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Users Manual Model 8/8LP Cryo-Plex - REMRSEC Facilities

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Introduction 3<br />

3.1 General Information about the <strong>Model</strong> 8/<strong>8LP</strong> <strong>Cryo</strong>pump<br />

Austin Scientific provides both custom and industry standard cryogenic solutions at highly<br />

competitive prices. <strong>Cryo</strong>genic vacuum pumps provide clean, oil-free high vacuum with high<br />

pumping speeds are the pump of choice for sputtering, electron beam evaporation, accelerator<br />

beam lines and many aerospace and coating applications.<br />

<strong>Model</strong> 8/<strong>8LP</strong> cryopumps are available in various standard inlet flange configurations - ANSI, ISO,<br />

CF and complete UHV, with temperature sensors either in diode or hydrogen-vapor-bulb (HVB)<br />

configurations.<br />

3.1.1 <strong>Model</strong> 8/<strong>8LP</strong> <strong>Cryo</strong>pump Features<br />

The <strong>Model</strong> 8/<strong>8LP</strong> cryopumps, as seen in Figure 3-1, are typically used in the following<br />

applications:<br />

• Sputtering tools<br />

• Ion implanters<br />

• R & D bell-jar systems<br />

• Surface analysis<br />

• Accelerators<br />

• Beam lines<br />

• General vacuum systems<br />

<strong>Model</strong> 8/<strong>8LP</strong> <strong>Cryo</strong>-<strong>Plex</strong> ® <strong>Cryo</strong>pump <strong>Users</strong> <strong>Manual</strong><br />

3-1

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