SPM Nanolithography Workshop - NIST Virtual Library - National ...
SPM Nanolithography Workshop - NIST Virtual Library - National ...
SPM Nanolithography Workshop - NIST Virtual Library - National ...
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ABSTRACTA workshop on Scanning Probe Microscope (<strong>SPM</strong>)-based <strong>Nanolithography</strong> was held at <strong>NIST</strong>Gaithersburg on November 24-25, 2002. The meeting was sponsored by the PrecisionEngineering Division, Manufacturing Engineering Laboratory, <strong>NIST</strong>, under a ResearchCooperation Agreement on advanced lithography of functional nanostructures signed in 2001 bythe <strong>National</strong> Microelectronics Center of Spain (CNM), the <strong>National</strong> Institute of AdvancedIndustrial Science & Technology (AIST) of Japan, and <strong>NIST</strong>. A dozen active collaborators of<strong>NIST</strong>, AIST, and CNM projects in this emerging field presented their most recent results onfundamental aspects of nanostructure fabrication and characterization and on the application of<strong>SPM</strong> nanostructures to nano-electronics, nano-optics, and nano-mechanical devices.5
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