量子電腦 - 中研院物理研究所
量子電腦 - 中研院物理研究所
量子電腦 - 中研院物理研究所
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光 學 平 版 印 刷 術<br />
複 雜 圖 案<br />
Complicated<br />
pattern<br />
繞 射<br />
Optical Lithography<br />
Reduced-sized pattern<br />
縮 小 圖 案<br />
• The resolution of the reduced<br />
image cannot be better than λ/2<br />
due to the diffraction effect..<br />
• No effective lenses working at very<br />
short wavelength in x-ray region<br />
• Using N-photon entangled state<br />
to achieve a spatial resolution<br />
equivalent of using a light with<br />
wavelength λ/N.<br />
2<br />
sin β<br />
Diffraction ∝ ,<br />
2<br />
β<br />
β = ( πa<br />
/ λ)sin θ.<br />
Diffraction limit:<br />
minimum width at<br />
β= π.