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量子電腦 - 中研院物理研究所

量子電腦 - 中研院物理研究所

量子電腦 - 中研院物理研究所

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光 學 平 版 印 刷 術<br />

複 雜 圖 案<br />

Complicated<br />

pattern<br />

繞 射<br />

Optical Lithography<br />

Reduced-sized pattern<br />

縮 小 圖 案<br />

• The resolution of the reduced<br />

image cannot be better than λ/2<br />

due to the diffraction effect..<br />

• No effective lenses working at very<br />

short wavelength in x-ray region<br />

• Using N-photon entangled state<br />

to achieve a spatial resolution<br />

equivalent of using a light with<br />

wavelength λ/N.<br />

2<br />

sin β<br />

Diffraction ∝ ,<br />

2<br />

β<br />

β = ( πa<br />

/ λ)sin θ.<br />

Diffraction limit:<br />

minimum width at<br />

β= π.

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