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View - X-ray Optics and Microscopy at Stony Brook

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432 C Jacobsen al et<br />

In scanning microscopy the image is formed point by point in a serial fashion as<br />

the focused probe is moved across the specimen. This method is therefore well suited<br />

to simple electronic detection of the x-<strong>ray</strong>s, <strong>and</strong> consequently the direct digital acquisition<br />

<strong>and</strong> processing of the image. By counting the transmitted photons, inform<strong>at</strong>ion<br />

is h<strong>and</strong>led in an efficient manner with minimal noise. This results in minimising the<br />

radi<strong>at</strong>ion dose to the specimen (Sayre et a1 1977a, b). In addition, a direct measurement<br />

of the absorptivity is obtained <strong>at</strong> each point in the specimen. The absorption coefficient<br />

can then be calcul<strong>at</strong>ed if the thickness is known. Altern<strong>at</strong>ively, the thickness can be<br />

determined if either the composition is known, or images are taken <strong>at</strong> more than one<br />

wavelength.<br />

2. The microscope<br />

The first scanning x-<strong>ray</strong> microscope was built by Horowitz <strong>and</strong> Howell (1972) (see<br />

also Horowitz 1978) almost 15 years ago. Our instrument is based on similar<br />

principles, but it is the first one to incorpor<strong>at</strong>e focusing optics to define a submicron<br />

probe, a tunable monochrom<strong>at</strong>ic soft x-<strong>ray</strong> source for absorptivity measurements <strong>and</strong><br />

direct, computer-based image acquisition <strong>and</strong> processing. The microscope oper<strong>at</strong>es <strong>at</strong><br />

beamline U15 of the ultraviolet ring <strong>at</strong> the N<strong>at</strong>ional Synchrotron Light Source (NSLS).<br />

This beamline uses a toroidal gr<strong>at</strong>ing monochrom<strong>at</strong>or with a resolving power of about<br />

300 to select any desired wavelength in the 1.5-4.5 nm range (Williams <strong>and</strong> Howells<br />

1983). A schem<strong>at</strong>ic diagram of the appar<strong>at</strong>us is shown in figure 1. A Fresnel zone<br />

pl<strong>at</strong>e, fabric<strong>at</strong>ed <strong>at</strong> IBM by electron beam lithography (Kern et al 1983, 1984), focuses<br />

the radi<strong>at</strong>ion to a spot of about 200 nm FWHM. Just before the zone pl<strong>at</strong>e the radi<strong>at</strong>ion<br />

passes through an ultr<strong>at</strong>hin (120 nm of Si3N4) window (Feder <strong>and</strong> Sayre 1980) into<br />

an <strong>at</strong>mospheric environment. The specimen is placed <strong>at</strong> the focus, mounted on a stage<br />

th<strong>at</strong> uses piezoelectric transl<strong>at</strong>ors to scan it under computer control. X-<strong>ray</strong>s transmitted<br />

by the specimen are detected by a flow proportional counter which counts single<br />

photons. The image is stored in computer memory, where it can be manipul<strong>at</strong>ed point<br />

by point, <strong>and</strong> displayed in real time on a colour television screen. A detailed description<br />

of the microscope can be found in Rarback et a1 (1984).<br />

In the x-<strong>ray</strong> wavelength range above the oxygen K absorption edge (2.3 nm), w<strong>at</strong>er<br />

becomes rel<strong>at</strong>ively transparent, so organic m<strong>at</strong>ter st<strong>and</strong>s out in the image of wet<br />

biological specimens. To study such m<strong>at</strong>erial we used the wavelength of 3.2 nm, <strong>at</strong><br />

Vacuum<br />

window<br />

Plnhole<br />

Synchrotron Zone<br />

Specimen<br />

l,<br />

Scannlng stage<br />

Proportional counter<br />

Figure 1. Schem<strong>at</strong>ic diagram of the appar<strong>at</strong>us (not to scale). The toroidal gr<strong>at</strong>ing monochrom<strong>at</strong>or (TGM)<br />

selects the wavelength incident on the specimen, while the pinhole provides the required sp<strong>at</strong>ial coherence.<br />

The vacuum window separ<strong>at</strong>es the evacu<strong>at</strong>ed region of the beamline from the specimen area <strong>at</strong> <strong>at</strong>mospheric<br />

pressure. The zone pl<strong>at</strong>e focuses the radi<strong>at</strong>ion onto the specimen, which is scanned under computer control.<br />

Transmitted photons are detected by the flow proportional counter.

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