UNIVEX - Vacuum Products Canada Inc.
UNIVEX - Vacuum Products Canada Inc.
UNIVEX - Vacuum Products Canada Inc.
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Accessories<br />
Standard Accessories for <strong>UNIVEX</strong> Systems<br />
Blank-Off Screw Fitting<br />
For 34.5 mm dia. hole.<br />
Technical Data<br />
Material<br />
Seal<br />
Blank-Off Screw Fitting<br />
Stainless steel<br />
FPM (FKM)<br />
Weight<br />
Ordering Information<br />
kg<br />
0.1<br />
Blank-Off Screw Fitting<br />
Blank-off screw fitting Part No. 030 40<br />
Blank-off screw fitting<br />
PS 113 A Safety Switch<br />
For safety interlock arrangements in<br />
connection with the <strong>UNIVEX</strong> system<br />
controller, respectively optionally connected<br />
power supply equipment (for<br />
sputtering, electron beam evaporation<br />
or vacuum etching, for example).<br />
Technical Data<br />
Switching pressure<br />
Return switching pressure<br />
mbar<br />
mbar<br />
Switching inaccuracy<br />
mbar<br />
Max. permissible operating pressure (abs.)<br />
mbar<br />
Storage temperature range °C<br />
Nominal temperature range °C<br />
Switching contact<br />
Contact life<br />
Safety Switch<br />
approx. 6 below atmospheric pressure<br />
3 below atmospheric pressure<br />
2<br />
2000<br />
-25 to +85<br />
0 to +85<br />
Changeover contacts, gold-plated,<br />
for prog. controls<br />
> 10 5 switching cycles<br />
Switching capacity<br />
mA / V AC<br />
mA / V AC<br />
100 / 24<br />
30 / 24<br />
PS 113 A Safety Switch<br />
Electrical connection<br />
<strong>Vacuum</strong> connection<br />
DN<br />
6.3 mm flat plug<br />
16 ISO-KF<br />
Materials in contact with the medium<br />
Protection class<br />
IP<br />
Stainless steel 1.4305, 1.4310,<br />
Stainless steel 1.4300 PTFE coated<br />
44<br />
Ordering Information<br />
Safety Switch<br />
Low pressure safety switch<br />
PS 113 A, DN 16 ISO-KF;<br />
complete with 3 m long cable Part No. 230 011<br />
Variable Leak Valve with<br />
Isolation Valve<br />
For manually controlled admission of<br />
gas in connection with plasma processes<br />
(sputtering, etching and glow discharge<br />
cleaning).<br />
Technical Data<br />
Gas admission rate q L mbar x l x s -1<br />
Connection flange<br />
DN<br />
Ordering Information<br />
Variable leak valve with isolation valve<br />
Variable Leak Valve with Isolation Valve<br />
5 x 10 -6 to 1 x 10 3<br />
16 ISO-KF<br />
Variable Leak Valve with Isolation Valve<br />
Part No. 215 010<br />
(see also Product Section C14 “<strong>Vacuum</strong> Valves”)<br />
C19 22<br />
Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog
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