Small Footprint – High Throughput

P9000 Cluster System (cont.)
Reliability and Intuitive Programming
Need to run more than one recipe at a time? The P9000 has two cassette indexers that can be programmed independently. Two cassette
platforms allow the user flexibility to run 50 wafer lots or two separate 25 wafer lots. The P9000 allows you to add modules without adding
to the footprint.
The central atmospheric robot provides reliability as well a dual end effecter for high volume processing and wafer temperature sensitivity.
In order to fully utilize floor space the bottom portion of the P9000 was designed to house photo-resist bottles, pumps, power supplies, and
controllers. With the use of slide drawers changing bottles, servicing pumps, and performing preventive maintenance is made simple and
convenient.
A Windows based PC with Rabbit Microprocessors control system allows the P9000 to collect wafer data, provide intuitive programming,
SECS/GEM interface as an option, and much more.
P9000 Cluster System - Features:
CENTRAL ATMOSPHERIC
ROBOT
STACKED MODULES
CONTROL SYSTEM
Efficient Handling Compact and Flexible Real Time Monitoring
61.5”
The high speed precision wafer
handling robot offers superior
performance. Fast, accurate,
and repeatable are just a few
characteristics of the central
atmospheric robot. This robot
is engineered for dual wafer
transport to increase throughput.
With greater than 80,000 cycles
between failures, the robot adds
to the reliability of the C&D P9000.
61”
Stacked modules offer a wide range
of flexibility. For high throughput
stacked chill plates are essential
in order to keep wafers flowing
through the system efficiently.
The stacked hot plates can be set
at different temperatures in order
to eliminate the wait time between
one recipe and another. No more
waiting for hot plates to heat
up or cool down before
starting the next lot. The
stacked hot plates can be
configured for contact or
fix proximity bake.
Figure 1
Actual dimensions
of the P9000.
C&D’s Graphic User Interface
(GUI) combined with a Rabbit
Microprocessor provides a
powerful control system. This
control system allows real time
monitoring of process parameters
as well as data logging, event
reporting, and batch reports.
The versatility of the C&D
control system allows two
separate process flows to be
run simultaneously. This feature
allows you to take full advantage
of all process modules thereby
increasing wafer throughput.
The P9000 comes with an auto
delete feature. With this feature
users can determine how frequently
the data should be backed-up and
the hard drive cleared out. This
capability ensures that new data is
always being collected and stored
onto the hard drive.
C&D Semiconductor Services, Inc. • 2210 Lundy Avenue, San Jose, CA 95131 • Tel 408.383.1888 • Fax 408.383.1889 • www.cdsemi.com