CSM Instruments - ST Instruments

Atomic Force Microscope
Atomic Force Microscope, or Scanning Probe Microscopy (AFM, SPM), is an extremely accurate and versatile technique
for measuring surface topography at the nanoscale. A very fine sensor tip mounted to the end of a small deflecting
cantilever is brought into contact with the sample surface to be investigated. The sensor tip is moved across the surface
in numerous line scans, which produce a three-dimensional image of the surface with ultra high resolution. This
technique is especially useful for imaging residual scratches, indentations or other nanoscale surface features as well
as accurately measuring their dimensions.
//// Features
> The combination of optical and Scanning Probe Microscopy (SPM) opens up new possibilities in
quantitative visual surface characterization
> Optical inspection of large sample areas with the ability to zoom in on interesting structures with
sub-nanometer resolution
> Analysis of micro or nanostructures
> Critical Dimension (CD) measurements
> Investigation of etched structures and roughness
> Profile analysis of coatings and thin films
> Measurements of surfaces with low optical contrast
> Characterization of fragile biological tissue as well as many other applications in materials
and surface research
//// Options
> Non - contact, intermittent, and close - contact mode, including phase contrast
> Frequency detection mode, including Q - Factor Control
> Field contrast modes (magnetic force, electrostatic force mode, MFM / EFM) for simultaneous imaging of
long ranging interactions
> Force modulation mode (variable force applied to the tip) for measurements of elastic properties
> Lateral force mode, friction measurement
> Surface potential mode (Kelvin probe), for work function measurements
> STM - Scanning Tunneling Microscopy
> Spreading Resistance for measurements of resistance and conductivity
> Measurements in liquids
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