META 1450 - VTD
META 1450 - VTD
META 1450 - VTD
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<strong>META</strong> <strong>1450</strong><br />
<br />
<br />
<br />
, , <br />
1100 . 1250 .<br />
. 2 . <br />
Al, Cu, CrNi, Ag, Au, ZnS, MgF2 SiOx. <br />
, , <br />
. <br />
.<br />
<br />
10 40 . , <br />
,<br />
, . <strong>META</strong><br />
<strong>1450</strong> .<br />
, <br />
, , .<br />
: <strong>VTD</strong> Vakuumtechnik Dresden GmbH<br />
Bismarckstraße 66, D-01257 Dresden<br />
( +49 (0)351 2805-226, : +49 (0)351 2805-222<br />
E-Mail: sales@vtd.de, www.vtd.de
<strong>META</strong> <strong>1450</strong> - <br />
<br />
<br />
<strong>META</strong> <strong>1450</strong><br />
<br />
<strong>META</strong> 1451<br />
<br />
HMDS<br />
<br />
1 484 X<br />
1 900 X<br />
, .<br />
<br />
² . 14 X<br />
³/ . 630 X<br />
³/ . 2 000 X<br />
<br />
2 x 20 000 X<br />
)<br />
()<br />
<br />
. 200 000 X<br />
10 / 7 X<br />
<br />
]<br />
280 / 360 X<br />
1 600 X<br />
<br />
-1<br />
15 X<br />
, .<br />
<br />
1 - 2 1 - 2<br />
[<br />
]<br />
***<br />
18 /8 18 /8<br />
1 10 -4<br />
X<br />
<br />
<br />
<br />
5,5 X<br />
<br />
3 NPE, 50 , 400/230 <br />
X<br />
, .<br />
<br />
65 X<br />
() a (.) 0,4 - 0,6 X<br />
3 -1<br />
. 1,3 * X<br />
<br />
<br />
° C 20 5 X<br />
a (.) 0,6 ... 0,7 X<br />
3 <br />
. 0,05 X<br />
--- 1,2<br />
<br />
HMDS<br />
--- 3 - 5<br />
<br />
<br />
--- 15<br />
. 4 650 X<br />
. 2 500 X<br />
<br />
<br />
. 4 900** X<br />
, . 15 500 . 15 600<br />
X = <strong>META</strong> <strong>1450</strong><br />
*) **) ***) , <br />
<strong>META</strong> 1452 / <strong>META</strong> 1453 + HMDS <br />
5%<br />
]
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