種々の結晶方位解析法と SEM/EBSD 法の原理 - Tsuji Lab - 京都大学

20
EBSD
2008.11.28
scanning electron microscope: SEM
EBSDelectron back
scattering diffraction[1-4] 10
EBSD
anisotropy
polycrystalorientation
texture
EBSD
EBSD
EBSD
EBSD
Table 1 EBSD

Table 1
- 10 mmφ < ~60 min / pole figure [5,6]
1° < 1 mmφ < ~30 min / point [6]
5° < 10 µmφ < ~30 min / point [7-9]
0.5° < 5 µmφ < ~15 min / point [10,11]
0.5° < 5 µmφ < ~30 min / point [11-13]
0.1° < 10 nmφ <

Fig.1 {111} ODF Al [17]
LaueX
X
[18,19]
{111}, {110}, {100}
SEM
[7-9, 20-22]Figure 2
Fe-19CrFe-36Ni
SEM [23] BCC
{110} 12
FCC
{111}{001}

[23,24]Fe-19Cr
SEM
Fig.3 [25]{001}{111}
10m
Fig.2 Fe-19Cr Fe-36Ni
SEM [23]

Fig.3 Fe-19Cr
SEM [25]
SEMscanning electron microscope
EBSD
X
[10,11]
Figure 4 [11]
EBSD Kikuchi
X
Fig.4
X SEM

Fig.4 [11]
SEM
Fig.5 (a) [13]Fig.5 (b)
Kikuchi
ECPelectron channeling pattern[11-13]Kikuchi
m ECP
ECP Fig.6
[26]Fe-19Cr 185
Fig.5 (a) ECP [13](b) ECP

Fig.6 ECP Fe-19Cr 185
TEMtransmission electron microscope
TEM
SADselected area diffraction
Fig.7
001
[001]
1015[14]SAD
EBSD

Fig.7 BCC [27]

EBSD
EBSD SEM
electron back-scattering pattern Kikuchi
Kikuchi
EBSD Fig.8
EBSD 1973 [1]EBSD
1991
1993 Adams [28,29] Orientation Imaging Microscopy (OIM)
[1]
Fig.9
EBSD
SEM
microstructure
grain boundary
interface
Kikuchi
EBSD
OIM
Fig.8 Kikuchi SBSD

Fig.9 EBSD [3]
EBSD Kikuchi 0.1
ECP Fig.6 EBSD
EBSD

EBSD ECP
Fig.10 ARB
4.8
EBSD
200nm
4050nm
Fig.10 ARB 4.8 Al EBSD (a) ND
(b) RD (c) [30]
EBSD
Figure 11
EBSD
[31,32]
[31,32] EBSD
EBSD
Fig.11
[33]

Fig.11 (a) 28.5at%Ni (b) 0.2wt%C
EBSD [31,32]
EBSD
[33,34]12
EBSD
TEM Kikuchi
TEM/Kikuchi EBSD
[15]TEM/Kikuchi EBSD
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