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TSMC PDK Support & Interoperable PDK libraries

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<strong>TSMC</strong> Property<br />

<strong>TSMC</strong> <strong>PDK</strong> <strong>Support</strong> &<br />

<strong>Interoperable</strong> <strong>PDK</strong> <strong>libraries</strong><br />

Steven Chen<br />

Department manager, <strong>PDK</strong> Development<br />

<strong>TSMC</strong><br />

© 2008 <strong>TSMC</strong>, Ltd


<strong>TSMC</strong> <strong>PDK</strong> Definition<br />

<strong>TSMC</strong> Property<br />

Process Design Kits that support a full custom design flow<br />

from schematic entry to final layout verification<br />

Schematic Entry<br />

Pre-layout Simulation<br />

Layout Creation<br />

Layout Verification (DRC, LVS, ERC)<br />

LPE & Post-layout Simulation<br />

IP or Tape Out<br />

1<br />

© 2008 <strong>TSMC</strong>, Ltd


<strong>TSMC</strong> <strong>PDK</strong> -- Tools and Contents<br />

<strong>TSMC</strong> Property<br />

Applications<br />

<strong>Support</strong> Tools<br />

Process Design Kits<br />

Schematic Entry<br />

Cadence(Composer),<br />

Mentorg(DA-IC)<br />

Symbol, CDF, Callback, Utilities<br />

Circuit Simulation<br />

Cadence(AMS),<br />

Synopsys(Hspice),<br />

Cadence(Spectre), Mentorg(Eldo),<br />

Agilent(RFDE)<br />

Models, Simulation views, Backannotation,<br />

Dynamic-link<br />

Layout Editor<br />

Cadence(Virtuoso), Mentorg(IC<br />

station), SpringSoft(Laker)<br />

Layout technology files, Pcells,<br />

Utilities, Auto route<br />

Layout<br />

Verification<br />

(LVS/ERC/DRC)<br />

Mentorg(Calibre),<br />

Synopsys(Hercules),<br />

Magma(Quartz)<br />

LVS decks, LVS views, DRC decks,<br />

ERC decks, DFM utilities<br />

Layout Parasitic<br />

Extraction (LPE)<br />

Mentorg(Calibre XRC),<br />

Synopsys(Star-RCXT),<br />

Cadence(QRC),<br />

Magma(Quartz,Quickcap)<br />

RC tech files, LPE decks, Mapping<br />

files for extracted view, CCI flow<br />

2<br />

Electromagnetic<br />

solver<br />

Integrand(EMX), Ansoft (HFSS),<br />

Agilent(Momentum),<br />

Helic(VeloceRF), Cadence (VPCD),<br />

Lorentz (PV EMD), OEA ( Sprial),<br />

Silvaco (Quest), Zeland(IE3D)<br />

RCX tech file, qualification report,<br />

integration flow<br />

© 2008 <strong>TSMC</strong>, Ltd


<strong>TSMC</strong> <strong>PDK</strong> Selection<br />

<strong>TSMC</strong> Property<br />

Cover <strong>TSMC</strong> processes from 0.60µm to 45nm<br />

Cover Logic, MM, RF, SiGe, High Voltage<br />

3<br />

© 2008 <strong>TSMC</strong>, Ltd


<strong>TSMC</strong> <strong>PDK</strong> Advanced Features<br />

<strong>TSMC</strong> Property<br />

<br />

<br />

<br />

Easy Adoption<br />

Design Accuracy<br />

Design Efficiency<br />

LNA Reference Design<br />

TIF/TCF Analysis<br />

4<br />

© 2008 <strong>TSMC</strong>, Ltd


Comparison of 0.18um and 65nm <strong>PDK</strong><br />

<strong>TSMC</strong> Property<br />

Items 0.18um RF 65nm RF<br />

Device Number 125 590<br />

Utility Number 0 16<br />

MOS p-cell code CDF Option 10 68<br />

QA Time 15hrs 90 hrs<br />

MOS Call-back Function(lines) 275 4000<br />

DRC (lines) 4016 23464<br />

LVS (lines) 3867 25574<br />

5<br />

© 2008 <strong>TSMC</strong>, Ltd


Challenges of <strong>PDK</strong> support ?<br />

<strong>TSMC</strong> Property<br />

Technologies (N32 ~ 1.0um)<br />

Nodes (Logic, MM/RF, HV ..)<br />

Applications (Schematic entry, layout edit …)<br />

Tools for same application ( Virtuoso, IC station, Laker …)<br />

More and more features/complexity in advanced <strong>PDK</strong><br />

Over 2500 AAA (Active Accuracy Assurance) design<br />

kits released in 2007<br />

Too many <strong>PDK</strong>s to support in near future<br />

6<br />

© 2008 <strong>TSMC</strong>, Ltd


Effort and Risk in Current <strong>PDK</strong> Development<br />

<strong>TSMC</strong> Property<br />

1. Effort in developing different design kits<br />

2. Effort&Risk in using design database translation<br />

3. Barrier for any new tools<br />

Foundry Foundry data data<br />

(Design (Design Rule, Rule,<br />

Measurement Measurement data, data,<br />

Model Model …) …)<br />

Develop<br />

Develop<br />

Tool Tool A<br />

Design Design Kits Kits<br />

Tool Tool B<br />

Design Design Kits Kits<br />

Tool Tool A<br />

Design Design Database Database<br />

Effort&Risk<br />

Tool Tool B<br />

Design Design Database Database<br />

Product<br />

Tape-out<br />

Develop<br />

Effort&Risk<br />

Tool Tool C<br />

Design Design Kits Kits<br />

Tool Tool B<br />

Design Design Database Database<br />

7<br />

© 2008 <strong>TSMC</strong>, Ltd


Desired <strong>PDK</strong> <strong>Support</strong><br />

<strong>TSMC</strong> Property<br />

1. <strong>Interoperable</strong> <strong>PDK</strong> can be ready earlier for current and future tools<br />

2. No <strong>PDK</strong> barrier for changing tools<br />

3. Seamlessly use different tools for different applications<br />

4. Green <strong>PDK</strong> Save resources of <strong>PDK</strong> development & design<br />

database translation<br />

EDA tool innovation<br />

Tool A<br />

Tool B<br />

Tool C<br />

Tool N<br />

Foundry Foundry data data<br />

(Design (Design Rule, Rule,<br />

Measurement Measurement data, data,<br />

Model Model …) …)<br />

<strong>Interoperable</strong><br />

<strong>Interoperable</strong><br />

Design Design Kits Kits<br />

Design kits innovation<br />

<strong>Interoperable</strong><br />

<strong>Interoperable</strong><br />

Design Design Database Database<br />

Design innovation<br />

Product<br />

Tape-out<br />

8<br />

© 2008 <strong>TSMC</strong>, Ltd


Challenges of <strong>Interoperable</strong> <strong>PDK</strong><br />

<strong>TSMC</strong> Property<br />

Professional <strong>PDK</strong> contents<br />

Are tools ready for professional <strong>PDK</strong> with basic and<br />

advanced features?<br />

Competitive vendors to work together forever?<br />

Committee to decide new features in <strong>PDK</strong>?<br />

Innovation and interoperability<br />

RCX tech file table-based tools and equation-based tools<br />

<strong>Interoperable</strong> <strong>PDK</strong> qualification program<br />

9<br />

© 2008 <strong>TSMC</strong>, Ltd


<strong>TSMC</strong> Property<br />

10<br />

© 2008 <strong>TSMC</strong>, Ltd

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