The Emerging Trends in Electrical and Computer Engineering
The Emerging Trends in Electrical and Computer Engineering
The Emerging Trends in Electrical and Computer Engineering
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CMOS MEMS at CMU<br />
• Mov<strong>in</strong>g capacitor <strong>in</strong> 0.35 µm CMOS<br />
• Dense comb array provides variable<br />
capacitance<br />
F<strong>in</strong>ger<br />
motion<br />
Electro-thermal<br />
actuators<br />
F<strong>in</strong>ger<br />
motion<br />
Yoke for mov<strong>in</strong>g<br />
f<strong>in</strong>gers<br />
Yoke for static<br />
f<strong>in</strong>gers<br />
A. Oz, G. K. Fedder, IEEE Transducers 2003 & MTT-S RFIC 2003, June 2003
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