch for retracted 

position. 

067 

Elevating PowerProbe

Dual Axis PowerProbe 

068 


Dual Axis PowerProbe Standard 


Linear coupling breakaway force 180 N (40.5 lbf) 

Rotary coupling breakaway torque (second shaft) 4 Nm (2.95 lbf ft) 


Max recommended internally applied load when 

vertically installed 

Dual Axis PowerProbe (DAP Series) 

Linear primary motion 

Secondary internal rotating shaft 




Retracted switch options 






This is a function of the load acceleration. In a static case 

the load may approach the coupling break-away force, 

however, it would be wise to apply a sensible safety factor. 


Bakeout temperature Bakeable to 250 o C without the removal of any components 


 

 

 

 

 

 

The Dual Axis PowerProbe (DAP) has two concentric 

output shafts providing independent axes of 

motion. The outer tubular shaft has linear only 

motion provided by the linear PowerProbe magnetic 

coupling. The inner shaft has independent rotary 

motion provided by the PowerProbe rotary magnetic 

coupling. The DAP has a single driving thimble 

allowing concurrent actuation of both the linear and 

rotary axes. 

This PowerProbe variant is ideally suited to system 

designers who wish to employ a secondary motion 

to actuate an end effector mechanism, such as a 

sample locking system, for example. 

The Dual Axis PowerProbe benefi ts from our 

powerful magnetic coupling technology providing 

robust, reliable performance. Additionally the 

internal linear guidance system, prevents rotation 

of the main shaft, thus removing the need for 

conventional external guide bars, providing an 

elegant and compact solution to sample transfer. 


Dual Axis PowerProbe range part code generator 



Series Flange Size Linear Stroke Actuation method 

DAP 35 - - 

Example partcode: DAP35-250-H 

DAP - Dual Axis PowerProbe 

35 - CF38 70 mm OD 


H - Manual 

250 H 

304 HR 

457 

609 

914 

1219 

Series Linear Stroke Actuation method 

DAP Dual Axis PowerProbe 250 mm (10”) H Manual 

Dimensional drawing overleaf 

304 mm (12”) HR 

457 mm (18”) 

609 mm (24”) 

914 mm (36”) 

1219 mm (48”) 

Manual with bakeable limit switch for retracted 

position 

069 

Dual Axis PowerProbe

Dual Axis PowerProbe 

070 



‘A’ Dimension 461 515 668.4 821 1225 1529.6 


Port Aligners 

 

 

 

 

Ideal for sample transfer tool 

alignment 

Linear and tilt adjustment 

Rigid construction 

Compact design 

Introduction to Port Aligners 

When combined with a sample transfer tool, a 

port aligner provides the ability to align the tool’s 

position in relation to other system components. 

Typically this would include alignment with a sample 

manipulator or sample carousel, whereby the angle 

of approach is critical to successful transfer. Port 

aligners are also useful for overcoming any port 

errors or general misalignment. 



The port aligner range is fully compatible with UHV Design’s sample transfer tool range (see pages 058-070). 

For further information on the full port aligner range see page 099. 

Port Aligner part code generator 

Series Flange Size Machined Holes 

PA - 

Flange size Bolt holes 

35 H 

64 T 

Example partcode: PA35-T PA - Port Aligner, 35 - CF38 70 mm OD, T - Tapped Holes 

35 CF38 (2.75” OD CF) H Clear bolt holes 

64 CF64 (4.5” OD CF) T M8 Tapped bolt holes 

071 

Port Aligners

Sample Hand-Off System 

072 


Hand-off System part codes 

Series Y Shift Actuation PowerProbe 

Code 

64-38 

64-64 

100-38 

100-64 

LDM - - 

Travelling 

fl ange 

CF38 70 mm 

(2.75” ) OD 

CF64 114 mm 

(4.5”) OD 

CF38 70 mm 

(2.75” ) OD 

CF64 114 mm 

(4.5”) OD 

Y Shift Type 

64 - 38 H 

64 - 64 SS 

100 - 38 SD 

100 - 64 


Y motion 

(lift/lower) 

State UHV Design 

sample transfer tool 

part number you 

wish to use * 

Actuation Type 

CF64 114 mm (4.5”) OD 

H Manual 

+/- 7.5 mm 

CF64 114 mm (4.5”) OD SS 

Side mounted stepper 

motor 

CF100 152 mm (6”) OD 

CF100 152 mm (6”) OD 

Sample Hand-off System 

(Y-shift / PowerProbe) 

 

 

 

 

Combined sample introduction and 

hand-off capability 

Compatible with UHV Design’s 


Production proven design 

Robust construction 

Introduction to the sample hand-off system 

UHV Design have developed a standard system for 

sample and wafer handling which has been used 

for many years in production applications. The 

system combines the linear/ rotary motion of the 

Sample Transfer Tool range (pages 058-070) with 

the ability to lift and lower the sample to enable 

hand-off (transfer). 

This latter motion is produced by the Y-shift range of manipulators (full details on page 105), which provides 

+/- 7.5 mm or +/- 31 mm of ‘Y’ motion. A typical application would be the loading of wafers from a load-lock 

into a process chamber, and then lowering the wafer onto a manipulator for processing, as shown overleaf. 

Customised transfer forks are available on request. 

The Y shift design includes two parallel fl anges. One remains fi xed, whilst the other provides the movement. 

A high quality, supple, edge-welded bellows spans the fl anges to accommodate the required motion while 

ensuring an all-metal vacuum enclosure. The device works by adjusting the position of the travelling fl ange, 

and therefore the probe and sample in relation to the fi xed system-mounting fl ange. Positioning of the 

travelling fl ange is controlled through an external leadscrew which can be driven either manually or motorised. 

A kinematically designed mechanism ensures smooth and precise motion. 

Example partcode: 

LDM64-38-H-PP35-250-H 

LDM - Y Shift, 

64/38 - CF38 travelling fl ange, CF64 

mounting fl ange, 

H - Manual actuation, fi tted with a: 

PP35-250-H - PowerProbe. 

+/- 31 mm 


* See pages 58 and 61 for details of compatible PowerProbes 




073 

Sample Hand-Off System

Wobble Sticks 

074 


Specifi cation / 

Part Number 

Linear travel 

Linear break-away 

force 

WSL- series 

150 mm or 

250 mm 

WSLR- series 

95 N (21.38 lbf) 

Rotation NA Continuous 

Angular break-away 

torque 

NA 

Tilt +/- 15 o 

Suggested maximum 

sample mass 

Maximum bakeout 

temperature 

260 g 

250 o C 

0.45 Nm 

(0.33 lbf ft) 

Wobble Sticks 

 

 

 

 

3 or 4 axes of movement 

Magnetically coupled design 


Modular concept 

The Wobble Stick is one of the simplest manipulation 

tools available, translating hand movements, with 

defi ned freedom, through a vacuum enclosure. 

The Wobble Stick series is based upon UHV Design’s 

larger PowerProbe technology (see pages 56-70), 

which provides high power linear and rotary motion 

through a magnetic coupling. The Wobble Stick 

range includes two series: - 

• WSL series, for linear motion with tilt 

• WSLR series, for linear/rotary motion with tilt 

Design concept 

The UHV Design Wobble Stick is a modular concept. 

The basic ‘WSL’ version provides lateral/tilt 

movement through a robust hydroformed bellows 

adaptor and linear push/pull motion through a 

magnetic coupling. In addition, the ‘WSLR’ series 

also provides continuous rotation, totalling fouraxes 

of movement. 

Magnetic coupling 

The Wobble Sticks benefi t from UHV Design’s high 

power magnetic coupling technology. The coupling 

eliminates the need for long egde-welded bellows 

‘stacks’, typically employed with conventional 

Wobble Stick designs. This reduces the risk of leaks 

and in doing so, improves reliability for sensitive 

applications. Also, unlike a bellows-sealed device, 

the Wobble Stick is not subject to the thrust due 

to vacuum, resulting in smooth, free-moving 

operation. 

Gripper and Pincer end effectors 

UHV Design can also offer both pincer and gripper 

end effectors for sample stub handling. In fact UHV 

Design Wobble Sticks can be supplied with end 

effectors to suit many standard surface science 

applications. Please see page 076 for more details 

on this option. 


Wobble Stick range part code generator 

Series Linear travel (stroke) Actuation 

WSL 150 

WSLR 250 

- - H 

Series Linear travel Actuation 

WSL Linear and tilt motion 150 mm (6”) H Manual 

WSLR Linear, rotary and tilt motion 250 mm (10”) 

WSL Series 

WSLR Series 



Example partcode: WSL-150-H 

WSL - Linear and tilt motion 


H - Manual actuation 

075 

Wobble Sticks

Wobble Sticks 

076 


Specifi cation / 

Part Number 

Linear Travel 

WSLRG 

WSLRP 

150mm or 250mm 

(6” or 10”) 

End effector type Gripper Pincer 

Linear break-away force 95 N (21.38 lbf) 

Rotation Continuous 

Angular break-away torque 

0.45 Nm 

(0.33 lbf ft) 

Tilt +/- 15 o 

Suggested maximum sample 

mass 


temperature 

260 g 

250 o C 

Pincer Style Wobble Sticks 

 

 

 

 

 

3 or 4 axes of movement in addition 

to grip 

Gripper or Pincer shaft terminations 

Magnetically coupled design 


Modular concept 

The Wobble Stick is one of the simplest manipulation 

tools available, translating hand movements, with 

defi ned freedom, through a vacuum enclosure. 

Gripper and Pincer end effectors 

UHV Design offers both pincer and gripper end 

effectors for sample stub handling. 

The gripper version is primarily designed as a 

retrofi t for existing ESCALAB sample stub handling 

systems, but has a variety of applications. 

The Pincer should be considered as a universal 

sample grip system suitable for the majority of 

small sample handling applications. 

Design concept 

The UHV Design Wobble Stick is a modular concept. 

The basic design provides lateral/tilt movement 

through a robust hydroformed bellows adaptor 

with linear push/pull motion and rotation through a 

powerful magnetic coupling. 

The fourth axis of motion, the gripper or pincer 

element of the Wobble Stick, is actuated through 

the rotary function. 

Magnetic coupling 

The Wobble Sticks benefi t from UHV Design’s high 

power magnetic coupling technology. The coupling 

eliminates the need for long edge-welded bellows 

‘stacks’, typically employed with conventional 

wobble stick designs. This reduces the risk of leaks 

and in doing so, improves reliability for sensitive 

applications. Also the Wobble Stick is not subject 

to thrust due to vacuum, resulting in smooth, freemoving 

motion. 




Wobble Stick with gripper/pincer range part code generator 

Series Linear travel (stroke) Actuation 

WSLRP 150 

WSLRG 250 

- - H 

Series Linear travel Actuation 

WSLRP Linear, rotary and tilt motion with pincer 150 mm (6”) H Manual 

WSLRG Linear, rotary and tilt motion with ESCA gripper 250 mm (10”) 

Example partcode: WSLRP-150-H 

WSLRP - Linear, rotary and tilt motion with pincer 



077 

Wobble Sticks

Wobble Sticks 

078 


Gripper style Wobble stick with Sample stub 


Section n 5 

Linear Motion and Alignment 

Selecting your Linear Shift Mechanism 080 

Standard Series (LSM Series) 083 

Long Travel Series (LSML Series) 088 

Compact Series (CLSM Series) 091 

Linear Motion with Position Alignment 

Tilting Series (LSMT Series) 094 

Lateral Offset Series (LSMX) 097 

Port Aligners 100 

Linear Motion & Alignment 


Linear Motion & Alignment

Selecting your Linear Shift 

080 


Code Linear Shift Mechanism 

Series 

Linear Shift Mechanism selection 

Introduction to Linear Shift Mechanisms 

Linear Shift Mechanisms (linear translators) provide 

linear motion along the port axis (Z). Typical 

applications include the positioning of beamline 

fi lters, adjustment of sputter sources and deposition 

stages through to production style applications. 

Bakeable to 250 o C, the range is supplied on CF 

fl anges and provides true UHV performance. 

The bellows sealed Linear Shift Mechanisms provide 

smooth, precise motion via a kinematically designed 

external leadscrew driven mechanism, complete 

with anti-rotation and anti-defl ection systems. This 

design ensures smooth and precise motion along 

the Z axis. The range has a high load capability 

ensured through its rigid construction. 

The bellows are manufactured from 316L stainless 

steel as standard and offer a minimum design life 

of 10,000 cycles. Customised units are available 

offering a design life of up to 1 million cycles. 

Product selection 

The Linear Shift Mechanism range is possibly the 

largest of its type on the market with over 500 

variations. To simplify selection, the range is divided 

into fi ve standard series to suit the majority of 

applications and includes strokes of up to 1 metre. 

It is also possible to adjust the axis of motion along 

the X axis and to ‘tilt’ the travelling fl ange for fi nal 

alignment. The following section contains detailed 

specifi cations, options and dimensional drawings 

for each. A summary of each is included below as a 

quick reference guide. 

Summary Page 

LSM Standard This is the most comprehensive series, offering a multitude 

of fl ange sizes, strokes up to 350 mm (14 “) and actuation 

options. 

LSML Long travel The Long travel series includes an upgraded structure enabling 

up to 1 metre (39”) of stroke. 

CLSM Compact The compact series has the shortest fl ange-to-fl ange-face 

dimension. The series is offered with a variety of fl ange sizes 

and strokes. 

LSMT With tilt for fi nal alignment The ‘tilt’ series provides the ability to tilt the travelling fl ange 

by +/-2 o to allow fi nal adjustment of the driven load. 

LSMX With ‘X’ travel for fi nal 

alignment 

This LSMX series provides the ability to adjust the lateral 

position of the travelling fl ange along the X axis (side-to-side) 

by +/- 5 mm to allow fi nal alignment of the driven load. 

www.uhvdesign.com sales@uhvdesign.com Tel:+44(0)1323 811188 

083 

087 

090 

093 

096

Linear Shift Mechanism selection 

Code Actuation method Description 



Actuation 

Linear Shift Mechanisms can be actuated manually, pneumatically or via a DC or stepper motor. 

Manual Actuation 


H Manual A manual handwheel provides the most basic method of actuation. 

GH Manual with 

geared-handwheel 

Pneumatic Actuation 

P Pneumatic Pneumatic actuators provide a simple solution to automated 

operation. 

Motorisation 

A selection of motors are available to meet the load, speed and positioning requirements of each application. 

All motorised linear shift mechanisms are supplied with bakeable limit switches. UHV Design offer both DC and 

stepper motor controllers, which are included in section 13. Motor mounting assemblies are easily removed 

for bakeout. 


Large bore Linear Shift Mechanisms are fi tted with a geared 

handwheel to provide suffi cient mechanical advantage to overcome 

the additional thrust due to vacuum. 

SD DC motorised A 12 or 24V DC motor provides the motion and is mounted to the side 

of the LSM. Special in-line versions are available upon request. 

SS Stepper motor driven A stepper motor provides the motion and is mounted to the side of the 

LSM. Special in-line versions are available on request. 

UP Wiring upgrade When purchasing a Linear Shift Mechanism for use with UHV Design 

controllers (see page 175), an additional integration upgrade is 

available. The upgrade includes a bakeable socket connector, mounted 

to the frame, to which the limit switches are pre-wired. In the case of 

stepper motor driven products, an extra home switch is also provided. 

The motor lead terminates with a connector compliant with UHV 

Design’s controllers. 

081 

Selecting your Linear Shift

Selecting your Linear Shift 

082 


Position Readout/Feedback 

Linear Shift Mechanisms are offered with a variety of position readout/feedback solutions. 


ES Engraved shaft Linear Shift Mechanisms can be fi tted with a scale with 1 mm 

increments for visual positioning. 

DLA Digital linear scale Digital scale displays are fi tted to Linear Shift Mechanisms via a 

kinematic mount ensuring precise and repeatable location, which is 

critical for accurate repositioning after bakeout. The scale features 

large, easy to read characters that can be switched between metric and 

imperial units. The readout has a resolution of 10 microns (0.01mm). 

Users can set the ‘Origin’ at any position of its stroke, from which it 

will provide a plus/minus scale in the units selected. The ‘Origin’ is 

retained in its memory until re-set by the user, even when switched 

off. A second temporary ‘Zero’ facility is offered to enable one-off 

measurements to take place, which resets to the ‘Origin’ setting when 

turned off. 

LP Linear potentiometer The Linear potentiometer option is selected where position feedback 

of the Linear Shift Mechanism travelling fl ange is required for closed 

loop control applications. The LP provides resolution and repeatability 

of 2 microns. 

The LP has a conductive resistive track and precious metal wiper that 

can be interfaced to a number of analogue devices such as a PLC or 

motor controller. 

The LP is attached to the LSM frame with a kinematic mount enabling 

it to be removed if bakeout is required. 

Digital Linear Scale (DLA) Linear Potentiometer (LP) 


LSM Linear Shift Mechanism Series 

 

 

 

 

 

Smooth kinematic motion 

Reliable, rigid construction 

Manual, motorised or pneumatic 

actuation 


Demountable bellows assembly 

The LSM is the most comprehensive series in the 

range, offering the largest number of fl ange, stroke 

and actuation options. All fl anges within the series 

are supplied with tapped bolt holes as standard. 

Special variants with clear holes on the base fl ange 

can be provided for most sizes, these are labelled 

HLSM in the partcodes and specifi cation tables. 

The series can be actuated via a manual handwheel, 

pneumatic cylinder, DC motor or stepper motor. 

Suitable DC and stepper motor controllers can be 

found in section 13. Each LSM can also be fi tted 

with the new digital linear scale, offering visual 

position indication with 10 micron resolution. See 

previous page for more information. 

Model Flange information 

LSM 

Flange code Flange size 

General Specifi cation 

Bolt holes 



Clear bore 

(mm) 


10 CF10 (1” OD) M3 Tapped 8 250 o C 

16 CF16 (1.33” OD) M4 Tapped 16 250 o C 

38 CF38 (2.75” OD) M6 Tapped* 38 250 o C 

64 CF64 (4.5” OD) M8 Tapped* 65 250 o C 

100 CF100 (6” OD) M8 Tapped* 102 250 o C 

150 CF150 (8” OD) M8 Tapped* 149 250 o C 

* Clear bolt holes on base fl ange available (HLSM option). 

083 

Linear Shift Mechanisms

Linear Shift Mechanisms 

084 


LSM range part code generator 

Optional extras 

Model Stroke (mm) Actuator Scale Wiring upgrade 

- - - - 

LSM10 25 H 

- - - - 

LSM16 25 H ES 

50 P 

100 

- - - - 

LSM38* 25 H ES UP 

LSM64* 50 P DLA 

LSM100* 75 SS LP 

LSM150* 100 SD 

150 

175 

200 

250 

300 

350 

* Add an ‘H’ to the beginning of the part number to order clear boltholes in the base fl ange rather than the 

standard tapped boltholes. This is not available on all sizes. 

For a full explanation of the partcodes please see pages 081 and 082. If you have a special requirement that is 

not offered in the standard partcode structure please contact sales. 

Actuation options Scale options Wiring upgrade 

H Manual handwheel ES Engraved shaft UP 

P Pneumatic DLA Digital linear scale 

SS Side mounted Stepper motor LP Linear potentiometer 


Example partcode: LSM38-25-H 

LSM - Linear shift mechanism 

38 - CF38 70 mm OD fl ange 



Wiring upgrade with switches 

for connection to controller 


Dimensional data 

LSM10 



A B C D E F G H J K 

LSM10-25 77.3 52.3 95 130.4 25.4 8 - - 60.7 27 

LSM16 

LSM16-25 55 30 90 82.3 34 16 - - 78 25.8 

LSM16-50 94.2 44.2 129 82.3 34 16 - - 78 25.8 

LSM38 

Manual actuation Motorised actuation 

LSM38-25 98.7 73.7 180 155.2 75 38 72 257 163.5 39 

LSM38-50 123.7 73.7 204 155.2 75 38 72 257 163.5 39 

LSM38-75 162 87 243 155.2 75 38 72 257 163.5 39 

LSM38-100 187 87 268 155.2 75 38 72 257 163.5 39 

LSM38-150 250 100 331 155.2 75 38 72 257 163.5 39 

LSM38-175 281 106 363 155.2 75 38 72 257 163.5 39 

LSM38-200 312.5 112.5 394 155.2 75 38 72 257 163.5 39 

LSM38-250 377.5 127.5 459 155.2 75 38 72 257 163.5 39 

LSM38-300 446.5 146.5 531 155.2 75 38 72 257 163.5 39 

LSM38-350 509 159 594 155.2 75 38 72 257 163.5 39 

HLSM38 

HLSM38-25 98.7 73.7 180 155.2 75 38 72 257 163.5 39 

HLSM38-50 131.7 81.7 212 155.2 75 38 72 257 163.5 39 

HLSM38-75 170 95 251 155.2 75 38 72 257 163.5 39 

HLSM38-100 194.5 94.5 275.5 155.2 75 38 72 257 163.5 39 

HLSM38-150 260 110 341 155.2 75 38 72 257 163.5 39 

HLSM38-175 291 116 373 155.2 75 38 72 257 163.5 39 

HLSM38-200 322.5 122.5 404 155.2 75 38 72 257 163.5 39 

HLSM38-250 387.5 137.5 469 155.2 75 38 72 257 163.5 39 

HLSM38-300 456.5 156.5 541 155.2 75 38 72 257 163.5 39 

HLSM38-350 519.5 169.5 604 155.2 75 38 72 257 163.5 39 

This table lists the most common sizes and should not be considered exhaustive 

Continued overleaf 

085 


Linear Shift Mechanisms 

086 



Dimension A B C D E F G H J K 

LSM64 

LSM64-25 136 111 232 203 122.5 65 72 297 212 64 

LSM64-50 161 111 258 203 122.5 65 72 297 212 64 

LSM64-75 186 111 283 203 122.5 65 72 297 212 64 

LSM64-100 211 111 308 203 122.5 65 72 297 212 64 

LSM64-150 261 111 358 203 122.5 65 72 297 212 64 

LSM64-200 317 117 415 203 122.5 65 72 297 212 64 

LSM64-250 378 118 475 203 122.5 65 72 297 212 64 

LSM64-300 448 118 535 203 122.5 65 72 297 212 64 

HLSM64 

HLSM64-25 136 111 232 20.3 122.5 63 72 297 212 64 

HLSM64-50 161 111 258 20.3 122.5 63 72 297 212 64 

HLSM64-75 186 111 283 20.3 122.5 63 72 297 212 64 

HLSM64-100 211 111 308 20.3 122.5 63 72 297 212 64 

HLSM64-150 274 124 370 20.3 122.5 63 72 297 212 64 

HLSM64-200 336 136 433 20.3 122.5 63 72 297 212 64 

HLSM64-250 404 154 500 20.3 122.5 63 72 297 212 64 

HLSM64-300 467.3 167.3 564 20.3 122.5 63 72 297 212 64 

LSM100 

LSM100-25 175 150 289 266.5 177 102 105 376 273 92 

LSM100-50 200 150 314 266.5 177 102 105 376 273 92 

LSM100-75 225 150 339 266.5 177 102 105 376 273 92 

LSM100-100 250 150 364 266.5 177 102 105 376 273 92 

LSM100-150 300 150 414 266.5 177 102 105 376 273 92 

LSM100-200 350 150 464 266.5 177 102 105 376 273 92 





HLSM100 

HLSM100-25 175 150 289 266.5 177 102 105 376 273 92 

HLSM100-50 200 150 314 266.5 177 102 105 376 273 92 

HLSM100-75 225 150 339 266.5 177 102 105 376 273 92 

HLSM100-100 250 150 364 266.5 177 102 105 376 273 92 

HLSM100-150 300 150 414 266.5 177 102 105 376 273 92 

HLSM100-200 358 150 472 266.5 177 102 105 376 273 92 

LSM150 

LSM150-25 176 151 288 305 229 149 104 414 313 105 

LSM150-50 201 151 317 305 229 149 104 414 313 105 

LSM150-75 226 151 338 305 229 149 104 414 313 105 

LSM150-100 251 151 367 305 229 149 104 414 313 105 

LSM150-150 276 151 388 305 229 149 104 414 313 105 

LSM150-200 365 165 479 305 229 149 104 414 313 105 

HLSM150 

HLSM150-25 176 151 288 305 229 149 104 414 313 105 

HLSM150-50 201 151 317 305 229 149 104 414 313 105 

HLSM150-75 226 151 338 305 229 149 104 414 313 105 

HLSM150-100 251 151 367 305 229 149 104 414 313 105 

HLSM150-150 276 151 388 305 229 149 104 414 313 105 

HLSM150-200 372 172 486 305 229 149 104 414 313 105 

087 


Long Travel Series 

088 


LSML Long Travel Linear Shift 

Mechanism Series 

 

 

 

 

 

 

Up to 1000 mm (39”) stroke 



‘Plug and play’ production solutions 

Manual and motorised actuation 


The LSML long travel series of Linear Shift 

Mechanisms, provides strokes of up to 1000mm 

(39”). The series incorporates an upgraded 

structure, to maintain performance throughout 

their stroke. LSMLs can also be selected for shorter 

strokes, where ultimate stability is required. 

The LSML is the most sophisticated product in 

the range offering a complete solution to linear 

motion. 

Actuation methods 


pneumatic cylinder, DC motor or stepper motor 

(see page 081 for a full explanation of actuation 

options). 

Motorised LSMLs are fi tted with bakeable limit and 

home switches, pre-wired to a single bakeable 

connector mounted on the frame. LSMLs are 

compatible with UHV Design’s DC and Stepper 

motor controller range on page 175. 

Each LSML can be supplied with a digital linear 

scale, offering visual position indication with 10 

micron resolution. Please see page 082 for more 

information. 

Part code 

LSML 

HLSML 


Flange size Bolt holes 

Flange code Flange type 

Travelling 

fl ange 

Base fl ange 

Clear 

bore 

mm 

Maximum 

bakeout 

38 CF38 70 mm (2.75”) OD M6 tapped M6 tapped 38 250 o C 

64 CF64 114 mm (4.5”) OD M8 tapped M8 tapped 65 250 o C 

38 CF38 70 mm (2.75”) OD M6 tapped Clear holes 38 250 o C 

64 CF64 114 mm (4.5”) OD M8 tapped Clear holes 65 250 o C 


LSML range part code generator 



Size Stroke (mm) Actuator Scale Wiring Upgrade 

- - - - 

LSML38 200 H ES UP 

LSML64 300 SD DLA 

HLSML38 400 SS 

HLSML64 500 P 

600 

800 

1000 

‘H’LSML version indicates clear holes on the 

mounting fl ange 

Actuation options Scale options Wiring upgrade 

H Manual handwheel ES Engraved shaft UP 

SD Side mounted DC motor DLA Digital linear scale 

SS Side mounted Stepper motor 

P Pneumatic cylinder 

Example partcode: LSML38-200-H 

LSML - Long Travel Linear Shift Mechanism 




For a full explanation of the partcodes please see pages 081 and 082. If you have a special requirement that is 

not offered in the standard partcode structure please contact sales. 

Wiring upgrade with switches 

for connection to controller 

089 

Long Travel Series

Long Travel Series 

090 


Manual / Motorised actuation 


LSML38 

LSML38-200 322 122 402 161 102.5 38 72 259 163.5 39 

LSML38-300 452.5 152.5 534 161 102.5 38 72 259 163.5 39 

LSML38-400 576 176 657 161 102.5 38 72 259 163.5 39 

LSML38-500 707 207 788 161 102.5 38 72 259 163.5 39 

HLSML38 

HLSML38-200 335 135 416 161 102.5 38 72 259 163.5 39 

HLSML38-300 462.5 162.5 533 161 102.5 38 72 259 163.5 39 

HLSML38-400 586 186 667 161 102.5 38 72 259 163.5 39 

HLSML38-500 717 217 798 161 102.5 38 72 259 163.5 39 

LSML64 

LSML64-200 311 111 399 204 161 65 41.2 314 163.5 64 

LSML64-300 446 146 534 204 161 65 41.2 314 163.5 64 

LSML64-400 592 192 663 204 161 65 41.2 314 163.5 64 

LSML64-500 700 200 771 204 161 65 41.2 314 163.5 64 

LSML64-600 860 260 1009 204 161 65 41.2 314 163.5 64 

LSML64-800 1111 311 1181 204 161 65 41.2 314 163.5 64 

HLSML64 

HLSML64-200 325 125 413 204 161 65 41.2 314 163.5 64 

HLSML64-300 459 159 547 204 161 65 41.2 314 163.5 64 

HLSML64-400 602 202 673 204 161 65 41.2 314 163.5 64 

HLSML64-500 700 200 771 204 161 65 41.2 314 163.5 64 

HLSML64-600 860 260 1009 204 161 65 41.2 314 163.5 64 

HLSML64-800 1111 311 1181 204 161 65 41.2 314 163.5 64 


CLSM Compact Linear Shift 

Mechanism Series 

 

 

 

 

 

Compact fl ange-to-fl ange 

dimension 



Manual and motorised actuation 


The CLSM compact series offers the shortest fl angeto-fl 

ange-face dimension in the range. As such the 

series is offered with limited fl ange and stroke 

options. 


pneumatic cylinder, DC motor or Stepper motor 

(see page 081 for a full explanation of actuation 

options). 

Each CLSM can be supplied with a digital linear 

scale, offering visual position indication with 10 

micron resolution, as described on page 082. 


CLSM 



Bolt holes 



Clear bore 

(mm) 




091 

Compact Linear Shift

Compact Linear Shift 

092 


CLSM Range part code generator 

Size Stroke Actuator Scale Wiring upgrade 

Stroke Actuation options Scale options Optional wiring upgrade 

25 25 mm (1”) H Manual handwheel ES Engraved shaft UP Wiring upgrade with 

50 50 mm (2”) SD Side mounted DC motor DLA Digital linear scale 

75 75 mm (3”) SS 

- - - - 

CLSM38 25 H ES UP 

CLSM64 50 SD DLA 

75 SS 

100 P 

Example partcode: CLSM38-25-H 

CLSM - Compact Linear Shift Mechanism 




If you have a special requirement that is not offered in the standard partcode structure please don’t hesitate to 

contact sales. 

For a full explanation of partcodes please see page 081. 

Side mounted Stepper 

motor 

100 100 mm (4”) P Pneumatic cylinder 

switches for con- 

nection to controller 




CLSM38 




CLSM38-25 63 38 173 142 75 39 102 247 152 39 

CLSM38-50 92 42 202 142 75 39 102 247 152 39 

CLSM38-75 125 50 235 142 75 39 102 247 152 39 

CLSM38-100 163 63 273 142 75 39 102 247 152 39 

CLSML64 


CLSM64-25 106 81 221 206 122.5 65 73 300 215 67 

CLSM64-50 131 81 221 206 122.5 65 73 300 215 67 

CLSM64-75 156 81 221 206 122.5 65 73 300 215 67 

CLSM64-100 188 88 221 206 122.5 65 73 300 215 67 

093 

Compact Linear Shift

Linear Shift Tilt Series 

094 



LSMT 


LSMT Linear Shift Mechanism 

with Tilt Series 

 

 

 

 

 


+/- 2 o tilt for fi nal alignment 



Manual, pneumatic and motorised 

actuation options 


The LSMT is based on the standard LSM series with 

the additional facility to ‘tilt’ the moving fl ange by 

+/- 2 o for fi nal alignment, acting as an integrated 

‘port aligner’. Adjustment is actuated via four 

threaded support shafts. All fl anges in the series 

are supplied with tapped bolt holes as standard. 

The series can be actuated with a manual handwheel, 

pneumatic cylinder, DC motor or stepper motor. For 

a full explanation of the options please see page 

081. 

UHV Design’s full range of DC and Stepper motor 

controllers can be found on page 175. 

Bolt holes 

Travelling 

fl ange tilt 

Clear bore 

(mm) 

Maximum 

bakeout 

38 CF38 70 mm (2.75”) OD M6 Tapped +/-2 o 38 250 o C 

64 CF64 114 mm (4.5”) OD M8 Tapped +/-2 o 65 250 o C 


LSMT range part code generator 




LSMT38 - - - - 

Stroke Actuation options Scale options Optional wiring upgrade 

25 25 mm (1”) H Manual handwheel ES Engraved shaft UP 

50 50 mm (2”) P Pneumatic DLA Digital linear scale 

75 75 mm (3”) SS 

100 100 mm (4”) SD 

50 H ES UP 

75 P DLA 

100 SS 

LSMT64 - - - - 

Side mounted 

stepper motor 

Side mounted DC 

motor 

SD 

25 H ES UP 

50 P DLA 

100 SS 

Example partcode: LSMT38-50-H 

LSMT - Linear Shift Mechanism with Tilt 




SD 


For a full explanation of the partcodes please see page 081 

Wiring upgrade 

with switches for 

connection to UHV 

Design’s controller 

095 

Linear Shift Tilt Series

Linear Shift Tilt Series 

096 




LSMT38 


LSMT38-50 142 92 213 155 75 38 89 259 165 39 

LSMT38-100 199.5 99.5 270.5 155 75 38 89 259 165 39 

LSMT64 

LSMT64-25 180.5 130.5 307 203 122.5 65 55.5 298 213 64 

LSMT64-50 230.5 130.5 307 203 122.5 65 55.5 298 213 64 


Linear Shift Mechanism with X 

Travel Series 

 

 

 

 

 

+/-5 mm lateral (X) motion 



Manual, pneumatic or motorised 

actuation 


The LSMX is based on the standard LSM series. 

Where the LSMX version differs, is that in addition 

to the Z motion, the user has the option to manually 

adjust the position of the moving fl ange laterally by 

+/- 5 mm. This is useful if the customer needs the 

fl exibility to make lateral alignment adjustments to 

the linear shift without altering the travelling fl ange 

angle. A typical application would be the alignment 

of a sample holder with a sample transfer arm 

within the system. 

The series can be actuated with a manual handwheel, 

pneumatic cylinder, DC motor or stepper motor. UHV 

Design’s complete range of DC and stepper motor 

controllers can be found on page 175. 

The ‘X’ motion is actuated via a manual handwheel, 

which adjusts the travelling fl ange laterally. 


LSMX 



Bolt holes 



Travelling 

fl ange 

offset 

(X motion) 

Clear 

bore 

(mm) 

Maximum 

bakeout 

38 CF38 70 mm (2.75”) OD M6 Tapped +/-5 mm 38 250 o C 

64 CF64 114 mm (4.5”) OD M8 Tapped +/-5 mm 65 250 o C 

100 CF100 152 mm (6”) OD M8 Tapped +/-5 mm 102 250 o C 

097 

Linear Shift X Travel Series

Linear Shift X Travel Series 

098 


LSMX range part code generator 

Stroke Actuation options Scale options Wiring upgrade 

50 50 mm (2”) H Manual handwheel ES Engraved shaft UP Wiring upgrade 

100 100 mm (4”) P Pneumatic 



Options 


- - - - 

LSMX38 50 H ES UP 

LSMX64 100 P 

LSMX100 SD 

Example partcode: LSMX38-50-H 

LSMX - Linear Shift Mechanism with X travel 




SS 

If you have a special requirement that is not offered in the standard partcode structure please don’t hesitate 

to contact sales. 

For a full explanation of partcodes see page 081. 

for UHV 

Design’s motor 

controller 



LSMX38 






LSMX38-50 143 93 205 155 105 26 52 257 183 39 

LSMX38-100 206 106 267 155 105 26 52 257 183 39 

Larger bore sizes available on request please contact sales. 

099 

Linear Shift X Travel Series

Port Aligners 

100 


Port Aligners 

 

 

 


Linear and tilt alignment 

Rigid construction 

CF35 (2.75” OD) to CF200 (10” OD) 

fl anged range 

Introduction to Port Aligners 

The Port Aligner range enables the distance and 

angular relationship between two fl anges to be 

adjusted. The design consists of two parallel fl anges, 

one of which remains fi xed, whilst the second may 

be adjusted with respect to the fi rst. The fi xed 

fl ange supports three equi-spaced threaded shafts. 

Alignment of the travelling fl ange is achieved by 

adjusting the fl oating mounts attached to each 

threaded shaft. The range can be mounted in any 

orientation and is bakeable to 250 o C. 

A high quality, fl exible, 316L edge welded bellows, 

spans the fl anges to accommodate the required 

motion while ensuring an all-metal vacuum 

enclosure. 

Port Aligner range 

The range consists of fi ve series, which can be 

supplied with either tapped or clear bolt holes on 

the fl anges. Each range provides +/-5 mm axial 

adjustment, with +/- 3 o angular tilt. Essentially, this 

is a simple device that once adjusted, provides a 

stable platform. 

Part no. PA-35H PA-35T PA-64H PA-64T PA-100H PA-100T PA-150H PA-150T PA-200H PA-200T 

Flange Size 

Flange bolt 

hole type 

Axial 

adjustment 

CF38 

(2.75” OD CF) 

Through 

holes 

Tapped 

M6 

CF64 

(4.5” OD CF) 

Through 

holes 

Tapped 

M8 

CF100 

(6” OD CF) 

Through 

holes 

+/- 5 mm 

Tilt +/- 3 o 

Bellows clear 

bore 

Bakeout 

temperature 

Tapped 

M8 

CF150 

(8” OD CF) 

Through 

holes 

Tapped 

M16 

CF200 

(10” OD CF) 

Through 

holes 

Tapped 

M16 

38 mm 65 mm 102 mm 127 mm* 127 - 200 mm* 

250 o C 

* Options available - Please contact sales for clear bore details 


Port Aligner range part code generator 

Series Flange Size Boltholes 

PA - 

Example partcode: PA35-H 

PA - Port Aligner 


H - Clear holes 



35 H 

64 T 

100 

150 

200 

Flange size Boltholes 

35 CF38 (2.75”) OD H Clear holes 

64 CF64 (4.5” OD CF) T Tapped holes 

100 CF100 (6” OD CF) 

150 CF150 (8” OD CF) 

200 CF200 (10” OD CF) 

If you have a special requirement that is not offered in the standard 

partcode structure please don’t hesitate to contact sales. 

101 

Port Aligners

Port Aligners 

102 


Port aligner dimensions 


A B C D E F G 

PA35 59 73.4 106 20 M8 38 88 

PA64 75 93 166 26 M12 65 140 

PA100 90 108 206 26 M12 102 180 

PA150 100 125 279.4 45 M16 127 238.4 

PA200 100 125 329.4 44 M16 127 290 


Section n 6 

Y, XY, XYZ and Sample Manipulation 

Introduction to Y, XY and XYZ Stages 104 

Y Shifts 105 

XY MultiBase Manipulators 108 

XY MultiBase Manipulators with Rotatable Axis 111 

XYZ MultiStage Manipulators 113 

Complete XYZ Sample Manipulators 

Y, XY, XYZ and Sample Manipulators 

MultiCentre Range 116 

XYZ Liquid Helium Cryostats 123 

ST-400 Continuous Flow Cryostat 124 

Helitran Continuous Flow Cryostat 125 

Displex Closed Cycle Cryostat 126 


Y, XY, XYZ and Sample Manipulators


104 


Introduction to Multi-axis 

Manipulation 

For applications requiring multiple axes of 

translation, tilt, rotation or perhaps sample heating/ 

cooling and transfer, UHV Design can compound their 

various modular components to build sophisticated 

manipulators with up to six axes of independent 

motion (example shown to the right). 

Typical applications might include electron 

spectroscopy experiments for surface science, 

laser / optical probes, beam line manipulators and 

various deposition techniques. The various building 

blocks have been preconfi gured into commonly used 

instruments and are delineated for convenience in 

the table below, each of which are then detailed in 

the following section. 

If your application is primarily deposition, requiring 

heating and rotation without any X or Y movement, 

then the EpiCentre range of products may be more 

appropriate (see page 127). 

NB: It is the UHV Design convention to nominate Z 

as being along the port axis 

Axes of motion Description Page No. 

Y Y-SHIFT - provides accurate, repeatable axial alignment along 

the Y-axis. 

X-Y MULTIBASE - provides XY translation with a multitude of fl ange 

sizes, clear bores and actuation methods. 

X-Y-Z MULTISTAGE - a range of XYZ stages based upon the combined 

use of the XY MultiBase (above) and the Linear Shift Mechanism 

range of Z translators. 

X-Y-Z--- By combining the XYZ MULTISTAGE (above) with the MagiDrive 

rotary feedthrough range, up to six axes of independent motion 

can be provided, as depicted in the diagram to the left. 

X-Y-Z-- MULTICENTRE - a complete sample manipulator solution, built 

using the XYZ MultiStage, but which also provides transferable 

sample holders and stage receptors. The receptor can provide 

up to two rotations - polar rotation (also referred to as 

specimen tilt), and azimuthal rotation (specimen rotation 

about the sample surface normal). Additionally the transferable 

samples can also be heated and cooled, providing temperature 

control in the range of -150 o C to 1200 o C. 

105 

108 

113 

114 

116 



Model LDM64/38 LDM64/64 LDM100/38 LDM100/64 

Fixed fl ange 

Travelling fl ange 

CF 64 

(4.5” OD) 

CF 38 

(2.75” OD) 

CF 64 

(4.5” OD) 



CF 64 

(4.5” OD) 

Y-Shift Range 

+/-7.5 mm or +/-31 mm Y motion 

Large cantilevered load capacity 


Smooth/precise motion 


CF 100 

(6” OD) 

CF 38 

(2.75” OD) 

CF 100 

(6” OD) 

CF 64 

(4.5” OD) 

Offset +/- 7.5 mm +/- 7.5 mm +/- 31 mm +/- 31 mm 

Bellows bore 60 mm 60 mm 90 mm 90 mm 

Clear bore 38 mm 60 mm 38 mm 60 mm 

Flange to fl ange 87.5 mm 87.5 mm 182 mm 182 mm 

 

 

 

 

 

The Y-Shifts provide accurate, repeatable axial 

alignment on the Y-axis, and might be used in 

conjunction with a sample transfer arm, such as a 

PowerProbe, to effect sample hand-off (see page 

072). The robust, production proven devices offer 

true UHV performance and are available in two 

sizes providing +/-7.5mm or +/-31mm Y axis 

adjustment, with four different fi xed / travelling 

fl ange combinations. 

Suitable for use in both production and R&D 

applications, the Y-Shifts are supplied with a 

range of actuation methods including manual hand 

wheels, DC or stepper motors. Motorised Y shifts 

are supplied with pre-wired bakeable limit switches, 

terminating with a bakeable, frame-mounted 

connector. A range of controllers are also offered 

for DC motor or stepper motor control. 

The Y-Shift design includes two parallel fl anges, 

one remains fi xed, whilst the other provides the 

movement. The device works by adjusting the 

position of the travelling fl ange in relation to the 

fi xed system mounted fl ange. The travelling fl ange 

position is controlled through an external leadscrew. 

A kinematic guide mechanism ensures smooth 

and precise motion. Vacuum integrity is ensured 

through the use of high quality 316L edge-welded 

bellows which have a minimum design life of 10,000 

cycles. The Y-Shifts rigid construction enables large 

cantilevered loads to be accommodated and allows 

the units to be mounted in any orientation. Y-Shifts 

are used for a number of applications, for example 

in transfer system alignment to adjust a linear 

probe to achieve sample hand-off. 

105 

Y-Shift Series

Y-Shift Series 

106 


Y Shift range part code generator 

Size Fixed fl ange Travelling fl ange Actuation 

LDM / - 

Example partcode: LDM64/38-H 

LDM - Y Shift 

64 - CF64 114 mm OD mounting fl ange 

38 - CF38 70 mm OD travelling fl ange 

H - Manual 

64 38 H 

100 64 IS 


Please note that any of the Fixed and Travelling fl ange options can be combined with any of the motorisation 

options. 

Fixed fl ange Travelling fl ange Actuation 

64 CF 64 (4.5” OD) 38 CF 38 (2.75” OD) H Manual handwheel 

100 CF 100 (6” OD) 64 CF 64 (4.5” OD) IS In-line stepper motor 

Linear PowerProbe and Y-Shift 



ID

LDM64-64-H 

LDM64-64-IS 

LDM100-64-H 

LDM100-64-IS 



107 

Y-Shift Series

MultiBase XY Stages 

108 



 

 

 

 

 

Up to +/- 31 mm of X and Y motion 

Any orientation mounting 


Robust construction for high loads 


MultiBase stages provide modular platforms for the 

manipulation of components in the X and Y planes. 

A MultiBase may be used as a discrete stand-alone 

component or combined with our range of Linear 

Shift Mechanisms and MagiDrives to build a multiaxis 

manipulator with up to six axes of motion. 

The MultiBase XY stage is the fi rst choice for both 

research and demanding production environments 

due to its precise motion, true UHV performance 

and rugged construction which allows mounting in 

any orientation. 

The MultiBase design includes two parallel fl anges. 

One remains fi xed, whilst the other provides the 

movement. A high quality, supple, edge welded 

bellows spans the fl anges to accommodate the 

required motion while ensuring an all-metal 

vacuum enclosure. The device works by adjusting 

the position of the travelling fl ange in relation to 

the fi xed system mounting fl ange. Positioning of the 

travelling fl ange is controlled through two external 

lead-screws. 

A kinematic mechanism ensures smooth and precise 

motion. This novel mechanism incorporates a high 

precision drive and guidance system, removing the 

requirement for vulnerable cross-roller slides used 

by other manufacturers. Combining this with a rigid 

construction allows mounting in any orientation 

without additional supports. This simplifi es system 

designs, reducing the mounting space required and 

the overall cost. 

Scales are fi tted to each axis for resolving the position 

of the travelling fl ange on the manual version. The 

motorised stages are fi tted with stepper motor and 

gearbox combinations. The combined use of the 

MultiBase with UHV Design’s Programmable Stepper 

Motor Control Centres (see page 175) provides a 

platform for sophisticated positioning. 


MultiBase movement information 

Unlike some X/Y manipulators where the X/Y travel 

is limited by the central probe and the ID of the 

edge welded bellows, UHV Design solidly limit the 

X and Y travel using rigid stops, which provides a 

more robust design. In the context of the diagram 

to the right this means that the axis of the central 

probe / tube cannot pass outside the limitations 

of the red box, as defi ned by +/- XMAX and +/- 

YMAX, both given in the table below. The absolute 

maximum displacement from the centre will be the 

vectorial sum of +/-Xmax and +/-Ymax, which is 

given simply by Pythagoras as: 


Model XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64 

Travelling fl ange CF38 70 mm (2.75”) OD with M6 straddled holes 

Mounting fl ange 

114 mm (4.5”) 

OD CF64 with M8 

straddled holes 

CF100 152 mm (6”) OD with M8 straddled holes 

X Y travel* +/- 14 mm +/- 31 mm 

XMAX, YMAX +/- 10 mm +/- 22 mm 


CF64 114 mm (4.5”) OD with M8 


X Y resolution Manual drive +/- 0.01 mm. Stepper motor driven +/- 0.0005 mm 

Probe OD 22 mm max to achieve full movement 28 mm max to achieve full movement 

Actuation 

+/- (XMAX 2 + YMAX 2 ) 0.5 

Again values for each manipulator are given in the 

table. 

Provided the central probe / tube has a diameter 

less than ‘PROBE OD’ (also given in the table) it will 

not clash or harm the bellows. 

Note: The fi xed fl ange is supplied with tapped 

holes as standard, clear holes are available on 

request. 


MultiBase movement diagram 

Manual via combined micrometer handwheel and linear scale. 

Motorised units are stepper motor driven. 

* Note: MultiBase travel is defi ned as the maximum vectorial sum of X and Y travels. 

CF150 203 mm (8”) 

OD with M8 


109 

MultiBase XY Stage


110 


MultiBase X/Y range part code generator 

Model 

Code X and Y travel 

XY14 

XY31 

Model Fixed Flange Travelling Flange Actuation 

XY14 - - 38 - 

+/- 10 mm 

(+/-14 mm vector) 

+/-22 mm 

(+/- 31 mm vector) 


64 

100 

150 

64 H 

100 IS 

Model Fixed Flange Travelling Flange Actuation 

XY31 - - - 

Example partcode: XY14-64-38-H 

XY14 - MultiBase XY stage +/-14 mm travel 



H - Manual 

100 38 H 

150 64 IS 

Note: Fixed fl ange supplied with tapped holes as standard, clear holes available on request. 


In some cases a user may wish to motorise only one axis whilst leaving the other axis manually actuated, please 

contact sales to discuss this option. 

CF 64 114 mm 

(4.5”) OD 

CF 100 152 mm 

(6”) OD 

CF150 203 mm 

(8”) OD 

38 

64 

CF 38 70 mm 

(2.75”) OD 

CF 64 114 mm 

(4.5”) OD 

H Manual handwheel 

IS In-line stepper motor 


Rotatable Axis MultiBase Manipulator 



The Rotatable Axis MultiBase X-Y manipulator 

enables the X and Y axes to be rotated about the 

axis of the manipulator, whilst under vacuum, such 

that they can be aligned precisely with a particular 

port axis on a chamber. This is a unique feature for 

X-Y manipulators, developed by UHV Design. 

The feature is particularly useful when using 

techniques where focusing is absolutely critical, and 

the user wants to move the sample along the axis of 

a gun or lens, etc. mounted on ports which are not 

exactly parallel or perpendicular to the manipulator 

axes. 

Using the Rotatable Axis MultiBase, the sample can 

be precisely moved along the axis of any port until 

optimum focusing is achieved. It can then be moved 

orthogonally to explore other areas of the sample, 

without losing focus. 

A conventional X-Y stage would require repeated ‘step’ movements in the X and Y axes to reach a specifi c 

location, followed by further ‘stepping’ motions on each axis to travel along the desired path/angle. The 

Rotatable Axis MultiBase removes this requirement, greatly simplifying positioning and focusing tasks. 

Note:- the top and base fl anges do not rotate with respect to one another, but rather the manipulator mechanism 

and actuators are rotated around the fl anges. Using the Rotatable Axis MultiBase manipulator together with 

z-shifts, rotary drives and other UHV Design sample handling options, a complete truly UHV eucentric stage 

can be assembled for the fi rst time, without resorting to using a sliding seal or differentially pumped rotary 

housing. See page 116 - 121 for complete sample stage solutions. 

111 

Rotatable Axis MultiBase XY Stages

Rotatable Axis MultiBase XY Stages 

112 


Rotatable Axis MultiBase range part code generator 

Size Fixed Flange Travelling Flange Actuation R.A.M.B 

XY14 - / 38 - - 

64 H RH 

100 IS RS 

Note: Fixed fl ange supplied with tapped holes as standard, clear holes available on request. 


In some cases a user may wish to motorise only one axis whilst leaving the other axis manually actuated, please 

contact sales to discuss this option. 

Size 

Size Fixed Flange Travelling Flange Actuation R.A.M.B 

XY31 - / - - 

100 38 H RH 

150 64 IS RS 

Example partcode: XY14-64/38-H-RH 

XY14 - MultiBase XY stage (+/- 14 mm travel variant) 



H - Manual 

RH - Rotatable Axis MultiBase with Manual actuation 

Code X/Y travel 

XY14 

XY31 

+/- 14 mm 

(vector) 

+/- 31 mm 

(vector) 


64 

100 

150 

CF 64 114mm 

(4.5”) OD 

CF 100 152mm 

(6”) OD 

CF150 203mm 

(8”) OD 

38 

64 

CF 38 70 mm 

(2.75”) OD 

CF 64 114 

mm (4.5”) 

OD 

H 

IS 

Manual 

handwheel 

In-line 

stepper motor 

Rotatable Axis 

MultiBase Actuation 

(R.A.M.B.) 

RH Manual 


RS 

Stepper 

motor 

driven

MultiStage XYZ Stages 

 

 

 

 

 

 

+/-14 mm or +/-31 mm XY motion 

25 mm to 1000 mm Z motion 

Manual or motorised actuation 

High load carrying capability 

Engineered for stability & precision 

High performance, competitively 

priced 

MultiStage manipulators provide precise motion 

along the X, Y and Z axes. Their robust construction 

provides a stable platform, enabling mounting 

in any orientation. 

The range is modular utilising the MultiBase X/Y 

stages to provide two generic platforms offering 

+/-14 mm or +/-31 mm of motion (vector sum of X 

& Y). Various Linear Shift Mechanisms can then be 

fi tted to these platforms to provide between 25 mm 

(1”) and 1000 mm (39”) Z stroke. The kinematic 

motion provided, results in smooth and reliable 

motion. Customised strokes and internal bellows 

support tubes are available on request. 

MultiStage manipulators are offered with manual or 

motorised actuation. Manual XY actuation is 

delivered via a combined micrometer handwheel 

and linear scale assembly. Manual Z motion can 

be fi tted with a 1 mm increment scale, or a Digital 

Linear Scale assembly providing 10 micron 

resolution. 

DC and stepper motor driven solutions are also 

available, along with motion control systems (see 

page 175). 

Rotatable Axis MultiBase Manipulator 

The MultiStage manipulator can also be 

provided with the ‘Rotatable Axis MultiBase’ (detailed 

information on page 111). This unique XY stage 

enables the X and Y axes to be rotated about the 

axis of the manipulator such that they can be aligned 

precisely with a particular chamber port axis or 

incoming beam. This facility is ideal for applications 

such as sample focusing. 



113 

MultiStage XYZ Stages

MultiStage XYZ Stages 

114 



XY Model XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64 

Travelling fl ange CF38 70 mm (2.75”) OD with M6 straddled holes 


CF64 114 mm 

(4.5”) OD with M8 


CF100 152 mm (6”) OD with M8 straddled holes 

CF64 114 mm (4.5”) OD with M8 


XY travel +/-10 mm (+/- 14 mm vector) +/-22 mm (+/- 31 mm vector) 

XY resolution Manual drive 0.01 mm, Stepping motor 0.0005 mm 

Actuation options 


DC or stepper motor driven. 

CF150 203 mm 

(8”) OD with M8 


Z travel Z shifts are available with following strokes as standard: 25, 50, 100, 200, 400, 600, and 1000 mm. 

Actuation 

Z resolution 

Manual handwheel actuation. 

Motorisation via side-mounted DC or stepper motors. 

Manual drive +/- 0.25 mm with engraved shaft, with digital linear scale 0.01 mm, stepping motor +/- 

0.0005 mm 

Six Axes Motion 

By combining the MultiStage with UHV Design’s 

range of MagiDrive rotary feedthroughs, rotary 

motion can be transmitted through the centre. 

Use of the hollow MagiDrive, allows services to 

be passed through the centre such as electrical 

connections for heating or tubes for sample 

cooling. 

Furthermore, being hollow, MagiDrives can be 

mounted one atop another, thereby providing 

additional axes of rotation. Up to three independent 

axes of rotation can be provided, totalling six 

axes with the XYZ MultiStage (as shown to the left). 

Please contact sales for further information. 


MultiStage XYZ range part code generator 

XY Actuation 

Code Actuation method Code 


S 

D 

Model 

Side-mounted 

stepper motor 

Side-mounted 

DC motor 

XY 

Actuation 

Optional Rotatable 

Axis MultiBase 

(see page 111) 

R 

RS 

Actuation 

method 

Manual 

actuation 

Stepper 

motorised 



Optional 

R.A.M.B 

XY14-64-38 - - - Z - - 

Z travel Z Actuation 

Code Z travel Code Actuation method 

25 25 mm (1”) 

50 50 mm (2”) 

100 100 mm (4”) 

200 200 mm (8”) 


SS 

Side-mounted stepper 

motor 

400 400 mm (16”) SD Side-mounted DC motor 

600 600 mm (24”) 

1000 1000 mm (39”) 

Z Travel Z Actuation 

XY14-100-38 H 25 H 

S R 50 SS 

D RS 100 SD 

XY31-100-38 - - - Z - - 

XY31-100-64 H 25 H 

XY31-150-64 S R 50 SS 

200 

400 

600 

D RS 100 SD 

Example partcode: XY14-64-38-H-Z-25-H 

XY14-64-38 - MultiBase XY stage (+/- 14 mm travel variant) 

CF64 114 mm OD mounting fl ange, CF38 70 mm 

OD travelling fl ange 

H - Manual 

Z25 - 25 mm Z motion 

H - Manual 

200 

400 

600 

1000 


115 

MultiStage XYZ Stages

MultiCentre XYZ Stages 

116 


Summary table 

MultiCentre Sample Handling 

Systems 

Puck system Stub system 

X-Y travel Up to +/- 29 mm 

Z travel 25, 50, 100, 150, 200, 300, 500, and 1000 mm 

Polar rotation +/- 200 o 

Complete engineered solution for 

scientifi c and analytical application s 

High stability/precision stages 

Up to +/-31 mm XY motion 

25 mm-1000 mm Z motion 

Tilt and azimuthal sample rotation 

33mm Ø sample puck or stub system 

Failsafe hand-off to Power Probe 

transfer systems 

Heating, e-beam Heating, Cooling to 

LN2 and biasing options 

The MultiCentre provides a complete solution 

for sample transfer and manipulation. Typical 

applications include analytical instrumentation for 

surface analysis equipment and synchrotron end 

stations. 

MultiCentres are modular by design (as shown to 

the right), utilising the MultiStage range to provide 

X, Y and Z translations. The unique ‘Rotatable Axis’ 

X/Y stages can also be incorporated to provide a 

truly eucentric stage (see page 121 for a detailed 

explanation). UHV Design’s MagiDrive rotary 

feedthroughs are also utilised to provide the basic 

rotations. The MultiCentre range provides sample 

transfer pucks and sophisticated manipulator end 

stations / receptors with optional heating and 

cooling, to provide the complete sample handling 

solution. 

The MultiCentre range includes two discrete sample mounting and transfer systems. The fi rst is based upon 

a large 33 mm diameter puck, whereas the second employs a sample stub (compatible with those used in 

the past by VG Scientifi c’s surface analysis instrument - the ESCALAB), and ‘wobble stick’ transfer fork. 

The general capabilities of each range are summarised below, with a more detailed section for each on the 

following pages. 

Azimuthal rotation Continuous or +/- 100 o with cooling N/A 

Maximum sample size 33 mm diameter 14 mm diameter 

Heating > 1000 o C > 800 o C 

e-beam heating > 1200 o C N/A 

Cooling < -150 o C < -130 o C 

Sample current measurement Isolation > +/- 500 V Resistance > 500 M Ohm. 

 

 

 

 

 

 

 

 


MULTICENTRE 

Stacked MagiDrive rotary feedthroughs to provide 

polar and azimuthal rotation 

Heater, cooling, power and bias service collar 

Linear shift mechanism for Z translation 

MultiBase X Y stage 

MultiBase micrometer actuator 


Heater and sample bias wiring 

Heated sample holder with polar and azimuthal rotation 

(LN2 cooling not pictured). 



117 

MultiCentre XYZ Stages


118 


Puck handling system 

To provide fl exibility the sample transfer puck is larger than most competing 

products, at 33 mm diameter, such that a multitude of small samples can be 

mounted simultaneously, or a single larger sample can be mounted. A range of 

puck materials can be provided: 

• 316 stainless steel is used for the basic unit 

• Molybdenum pucks are provided when heating and heating / cooling 

options are selected 

• For the best in cooling with limited heating, copper pucks can be supplied 

End receptors 

Receptors come in two basic confi gurations. One, providing sample tilt only (i.e. 

rotation about an axis lying in the plane of the sample), and one providing both tilt 

and azimuthal rotation (about the sample surface normal). 

Both receptors accept the same sample puck which is latched in place through a 

positive bayonet actuation. The sample is electrically isolated to 500 V to provide 

for sample current measurement and biasing. 

Cooling 

The Receptors can be provided with an LN2 cooling system, which employs an 

ingenious LN2 tank design where the LN2 is in direct thermal contact with the 

receptor and provides the electrical isolation. There is no need for separate electrical 

insulation which then also acts as a good thermal insulator. In this way even the 

relatively large Puck can still be cooled to LN2 temperatures quickly. 

K-type thermocouples are normally supplied unless there is a need for very low 

residual magnetic fi elds, in which case N type are preferred. 

PBN heater 

A 200 W PBN coated graphite disc heater is installed immediately beneath the 

sample puck which can rapidly heat the sample to 1000 o C. A thermocouple is located 

inside the Puck receptor in close proximity to the Puck to measure temperature. 

e-beam heating 

For even higher temperature ‘fl ash heating’ of the Puck, an electrically fl oating 

fi lament is located immediately beneath the Puck, which when heated emits 

electrons that are accelerated onto the back side of the Puck. This can heat the 

Puck up to 1200 o C. 

Sample transfer 

Sample transfer from an entry lock for example is accomplished using a PowerProbe 

magnetic transfer arm (see section 4) with a puck transfer fork mounted on the 

end. 


Puck handling system: General Specifi cations 



MultiCentre model MC-P14 MC-P31 

XY travel +/-7 mm (+/- 9.9 mm vector) +/-20.5 mm (+/- 29 mm vector) 


options 

114 mm (4.5”) OD 

CF64 with M8 


152 mm (6”) OD CF100 with M8 straddled 

holes 

XY resolution Manual drive +/- 0.01 mm, Stepping +/- 0.0005 mm 

XY Actuation 

Z travel 

Z Actuation 

Z resolution 

Polar rotation 

and resolution 

Azimuthal rotation 


Heating 

Cooling 

PBN: 

E-Beam: 

Electrical isolation 



Z-shifts are available with following strokes as standard 

25, 50, 100, 200, 400, 600, and 1000 mm. 

Manual handwheel actuation. 


Manual drive +/- 0.25 mm with engraved shaft, 

Digital linear scale +/- 0.005 mm, 

Stepping motor +/- 0.0005 mm. 

203 mm (8”) OD 

CF150 with M8 


Maximum rotation = +/- 200 o Resolution < 1.0 o when driven from the same direction 

Manual and stepper motor driven actuation. 

Continuous without cooling 

Maximum rotation = +/- 100 o with cooling 

Resolution< 0.5 o when driven from the same direction. 

Maximum temperature measured using in-situ thermocouple at the sample puck > 1000 o C 

Maximum temperature measured using in-situ thermocouple at the sample puck > 1200 o C 

Ultimate low temperature measured using in-situ thermocouple at the sample puck 

< -150 o C Cool down time to ultimate < 30 min 

Sample transfer puck :- 

Electrical isolation > +/- 500 V 

Electrical leakage resistance > 500 MOhm. 

Sample transfer Via UHV Design’s Power Probe transfer arms 

119 



120 


Stub handling system 

The sample transfer stub is compatible with the well known ESCALAB stub 

system: 

• 316 stainless steel is used for the basic unit 

• Molybdenum stubs are provided when heating and heating / cooling 

options are selected 

• For the best in cooling with limited heating copper stubs can be supplied 

• Standard stub sizes of 10 mm and 14 mm diameter 

End receptors 

Provide electrical isolation to 500 V for sample current measurement and biasing. 

Cooling 

The receptor can be provided with an LN2 cooling system, which employs an 

ingenious Cold Lance design, where the LN2 is transmitted through a co-axial 

tube which is docked into the receptor using an additional sprung-loaded z-shift. 

This has the advantage of being able to provide continuous polar rotation, when 

disconnected and obviates the need for coiled cooling pipes. When disengaged, 

heat loss to the cooling circuit is eliminated improving heating performance. K-type 

thermocouples are normally supplied unless there is a need for very low residual 

magnetic fi elds, in which case N-type are preferred. 

Heater 

For heating, a tantalum wire heater is installed in the end receptor which can heat 

the sample to 800 o C. 

Sample transfer – from an entry lock for example, is accomplished using a our 

PowerProbe magnetic transfer arms (see section 4) in conjunction with our bellows 

sealed wobble stick. 

MultiCentre model MC-S14 MC-S31 

XY travel +/-7 mm (+/- 9.9 mm vector) +/-20.5 mm (+/- 29 mm vector) 


options 

114 mm (4.5”) OD CF64 

with M8 straddled holes 

152 mm (6”) OD CF100 with M8 


XY resolution Manual drive +/- 0.01 mm, Stepping +/- 0.0005 mm 

XY Actuation Manual via combined micrometer handwheel and linear scale. 


203 mm (8”) OD CF150 

with M8 straddled holes 

Z travel Z-shifts are available with following strokes as standard 25, 50, 100, 200, 400, 

600 and 1000 mm. 

Actuation Manual handwheel actuation. 


Z Resolution Manual drive +/- 0.25 mm with engraved shaft, with digital linear scale 0.01 mm, 

Stepping motor +/- 0.0005 mm 

Polar rotation 


Rotation = continuous Resolution < 1.0 o when driven from the same direction 

Heating Tantalum wire heater around the stub holder 

Maximum temperature measured using in-situ thermocouple at the sample stub > 800 o C 

Cooling Ultimate low temperature measured using in-situ thermocouple at the sample stub < -130 o C Cool 

down time to ultimate < 45 min 

Electrical isolation Electrical isolation > +/- 500 V Electrical leakage resistance > 500 MOhm. 

Sample Transfer Via UHV Design’s Power Probe transfer arms 


Eucentricity 

The ‘Puck’ and ‘Stub’ MultiCentre manipulators can 

be fi tted with the unique Rotatable Axis MultiBase 

XY stage (RAMB). Using the RAMB as a platform, 

it is possible for the fi rst time to confi gure a UHV 

modular MultiCentre as a truly eucentric stage. 

Eucentric stages are used almost exclusively for 

applications requiring the ultimate in alignment and 

analytical precision. All electron microscopes both 

SEMs (Secondary Electron Microscope) and TEMs 

(Transmission Electron Microscope) are equipped 

with eucentric stages for example, although these 

are more often than not simply ‘O’ ring sealed. 

Eucentric stages have the lateral translations ‘inside’ 

the tilt motion and differ quite fundamentally from a 

more standard confi guration where the tilt is ‘inside’ 

the translations. This is represented pictorially 

below. It can be seen that using a eucentric stage, 

once the sample is brought into focus it can be 

translated at will and remain in focus – this is 

quite different to the standard confi guration where 

tilting the sample results in a loss of focus plus an 

unwanted lateral translation. 



121 



122 


MultiCentre Customer Questionnaire 

To request a quotation please fax a completed questionnaire to UHV Design on +44 (0)1323 811999. 

Alternatively complete our online form at http://www.uhvdesign.com/multicentre_form.htm 

Customer name: 

Company name and address: 

What is your application? 

What size are your samples? 

What is the size and type of your system mounting fl ange? 

What is the systems operating pressure? 

What is the systems ultimate pressure? 

Telephone Number: 

Fax Number: 

Email address: 

Are gases involved with your process? If so please state partial pressures of each and at what sample temperatures 

they will be present. 

Are any of the following incompatible with your process (i.e will they react):- 

Tantalum Molybdenum Stainless steel 

What Type of Thermocouple do you require? 

Type K Thermocouple Type N Thermocouple Other 

Do you wish to heat the samples? If so to what temperature? 

How long will the sample be heated for during a cycle? 

Do you wish to cool the samples? If so to what temperature? 

What is the maximum X motion you require (mm)? 

What is the maximum Y motion you require (mm)? 

What is the maximum Z motion you require (mm)? 

Do you require rotation? 

Azimuthal Primary 

Do you need to bias or electrically isolate your sample? If so to what level? 

Do you require rotation of the axes about the manipulator axis (R.A.M.B option)? 

Please indicate the actuation method for each axis of manipulation: 

X Motion Manual Stepper Motor DC Motor 

Y Motion Manual Stepper Motor DC Motor 

Z Motion Manual Stepper Motor DC Motor 

Azimuthal Manual Stepper Motor DC Motor 

Primary Manual Stepper Motor DC Motor 

R.A.M.B Manual Stepper Motor DC Motor 

Do you need temperature controllers and/or power supplies? 

Additional comments or requirements: 


Liquid Helium Cooling 



A range of helium cryostats can be installed on the UHV Design XYZ MultiStage manipulators – most notably 

those from Advanced Research Systems and Janis, although others could be considered on request. 

ST-400 Helitran Displex 

The ST-400 continuous fl ow 

crysostat from Janis provides a 

cost effective solution for less 

demanding applications. 

The Helitran LT-3M continuous 

fl ow cryostat from ARS offers 

certain unique performance 

advantages for demanding 

applications. 

Where continuous fl ow cryostats 

cannot be used for reasons 

of safety or simply cost of He 

consumption, we also offer a 

closed cycle cryostat from ARS 

– the Displex CS202B. This unit 

also has two alternative heads/ 

expanders – the DE-202AB and 

202NB offering different levels 

of performance. 

Page 124 Page 125 Page 126 

123 

Liquid Helium Cryostats

Continuous Flow Cryostat 

124 


Continuous Flow Cryostat 

Introduction 

The ST-400 is a true UHV continuous fl ow cryostat 

from Janis Research Company Inc. 

It is fully compatible with UHV Design’s ‘XY31-‘ 

series of XYZ MultiStage manipulators (see pages 

112-115 for further information), which when 

combined, provide +/-19.8 mm of X/Y motion (+/- 

28 mm vectorial motion), up to 1 m of Z motion 

and 4.2 K base temperatures. Their combined use 

provides an economical solution to liquid helium 

cooling requirements. 

Each MultiStage / cryostat is built to order so that 

the cold fi nger length and confl at-style vacuum 

fl ange may be sized to fi t the user’s chamber. 

Features for UHV include: 

 

 

 

 

 

 

 

Bakeable to 200°C. 

Sample temperatures from 4.2 to 475 K 

standard, or > 700 K optional. 

Heater and temperature sensor in the 

cryostat helium space (not exposed to UHV 

environment). 

Electropolished stainless steel construction. 

Gold plated copper radiation shield and sample 

mount. 

UHV-compatible electrical feedthroughs for user 

wiring. 

Low cryogen usage @ 0.5 L/hr. 

 

Initial cool down time

Helitran Liquid Helium Cryostat 

Introduction 

The Helitran LT-3M is a continuous fl ow cryostat 

from Advanced research Systems Inc. It is fully 

compatible with UHV Design’s ‘XY31-’ series of 

XYZ Multi-Stage manipulators (see pages 112- 

115 for further information), and can be used to 

accomplish +/- 14 mm X/Y motion (+/-20 mm of 

vectorial motion), up to 1 m of Z motion and 2K 

base temperatures. 

The Helitran LT-3M has some unique design features 

giving signifi cant performance benefi ts, particularly 

in terms of low vibration, temperature stability, 

effi ciency and cooling power:- 

 

 

 

 

 

 

Built-in impedance valve at the sample tip 

means sub 4.2 K (1.7 K operation when the He 

exhaust is pumped). 

Patented matrix heat exchanger providing high 

cooling power (1.5 W @ 4.2 K, 20 W @ 50 K), 

and very effi cient heat transfer. This results in 

the effi cient use of cryogen – up to 40 times 

less cryogen required compared to some 

competitive product, and therefore also gives a 

concomitant reduction in operating costs. 

Co-axial shielded fl ow transfer system, contributes 

to this effi ciency but more importantly ensures 

single phase tip fl ow – i.e. eliminates boiling. 

This provides excellent temperature stability, 

and freedom from mechanical vibration at the 

tip. The intrinsic vibrational stability is stated as 

less than 0.1 nm in STM applications. 

An exhaust gas heater eliminates condensation 

and icing at the exhaust port. 

A fl ow control panel provides precise, repeatable 

fl ow / temperature control and optimisation. 

Heating and temperature control to 500 K using 

a Silicon diode sensor, and to 800 K using a K 

type thermocouple. 




Cryo-cooler Model: L He L N2 

Temperature Min 

4.2k (

Closed Cycle Cryostat 

126 


General Specifi cation (without options) 

Type DE-202AB DE-202NB 

Temperature 

range 

Refrigeration capacity 

(without attachments) 

Cooldown 

time to 20 

Kelvins 

Lines 

Power 

requirements 

Weights 

10 to 350 kelvin 6.5 to 350 kelvin 

20 k 

2.0 W @ 

50 Hz 

2.5 W @ 

60 Hz 

60 Hz - 50 minutes 


8 k 

10 k 

20 k 

0.4 W @ 

50 Hz 

0.5 W @ 

60 Hz 

0.8 W @ 

50 Hz 

1 W @ 60 

Hz 

2 W @ 60 

Hz 

2.5 W @ 

60 Hz 



3 m (10ft) fl exible stainless steel lines as 

standard 

208/230 V, 50/60 Hz, 1.7 kW typical 

Other voltages available upon request 

System - 91Kg (200 lb) 

Compressor 80 Kg (165 lb) 

Expander - 7Kg (16 lb) 

Displex Closed Cycle Cryostat 

Introduction 

The Displex is a versatile closed cycle cryostat 

package from Advanced Research Systems Inc. 

that has many applications in ultra-high vacuum 

research. The system typically includes a compressor, 

hoses, DE-202AB expander, temperature controller 

/ sensor and heater instrumentation. It is fully 

compatible with UHV Design’s ‘XY31-’ series of XYZ 

Multi-Stage manipulators (see pages 112-115 for 

further information), and can be used to accomplish 

+/- 18.8 mm X/Y motion (+/-26.5 mm of vectorial 

motion), up to 1 m of Z motion and 10 K base 

temperatures. 

Alternatively the DE-202NB is a modifi ed version 

that achieves a 6.5 K bottom out temperature and 

higher capacity at 10 K. There are also higher speed 

versions for faster cool-down times, viz DE202AB(T) 

– contact the factory for full details. The Displex 

Cryostats have some unique design features giving 

signifi cant performance benefi ts which include:- 

 

 

 

 

 

 

 

 

 

 

10 K to 350 K operation or 6.5 K to 350 K and 

(Options for 450 K and 800 K heating). 

Iron - doped gold (0.07% atomic wt. Iron) 

Chromel thermocouple temperature sensors, 

silicon diodes, or other sensors available upon 

request. 

Metallized thermofoil heater for long heater life 

- 36 W, 36 V resistance heater. 

UHV construction and instrumentation wiring. 

Bakeable to 200°C with displacer removed 

(400°C without instrumentation). 

Vacuum Level 1E-11 Torr. 

Operates in any position. 

The Displex is a Pneumatic Drive cryo-cooler 

with no mechanical drive components such as 

cams, push rods, and poppet valves. The motor 

is axial which further reduces the vibrations in 

the horizontal plane. The vibrations at the tip 

are lower than the pulse tube cryo-coolers, and 

lower by a factor of 4 than mechanical drive GM 

Cryo-coolers. Vibrations at the sample are the 

lowest in the class at :- 

+/- 15 Microns - Z 

+/- 5 Microns - X and Y 

Only two moving parts, easily maintained in the 

fi eld without breaking vacuum. 

Requires only electricity and cooling water for 

operation. 

Note: these specifi cations are for the Cryocooler only. Actual performance will depend on parasitic and experimental heat loads. For 

more information and order codes please contact sales. 


Section n 7 

Deposition Stages 

Sample Heater Deposition Stages 

Introduction to the EpiCentre range 128 

EpiCentre100 Series 130 

EpiCentre100 Questionnaire 137 


EpiCentre346 Questionnaire 140 

Controller and Power Supply Options 141 



Deposition Stages

EpiCentre Stages 

128 


EpiCentre Stages 

 

 

 

 

Sample heating up to 1200 o C 

True UHV operation 

Sample rotation, biasing, deposition 

height adjustment and transfer 

solutions 

Manual or motorised manipulation 

Epicentre deposition stages 

The EpiCentre range of deposition stages employ 

cutting edge design and engineering to give high 

temperature wafer heating and manipulation under 

clean, true UHV conditions. EpiCentres have been 

designed for applications such as wafer annealing, 

degassing, modifi cation, and for use with deposition 

techniques such as MBE (Molecular Beam Epitaxy), 

sputtering, and CVD (Chemical Vapour Deposition). 

EpiCentres can be mounted in any orientation to 

suit customer chamber designs, and application 

confi gurations. 

There are also versions confi gured for higher 

pressure and corrosive environments, where 

uniquely, the heating element is contained in a 

separate quartz vacuum enclosure, and is therefore 

completely immune from the effects of oxidising, 

reactive or corrosive atmospheres. 

The EpiCentre range has been utilised by pioneering 

research laboratories around the world for many 

years. End user references are available for a 

variety of applications and substrate sizes. The 

range comprises three models as shown opposite. 




EpiCentre 100 EpiCentre 346 EpiCentre 282 

An ‘inline’ design presenting the 

sample parallel to the mounting 

fl ange. The range provides 

sample heating with a range 

of proven modular options 

offering sample rotation, 

electrical biasing and 

axial translations to set the 

sample height an to facilitate 

sample hand-off. 

The modular approach allows 

end users to select the amount 

of axial translation required, 

the size and type of mounting 

fl ange, the operating height, 

type of biasing D.C / R.F. etc. 

and has the option of a quartz 

enclosed heater stage for corrosive 

applications. 

An ‘inline’ range of stages 

providing sample heating and 

rotation, but with fewer 

options and less fl exibility than 

the EpiCentre 100 range, resulting 

in lower cost. 

The principle differentiator is that 

the heater stage position is fi xed 

and cannot be adjusted. Sample 

transfer is enabled via an offset Z 

manipulator, which raises/lowers 

the sample cradle. The range is 

offered with the ‘quartz enclosed 

heater module’ for corrosive 

applications, but does not 

include any electrical bias or 

height adjustment facilities. 

This EpiCentre is an off-axis 

right-angled confi guration, 

designed predominantly as a 

retrofi t solution for V80H molecular 

beam epitaxy systems. 

The stage provides heating with 

continuous azimuthal rotation 

(i.e. about the substrate surface 

normal), plus primary rotation 

proving substrate tilt. 

Page 130 Page 138 Page 142 

129 

EpiCentre Stages

EpiCentre 100 

130 


EpiCentre 100 

Modular ‘inline’ stages offering heating, rotation, 

biasing, manipulating and transferring of samples/ 

substrates. 

The EpiCentre range provides true UHV heating 

solutions for various deposition techniques such 

as MBE, sputtering and CVD. The EpiCentre range 

can be mounted in any orientation and can also 

be confi gured for higher pressure and corrosive 

environments. 

Modular design 

As each application demands differing capabilities, 

the EpiCentre 100 series was developed in a 

modular fashion, enabling users to select from 

a variety of modules to suit their specifi c needs. 

This modular design enables the 100 series to 

provide both sophisticated multi-axis control, for 

production requirements, or simple hand wheel 

operated manipulation for cost effective research 

and development applications. The photograph 

opposite shows how a typical EpiCentre 100 stage 

is confi gured using the various modules available. 

Each of the modules are then described in detail 

on the following pages, fi nishing with a ‘quotation 

request form’ on page 137. 




EPICENTRE100 

Heater module service collar 

Heater retraction linear shift mechanism 

MagiGear for continuous substrate rotation 

Linear shift mechanism for deposition height adjustment 

RF/DC biasing connection 


Transit stand 

Refractory metal heater module 

Quartz enclosure (for corrosive environments) 

Heater element 

Rotating cradle for sample or wafer support 

131 

EpiCentre 100

EpiCentre 100 

132 


Sample / wafer support cradle 

Cradle assemblies are custom designed to support standard wafers from 25 mm 

(1”) to 200 mm (8”) diameter, and can also be confi gured for single or multiple 

sample holder platens. Cradles are typically manufactured from refractory metals, 

such as Molybdenum or Tantalum and have been fashioned to adapt to most 

common sample handling techniques. 

Refractory metal heater module 

EpiCentre heater modules are capable of producing wafer temperatures up to 

1200ºC. By virtue of the exceptional coupling of heat to the wafer, the elements 

run at considerably lower temperature than conventional metal heaters. Clean 

UHV operation is ensured with the use of: - 

• Reduced element operating temperature 

• Self-supporting element 

• Insulator free hot zone 

• Refractory metal enclosure construction 

As standard, heater modules are available with two types of element, PgG and PBN 

coated graphite, though other options are available upon request. 

In some cases conditions within the vacuum system will be detrimental to the 

lifetime and effi ciency of the heating element, for instance systems that contain 

a high partial pressure of oxygen. In such cases heater elements can be enclosed 

within a quartz bell jar to separate the heater from the process gases. Please see 

the opposite page for more information on Quartz enclosures. 

Thermocouple options 

Selecting the correct thermocouple type is essential to avoid potential degradation, 

corrosion and process contamination. Two types of thermocouples are offered as 

standard, ‘type C’ (Tungsten Rhenium) and ‘type K’ (Chromel Alumel), though other 

types are available upon request. Type C is non-magnetic, has a high temperature 

range and is generally more resistant to chemical attack. Type K is a more cost 

effective solution, has a lower temperature capability, is magnetic and tends to be 

more robust and durable. 

Heater elements 

Two heater element variants are available as standard although special options are 

available on request. 

PgG elements 

Pyrolytic graphite coated Graphite (PgG) elements are the standard type used 

for the EpiCentre deposition stages. Robustness, reliability, high temperature 

capability, excellent uniformity and cost are all aspects that make this element a 

desirable choice. 

PBN elements 

Pyrolytic Boron Nitride (PBN) elements are made from a grown PBN disc with a 

graphite fi lm, etched into an element formation. This is then coated/sealed with a 

PBN layer to minimise exposure to the system. Two graphite areas remain exposed 

to the system to enable electrical contact. This design offers robust, long life, low 

current heating. 


Quartz enclosed heater modules for reactive processes 

MagiGear for continuous substrate rotation 



The EpiCentre 100 is available with a quartz-enclosed heater module that separates 

the heater and its services from the process environment. 

This module is typically selected where:- 

• system cleanliness is absolutely critical 

• corrosive gases are present in the application 

• high partial pressures of oxygen are present 

The system works by creating a separate environment for the heater module to 

operate within, thereby making the heater totally immune from the process gas. 

Heat is radiated from the element, through the quartz-enclosure, to the sample/ 

wafer that is mounted on the cradle. As the heat must be radiated through the 

quartz, the attainable sample temperature is reduced to 1000ºC. 

The quartz enclosure seals against an internal water-cooled fl ange, creating the 

secondary vacuum enclosure. This quartz system is then separately pumped 

through the length of the EpiCentre stage via a port on the service collar. The 

heater module is then maintained at vacuum, without exposure to the process 

chamber. Vacuum pumps are not supplied. 

The patented MagiGear offers a simple, robust and clean rotation system. This 

unique eccentric feedthrough transmits rotation through a solid vacuum enclosure 

to an internal torque tube with a massive 47 mm clear bore. This provides the 

access for power, cooling, thermocouple or even independent pumping of the heater 

module. The absence of gears and use of well-proven precision ball races ensures 

hydrocarbon free operation with negligible particulate generation. The MagiGear 

can be DC or stepper motorised and is fi tted with a manual thumbwheel to allow 

positioning for sample transfer. Alternatively, a laser homing system is available 

for automated applications. The MagiGear is available in single, double and triple 

‘stack’ confi gurations to match the substrate load requirements. 

Laser homing 

The laser homing option enables the user to defi ne an absolute reference or 

‘home’ position to allow accurate and repeatable orientation of the cradle. This 

is typically used for automated sample hand off applications where the cradle 

needs to be aligned with a waiting transfer fork. 

RF/DC biasing connection 

EpiCentre stages can be provided with the facility to apply an electrical bias to 

control sample deposition characteristics. Two versions are available, one for 2kV 

DC isolation and one for DC / RF biasing up to 80 Watt power. In the case of 

RF biasing or high pressure applications, dark space shielding is also fi tted to 

prevent unwanted parasytic plasma formation around the electrical path and other 

susceptible areas. 

133 

EpiCentre 100

EpiCentre 100 

134 


Substrate shutters 

EpiCentre stages can be fi tted with rotary shutters, to control line-of-sight between 

the substrate and the deposition source. Shutters are based upon the ‘Rotary 

Source Shutter’ range (detailed on page 40) and are fi tted with customised shaft 

and refractory metal blades to suit each application. Shutters can be actuated 

manually or pneumatically. In the case of the latter, reed switch assemblies can 

also be fi tted to aid system interlocks. 

Deposition height adjustment and sample transfer 

The distance between the wafer cradle and the system mounting fl ange is usually 

specifi ed by the customer to suit individual applications. An important feature in 

the EpiCentre 100 concept, is the option to insert single or multiple Z shifts (Linear 

Shift Mechanisms, page 083) into the build to achieve varying levels of wafer 

manipulation as shown opposite. 

A single Z shift placed between the MagiGear rotary feedthrough and the system 

mounting fl ange, will adjust the entire stage by moving both wafer cradle and 

heater along an axis normal to the substrate (Z axis). This is typically used to vary 

the deposition height. 

By installing a single Z shift between the MagiGear rotary feedthrough and the 

heater module service collar, the heater module may be retracted away from the 

wafer, hence providing a gap for manually transferring the sample. 

By installing both Z shifts, the stage may be manipulated in a typical wafer handoff 

routine, as the heater may be retracted from the wafer to provide extraction 

space and the entire stage lifted or lowered to perform the wafer hand-off. 

These operations may be controlled manually or automated via motorisation or 

pneumatically activated systems. A further option is the ‘double Z-shift’, which will 

simply move the wafer cradle with respect to a fi xed heater position. This is often 

the choice selected for production applications. 

Controllers and power supplies 

UHV Design offers a full range of temperature and motion controllers as detailed 

on page 141. 


Simple stage using heating 

and rotation modules in fi xed 

geometry. This set-up is typically 

used for hand manipulated wafer 

or sample loading. 

When a linear shift mechanism 

is added between the mounting 

fl ange and MagiGear rotary 

feedthrough, the whole stage 

may be adjusted along the Z 

axis. This is used for variable 

deposition stations and alignment 

requirements. 

A linear shift mechanism placed 

between the MagiGear rotary 

feedthrough and the heater 

support fl ange will allow heater 

module separation from the wafer 

cradle. This allows wafer loading 

access but still requires the hand 

off motion to be generated from 

an alternative mechanism. 

With two independent linear 

shift mechanisms fi tted, control 

is available over the heater and 

cradle separation together with 

the ability to shift the entire 

stage. This combination provides 

the motion required to exchange 

wafers or samples from a simple 

end effector positioned between 

the heater and the cradle. The 

option of variable deposition 

geometry can still be utilised 

with this combination. 

This confi guration is normally used 

for production style wafer handoff 

motion. A single motorised 

(or hand wheel driven) linear 

shift mechanism manipulates the 

cradle for pick and place activity, 

while the heater module remains 

in a fi xed geometry. 



135 

EpiCentre 100

EpiCentre 100 

136 


General EpiCentre 100 Specifi cation 

Sample/wafer capability Ø 25 mm - 200 mm (1”-8”) as standard. Larger versions available upon request. 

Standard heater elements PgG and PBN (others upon request) 

Maximum temperature 

1200ºC for standard heater modules, 1000ºC for quartz-enclosed heater modules 

(based on heating a Mo test block) 

Temperature uniformity Nominally +/-2.5ºC across the central 90% of a Si wafer 

Rotation speed Up to 80RPM 

Thermocouple options Type ‘C’ (Tungsten Rhenium) or type ‘K’ (Chromel Alumel) 

Biasing capabilities 

DC system 

Combined DC and RF 

system 

Sample/wafer size 

Standard fl ange types 

2kV DC isolation 

2kV DC isolation / 80W RF power 

Ø 25-50 

mm (1-2”) 

CF100-150 

(6”-8” OD) 

Ø 75 mm 

(3”) 

CF150 

(8” OD) 

MagiGear ‘stack’ type Single Single 

Ø 100 mm 

(4”) 

CF200 

(10” OD) 

Single/ 

Double 

Ø 125 mm 

(5”) 

CF200 

(10” OD) 

Ø 150 mm 

(6”) 

CF250 

(12” OD) 

Ø 200 mm 

(8”) 

CF300 

(14” OD) 

Double Double Double 


EpiCentre 100 Quotation Request Form 

Customer name: Telephone number: 

Company name / address: Fax number: 

What size are the samples/ wafers? 

What material are the samples? 

Are the samples/wafers supported or holder free? 

What is the application? i.e. MBE, sputtering, CVD.... 






To request a quotation please fax a completed questionnaire to UHV Design on +44 (0)1323 811999. 

Alternatively complete our online form at http://www.uhvdesign.com/epicentre_questionnaire.htm 

Are gases involved with your process? If so please state the maximum partial pressure for each gas before and 

during deposition along with the maximum sample temperature for each case. 

Gas Type Maximum 

partial pressure 

before process 


at this point 

Maximum 


during process 


at this point 

1. mbar ºC mbar ºC 





What orientation is the stage to be mounted? 

Type C Thermocouple Type K Thermocouple 

Vertical, wafer facing down Vertical, wafer facing up 

Horizontal Other (please specify) 

Is rotation required? If so please state the required spin speed (RPM) 

To what temperature do you wish to heat the substrate / sample? 

Do you require substrate biasing? If so DC or RF? Volts Watts? 

Do you need to adjust the deposition height? If so how much? 

Do you need Z motion to facilitate sample/ wafer transfer? If so how much? 

Do you require a controller/ power supply? 

Will RHEED be used with this application? 


137 

EpiCentre 100

EpiCentre 346 

138 


EpiCentre 346 

General EpiCentre 346 Specifi cation 

The EpiCentre 346 offers the most cost effective 

heating solution in the EpiCentre range, providing 

sample heating, rotation and simple motion to aid 

sample transfer. Unlike the EpiCentre 100 range, 

however, the EpiCentre 346 has a fi xed heater 

position and so the ‘deposition height’ cannot be 

adjusted without increasing the distance between 

the substrate and the heater. 

The range benefi ts from the same EpiCentre 100 

modules (described on previous pages) such as 

the MagiGear rotary feedthrough and UHV heaters, 

including the quartz-enclosed heater module for 

corrosive environments. It can also be fi tted with 

a DC biasing system, but RF biasing is not offered. 

UHV Design offers a full range of temperature and 

motion controllers as detailed on page 141. 

Sample transfer 

Motion to aid sample transfer is a standard feature 

of the EpiCentre 346. To achieve this, the position 

of the sample cradle, with respect to the fi xed 

heater, is manipulated by a Linear Shift Mechanism, 

positioned on the mounting fl ange, as shown 

opposite. 

Sample/wafer capability Ø 25 mm - 200 mm (1”- 8”) as standard. Larger variants upon request. 

Standard elements PgG and PBN (others upon request) 

Maximum temperature 1200ºC for standard heater modules, 1000ºC for quartz-enclosed heater modules 

Temperature uniformity Nominally +/-2.5ºC across the central 90% of a Si wafer 

Rotation speed Up to 80 RPM 

Thermocouple options Type ‘C’ (Tungsten Rhenium) or type ‘K’ (Chromel Alumel) 

Biasing capability 2kV DC isolation 

Sample/wafer size Ø 25-75 mm (1-3”) Ø 100 mm (4”) 

Ø 125 - 150 mm 

(5-6”) 

Ø 200 mm (8”) 

Standard fl ange types CF200 (10” OD) CF250 (12” OD) CF250 (12” OD) CF300 (14” OD) 

MagiGear ‘stack’ type Single Single/Double Double Double 




When vertically mounted with the sample ‘facing down’, fully retracting the Linear Shift Mechanism minimises 

the distance between the cradle and heater, maximising the fi nal attainable temperature with minimum power 

losses (see Fig 1). By fully compressing the Linear Shift Mechanism, the sample cradle is ‘lowered’ away from 

the heater by 25 mm onto an awaiting transfer fork (Fig 2). This motion is typically manually actuated, though 

automated versions are available upon request. 

To receive a quotation, please complete the form on page 140. 

Fig 1: Deposition/ heating position Fig 2: Lowered to achieve sample hand-off 

139 

EpiCentre 346

EpiCentre 346 

140 


EpiCentre 346 Customer Questionnaire 

To request a quotation please photocopy, fi ll in this page and fax to UHV Design on +44 (0)1323 811999. 

Alternatively complete our online form at http://www.uhvdesign.com/epicentre_questionnaire.htm 



What size are the samples/ wafers? 

What material are the samples? 

Are the samples/wafers supported or holder free? 

What is the application? i.e MBE, sputtering, CVD.... 




Are gases involved with your process? If so please state the maximum partial pressure for each gas before and 

during deposition along with the maximum sample temperature for each case. 

Gas Type Maximum 


before process 


at this point 

Maximum 


during process 


at this point 






What orientation is the stage to be mounted? 

Type C Thermocouple Type K Thermocouple 

Vertical, wafer facing down Vertical, wafer facing up 

Horizontal Other (please specify) 

Is rotation required? If so please state the required spin speed (RPM) 

To what temperature do you wish to heat the substrate / sample? 

Do you require substrate DC biasing? If so, Volts / Watts? 

Do you require a controller/ power supply? 

Will RHEED be used with this application? 



EpiCentre Controllers and Power 

Supplies 

The EpiCentre range can be confi gured to allow the 

use of existing motor, temperature controller and 

heater power supplies. Where new equipment is 

required UHV Design offer complete solutions from 

a series of high quality, modular, control packages. 

Substrate rotation 

EpiCentre stages with wafer sample rotation may 

be fi tted with DC or stepper motors. The DC option 

is preferred for smooth drive, however, if indexing 

or positioning of the substrate is required then a 

stepper motor should be selected. 

Stepper motors 

The Programmable Stepper Motor Control Centre 

(PSMCC) provides a complete solution to substrate 

rotation. Supplied with its own Windows TM based 

software, the interface is intuitive whilst providing a 

comprehensive array of control options. It may also 

be linked to an existing host controller via various 

inputs and outputs. See page 178 for further 

details. 

DC motors 

If DC motors are selected for the EpiCentre substrate 

spin system, then the rotation controller DCMC may 

be used. This unit is a 24VDC power supply providing 

speed control. A rear panel connector allows remote 

operation from a 0-10 volt programming signal. 

The unit is housed in a half rack, 3U enclosure and 

complies with CE regulations. 

Axial translation 

For motorisation of the various axial translations 

offered, it is recommended that the customer uses 

either the Programmable Stepper Motor Control 

Centre (page 178) or the hand-held DC controller 

(page 176). 

Temperature controllers 

For optimal stage heating and substrate temperature 

control UHV Design offer the TCI power supply with 

3–term proportional temperature control. 

The unit comprises a Eurotherm PID (Proportional, 

Integral and Derivative) temperature controller, 

driving a Glassman high performance programmable 

DC power supply, of suitable voltage / current rating 

to match the heater requirement. 

The Glassman unit offers reliable, low noise 

operation, resulting low element stress and 

minimal EMC interference when performing RHEED 

measurements. 

The TC1 is CE compliant and can be supplied with a 

range of features. 


DC motor controller model DCMC 


Temperature Controller model TC1 

Glassman DC heater power supply 

141 

Controllers and Power Supplies

EpiCentre 282 

142 


EpiCentre 282 

The EpiCentre 282 is a full heating and rotation stage intended primarily as a retrofi t instrument for molecular 

beam epitaxy systems such as the V80H. This component differs from the EpiCentre 100 and 346 in that 

it supports the substrate at right angles to the general manipulator Z axis. Two axes of rotation provide 

continuous azimuthal rotation for the sample and a limited primary rotation for substrate orientation. 

An awareness of existing right-angled manipulator 

design drove us to completely rethink the concept 

of this stage. By stacking two of our existing rotary 

feedthroughs, UHV Design are able to achieve a dual 

axis, concentric rotation system, which eliminates 

the head positioning gear train typically used by 

other manufacturers. By incorporating our existing 

heater module technology into this component, 

UHV Design are able to improve on both ultimate 

temperature capability, uniformity and reliability. 

System design philosophy 

The azimuthal drive is achieved through a bevel gear 

train, actuated by the MD16 MagiDrive. Particular 

attention has been paid to the design of this section 

of the instrument, as it has conventionally been 

the source of premature failure. The gear train is 

supported in a precision housing that ensures the 

gear pitch distance does not reduce for increased 

temperature. The substrate cradle drive mechanism 

is positioned further from the hot zone and uses 

large ballraces in an arrangement tolerant of the 

thermal stresses. This all results in low radial run 

out of the cradle during rotation, which is important 

for serious RHEED measurements. 

Stage positioning 

The EpiCentre 282 may be fi tted with a simple 

manual tilt positioning selector. Alternatively, a fully 

automated system is available. Manual positioning 

is achieved by thimble adjustment of an MD35H 

MagiDrive. A positioning ring with an external spring 

loaded pin, is attached to the drive. Releasing the 

pin enables the drive to be rotated to a number 

of pre-defi ned positions. These ensure simple and 

repeatable locking of the stage for sample transfer, 

growth, fl ux monitoring and RHEED. The RHEED 

position may be fi nely tuned to allow for chamber 

geometry variations. The automated option provides 

stepper motor control over the MD35H. Bakeable 

switches protect the system from travel beyond its 

limits and provide an absolute homing point. When 

coupled to the PSMCC1 (page 178), this system 

allows precise positioning to be achieved throughout 

the desired range. 


Heater modules 

The 282 series is available with the same 100 series 

heater element technology, described on page 132 

including PgG (Pyrolytic graphite coated Graphite) 

and PBN (Pyrolytic Boron Nitride coated graphite). 

These heater elements offer the best ratio of heat 

radiating surface to gap and therefore run at lower 

temperatures for a given power transmission. 

The heater module is also available with a quartz 

guard to protect the element during sample 

transfer. The heater element power graph (right) 

plots the required Volts or Amps (left scale) to 

reach temperatures ranging from 400ºC - 820ºC. 

The graph then illustrates the total power (Watts) 

required for the same temperature range (right 

scale). Below this the heater resistance is plotted 

versus temperature. Other heater confi gurations 

can be provided on special request. 

Substrate spin, positioning, temperature 

control and power supply options 

The 282 may be fi tted with DC or stepper motors 

for continuous substrate rotation. Both options 

may be controlled using the DCMC or PSMCC (page 

175). The heating element is designed to match the 

TC1 temperature controller and 1.2 kW Glassman 

supply feature on page 141. 

A schematic of a typical EPI282 stage is included on 

the following page. 



Primary drive system MD35 Drive for manual positioning of substrate for deposition, transfer, fl ux 

monitoring etc. The MD35 is fi tted with an indexing head for fast and simple 

positioning. The RHEED position is adjustable to enable fi ne tuning of experiments. 

Secondary drive system MD16 MagiDrive for continuous substrate rotation, fi tted with a DC or stepping 

motor. Including an extended bearing housing for pinion support. 

Heater module • Designed for sample heating up to 1,000ºC (based on heating a Mo test disc) 

dependant on duration of heating 

• PgG, PBN elements (further options upon request) 

• Type C, Tungsten Rhenium (W/Re) thermocouple 

• Refractory metal enclosure 

• Optional quartz disc guard for heater protection 

Sample Molybdenum sample cradle assembly confi gured to accept a 90 mm diameter 

substrate holder, which accommodates wafers in the range of 25 mm to 90 mm 

diameter 

System fl ange adaptor CF150 (8” OD) CF fl ange fi tted with porting for rotary drive stack, main substrate 

shutter, power and thermocouple feedthroughs, fl ux monitor 

Controllers/power supply MCDC, PSMCC, TC1 and Glassman power supply options. 

143 

EpiCentre 282

EpiCentre 282 

144 


Example EpiCentre 282 Stage 




Section 8 

Heater Modules 

Introduction to Heater Modules 146 



Heater Modules


146 



 

 

 

 

High uniformity heating to 1000°C 

(1200°C for certain applications) 

Refractory metal hot zone 

High performance PgG or PBN 

coated graphite elements 

Quartz guard option for element 

protection 

In addition to the complete sample heating solutions 

offered in the EpiCentre section (page 129) UHV 

Design also offers a range of individual heater 

modules for end users to incorporate in their own 

heater stage designs. The range provides end users 

with a cost-effective solution to sample heating, 

whilst benefi ting from a proven heater technology 

used in market leading stages. 

Heater module overview 

UHV Design heater modules are used in vacuum 

applications for radiantly heating semiconductor 

wafers, holder supported samples or various other 

substrates to high temperatures. The modules 

feature CVD processed heating elements packaged 

in refractory metal cases. 

The immediate hot zone holding the element 

is constructed from refractory metals such as 

molybdenum and tantalum and does not include 

any ceramics or other materials to compromise 

performance at high temperature. These modules 

are therefore particularly suitable for ultra high 

vacuum applications. 

Thermocouples 

Heater modules are available with type ‘C’ or 

‘K’ thermocouples and can be supplied with 

semiconductor grade ‘quartz guards’ to protect 

the heater element from mechanical damage, i.e 

accidental contact with the sample transfer tool. 

Type C (Tungsten/Rhenium) thermocouples are 

provided as standard. For applications in which the 

use of Tungsten or Rhenium would be undesirable 

a type K (Chromel/Alumel) thermocouple can be 

supplied. 

Heater elements 

Heating elements are constructed from high quality, 

high-density graphite, coated with pyrolytic graphite 

or pyrolytic boron nitride. By virtue of the large 

radiating surface to gap ratio, these elements run at 

considerably lower temperatures than conventional 

metal heaters. The typical ratio of element surface to 

meander gap is 5:1 resulting in excellent substrate 

heating uniformity, even without rotation. 


Two heater elements are offered as standard, though other options are available upon request. 

PgG elements 

Pyrolytic graphite coated Graphite (PgG) elements are the standard type used for the EpiCentre deposition 

stages. Robustness, reliability, high temperature capability, excellent uniformity and cost are all aspects that 

make this element desirable. 

PBN elements 

Pyrolytic Boron Nitride (PBN) elements are made from a grown PBN disc with a graphite fi lm, etched into 

an element formation. This is then coated/sealed with a PBN layer to minimise exposure to the system. Two 

graphite areas remain exposed to the system to enable electrical contact. This design offers robust, long life, 

lower current heating. 

Heater Module size A Ø B PCD C D E F G H 

HM-25 50 35.2 20.8 12 6 17.6 12 8 

HM-50 78 63.75 26.7 17.43 11.20 38 30 26.7 

HM-75 112.5 89.8 26.7 17.43 11.20 38 30 26.7 

HM-100 137.5 115.25 26.7 17.43 11.20 38 30 26.7 

HM-150 188 160 78 45 22.5 48.5 30 26.7 

HM-200 230 204.5 78 45 22.5 48.5 30 26.7 



147 

Heater Modules


148 


Heater module part code generator 

Heater module Sample size Heater element Thermocouple type 

HM - - - 

25 PGG C 

50 PBN K 

75 

100 

150 

200 

Example partcode: HM-25-PGG-C 

HM - Heater Module 

25 - Suitable for 25 mm samples/ wafers 

PGG - Pyrolytic Graphite coated Graphite element 

C - Tungsten Rhenium Thermocouple 


Sample size Heater element Thermocouple type 

25 25 mm or 1” wafer/sample size PGG Pyrolytic Graphite coated Graphite C Type C, Tungsten Rhenium 

50 50 mm or 2” wafer/sample size PBN Pyrolytic Boron Nitride coated Graphite K Type K, Chromel Alumel 

75 75 mm or 3” wafer/sample size 





Section n 9 

MicroProducts 

Introduction 150 

MicroFlanges 151 

Gaskets and Bolt Sets 153 

Confl at Zero Length Adaptors 154 

Tubulated Fittings 154 

MicroBellows 155 

MicroDrives 156 

MicroShifts 158 

MicroFeedthroughs 160 

MicroProducts 


MicroProducts

MicroProducts 

150 

MicroProducts 

MicroProducts 

Introduction to MicroProducts 

As the technological demands in vacuum research 

progress, there is an ever increasing need to make 

best use of vacuum chamber ‘real estate’. This 

continuing trend to achieve compactness and 

effi ciency is what underpins the concept of UHV 

Design’s MicroProduct range. 

The CF10 MicroFlange 

The CF10 has an external diameter of just 25.4mm 

(1”), and makes possible a new range of MicroFlange 

based products. Use of the CF10 enables assemblies 

such as cluster fl anges and instrument service 

collars to be made more compact saving critical 

space. For example, a total of seven CF10 fl anges 

can be fi tted on a CF64 114mm (4.5”) OD fl ange. 

The CF10 MicroFlange was originally designed to 

provide system designers with additional fl exibility, 

but soon became the platform from which an entire 

range of MicroProducts was created. 

Since then, the MicroFlanges and accompanying 

MicroProducts have been included in leading 

vacuum distributor catalogues, and are now stocked 

around the world. As the CF10 is accepted within 

the international standards framework (ISO), and 

provides a real solution for system designers and 

integrators around the world. 

MicroFlanges MicroBellows MicroDrives MicroShifts MicroFeedthroughs 

Page 151 Page 155 Page 156 Page 158 Page 160 


MicroFlanges 

 

 

 

 

Smallest UHV fl ange on the market 

Greater choice for designers 

UHV copper gasket seal 

Metric tube compatibility 

Introduction to MicroFlanges 

The CF10 MicroFlange is the smallest UHV fl ange on 

the market, accepting 10 mm diameter tubes. The 

range compliments the conventional Confl at range 

of fl anges by providing system and instrument 

designers with additional choice and fl exibility. 

Sealing techniques 

The method of sealing employs a copper gasket 

trapped between two knife edged fl anges. Six M3 

bolts apply the required torque to ensure the correct 

bite pattern for UHV sealing. All the MicroFlanges 

accept metric washers which is essential for reliable 

bolting. All fl anges are manufactured from 316L 

stainless steel. 

MicroFlange part code generator 


MicroProducts 

MicroFlange Size Flange type Tapped holes option 

CF 10 - 

M T 


Size Flange type Optional tapped holes 

10 25.4 mm OD Mini Confl at M Fixed bored T Tapped holes 

MB Fixed blank 

MB 

151 

MicroFlanges

MicroFlanges 

152 

MicroProducts 

Flange Part No. Ø A Ø B Ø C 

bolt 

hole 

P.C.D 

Fixed bored 

fl anges with clear 

boltholes 

Fixed bored 

fl anges with 

tapped boltholes 

Fixed blank 

fl anges with clear 

boltholes 

Fixed blank 

fl anges with 

tapped boltholes 

CF10M 9 mm 10 mm 17.5 

mm 

CF10MT 9 mm 10 mm 17.5 

mm 

CF10MB - - 17.5 

mm 

CF10MBT - - 17.5 

mm 

Ø D E F G 

25.4 

mm 

25.4 

mm 

25.4 

mm 

25.4 

mm 

Bolt holes 

3 mm 6 mm Clear 6 x Ø 3.2 

mm 

3 mm 6 mm Tapped 6 x M3 

3 mm 6 mm Clear 6 x Ø 3.2 

mm 

3 mm 6 mm Tapped 6 x M3 


Copper Gaskets 

Part number Pack size Ø A 

CF10G 10/pack 8.5 mm 

Stainless Steel Bolt Sets 


MicroProducts 

Part number DN Type (M) L Screw type Pack size 

CFB10 10 M3 16 Hexagon screw 25 

CFB10-T 10 M3 12 

Hexagon screw for Flanges with 

Tapped Bolt Holes 

25 

153 

MicroFlange Accessories

MicroFlange Adaptors 

154 

MicroProducts 

CF Micro Reducing Adaptors 

Zero length adaptors allow the CF10 MicroFlange to 

be adapted between conventional CF16 (1.33” OD 

CF) and CF38 (2.75” OD CF) Flanges. 

Part no. Description A D L 

ZL16-10 

ZL35-10 

CF16 (1.33” OD) 

to CF10 

CF38 (2.75” OD) 

to CF10 

CF Micro Tubulation 

34 9 10 

70 9 13 

The MicroFlange tubulations enable end users to 

easily incorporate the CF10 within their assemblies, 

cluster fl anges and chambers. 

Part no. DN A L RA 

TU-10 10 25.4 30 10 


CF MicroBellows 

An Edge-welded Bellows Assembly with CF10 

MicroFlanges is offered to allow for system 

misalignment, vibration reduction, and to 

compensate for differential thermal expansion. The 

bellows are fully bakeable to 450 o C 

Part number DN D D2* Lmax Lmin 

EWB-10 10 20 10 57 47 

* Clear ID limited to 8.5 mm by gasket 


MicroProducts 

155 

MicroBellows

MD10 MicroDrive 

156 

Spec box 

MicroProducts 

MD10 - 25.4 mm CF MicroFlange 

 

 

 

 

 

Smallest UHV drive on market 

High torque / size ratio 




This miniature drive is made possible through the 

use of the new CF10 Micro-Flange (page 151), 

which has an outside diameter of just 25.4 mm. 

The body diameter is no bigger than the fl ange 

OD, which makes the MD10 ideal for rotating small 

instrumentation loads, in applications where space 

is at a premium. 


System mounting fl ange CF10 25.4 mm (1” OD) 

Construction 



316L 




bearings) 


thrust 

200 rpm 


20 N (4.5 lbf) 

MD10TX000Z 




MicroProducts 

If you have a special requirement that is not offered in the standard partcode structure, such as a special shaft 

or extended bearing housing, please contact sales. 


* For information on gearing options for motorised MagiDrives please see page 006. 


T Standard thimble 000 Standard 10 mm shaft Z Standard bearing 

TF Standard with friction control 

CF 


control 





RAI 


MD10 X 000 Z 




T 

TF 

CF 

P 

IS (1-5)* 

ID (1-5)* 

RA 

RAI 






157 

MD10 MicroDrive

MicroShift 

158 

MicroProducts 

Part code Flange size 

MicroShift 

 

 

 

 

 


Clear 

bore mm 

Micro linear shift mechanism 

25 mm linear motion 

Edge-welded bellows seal 



The MicroShift is mounted on a CF10 MicroFlange, 

with metric tapped bolt holes as standard and 

provides 25 mm of linear motion. It is ideally suited 

to low load, low cycle applications where space is at 

a premium. 

Maximum 

bakeout 

Standard stroke mm 

Actuation 

options 

LSM 10 CF10 (1” OD) 8 250 o C 25 H 

MicroShift LSM range part code generator 

Size Stroke Actuator 

LSM10 - 25 - H 



LSM10-25-H 


MicroProducts 

159 

MicroShift

MicroFeedthroughs 

160 

MicroProducts 

MicroFeedthroughs 

The compact MicroFeedthrough reduces the space envelope of the feedthrough assembly. By utilising a cluster 

fl ange the overall size of service collars and small instrumentation can be greatly reduced. This both lowers 

cost to the user and frees up space for other experimentation stages. 

The compact MicroFeedthrough consists of a stainless steel housing with ceramic insulators and gold plated 

Kovar contacts. The Feedthrough will operate at temperatures as low as -200 o C and is bakeable to 350 o C. 

Part number Description 

EF-PIN-10 

Part number Description 

EF-SMA-10 

CF-MicroFeedthroughs, 4 Pins, 

on CF10 MicroFlange 

Micro SMA Feedthrough, on CF10 

MicroFlange 

CF10 4 Pin MicroFeedthrough 

 

 

 

 

 

4 pin Feedthrough 

CF10 MicroFlange mounted 

Leak rate:

Section n 10 

UHV Flanges 


UHV Flanges 162 


UHV Flanges


162 



Full CNC manufacture for accuracy and 

repeatability 

High-fi nish knife edge for reliable seals 

Manufactured from 316L stainless 

steel to increase durability 

CF Fixed Blank Flanges CF Rotatable Blank Flanges 

Dimensional data mm 

T - Denotes tapped hole version available 

 

 

 

 

Cleaned and packed to UHV standards 

The diffi culty in obtaining high quality 316L 

stainless steel fl anges, with reliable knife-edges 

and seal faces has driven us to extend the range 

manufactured at our own facility. We now offer the 

most popular sizes in our range to other discerning 

users requiring true UHV performance. 

Flange type DN A D2 L Order Code 

CF Fixed 

Blank 

Flanges 

CF 

Rotatable 

Blank 

Flanges 

10 25 3.2 6 CF10MB (T) 

16 34 4.3 7 CF16MB (T) 

35 70 6.7 13 CF35MB (T) 

63 114 8.3 17 CF63MB (T) 

100 152 8.3 20 CF100MB (T) 

150 203 8.3 22 CF150MB (T) 

200 254 8.3 25 CF200MB (T) 

250 304 8.3 25 CF250MB (T) 

16 34 4.3 7 CF16BR (T) 

35 70 6.7 13 CF35BR (T) 

63 114 8.3 17 CF63BR (T) 

100 152 8.3 20 CF100BR (T) 

150 203 8.3 22 CF150BR (T) 

200 254 8.3 25 CF200BR (T) 

250 304 8.3 25 CF250BR (T) 


CF Fixed Bored Flanges 

Dimensional data mm 



Flange type DN A RA D L L2 Order Code 

CF Fixed 

Bored 

Flanges 

CF 

Rotatable 

Bored 

Flanges 

10 25 10 9 6 3 CF10M (T) 

16 34 19 16 7 4.8 CF16M (T) 

35 70 41 38 13 4.8 CF35M (T) 

63 114 70 66 17 7.9 CF63M (T) 

100 152 101 98 20 9.5 CF100M (T) 

150 203 152 149 22 9.5 CF150M (T) 

200 254 204 200 25 9.5 CF200M (T) 

250 304 254 250 25 12.7 CF250M (T) 

16 34 19 16 7 4.8 CF16MR (T) 

35 70 41 38 13 4.8 CF35MR (T) 

63 114 70 66 17 7.9 CF63MR (T) 

100 152 104 100 20 9.5 CF100MR (T) 

150 203 154 154 22 9.5 CF150MR (T) 

200 253 204 200 25 9.5 CF200MR (T) 

250 305 254 250 25 12.7 CF250MR (T) 

T - Denotes tapped hole version available 

CF Rotatable Bored Flanges 

163 

UHV Flanges


164 



Section n 11 

Edge-Welded Bellows 

Edge-Welded Bellows Range 166 

End Piece Selection 169 

Quotation Request Form 170 



Edge-Welded Bellows


166 



Flexible, high stroke designs for:- 

 

 

 

 

 

Axial motion up to 2 m 

Lateral offsets 

Vibration isolation 

Compensation for differential 

thermal expansion 

Angular alignment 

UHV Design supply a range of high quality 

edge welded bellows fully compatible with UHV 

environments. 

Applications are numerous and vary from 

fundamental vacuum research instrumentation, to 

equipment used in semiconductor manufacturing 

and data storage device fabrication. 

Bellows can be provided in various materials 

including: 

• Stainless steel 316L 

• AM350 

• Titanium 

• Inconel 

• Hastelloy 

This variety of materials provides the capacity to 

deal with demanding environments, such as very 

high or low temperatures, applications involving 

corrosive chemistries or to minimise residual 

magnetic fi elds. 

As standard, bellows have a design life of 10,000 

cycles, but customised designs can be provided with 

a design life in excess of 1 million cycles. 

UHV Design can offer bellows in various formats 

such as ‘race track’ bellows, and with a variety of 

fl anges, tube ends, bellows rings and customised 

end pieces to suit virtually any application. These 

can be provided against a customer supplied 

drawing or designed in house using our 3-D design 

software. 

Long stroke bellows can be provided supported or 

guided to eliminate droop / defl ection and possible 

damage. 

UHV Design bellows are competitively priced and 

are typically available within 4-5 weeks. To receive 

a quotation, please complete the form on page 169 

or send us drawings of your commonly used items. 


Edge-Welded Bellows 316L Material as standard 

(please contact sales for alternative materials) 

Inside 

diameter (mm) 

Outside 

diameter (mm) 

Compressed 

bellows length 

(mm) 

Free bellows 

length (mm) 

Axial stroke 

(mm) 

Welding lip grip 

(mm) 

Wall thickness 

membrane (mm) 


Profi le width 

(mm) 


Effective area 

(mm) 

Spring constant 

(axial direction) 

(mm) 

DN ID OD Ic If z Gr. t b EA SRCz Phi R 

10 

16 

25 

40 

50 

4.8 12.70 0.27 0.53 0.31 1 0.08 4.00 0.70 80.00 1.62 15.90 

6 13 0.27 0.50 0.28 1 0.08 3.50 0.80 105.00 1.41 17.50 

8 16 0.27 0.65 0.42 1 0.08 4.00 1.30 60.00 1.72 17.00 

8.6 16.20 0.20 0.55 0.48 1 0.05 3.80 1.30 25.00 1.95 14.00 

9 20 0.35 0.80 0.52 1 0.08 5.50 1.90 55.00 1.72 21.70 

9 31.50 0.36 1.35 1.03 3 0.10 11.00 4.30 55.00 2.15 25.30 

13 26 0.32 0.90 0.70 3 0.08 6.50 3.40 55.00 1.76 23.40 

16 31.50 0.45 1.20 1.01 3 0.13 7.75 5.00 95.00 2.09 28.10 

16 35 0.43 1.15 1.18 3 0.13 9.50 5.90 49.00 2.21 28.70 

18.5 31.50 0.37 0.90 0.74 3 0.10 6.50 5.30 95.00 1.55 29.50 

19 37 0.40 1.60 1.36 3 0.13 9.00 6.90 70.00 2.40 28.10 

21 41 0.50 1.85 1.67 3 0.13 10.00 8.40 75.00 2.66 31.30 

21 49 0.55 2.30 1.84 3 0.15 14.00 11.30 65.00 2.46 37.30 

21 39 0.43 1.10 1.23 3 0.13 9.00 7.80 49.00 2.06 31.50 

21.10 34.90 0.35 1.05 0.96 3 0.10 6.90 6.60 75.00 1.81 28.60 

24 35 0.33 0.70 0.61 3 0.10 5.50 7.20 82.00 1.15 34.00 

26 41 0.44 1.25 1.23 3 0.13 7.50 9.40 135.00 1.96 33.40 

26 46 0.45 1.80 1.67 3 0.13 10.00 11.10 75.00 2.37 33.90 

31 51 0.50 1.80 1.67 4 0.13 10.00 14.20 65.00 2.13 38.90 

35 48 0.33 90 0.70 1 0.10 6.50 14.00 90.00 0.95 43.80 

36 56 0.50 1.80 1.76 4 0.13 10.00 17.60 65.00 2.05 42.00 

36 72 0.75 2.50 3.01 4 0.20 18.00 25.80 90.00 2.73 51.70 

38 51 0.40 1.00 0.88 2 0.10 6.50 16.10 110.00 1.12 45.90 

39 59 0.50 2.00 1.76 4 0.13 10.00 19.90 65.00 1.94 44.30 

46 71 0.50 2.30 2.11 4 0.13 12.50 28.50 60.00 1.94 50.30 

46 62.50 0.50 1.45 1.32 3 0.13 8.30 24.00 130.00 1.38 52.10 

46 88 0.70 3.30 2.64 4 0.20 21.00 39.20 96.00 1.95 64.50 

51 76 0.50 2.40 2.28 4 0.15 12.50 33.30 85.00 1.96 52.60 

52 62 0.33 0.85 0.52 1 0.10 5.00 26.10 120.00 0.55 65.10 

52 95 0.75 3.60 2.99 4 0.20 21.50 46.70 75.00 2.05 68.50 

60 88 0.55 2.70 2.46 5 0.15 14.00 45.10 80.00 1.82 61.30 

All stated values refer to the following operating conditions: 

Differential pressure = 1bar 

Operating temperature = room temperature 

Bakeout temperature = 250°C 

Number of cycles = 10,000 cycles 

Bending angle 

(mm) 

Bending radius 

(mm) 

167 

Edge-Welded Bellows


168 


Edge-Welded Bellows 316L Material as standard 

(please contact sales for alternative materials) 

Inside diameter 

(mm) 

Outside 

diameter (mm) 

Compressed 

bellows length 

(mm) 

Free bellows 

length (mm) 

Axial stroke 

(mm) 

Welding lip grip 

(mm) 

Wall thickness 

membrane (mm) 

Profi le width 

(mm) 

Effective area 

(mm) 

Spring constant 

(axial direction) 

(mm) 

DN ID OD Ic If z Gr. t b EA SRCz Phi R 

63 

102 

160 

200 

250 

320 

65 90 0.50 2.40 2.46 4 0.15 12.50 49.00 95.00 1.78 61.10 

70 94 0.55 2.35 2.33 4 0.15 12.00 54.70 95.00 1.62 66.50 

75 100 0.60 2.40 2.55 4 0.15 12.50 62.20 95.00 1.66 70.70 

77.50 120 0.75 3.50 3.16 5 0.20 21.25 81.20 85.00 1.72 85.00 

80 108 0.55 2.25 2.2 5 0.15 14.00 71.90 80.00 1.33 77.80 

82 125 0.75 3.70 3.34 5 0.20 22.00 88.90 80.00 1.74 87.20 

90 120 0.60 2.80 2.46 5 0.15 15.00 89.50 70.00 1.34 85.70 

90 110 0.50 1.45 1.23 5 0.15 10.00 80.40 145.00 0.73 94.30 

90.50 135 0.70 4.20 3.69 5 0.20 22.25 105.10 80.00 1.78 90.00 

92 149 0.85 4.75 4.04 6 0.25 29.00 122.00 95.00 1.77 102.00 

102 132 0.60 2.60 2.72 5 0.15 15.00 110.70 75.00 1.35 91.60 

102.50 150 0.90 4.40 4.04 5 0.25 23.75 131.40 135.00 1.76 104.40 

110 160 0.80 4.25 2.64 5 0.20 25.00 150.00 40.00 1.07 122.70 

115 145 0.55 2.50 2.72 5 0.15 15.00 136.30 75.00 1.22 98.20 

127 157 0.70 2.60 2.81 5 0.20 15.00 162.30 100.00 1.17 112.80 

150 185 0.75 2.60 2.99 5 0.20 17.50 225.70 140.00 1.05 133.30 

156 186 0.75 2.60 2.90 5 0.20 15.00 234.50 200.00 1.02 135.30 

160 210 2.00 4.20 2.20 5 0.25 25.00 277.40 200.00 0.68 273.00 

173 203 0.65 2.50 2.81 5 0.15 15.00 283.10 100.00 0.90 142.70 

180 209 0.65 2.15 2.72 5 0.15 14.50 302.80 95.00 0.85 148.30 

180 215 0.75 2.80 2.99 5 0.20 17.50 312.90 148.00 0.91 154.90 

200 235 0.75 3.00 3.08 5 0.20 17.50 379.00 160.00 0.85 167.90 

230 265 0.70 2.80 3.08 5 0.20 17.50 490.00 160.00 0.76 185.50 

250 285 0.80 3.20 2.81 5 0.20 17.50 572.00 200.00 0.64 213.80 

280 330 0.90 3.30 3.08 5 0.20 25.00 745.00 150.00 0.61 249.00 

300 340 0.80 3.20 3.16 5 0.20 20.00 818.20 200.00 0.61 245.00 

360 440 2.00 7.50 5.28 6 0.30 40.00 1286.20 150.00 0.78 366.70 

400 400 480 1.45 5.00 3.96 6 0.40 40.00 1553.60 350.00 0.54 394.70 

All stated values refer to the following operating conditions: 

Differential pressure = 1bar 

Operating temperature = room temperature 

Bakeout temperature = 250°C 

Number of cycles = 10,000 cycles 

Bending angle 

(mm) 

Bending radius 

(mm) 


‘H’ type (single piece) Tube and ‘R’ type (two piece) 

Bellows 

Inside 

Diameter 

(mm) 

Bellows 

Outside 

Diameter 

(mm) 

Inside 

diameter of 

connecting 

tube (mm) 

Outside 

diameter of 

connecting 

tube (mm) 



Width of ring 

(mm) 

Length max 

(mm) 

Length max 

(mm) 

DN ID OD Di Da S L L1 

6 13 6.0 8.0 4.0 25.0

Bellows Request Form 

170 


Bellows quotation request form 

To request a quotation please photocopy, complete and fax this form to UHV Design on +44 (0)1323 811999 

Customer Name: 

Postal address: 

Tel: 

Fax: 

Email: 

Inside Diameter (ID) mm 

Outside Diameter (OD) mm 

Working stroke axial (Z) mm 

Lateral offset (if applicable) mm 

Tilt in degrees (if applicable) o 

Material 316L AM350 Ti Inconel Other 

Operating temperature 

Heating temperature 

Operating pressure inside bar 

Operating pressure outside bar 

Leakage rate (standard 1 x 10 -9 mbarls -1 ) mbarls -1 

Lifetime required (Standard 10,000 cycle) cycles 

End-pieces/ type: CF fi xed fl ange, CF rotatable 

fl ange, ‘H’ Type, ‘R’ Type or other 

Number of pieces required 


Standard operating temperature = 20 o C, standard heating temperature = 250°C 

Standard internal operating pressure = 0 bar, standard external operating pressure = 1 bar 


o C 

o C

Section n 12 

Goniometers 

Goniometers 

Introduction to Goniometers 172 


Goniometers

Goniometers 

172 

Goniometers 

Goniometers 

 

 

 

 

Up to six axes of manipulation 

Precise and durable 

True UHV performance 

Individually specifi ed for customer 

application 

Introduction to Goniometers 

A goniometer is an instrument that either measures 

angles or allows an object to be rotated to a precise 

angular position. The term goniometer is derived 

from two Greek words, gonia, meaning angle and 

metron, meaning measure. 

UHV Design have manufactured a number of special 

UHV goniometers for diverse applications, such as: 

• Electron band gap mapping using hemispherical 

analysers 

• Particle fl ux angular anisotropy measurements 

• Vacuum X-ray crystallography 


Given the specialist nature of Goniometer 

applications each is custom designed to meet the 

users’ specifi c needs. UHV Design’s full range of 

manipulation products provide the building blocks 

for goniometers, as described below. 

Using our extensive range of MagiDrive magnetically 

coupled rotary drives, we eliminate the potential for 

leaks, backlash, and catastrophic failure associated 

with bellows sealed rotary motion couplings. This 

is particularly benefi cial for applications where very 

strict system cleanliness needs to be maintained and 

for ‘big’ physics experiments where the possibility 

of catastrophic vacuum failure must be completely 

eliminated. 

UHV Design’s ‘hollow’ MagiDrive rotary couplings 

can be ‘stacked’ one atop another, providing up to 

four concentric shafts with independent rotation. 

(Please see page 029 for more information). 

Built upon a MultiStage XYZ manipulator this 

means that up to seven independent motions can 

be transmitted through a single port in the vacuum 

wall – providing effi cient port utilization. 

Driven from these building blocks a range of multiaxis 

turntables can be provided for the mounting of 

large analysers and detectors. 

Each motion can be manually driven, DC motor 

driven or stepper motor driven. Stepper motors 

can be controlled by UHV Design’s programmable 

stepper motor controller, which has a very powerful, 

fl exible and friendly GUI. 

UHV limit switches can also be fi tted. 

An outline drawing of a previously supplied 

Goniometer can be found overleaf. 

For more information on UHV Design’s Goniometers 



Goniometers 

173 

Goniometers

Goniometers 

174 

Goniometers 


n 

Motion Controllers 

Hand-Held DC Controllers 176 

Programmable Stepper Motor Controllers 178 

Modular Stepper Motor Controllers 182 



Motion Controllers

Hand-held DC Motion Controllers 

176 


Hand Held DC Controller 

 

 

 

 

 

Simple bi-directional variable speed 

DC motor controller 

Brushless DC motor technology for 

long life 

50 W power output 

Full torque from 100- 3000 RPM 

Limit switch input options 

Introduction 

UHV Design’s DC motor controller has been 

developed to offer simple, single-axis remote 

control of its manipulation products. 

The control interface module with both speed and 

direction controls, can be plugged into the motor 

directly. Alternatively an extension cable can be 

utilised for remote control. The control interface 

can then take two inputs for limit switches, thus 

preventing ‘over-drive’ in either direction. The 

hand-held DC motor controller provides a simple 

cost effective solution to DC motorisation. 

Operation 

The system has the advantage over many 

conventional variable voltage supplies in that it is a 

true speed controller and gives full torque throughout 

the speed range. It has particularly smooth running 

characteristics (even at slow speeds). 

Universally rated to ensure voltage compatibility, 

the controller is fully compliant with EMC test 

regulations and carries the CE mark. 

The DC Motor controller is only specifi ed for DC 

motor driven components it has been supplied with. 

This will ensure product compatibility. 

Technical Specifi cation 

Input voltage 90 - 220 Vac 

Nominal output voltage +24 V DC 

Current output (max) 1.9 A (45 W) 

Speed Control 

100 - 3000 RPM 

@ full torque 


Option A - 

Base model: 



Brushless DC servo motor 

Direction and speed control module 

Switch mode AC Power Supply Unit 

Option B - 

Base model and extension cable: 




Control module extension cable 

Option C - 

Base model with limit switch cable: 




Limit Switch signal control cable 

Option D - 

Full system: 




Control module extension cable 

Limit Switch signal control cable 

Key Part No. Description Option A Option B Option C Option D 

DC Motor 

PSU 

DC motor 

PSU 

Hand-held controller 

Brushless DC Servo motor with 

integrated electronics 

Switch mode AC PSU for input 

voltage from 90 to 220 Vac 

Main controller with directional 

switch and speed control facility 

1 1 1 1 

1 1 1 1 

1 1 1 1 

Motor interface PSU to motor cable 1 1 1 1 

Input cable 

Controller extension 

cable 

Optional limit switch signal 

control cable - used when 

powering manipulation 

Optional 5m extension cable for 

hand-held control module 

0 0 1 1 

0 1 0 1 

177 

Hand-held DC Motion Controllers

Stepper Motor Controllers 

178 


Introduction 

The PSMCC series offers a complete solution for 

intelligent motion control of stepper motor driven 

products for up to four axes of motion. The units 

are provided with user-friendly Microsoft Windows 

based software, offering a multitude of features to 

accommodate both general and complex motion 

control requirements. 

The complete solution 

Stepper motors require an electronic module to 

accept command signals and interpret these in 

terms of providing power to the motor. This module 

is called a driver. Drivers also require a further 

electronic system with software to compute and 

execute the required motion profi le, interface with 

other systems and control the sequence and timing 

of events. This system is called a controller. UHV 

Design have combined driver and controller with 

the necessary peripheral components required 

for an industrial standard, programmable stepper 

motor control centre. 

To ensure ‘plug and play’ with all UHV Design 

products, various upgrades are offered including 

pre-wired bakeable home and limit switches, along 

with input and motor connectors. 

PSMCC’s can be used together to provide up to four 

separate axes of motion, enabling complete motion 

control solutions to be provided. 

Performance features 

The control centres are each housed in 19 inch rack 

mounted cases. The front panel features switches 

for starting a sequence, jogging and an emergency 

stop. All other control functions are entered through 

the PSMCC’s software. This Microsoft Windows 

based software package allows the user to set 

motor current, idle current, step resolution, jogging 

parameters, limit switch polarity and even defi ne 

the units to be used. 

Programmable Stepper Motor 

Control Centre 

 

 

 

Single and Multiple axes control 

User friendly software 

‘Plug and Play’ with UHV Design 

products 

The user-friendly software provides an excellent 

interface to write both simple and complex motion 

control programs. Once programmed, the centre 

may be disconnected from the PC and on the start 

command, will execute the downloaded control 

commands. Software interface examples are 

included on page 179. 

Ultra-smooth motion 

A micro-stepping driver is used to ensure smooth 

motor operation, avoiding the cogging associated 

with stepper motors. Micro stepping, subdivides 

1.8° steps (standard motors) with a choice of up 

to 13 further step resolutions. The highest setting 

divides each full step in to 254 micro-steps. 

Module confi guration 

Schematic diagrams for single and multiple axis 

control systems can be found on pages 180 and 

181. As illustrated, each axis requires a separate 

control centre with corresponding cables. Each can 

then be fi tted with a ‘remote jog’ facility. PSMCC 

control centres can be confi gured for 110 Vac or 

220 Vac. 


Main screen Programming tool box 


Part number Product description 

PSMCC-220V 

PSMCC-110V 

Case 19 inch rack mounting, 2U high, 290 mm deep. 

Motor compatibility 

Electrical supply 



UHV Design’s standard range of stepper driven products and other NEMA 

17, 23 and 34 frame motors (limited to 3.5 amps, 42 volts). 

Factory set for 110Vac (PSMCC_-110V) or 220Vac (PSMCC_-220V), 

50-60Hz. 

Front panel facilities Mains ON/OFF, Emergency stop, Start and Jog Lemo style connector. 

Rear panel facilities 

Interlock 9 pin “D” connector, Motor Lemo style connector, Output 9 pin 

“D” connector and Input 9 pin “D” connector, PC 9 pin “D” interface connector, 

IEC Mains input. 

Limit switching Facility for two mechanical switches. 

Inputs 

Outputs 2 off spare outputs. 

Controller 

Driver 

PSMCC-INT Interlock cable 

3 off spare inputs. Inputs may be TTL, PLC or mechanical switches. Onboard 

power supply for input switching. 

Programming platform: Microsoft Windows based software for easy 

setup and programming. RS232 cable connects your PC for programming 

(PC running Windows 98, 2000, ME, NT or XP with a 9 pin serial port). 

MOSFET driver: Providing 3.5 amps per phase at 42 volts and microstepping 

to 50800 steps per revolution. 

Interlock cable to allow the user to connect emergency stop buttons 

between axis controllers. 

PSMCC-RJ Jog facility Optional remote jog facility for connection to the PSMCC front panel. 

PSMCC-MC Motor cable 

PSMCC-OC Output cable 

PSMCC-IC Input cable 

PSMCC-COMM 

Communications 

cable 

PSMCC-PC PC cable 

5m motor cable for connection to the PSMCC. Includes connectors at each 

end. A further matching connector is supplied for attaching to the motor. 

5m output cable with a 9-pin D type connector for PSMCC connection. 

Terminating with a fl ying lead for user output wiring. 

5m input cable with a 9-pin D type connector for PSMCC connection. 

Terminating with a fl ying lead for user input wiring. 

1.5m cable terminating with two 9-pin D type connectors to interface 

between the PSMCC2 and other PSMCC terminals. 

3m PC cable terminating with two 9-pin D type connectors to interface 

between the PSMCC1 or PSMCC2 and the PC terminal. 

179 

Stepper Motor Controllers


180 


Key Part No. Description Single Axis Dual Axis Triple Axis Quadruple 

Axis 

PSMCC1 

PSMCC2 

PSMCC3 

PSMCC4 

PSMCC1 1st Axis Controller 1 1 1 1 

PSMCC2 2nd Axis Controller 0 1 1 1 

PSMCC3 3rd Axis Controller 0 0 1 1 

PSMCC4 4th Axis Controller 0 0 0 1 

PSMCC-PC PC cable 1 1 1 1 

PSMCC-COMM 

Communications 

cable 

PSMCC1 1st Axis Motor 

JOG 


JOG 

PSMCC2 2nd Axis Motor 

JOG 

0 1 2 3 

PSMCC-INT Interlock cable 0 1 2 3 

PSMCC-MC Motor cable 1 2 3 4 

PSMCC-RJ Remote jog As required 

PSMCC-IC Input cable As required 

PSMCC-OC Output cable As required 

Single Axis Control system 

Dual Axis Control system 

Single Axis product basket includes: 

PSMCC-1 First axis controller 

PSMCC-PC Computer connection cable 

PSMCC-MC Motor cable 

Options: 

PSMCC-IC Input cable 

PSMCC-OC Output cable 

PSMCC-RJ Remote Jog facility 

Dual Axis product basket includes: 


PSMCC-2 Second axis controller 


PSMCC-COMM Communication cable 

PSMCC-INT cable 

2 x PSMCC-MC Motor cables 

Options: 

2 x PSMCC-IC Input cables 

2 x PSMCC-OC Output cables 

2 x PSMCC-RJ Remote Jog facilities 


Triple Axis Control system 


JOG 


JOG 

PSMCC3 3rd Axis Motor 

JOG 

Quadruple Axis Control system 


JOG 


JOG 

PSMCC3 3rd Axis Motor 

JOG 

PSMCC4 4th Axis Motor 

JOG 



Triple Axis product basket includes: 



PSMCC-3 Third axis controller 



2 x PSMCC-COMM Communication cables 

2 x PSMCC-INT cables 

Options: 

3 x PSMCC-IC Input cable 

3 x PSMCC-OC Output cable 


Quadruple Axis product basket includes: 



PSMCC-3 Third axis controller 

PSMCC-4 Fourth axis controller 



3 x PSMCC-COMM Communication cables 

3 x PSMCC-INT Cables 

Options: 

4 x PSMCC-IC Input cable 

4 x PSMCC-OC Output cable 


181 

Stepper Motor Controllers


182 


Modular Stepper Motor 

Controller (MSMC) 

 

 

 

 

 

 

 

 

Single and Multiple axis control 

A complete system solution 

Plug & run simplicity 

Programmable positioning 

Optional closed loop control 

Matching size 17–34 frame motors 

Bench or rack mounting options 

0.5 to 3.5 A per phase current 

output. 48 V DC 

Introduction 

The MSMC integrated stepper motor controller 

provides a cost effective solution to a wide range 

of applications that require accurate manipulation 

of the driven mechanism. The MSMC incorporates a 

less sophisticated software interface to that of the 

UHV Design ‘Programmable Stepper Motor Control 

Centre’ (PSMCC) range described on page 178. 

A user friendly command line interface is used to 

communicate to the MSMC via a host computer. 

The commands are inputted as a string of ASCII 

characters that can then be transferred via the 

RS232 or RS485 connection to the controller. A 

number of strings can be stored in the MSMCs’ on 

board memory to form a sequence of moves that 

can be triggered by the available inputs. 

Simply connect the intelligent drive to a PC, motor, 

travel limits etc, and an AC power supply using cables 

provided, and the system is fully operational. 

• Integrated power supply for direct connection 

to AC supply 

• Choice of 115 or 230 Vac, 50 or 60Hz operation 

• Integrated high effi ciency bi-polar drive stage 

400 step/rev. (half-step mode) motor 

resolution provides smooth operation 

• Integrated motion controller 

• RS232 or RS485 communication 

• Up to 99 units can be daisy chained to a single 

port 

• Internal memory stores sequences for stand 

alone operation 

• Programmable position, acceleration, 

deceleration & velocity 

• 8 in and 8 out programmable digital I/O to 

interface with other process functions 

• Dedicated inputs for limits and datums 

• Optional jog box for manual operation 

• Choice of matched size 17, 23 & 34 frame 

motors 

For more information on the MSMC controller 



Section n 14 

Synchrotron Solutions 

Synchrotron Beam Finder / Aligner 184 



Synchrotron Solutions

Beam Finder/ Aligner 

184 


Synchrotron Beam Finder/Aligner 

 

 

 

 

 

Phosphor screen optical viewing 

system 

Can be confi gured for photon, 

electron, ion or particle beams 

Can be used for both alignment and 

viewing of beam 

Quick and easy screen change 

Effective in high ambient light 

conditions 

Introduction 

UHV Design provide a beam viewing / aligning 

probe, for use on Synchrotrons and accelerators. 

Comprising a phosphor screen, optical viewing 

system and TV camera the Beam Alignment Probe is 

mounted on a high-precision bellows sealed Linear 

Shift Mechanism (see section 5). This allows the 

Beam Alignment Probe to be interposed in the beam 

for viewing and alignment, and then withdrawn. 

The design is compact and co-axial to minimize the 

volume envelope of the probe, and maximize port 

utilization. Light emitted from the screen is refl ected 

along the axis of the probe, from a robust machined 

aluminium mirror, and through a 38 mm viewport 

where it is collected by a large ‘f’ stop lens into a 

low light camera. 

This geometry ensures the focal plane is fl at and 

effectively perpendicular to the camera, so that 

high ‘f’ stop lenses can be used for maximum 

sensitivity. 

The mirror, being machined from solid aluminium is 

relatively radiation hard, and should be unaffected 

by the beam. Where X-ray / Gamma radiation is 

intense and there is concern about the mirror 

scattering ionizing radiation directly into the camera 

and producing noise, the viewport can be provided 

with a lead glass screen. Alternatively in really 

extreme environments a second mirror can be 

provided to move the camera off-axis altogether. 

A variety of easily changeable phosphor screens 

can be provided for optimum performance for 

different particle beams or X-ray / UV wavelength 

ranges. The table overleaf gives a brief summary 

of some commonly used phosphors and their key 

parameters. 

As an alternative for photon beams, a semitransparent 

phosphor screen can be mounted at 45 o 

to the probe axis such that the beam can be viewed 

whilst still being used. 

Furthermore, screens can be provided with thin Al 

over-layers or ITO under-layers to minimize the 

effect of charging. Being of a light tight construction, 

the use of an Al coated phosphor screen also 

means the unit can be used in high ambient light 

conditions without degrading the beam image. 

These confi gurations could also be used to measure 

a photo-emission current 

The camera can be of the customers choosing, 

although we can also recommend preferred models 

from normal cable connected units, to Fire WireTM 

cameras. 


Phosphor screen options 


X-ray 

Gamma 

UV 

IR 

Alpha 

Beta 

Electron / ion 

Neutron (n) 


Emission colour 

Spectrum type 

Peak emission (nm) 

Decay to 10% 

Afterglow 

Particle size range - um 


Gd O S:Tb 2 2 Green line 545 1.5ms low 2.5-25 7.3 2.3 15 K-edge 50KV High X-ray 

absorption 

Gd O S:Eu 2 2 Red Line 627 850us yes 2.5-25 7.3 2.3 12 L Edge 8KV 

- also used 

for VUV 

Gd O S:Pr 2 2 Green Line 513 7us no 2.5-10 7.3 2.3 13 UV

Beam Finder/ Aligner 

186 


Synchrotron Beam Finder/Aligner Questionnaire 

To request a quotation please photocopy, fi ll in this page and fax to UHV Design on +44 (0)1323 811999. 



What is the application? (UV, electrons, ions etc.) 

What is the beam energy? 

What size is the beam? 

What phosphor type is required? (see table on previous page) 

Is an ITO base or Al over-layer required? 


Do you need to bias or electrically isolate the screen? If so to what level? 

What is the size and type of your system mounting fl ange? 

What is the maximum Z motion you require (mm)? 

Do you require X and/or Y motion? If so how much? 

Maximum X motion (mm) 

Maximum Y motion (mm) 

Please indicate the actuation method for each axis of manipulation: 

X Motion Manual Stepper Motor DC Motor 

Y Motion Manual Stepper Motor DC Motor 

Z Motion Manual Stepper Motor DC Motor 



Section n 15 

Custom Solutions 

Custom Solutions 188 



Custom Solutions


188 



Introduction 

UHV Design manufacture quality components for use in high and ultra high vacuum environments. Our ability 

to address specialist applications has lead us, through it’s success, to produce our own range of unique 

products. A contributing factor to our growth is that we still recognise the need for fl exibility in design and 

manufacture. Below are just some of the recent custom units that we have manufactured. 

Synchrotron stage with linear 

motion and tilt 

Quartz enclosed heater module 

for 8” wafers 

Dual Axis Glancing Angle 

Deposition Goniometer 

High duty sample transfer 

system for magnetic storage 

Ultra Long Linear devices Shift Mechanism 


Production linear/ tilt stage 

Bespoke heating stage 


5-axis sample heating stage 

4-axis surface analysis stage with 

heating, cooling and biasing 

ESCA style sample heater stage 


Large scale Linear Shift Mechanism fi tted with miniature linear shift mechanisms for actuation of precision 

fl ip plates. The fl ip plates house sensors that require micron positioning repeatability. This product 

was built for a leading research and development institute. 

189 

Custom Solutions

000 

Product Index Index 

Adaptors zero length Confl at 154 

Axis Selectable PowerProbe 064 

Beam Finder / Aligner for Synchrotron 184 

Beam shutters 046 

Bellows Micro, edge-welded 155 

Bellows, edge-welded 166 

Bolts and gasket sets for MicroFlanges 153 

CF10 MicroFlanges 151 

Closed Cycle Cryostats 123 

CLSM, Compact Linear Shift Mechanism 091 

Compact Series Linear Shift 091 

Confl at fl anges 162 

Confl at MicroBellows 155 

Confl at MicroFeedthroughs 160 

Confl at MicroFlanges 151 

Confl at MicroTubulations 154 

Confl at zero length adaptors 154 

Controller options for EpiCentre 141 

Controllers, hand-held DC 176 

Controllers, Programmable Stepper Motor 178 

Cryostats, Closed Cycle 126 

Cryostats, Continuous Flow 124, 125 

Cryostats, Liquid Helium 123 

Custom solutions 187 

DC hand-held controllers 176 

Deposition manipulators 127 

Displex Closed Cycle Cryostats 126 

Dual Axis PowerProbe 068 

Edge-welded bellows range 166 

Elements, heater 146 

Elements, Pyrolytic Boron Nitride 146 

Elements, Pyrolytic graphite coated Graphite 146 

Elevating PowerProbe 066 

EpiCentre 100 series 130 



EpiCentre controller and power supply options 141 

Eucentric stage 111, 121 

Feedthroughs, Linear 079 

Feedthroughs, Micro 160 

Feedthroughs, Rotary 002 

Fittings, Tubulated 154, 169 

Fixed blank fl anges Confl at 151, 162 

Fixed bored Confl at fl anges 151, 163 

Flanges 151, 162 

Gasket and bolts sets for MicroFlanges 153 

Goniometers 172 

Gripper/ Pincer wobble sticks 076 

Hand-held DC controllers 176 

Hand-off system 072 

Heater modules 146 

Heater stages 127, 116 

Helitran Liquid Helium Cryostats 125 

Hollow MagiDrive MD100H range 036 



Lateral offset Linear Shift Mechanism 097 

Linear and Rotary motion Push Pulls 049 

Linear Displacement mechanisms (Y shifts) 105 

Linear guided motion Push Pulls 051 

Linear non-guided motion Push Pulls 053 

Linear PowerProbe 058 

Linear Shift Mechanism (long travel) 088 

Linear Shift Mechanism Compact series 091 

Linear Shift Mechanism Lateral offset series 097 

Linear Shift Mechanism standard series 083 

Linear Shift Mechanism Tilting series 094 

Linear Shift Mechanism, Micro 158 

Linear shutters 046 

Linear translators 079 

Linear/Rotary probes / transfer arms 061 

Liquid Helium Cryostats 123 

Long Travel Linear Shift Mechanism 088 

LSM standard series 083 

LSML series 088 

LSMT Tilting Linear Shift 094 

LSMX Lateral offset Linear Shift 097 

MagiDrive Hollow MD100H range 036 



MagiDrive MD10 range 008 


MagiDrive MD16/ MD19 range 011 

MagiDrive MD20/ MD21 range 014 




Magnetic Push-Pulls 047 

Magnetic Rotary Drives/Feedthroughs 001 

Magnetic sample transfer arms 055 

Magnetic wobble sticks 074 

Manipulators, deposition 127 

Manipulators, rotary 001 

Manipulators, sample stage 103, 127 

Manipulators, XY 108 

Manipulators, XYZ 113 

Manipulators, Z axis 079 

MBE manipulators 127 

MD10 MagiDrive range 008 


MD100H Hollow MagiDrive range 036 

MD16/ MD19 MagiDrive range 011 

MD20/ MD21 MagiDrive range 014 






Micro bellows 155 

MicroDrive range 008 

MicroFeedthroughs 160 

MicroFlange adaptors 154 

MicroFlange gaskets and bolt sets 153 

MicroFlanges 151 

MicroProducts 149 

MicroShifts 158 

MicroTubulations 154 

Modules, heater 146 

Motor controllers DC 176 

Motor controllers stepper 178 

MultiBase Rotatable Axis 111, 121 

MultiBase X and Y stages 108 

MultiCentre XYZ stages 116 

MultiStage XYZ stages 113 


PBN heater elements 146 

PgG heater elements 146 

Pincer / Gripper wobble sticks 076 

Port Aligners 071, 099 

Power supply for EpiCentre 141 

PowerProbe, Axis Selectable 064 

PowerProbe, Dual Axis 068 

PowerProbe, Elevating 066 

PowerProbe, hand-off system 072 

PowerProbe, Linear 058 

PowerProbe, Rotary/Linear 061 

Programmable Stepper Motor Controllers 178 

Push Pulls (linear and rotary motion) 049 

Push Pulls (linear guided motion) 051 

Push pulls (linear non-guided motion) 053 

Pyrolytic Boron Nitride elements 146 

Pyrolytic graphite coated Graphite elements 146 

Rocking beam shutters 046 

Rotary drives / feedthroughs 001 

Rotary and linear motion Push Pulls 049 

Rotary source shutters 040 

Rotary/Linear PowerProbe 061 

Rotatable Axis MultiBase 111, 121 

Rotatable blank fl anges confl at 162 

Rotatable bored confl at fl anges 163 

Sample deposition systems 128 – 144 

Sample hand-off system 72 

Sample heating, complete deposition stages 127 

Sample heating, cooling biasing and rotation solutions 128 - 144 

Sample stages (X and Y) 108 

Sample stages XYZ 113 

Sample stages XYZ, rotation and heating/cooling 116 

Sample transfer arms/probes 055 

Shutters, linear 046 

Shutters, rocking beam 046 

Shutters, rotary source 040 

Shutters, viewport 043 

Source shutters 040 

Stage eucentric 111, 121 

Stages, X and Y 108 

Stages, XYZ 113 

Stages, XYZ with rotation and services 116 

Stepper Motor Controllers 178 

Substrate heating 116, 127, 145 

Substrate heating - complete deposition stages 127 

Substrate heating - heater modules 145 

Synchrotron Beam Finder / Aligner 184 

System PowerProbe sample hand-off 072 

Tilting Linear Shift Mechanism 094 

Transfer rods 055 

Tubulated fi ttings 154 

UHV fl anges 162 

Viewport shutters 043 

Wafer heating - complete deposition stages 127 

Wafer heating - heater modules 145 

Welded bellows 165 

Wobble sticks 074 

Wobble sticks Gripper/ Pincer 076 

XY stages 108 

XYZ stages 113 

XYZ stages with heating/cooling 116 

Y shifts 105 

UHV Design 

Z shifts 083 

Z shift - Compact series 091 

Z shift - Lateral offset series 097 

Z shift - Long travel series 088 

Z shift - Micro series 158 

Z shift - Standard series 083 

Z shift - Tilting series 094 

Z translators 079 

Zero length Confl at adaptors 154 

Tel:+44(0)1323 811188 sales@uhvdesign.com www.uhvdesign.com www.uhvdesign.com 

000 

UHV Design

UHV Design Catalogue

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