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1318 IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL. 46, NO. 9, SEPTEMBER 2010<br />

coupler increasing the tuning range. Moreover, using a longer<br />

doped fiber length could increase the optical gain in the L-<br />

band region. Optimization of the laser cavity and of the filter<br />

must be done to expand the tuning range and the output power<br />

of the laser. However, to the best of our knowledge, a tunable<br />

<strong>MEMS</strong>-based fiber laser was not demonstrated yet. It is an<br />

interesting development for fast and compact tunable fibre<br />

lasers.<br />

VII. Conclusion<br />

<strong>In</strong> this paper, we presented a wide range tunable filter.<br />

By using a single step etching process, a very compact and<br />

integrated tunable F-P filter was fabricated. Optical fibers,<br />

actuator, and the optical device were fabricated in one single<br />

etching step. Tuning as large as 104 nm in the optical C and L-<br />

bands was demonstrated. A mechanical resonance frequency<br />

of 14.4 kHz was measured allowing tuning over the whole<br />

dynamic range of the filter in few µs. <strong>In</strong> the second part of<br />

this paper, we presented a novel approach to tune a fiber laser<br />

with the <strong>MEMS</strong> actuated F-P filter. By introducing the <strong>MEMS</strong><br />

F-P filter into a ring fiber laser cavity, a compact tunable fiber<br />

laser was demonstrated. The tuning range is 35 nm with a<br />

spectral width of less than 0.06 nm.<br />

At this point, the tunable laser is still a basic proof of<br />

concept. However, since <strong>MEMS</strong> allows fast actuation and low<br />

cost batch fabrication, our technology opens the path to a<br />

wide range of applications in telecommunications, metrology,<br />

laser machining, and bio-chemical sensing using high quality<br />

integrated tunable fiber lasers.<br />

[11] S.-K. Liaw, K.-L. Hung, Y.-T. Lin, C.-C. Chiang, and C.-S. Shin, “Cband<br />

continuously tunable lasers using tunable fiber Bragg gratings,”<br />

Opt. <strong>Laser</strong> Technol., vol. 39, no. 6, pp. 1214–1217, Sep. 2007.<br />

[12] S. Yamashita and M. Nishihara, “Widely tunable erbium-doped fiber<br />

ring laser covering both C-band and L-band,” IEEE J. Sel. Top. Quantum<br />

Electron., vol. 7, no. 1, pp. 41–43, Jan.–Feb. 2001.<br />

[13] N.-K. Chen, D.-Y. Hsu, and S. Chi, “Widely tunable asymmetric longperiod<br />

fiber grating with high sensitivity using optical polymer on laserablated<br />

cladding,” Opt. Lett., vol. 32, no. 15, pp. 2082–2084, 2007.<br />

[14] H. Y. Ryu, W.-K. Lee, H. S. Moon, and H. S. Suh, “<strong>Tunable</strong> erbiumdoped<br />

fiber ring laser for applications of infrared absorption spectroscopy,”<br />

Opt. Commun., vol. 275, no. 2, pp. 379–384, 2007.<br />

[15] S.-K. Liaw and G.-S. Jhong, “<strong>Tunable</strong> fiber laser using a broad-band<br />

fiber mirror and a tunable fbg as laser-cavity ends,” IEEE J. Quantum<br />

Electron., vol. 44, no. 6, pp. 520–527, Jun. 2008.<br />

[16] P. Humphrey and J. Bowers, “<strong>Fiber</strong>-birefringence tuning technique for<br />

an erbium-doped fiber ring laser,” IEEE Photon. Technol. Lett., vol. 5,<br />

no. 1, pp. 32–34, Jan. 1993.<br />

[17] C. Poulsen and M. Sejka, “Highly optimized tunable Er3+-doped single<br />

longitudinal mode fiber ring laser, experiment and model,” IEEE Photon.<br />

Technol. Lett., vol. 5, no. 6, pp. 646–648, Jun. 1993.<br />

[18] C. H. Yeh, F. Y. Shih, C. N. Lee, C. T. Chen, and S. Chi, “Wavelengthtunable<br />

erbium fiber ring laser in single-frequency operation utilizing<br />

Fabry-Pérot laser with Sagnac cavity,” Opt. Commun., vol. 281, no. 9,<br />

pp. 2454–2458, 2008.<br />

[19] C. Chen and C. Lee, “Design and modeling for comb-drive actuator<br />

with enlarged static displacement,” Sensors Actuators A, vol. 115, nos.<br />

2–3, pp. 530–539, 2004.<br />

[20] J. Masson, F. B. Kone, and Y.-A. Peter, “<strong>MEMS</strong> tunable silicon Fabry-<br />

Pérot cavity,” Proc. SPIE, vol. 6717, no. 5, 2007.<br />

[21] J. Masson, S. Bergeron, A. Poulin, N. Godbout, and Y.-A. Peter,<br />

“<strong>Tunable</strong> erbium doped fiber laser using a silicon micro-electromechanical<br />

Fabry-Pérot cavity,” in Proc. IEEE/LEOS <strong>In</strong>t. Conf. Opt.<br />

<strong>MEMS</strong> Nanophoton., 2007, pp. 171–172.<br />

[22] Z. F. Wang, W. Cao, and Z. Lu, “Moems: Packaging and testing,”<br />

Microsyst. Technol., vol. 12, nos. 1–2, pp. 52–58, 2005.<br />

[23] R. Kashyap, <strong>Fiber</strong> Bragg Gratings. New York: Academic Press, 2004.<br />

[24] H. Jansen, M. de Boer, and M. Elwenspoek, “The black silicon method<br />

VI: High aspect ratio trench etching for <strong>MEMS</strong> applications,” in Proc.<br />

Micro Electro Mech. Syst., 1996, pp. 250–257.<br />

References<br />

[1] S.-S. Yun, K.-W. Jo, and J.-H. Lee, “Crystalline Si-based in-plane<br />

tunable Fabry-Pérot filter with wide tunable range,” in Proc. IEEE/LEOS<br />

<strong>In</strong>t. Conf. Opt. <strong>MEMS</strong>, 2003, pp. 77–78.<br />

[2] B. Saadany, M. Malak, M. Kubota, F. M. Marty, Y. Mita, D. Khalil, and<br />

T. Bourouina, “Free-space tunable and drop optical filters using vertical<br />

Bragg mirrors on silicon,” IEEE J. Sel. Top. Quantum Electron., vol. 12,<br />

no. 6, pp. 1480–1488, Nov.–Dec. 2006.<br />

[3] A. Lipson and E. Yeatman, “A 1-D photonic band gap tunable optical<br />

filter in (110) silicon,” J. Microelectromech. Syst., vol. 16, no. 3,<br />

pp. 521–527, 2007.<br />

[4] C. A. Barrios, V. R. Almeida, R. R. Panepucci, B. S. Schmidt, and<br />

M. Lipson, “Compact silicon tunable Fabry-Pérot resonator with lowpower<br />

consumption,” IEEE Photon. Technol. Lett., vol. 16, no. 2,<br />

pp. 506–508, Feb. 2004.<br />

[5] M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “<strong>In</strong>-plane<br />

microelectromechanical resonator with integrated Fabry-Pérot cavity,”<br />

Appl. Phys. Lett., vol. 92, no. 8, p. 081101, 2008.<br />

[6] R. St.-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-<br />

Pérot cavity for volume refractive index measurement in microfluidic<br />

systems,” Appl. Phys. Lett., vol. 94, no. 24, p. 243905, 2009.<br />

[7] T. Hausken, “<strong>In</strong>cumbent sources resist fibre laser proliferation,” Opt.<br />

<strong>Laser</strong> Eur., vol. 157, pp. 31–34, Jan. 2008.<br />

[8] A. Bellemare, M. Karbsek, C. Riviere, F. Babin, G. He, V. Roy,<br />

and G. Schinn, “A broadly tunable erbium-doped fiber ring laser:<br />

Experimentation and modeling,” IEEE J. Sel. Top. Quantum Electron.,<br />

vol. 7, no. 1, pp. 22–29, Jan.–Feb. 2001.<br />

[9] J. A. Buck, Fundamentals of Optical <strong>Fiber</strong>s, 2nd ed. New York: Wiley,<br />

2004.<br />

[10] M. J. F. Digonnet, Rare-Earth-Doped <strong>Fiber</strong> <strong>Laser</strong>s and Amplifiers,<br />

2nd ed. Boca Raton, FL: CRC Press, 2001.<br />

Jonathan Masson graduated with a degree in engineering<br />

physics from the École Polytechnique de<br />

Montréal (EPM), Montréal, QC, Canada, in 2006.<br />

During his studies, he made a year long exchange<br />

at the <strong>In</strong>stitut National Polytechique de Grenoble,<br />

Grenoble, France. He attained his M.S. degree from<br />

the EPM working on tunable silicon grating under<br />

the supervision of Professor Yves-Alain Peter. He<br />

is currently pursuing the Ph.D. degree in the field<br />

of optical micro-electro-mechanical systems from<br />

<strong>In</strong>stitute of Microengineering, Sensors, Actuators<br />

and Microsystems Laboratory, École Polytechnique Fédérale de Lausanne,<br />

Neuchâtel, Switzerland.<br />

Raphael St-Gelais (S’08) received the B.Eng. degree<br />

in engineering physics from École Polytechnique<br />

de Montréal, Montréal, QC, Canada, in 2007.<br />

He is currently pursuing the Ph.D. degree from the<br />

same institute with the support of an Alexander<br />

Graham Bell Canada Graduate Scholarship.<br />

He was an Engineering <strong>In</strong>tern with Dalsa Semiconductor,<br />

Bromont, QC, Canada, during a short<br />

period before joining the Micro and Nano Systems<br />

Laboratory, École Polytechnique de Montréal, in<br />

2008. His work is published in peer-reviewed journals<br />

and international conference proceedings. His current research interests<br />

include optical microelectromechanical systems, silicon photonics, and microfluidics<br />

for applications, such as on-chip optical biosensors and tunable<br />

components for optical fiber networks.

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