Web750sp - Leybold Optics GmbH

SOLAR
Web 750 sp
PV Sputter Web
Coating System

Customer Benefit
The Web 750 sp is an advanced Vacuum Coating Plant de-
signed for the sputter deposition of thin films onto metal
web as used in the Photovoltaic Industry for example. The
special web winding and transport system allows sensi-
tive surfaces to be coated without any mechanical contact
to the coated web surface.
The central web handling chamber can be separated from
the coating sections by special valves allowing for loa-
ding/unloading of the web coils without breaking the va-
cuum in the coating sections.
Efficient gas separation of the two process chambers by
means of a differentially pumped section allows two lar-
gely different processes to be run simultaneously.
A variety of different process equipment like planar ma-
gnetrons, rotary cylindrical magnetrons, or ion sources
can be used in the Web 750sp.
Applications
The Web 750 sp is designed for high-rate sputter coating
onto metal web like stainless steel or copper. The system
meets the requirements for coating of very sensitive sur-
faces due to the use of a strictly single sided web winding
system.
The Web 750 sp is perfectly suitable for the photovoltaic
industry e.g. for the deposition of transparent front con-
tacts or for metallization.

The Web Handling Section
Loading/ unloading of the web is done in the central web
handling module.
Winder and unwinder coils are mounted on a cart that can
be moved in front of the vacuum chamber for convenient
web exchange.
The winding system allows for the use of a protective in-
terleaf in the uncoated state and/or after coating.
A servo drive system employing 4 independent motors is
used to drive the web coils under controlled tension.
In-situ measurement equipment can be installed in the
web handling section for on-line process control.
Coating Rolls
Both coating chambers include a coating roll.
Features:
• Polished hard surface
• Electrically insulated from the chamber
(it can be floating, connected to ground, or biased)
• Rolls can be cooled or heated employing a fluid
• Protection shields are used to avoid coating of the
rolls themselves

Process Section I
Process section I can be employed for:
• Pre-treatment of the web
• RF sputtering using up to 6 planar RF magnetrons
(other process equipment possible)
Features:
• All process equipment is installed on a 2-axis motor
driven door flange allowing convenient service and
maintenance of the equipment.
• Process equipment can stay connected to power
supply, cooling water, and gas supply while the door
flange is opened.

Process Section II
Process section II can be employed for:
• DC or pulsed DC sputtering using up to 10 rotary
cylindrical magnetrons (other process equipment
possible)
• Post-treatment of the web
Features:
• All process equipment is installed on a 2-axis motor
driven door flange allowing convenient service
and maintenance of the equipment.
• Process equipment can stay connected to power
supply, cooling water, and gas supply while the
door flange is opened.

Process Control
Control of the process parameters in the Web 750 sp is
performed in order to achieve reproducible coating pro-
perties. The control of plasma parameters and thin film
properties like thickness and conductivity can be imple-
mented.
For transparent coatings on metallic web an optical on-
line monitor is available. An especially designed sensor
head allows specular and non-specular reflection to be
measured. From the VIS- NIR reflection data film thickness
and conductivity of TCOs can be extracted.
Composition of the deposited film can be analyzed using
X-ray fluorescence.
Technical Parameters
• Coating speed up to 3 m/min for solar cell transparent
front contact coating (value depends on layer stack)
• Quality coating width of 500 mm (can be extended
up to 1500 mm)
• Machine down time for web exchange approximately
2 hours only
• Strictly single sided web handling system
• Up to 10 magnetrons per process chamber
• Dry vacuum pumping system with high water vapour
pumping speed
• User and maintenance friendly design
• Integrated on-line process control

CHINA
LEYBOLD OPTICS CHINA
#25, Kangsheng Industrial Park
No.11 Kangding Street
Beijing BDA, 100176, China
Phone: +86 10 67803366 - 0
Fax: +86 10 67803366 - 100
FRANCE
LEYBOLD OPTICS FRANCE
7 Avenue du Quebec
91140 Villebon sur Yvette
Z.A. de Courtaboeuf, France
Phone: +33 1 698248 - 12
Fax: +33 1 698248 - 40
GERMANY
LEYBOLD OPTICS DRESDEN
Zur Wetterwarte 50
Haus 303
01109 Dresden, Germany
Tel.: +49 351 86695 - 16
Fax: +49 351 86695 - 42
GREAT BRITAIN /
IRELAND
LEYBOLD OPTICS UK
St. Modwen Road, Stretford
Manchester M32 OZE, Great Britain
Phone: +44 161 86628 - 00
Fax: +44 161 86628 - 01
ITALY / AUSTRIA / SLOWENIA
LEYBOLD OPTICS ITALIA
Via Trasimeno 8
20128 Milano, Italy
Phone: +39 2 263050 - 84
Fax: +39 2 272096 - 95
HEADQUARTERS:
LEYBOLD OPTICS GmbH
Siemensstrasse 88
63755 Alzenau, Germany
Tel.: +49 6023 500 - 0
Fax: +49 6023 500 - 150
E-Mail: info@leyboldoptics.com
www.leyboldoptics.com
JAPAN
LEYBOLD OPTICS JAPAN
Kazama Bldg.
19-5, Nishi Shinbashi 2-chome,
Minato-ku, Tokyo, 105-0003 - Japan
Phone: +81 35 77755 - 51
Fax: +81 35 77755 - 53
KOREA
LEYBOLD OPTICS KOREA
# 1406, HyunDae 41 Tower, 917-9
Mok-1Dong, Yangcheon-Gu
Seoul 158-051, Korea
Phone: +82 2 2168 - 2136
Fax: +82 2 2168 - 2078
SPAIN / PORTUGAL
LEYBOLD OPTICS IBÉRICA
C/Carles Buigas 57-59
08980 Sant Feliu de Llobregat
Barcelona, Spain
Phone: +34 93 666 - 0778
Fax: +34 93 666 - 4612
TAIWAN
LEYBOLD OPTICS TAIWAN
82, Shien-Cheng 11th St., Chu-Bei City
302, Hsinchu County
Taiwan
Phone: +886 35 5831 - 23
Fax: +886 35 5831 - 39
USA / CANADA / SOUTH AMERICA
LEYBOLD OPTICS USA
539 James Jackson Ave.
Cary, NC 27513, USA
Phone: +1 919 65771 - 00
Fax: +1 919 65771 - 01
www.mbwm.de